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CN100511054C - 实验管理系统与方法 - Google Patents

实验管理系统与方法 Download PDF

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CN100511054C
CN100511054C CNB028156838A CN02815683A CN100511054C CN 100511054 C CN100511054 C CN 100511054C CN B028156838 A CNB028156838 A CN B028156838A CN 02815683 A CN02815683 A CN 02815683A CN 100511054 C CN100511054 C CN 100511054C
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B·N·克里希纳穆尔蒂
P·C·霍金斯
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Abstract

在自动化环境中为自动进行实验提供系统、方法和介质，而不需要拆分出这一环境中的测试对象(如半导体芯片或芯片)。一个“实验”是利用自动化环境的已有(如预先规定的)工艺的一种预定的偏差。用于实验管理的计算机实现的方法、系统和计算机可读介质，如那些与半导体技术相关的方法、系统和介质。实验命令包括能够在自动化环境中操作的基本工艺的某些偏差。从用户分布列表中获得实验命令的批准，同时允许用户与实验命令附加文档，或可修改实验。将实验命令转换和存储为处理数据，该数据适合于在所述自动化环境中执行。根据处理数据，使得实验与所述基本工艺的至少一部分一起被自动化环境执行。

Description

实验管理系统与方法
发明背景
技术领域
本发明涉及用以管理实验的与计算机相关的方法、系统与介质。尤其涉及到管理与工艺中变化相关的实验，该工艺例如用以支配半导体技术制造。
背景技术
多数工业中的机器、材料和工艺正日益变得复杂和费用昂贵。同时，产生了这样一种要求，即进行工艺以及机器和材料质量的持续改进。
半导体和其他产品通常是在预定工艺的控制之下制造的。这些预定工艺相当复杂。例如，用于生产半导体芯片的一种预定制造工艺可能包含五百至七百五十个工序。而且，每个这样的工序都可能包括几个变量，例如6个重要的变量。
为了改进生产或测试理论，常常需要通过改变基本制造工艺的某些小部分来进行实验。例如，一位工程师可能想要使半导体的多层中的一层变厚10％。这可能需要额外的15秒执行对应于该工序的方法，而且也许要在随后工序中进行一些调整。典型的是，这位工程师并不新创建一种包括这些修改的新的基本工艺以适用于所希望的测试，因为这将太费时了。
不幸的是，运用传统技术的这样一个实验要求人工介入和结果的人工跟踪。因而，进行实验的工程师或操作员会得到多个半导体芯片，并且在自动化的(例如生产或模拟生产的制造)环境之外对它们进行处理。这样，进行实验的产品需要从自动化环境中取出，而这既费时，又可能会引入外部因素，并且外部因素可能最终(且并非在意料之中)影响实验的结果。另外，这样取出半导体芯片会使得难以协调变化或实验记录的人工跟踪，且难以控制实验和分析所有结果。
结果是，对研究和开发工程师、在工厂设备上工作的操作员和其他使用者来说，始终有这样一种需求：对现有工艺作改变的实验应是灵活、方便和可跟踪的。
发明内容
本发明通过提供在自动化的(如生产或模拟生产制造)环境中用于自动化实验的系统、方法和介质，而不需要从这一环境中使测试对象(如单个半导体芯片或多个芯片)拆分出来，缓和了上面所述的传统技术的一些问题。根据本发明的至少一些实施例，一个“实验”是利用自动化环境的一种已建立的(例如预先规定的)工艺的至少某一部分的一种预先计划的偏差。
根据本发明的至少一些实施例，实验始于一个实验的命令(即请求启动实验)，该命令最初是作为一种非正式请求发出的，送至一个计算机化的系统，路经各个规定的使用者，也许经过修改，而最终得到批准。为便于进行所请求的实验，实验管理包括四个概念上不同的阶段：命令管理，配置，执行以及分析。本发明的命令管理部分有助于自动地引导实验命令的形成(上面提到过)并且跟踪实验。配置阶段典型地是处理实验的人工或自动转换，把普遍的语句、请求或设定的结果转换为数据，该数据规定要被自动化环境执行的特定工艺。执行阶段包括基于该工艺数据而通过自动化环境执行该实验自身，还包括实验结果的汇总。在分析阶段，报告和分析实验的结果。
