BRPI0413664A - Modulador separável - Google Patents
Modulador separávelInfo
- Publication number
- BRPI0413664A BRPI0413664A BRPI0413664-0A BRPI0413664A BRPI0413664A BR PI0413664 A BRPI0413664 A BR PI0413664A BR PI0413664 A BRPI0413664 A BR PI0413664A BR PI0413664 A BRPI0413664 A BR PI0413664A
- Authority
- BR
- Brazil
- Prior art keywords
- modulator
- flexible layer
- mirror
- over
- separable
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/137—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
- G02F1/13725—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering based on guest-host interaction
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12104—Mirror; Reflectors or the like
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/216—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference using liquid crystals, e.g. liquid crystal Fabry-Perot filters
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/03—Function characteristic scattering
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
- G09G3/3466—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on interferometric effect
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Nanotechnology (AREA)
- Nonlinear Science (AREA)
- Biophysics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Aerials With Secondary Devices (AREA)
Abstract
"MODULADOR SEPARáVEL. Descreve-se uma arquitetura de modulador separável. O modulador tem um espelho suspenso de uma camada flexível sobre uma cavidade. A camada flexível também forma suportes e colunas de sustentação para o espelho. Uma arquitetura de modulador separável alternativa tem um espelho suspenso sobre uma cavidade. O modulador é sustentado por suportes e colunas de sustentação. As colunas de sustentação compreendem uma camada flexível sobre tampões de coluna de sustentação. Uma estrutura de barramento pode ser formada sobre a camada flexível disposta sobre as colunas de sustentação.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/644,312 US7460291B2 (en) | 1994-05-05 | 2003-08-19 | Separable modulator |
PCT/US2004/026458 WO2005019899A1 (en) | 2003-08-19 | 2004-08-12 | Separable modulator |
Publications (1)
Publication Number | Publication Date |
---|---|
BRPI0413664A true BRPI0413664A (pt) | 2006-10-24 |
Family
ID=34216394
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BRPI0413664-0A BRPI0413664A (pt) | 2003-08-19 | 2004-08-12 | Modulador separável |
Country Status (12)
Country | Link |
---|---|
US (4) | US7460291B2 (pt) |
EP (1) | EP1656579A1 (pt) |
JP (1) | JP4468307B2 (pt) |
KR (1) | KR20060098362A (pt) |
CN (1) | CN1853130A (pt) |
AU (1) | AU2004266407A1 (pt) |
BR (1) | BRPI0413664A (pt) |
CA (1) | CA2536145C (pt) |
IL (1) | IL173672A0 (pt) |
RU (1) | RU2351969C2 (pt) |
TW (1) | TWI358550B (pt) |
WO (1) | WO2005019899A1 (pt) |
Families Citing this family (332)
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2004
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- 2004-08-12 CA CA2536145A patent/CA2536145C/en not_active Expired - Fee Related
- 2004-08-12 BR BRPI0413664-0A patent/BRPI0413664A/pt not_active IP Right Cessation
- 2004-08-12 RU RU2006108553/28A patent/RU2351969C2/ru not_active IP Right Cessation
- 2004-08-12 EP EP04781184A patent/EP1656579A1/en not_active Withdrawn
- 2004-08-12 KR KR1020067003335A patent/KR20060098362A/ko not_active Abandoned
- 2004-08-12 AU AU2004266407A patent/AU2004266407A1/en not_active Abandoned