根据本发明的至少一些实施例，在操作时接收实验命令，该实验命令至少包括一个能运用于自动化环境中的基本工艺的某种偏差。然后获得对该实验命令的批准。实验命令的至少一部分被转换成适合于被所述自动化环境执行的处理数据，并且储存起来。根据该处理数据，通过自动化环境，结合所述基本工艺的至少某些部分，引发所要执行的实验。
进一步说，本发明可包括存储数据，该数据规定实验命令、将该向实验命令分送给多个使用者、从其中至少一个使用者得到对该实验命令的变化、并从至少一个使用者处接收对该实验命令的批准。而且可将文档附加到实验请求上。
另外，可公布信息，指示实验请求的状态变化，对附加到实验请求上的附加文档做出响应，或对实验命令的状态中的变化做出响应。
此外，所述实验可产生至少一个测试产品和至少一个生产产品(即一种对照物，其例如可以是在测试产品之前或之后受到处理的产品，以及根据基本工艺受到处理的产品)；处理数据可包括基本工艺的指示，对该基本工艺的变化，以及一对照物组(即从属于该实验的产品)的拆分；而拆分出的对照物组根据基本工艺可产生至少一个生产产品，对该基本工艺的变化可产生至少一个测试产品。实验的执行结果可以被储存起来。
附图说明
本发明的上述的以及其他的优点和特征将由附图的详尽描述变得更加显而易见，其中：
图1是一个计算机化的工艺控制系统的方框图，该系统可与本发明的至少某些实施例结合使用；
图2是根据本发明的至少某些实施例的用于实验管理的整个方法的流程图；
图3A和B是图2中整个方法的命令管理方法部分的流程图；
图4是图2中整个方法的配置方法部分的流程图；
图5是图2中整个方法的执行方法部分的流程图；
图6是图2中整个方法的分析方法部分的流程图；
图7是一个表明实验规定的示意图；
图8是一个用于实验编辑的示例性使用者界面，其与本发明的至少某些实施例结合使用；
图9是一个用于实验编辑的示例性使用者界面，其指明附件，与本发明结合使用；
图10是一个用于实验编辑的示例性使用者界面，其指明实验内容，应用于本发明的至少某些实施例；
图11是一个用于实验编辑的示例性使用者界面，其指明圆片级分割(wafer level split)的细节，应用于本发明的至少某些实施例；
图12是一个实验的至少某些实施例的说明。
具体实施方式
以下详细描述包括许多特定的细节。包含这些细节只是为了说明目的，而不应理解为对本发明做出限制。为了参考的方便，在通篇这种讨论中，在各种图表中均以同样的数字来表示相类似的各个部分。
如在以上发明内容部分所指出的，根据本发明的至少某些实施例，一个“实验”是一种利用自动化环境的基本工艺的至少某一部分的预先计划的偏差。典型的是，可对诸如半导体芯片等材料进行实验，该材料是作为一种自动化方法的结果生产的。同样如上文所指出的，本发明的至少某些实施例，预见到实验管理包括四个概念上不同的阶段：命令管理，配置，执行和分析。虽然这些阶段在概念上是不同的，但它们可能会偶尔重叠。
根据本发明的至少某些实施例，报告、记录、表格、文件和其他文档可与整个命令管理和配置阶段的特定实验相关联。这些文档可供得到允许利用本实验的使用者查阅。这使使用者和查阅者得以用一种用户友好的界面、高度灵活的方式，对实验作出评价、提供背景信息、提供适当的表格、附加相关的信息，等等。由于其灵活性，会吸引使用者提供输入，并会导致更高质量的实验。
现在参考图1，其为一方框图，概括说明一个计算机化的工艺控制系统，该系统可应用于本发明的至少某些实施例。如图所示，实验命令101被输入到一个计算机化的系统，概括性地表示为输入到控制器103。实验命令101包含所需实验的例如为文本形式的描述。例如，实验命令101可以是一个包含文字的字处理文档。作为一种替代，它还可以从菜单输入。在实验命令101中所描述的实验是用以产生结果的一种偏离现有自动化工艺的偏差，虽然它被描述为偏离特定工艺的偏差，但这并非是必需的。
控制器103可存取各种存储的工艺111，如半导体芯片的制造工艺。控制器103可以是通用计算机，也可以是特别编程的专用计算机，或者是其他自动化系统或分布式系统。(一般来说，在此所用的这类计算机，或其用途明显是来源于所讨论内容的计算机，可以是各种不同类型的计算机，包括那些包含来自美国加利福尼亚州Santa Clara的英特尔公司的处理器的计算机，其中所述计算机可包含任何数目和不同类型的存储装置，如计算机可读介质；另外，本发明的至少某些实施例设想了该计算机可读介质可以是一种传输介质。)所存储的工艺111包含着制造工艺中的许多自动化工序。这些工序的内容的实际格式是由系统和该系统中的各装置来确定的。该工艺中的一些工序利用了存储在方法数据库113中的方法。方法可被不同的工艺所共用。控制器103控制着如生产系统105这样的自动化环境的操作，生产系统105最终产生生产产品107，或按实验的安排产生测试产品109。因此，本发明允许使用者提出实验请求，产生基本工艺的派生工艺，并跟踪实验请求的状态。
参考图2，这是根据本发明的至少某些实施例的用于实验管理的整个方法的流程图。概念上的四个阶段(如上所述)包括：命令管理201，制造执行系统(MES)配置203，执行205，和分析207。
在下文进一步详细说明的命令管理阶段201将定义实验命令。典型的是，在实验命令中将一个实验定义为一组请求，并将其规定为一种偏离现有工艺的偏差。实验命令在被批准得以进行下一阶段之前，须经各种人员的传送、审阅以及变化。
在MES配置阶段203，实验命令被转换为实验配置，即特殊的工艺数据，该数据可由生产系统中的各部分加以执行。工艺数据采用各生产系统部分所期望的格式。在典型情况下，在基本工艺的各工序之间插入(和/或替代现有工序)用于进行实验的数据。
在执行阶段205，基于实验配置来完成材料的执行。这一阶段大部分或全部都是由生产系统部分自动完成的。在这一执行阶段203，所实施的配置中的每一工序的结果都要记录。
在分析阶段207，将报告和分析实验的结果。这可由计算机自动完成，和/或可包括使用者所作分析。
参考图3A和3B，其为图2中整个方法的示例性命令管理阶段的流程图，如本发明的至少某些实施例所设想的。这一阶段允许在实验请求审阅和签发(sign-off)后，请求进行和完成实验。在步骤301，最初由请求者来定义实验。为便于实验，所设想的是，请求可以用任何适当的形式提出。一种适当的形式是电子文档形式的文字描述。请注意，实验可被非正式地描述。并不一定要以偏离现有工艺的偏差形式来为最初的实验请求定义实验。
在步骤303产生实验对象(或以其他方式存储实验数据)。收集最初的信息以标识请求者和实验，例如以对象的形式存储该信息。随后将实验请求分送给分配表中所标识的合适的使用者。
在步骤305，接到实验请求(例如用于审阅)的使用者可对该实验请求附加外部文件、记录、表格或其他文档。可利用使文档与实验请求相关联的能力来帮助实现有关实验请求的用户交互作用。然后，这些文档可被其他使用者查阅。
在步骤307，使用者(或自动化实体)确定对特定基本工艺所做变化。使用者(或自动化实体)也可确定要修改的基本工艺。还有，在步骤309，使用者(或自动化实体)将确定何时从分出一批控制装置，以及何时执行该批特殊的事务处理。在步骤311，使用者(或自动化实体)确定哪个方法发生变化，如果有，确定需要变化的内容。在已经确定对基本工艺所做的特定变化时，系统将这些变化作为处理数据加以接收和存储。在步骤313，由于实验已被使用者初步掌握(tweaked)，将其传送以便签发，如图3B所示。在步骤315，如果实验已为使用者们所批准，本方法在步骤317结束，而实验则继续发展到概念上的下一个阶段。否则，本方法回到步骤305以便做进一步处理。
图3B说明签发方法的一个实施例。在步骤321，接到实验请求(例如用于审阅)的使用者可对于该实验请求附加外部文件、记录、表格或其他文档，它们可随后被其他使用者审阅。如果在步骤323对实验请求附加或删除文档，或者如果在步骤325对实验请求有状态变化，这些信息将在步骤327公布。一种合适的公布方式是通过电子邮件将这些信息发送给列出的使用者。例如，一种状态变化可以包括对于实验(或一部分实验)的“签发”。在步骤329，如果没有收到最终批准的指示(或赞成而没有批准)，本方法在步骤321重复进行。如果收到最终的批准，该阶段在步骤331结束。
参考图4，这是图2整个方法的配置阶段203部分的流程图。在配置阶段，使用者可设定特定的实验。例如，使用者可设定实验特定的数据，如标线或方法的细节。在步骤401，使用者(或自动化实体)检索并审阅实验命令。如上所指出的，该实验命令可以是一个实验的非正式的描述。使用者能够确定应该如何执行一种工艺以影响所请求的实验，或者例如通过解析该实验的描述和识别出表明所请求内容的特定的关键字或词组，使得该工艺可自动执行。本发明的至少某些实施例设想到可利用(举例来说)各种专门的系统技术来完成这一工作。本发明的至少某些实施例也设想了自动执行与使用者参与的一些组合。
同样参考图4，在步骤403，使用者(或自动化实体)确定要对一个特定基本工艺所做的变化。使用者(或自动化实体)还可确定要经修改的基本工艺。同样，在步骤405，使用者(或自动化实体)将确定何时分离出一批控制装置，以及所要执行的该批特定的事务处理。在步骤407，使用者(或自动化实体)确定哪个方法发生变化，如果有，确定需要变化的内容。在已经确定要对基本工艺所做的特定变化时，系统将这些变化作为处理数据加以接收和存储。
参考图5，这是图2整个方法的执行阶段205的流程图。此时已经以处理数据的方式定义了实验，该数据可被输入给自动化环境。此时即能以对该自动化环境透明的方式处理该实验。在步骤501，自动化环境接收用于修改后工艺的处理数据。在步骤503，自动化环境执行处理数据的步骤。如果有任何测试产品有待存储，则系统在步骤505至507存储这些测试产品。在步骤509，如果处理未完成，自动化环境即返回到步骤503继续处理。当处理完成，这一阶段在步骤511结束。
参考图6，这是图2整个方法的分析阶段207的流程图。可利用实验历史配置信息和历史数据以进行分析和报告。在步骤601，收集实验结果。在步骤603，可利用实验结果进行分析。例如某个使用者可能希望进行该结果的人工分析。在步骤605，自动化环境执行所请求的任何计算机化分析。在步骤607至609，如果对实验提出任何改变，则使用者可产生另一个实验请求。在步骤611完成分析。
参考图7，其为一个说明实验定义的视图，其中实验定义如同于本发明的至少某些实施例中所设想的。具体地说，实验701最初与存储数据相关联，该数据包括例如由使用者所定义的属性信息703，以及定义如何进行实验操作的操作信息705。一个实验可能在最初产生时是无可借鉴的，或者其可由用作模板的另一个实验复制而来。典型的属性可包括充分的信息，用以识别关于实验的有用信息，如实验标识符、实验对象、请求者名字、实验名称，请求者的电子邮箱地址。
当实验被初步定义后，开始状态将是“欠改变”状态707(表明该实验可被改变)，而一旦实验被批准，则结束阶段是有效的(被分送的)711。在欠改变状态之后而在有效的状态之前，可能有一系列使用者定义的状态709，它们处于使用者的控制之下。在实验被批准并获签发后，就进入有效的状态。最好是，使用者在未获适当的允许时，不能改变实验内容。可以有其他使用者定义的属性，以及附加的外部文档和/或文件，及使用者定义的状态模型。根据一种可能的实施方案，可将实验作为对象执行。需指出的是，这种状态表对应于命令管理方法部分。
图8-11是可结合用于本发明的至少某些实施例的可能的用户界面的一些例子。首先参见图8，这是用于实验编辑的示例性用户界面的一种情况。用户可在此关于提供实验811、实验属性813及可选择性关于实验类别815的信息。实验信息可包括概述实验描述的对象801。其他实验信息包括请求者标识信息803(如名字、电子邮箱地址)；实验的基本工艺或状态模型805；以及可选择的在实验请求后将到期的有效日期807。在这一初始界面所收集的信息与实验请求相关联。
参考图9，这是用于实验编辑的示例性用户界面的另一种情况，表明了与本发明的至少某些实施例结合使用的附件。在这些实施例中，诸如(但不限于是)文件、记录、表格、Web地址这样的文档可附加到实验请求或与其相关联。图9通过示例方式以文件名909列出几个附加至实验请求的文档：本地文档experiment.doc 901；另一文档的文件路径C:\Experiment\Experiment.doc 903；一个网站www.consolium.com905；以及一个超链接文档http://www.consolium.com/corp_events.html？phase＝ge 907。本例中的用户界面也指出是否该文件是简单的参考文件911。
参考图10，这是用于实验编辑的示例性用户界面的另一种情况，表明了与本发明的至少某些实施例结合使用的实验内容。这个示例性用户界面允许访问实验内容1001、物理拆分细节1003和合并细节1005，该拆分对标准和测试材料做不同处理，而该合并则详述在上述拆分后合并时如何处理标准和测试材料。实验内容1001提供控制实验工艺的文件。其在此命名为实验工艺1007、实验路径1009和实验操作1011。应指出的是，尚可提供有关实验的更多信息，如处理是否是在拆分之前或拆分之后1013。
参考图11，这是用于实验编辑的示例性用户界面，表明与本发明结合使用的圆片级拆分细节。这里，处理数据提供在批量级、槽级或单元级上的细节，本实例涉及到槽级拆分。如图所示，拆分细节1103提供了要拆分的槽和数量；以及与每个拆分相关联的工艺规划1105。
参考图12，其表明本发明所设想的实验的至少某些实施例。每个实验命令1201可以与其各种文档相关联，如文件1203、表格1205、记录1207和实验结果1209。使用者可将文档附加到实验命令中/从实验命令中删除文档。优选的是，将附加文档视作一个事件，并可导致该事件例如通过e-mail(电子邮件)或工作流程而公布。
使用者可复制实验命令，连同其附加文档、属性和其他相关信息。
还有，根据本发明的至少某些实施例，对于实验命令的变化可存储在历史记录中。所存储的变化包括本机属性(native attribute)、外部文档增添/删除及与其他对象相关联的变化。
考虑一个实验的例子，参考图3至图6。在这个例子中，使用者想让一个芯片的指定层加厚10％。这个例子中的实验是源于一个工程师的想法。该实验请求由使用者定义，并以步骤301至步骤303提交给系统。它可能是一个带有简单文字描述的非常普通的请求。为该实验请求生成一个实验对象，实验请求在步骤305至步骤313被路由到适当的使用者以便批准。批准可以是自动化的，如通过电子邮件传送同时等待被批准时的标记。如步骤321至步骤329所示，在收到对实验的签发指令之前，使用者可对于实验对象附加和/或删除相关文件、记录等。如果有附加或删除，或如果实验改变了状态，就对使用者公布事件，这展示于步骤323至327中。审阅处理将继续到收到签发指令为止。
一旦收到签发指令，实验命令即受到审阅并被转换成处理数据，如图4所示。这种审阅和转换可以是一种由具有适当经验的人员完成的人工处理。另外，它也可全部或部分地由自动化装置来完成。例如，在任何情况下，可在步骤403确定将成为批量中对照物的圆片1-11(即已有的步骤将不受影响)，而该批量中的其余圆片将成为测试产品。同样可确定，一个标准基本工艺的第500次循环中的某个特定参数必须从100变为200。可在步骤405规定，对照物将被从其他处理中拆分出来。如有必要的话，将在步骤407创造一种新方法，或修改现有的方法。所有的圆片均将处于自动控制下。两个批量将重新被结合和保持，或传送以用于分析。与基本工艺的各种变化、特定执行的事务处理、和任何方法变化有关的信息将被作为处理数据而存储。需指出的是，实验可要求收集额外的或不同的信息，作为处理结果的一部分。
然后进行实验，如图5所示。在这一点上，实验处理数据所受处理与例行的控制工作没有不同之处。亦即不需要另外的处理。在步骤501，处理数据被输入到制造系统，而通过在步骤503执行该处理数据，测试可自动进行。在步骤505-507存储实验执行过程中产生的结果。
在实验之后，可以依据测试材料到标准产品材料将测试产品重新分类，若其在容差范围内将被运送给客户。可选择的是，非标准的处理材料可被废弃(scrappeds)，或留待进一步分析，如图6所示。
尽管结合上文的特定实施例描述本发明，但许多替换、修改和变化对本领域技术人员来说是显而易见的。因此，所提出的本发明的优选实施例用意是说明性的而不是限定性的。在不脱离所附权利要求定义的本发明的精神和范围的情况下，可以做出各种变化。
例如，完全从头开始定义整个一个实验是可能的。一个典型的半导体制造工艺有500到750个工序，因此，作为源自现有工艺的一种变例来定义一个实验经常是更加有效的。
作为另一个例子，控制器可以是一个通用计算机，一个特殊编程的专用计算机；它也可作为一种分布式计算机系统实现，而不是一台独立计算机。

Claims (20)

1.一种与自动处理技术有关的用于管理实验的计算机实现的方法，包括以下步骤：
(A)接收实验命令，所述实验命令包括偏离可在自动化环境中操作的基本工艺的至少某个预先计划的偏差；
(B)获得所述实验命令的批准；
(C)将所述实验命令的至少一部分转换和存储为处理数据，该数据适合于被所述自动化环境执行；和
(D)根据所述处理数据，使得所述实验与所述基本工艺的一部分一起被所述自动化环境执行。
2.根据权利要求1的方法，其中所述的获得步骤进一步包括以下步骤：存储定义所述实验命令的数据，向多个使用者分送所述实验命令，从至少一个所述使用者获得对所述实验命令的变化，并且从至少一个使用者接收对于所述实验命令的批准。
3.根据权利要求1的方法，进一步包括对所述实验命令附加文档的步骤。
4.根据权利要求3的方法，进一步包括以下步骤：对附加到所述实验命令的文档做出响应，或对所述实验命令的状态中的变化做出响应，而公布表明所述实验命令的状态变化的信息。
5.根据权利要求1的方法，其中所述的转换步骤进一步包括接收所述处理数据的步骤。
6.根据权利要求5的方法，其中：
所述实验产生至少一个测试产品和至少一个生产产品；并且
其中所述处理数据包括所述基本工艺的指示、对所述基本工艺的变化和一对照物组的拆分；且
其中所述对照物组的拆分根据所述基本工艺产生至少一个生产产品，而对所述基本工艺的变化产生至少一个测试产品。
7.根据权利要求1的方法，进一步包括接收和存储所述实验的执行结果的步骤。
8.根据权利要求1的方法，其中所述自动化环境产生半导体技术。
9.根据权利要求1的方法，其中所述处理数据与以下至少其中之一相关：对所述基本工艺自身的变化，对所述基本工艺进行的添加，以及对所述基本工艺进行的省略。
10.根据权利要求1的方法，进一步包括以下步骤：对附加到所述实验命令的文档做出响应，或对所述实验命令的状态中的变化做出响应，而公布表明所述实验命令的状态变化的信息。
11.一种与自动处理技术有关的用于管理实验的计算机实现的系统，包括：
(A)实验命令，所述实验命令包括偏离可在自动化环境中操作的基本工艺的至少某个预先计划的偏差；
(B)所述实验命令的批准，它是对所述实验命令的接收做出响应而获得的；
(C)适合于被所述自动化环境执行的处理数据，它是由所述实验命令的至少一部分转换而来的；并且
(D)其中所述自动化环境根据所述处理数据，使得所述实验与所述基本工艺的至少一部分一起被所述自动化环境执行。
12.根据权利要求11的系统，其中所述批准进一步包括：定义所述实验命令的被存储数据，所述实验命令向多个使用者的分送，来自至少一个所述使用者的对所述实验命令的被存储的变化，和被接收到的来自至少一个使用者的对于所述实验命令的批准。
13.根据权利要求11的系统，进一步包括至少一个附加于所述实验命令的文档。
14.根据权利要求11的系统，进一步包括：表明所述实验命令的状态变化的信息，该信息是对附加于所述实验命令的文档做出响应或对所述实验命令的状态中的变化做出响应而公布的。
15.根据权利要求11的系统，其中所述处理数据是从一个使用者接收到的。
16.根据权利要求15的系统，其中：
所述实验产生至少一个测试产品和至少一个生产产品；并且
其中所述处理数据包括基本工艺的指示、对所述基本工艺的变化和一对照物组的拆分；且
其中所述对照物组的拆分根据所述基本工艺产生至少一个生产产品，而对所述基本工艺的变化产生至少一个测试产品。
17.根据权利要求11的系统，其中所述实验的执行结果被接收和存储。
18.根据权利要求11的系统，其中所述自动化环境产生半导体技术。
19.根据权利要求11的系统，其中所述处理数据与以下至少其中之一相关：对所述基本工艺自身的变化，对所述基本工艺进行的添加，以及对所述基本工艺进行的省略。
20.一种在自动化生产或制造系统中进行实验的方法，包括以下步骤：
(A)将所述自动化生产或制造系统的至少一个基本工艺和方法保存在存储器中，其中所述至少一个基本工艺包括多个自动化工序，并且所述多个自动化工序可利用所述方法；
(B)对照所述基本工艺和方法，根据接收的实验命令确定所述实验命令对一个特定基本工艺及一个或多个方法所做的变化，并将所述变化存储为处理数据；
(C)将所述处理数据插入所述特定基本工艺的各自动化工序之间，或者用所述处理数据来替代所述特定基本工艺中的现有自动化工序；以及
(D)根据所述处理数据，使得实验与所述特定基本工艺的至少一部分一起被所述自动化生产或制造系统执行。
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EP1417549A2 (en) 2004-05-12
WO2003017013A3 (en) 2003-05-08
CN1541348A (zh) 2004-10-27
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AU2002356021A1 (en) 2003-03-03

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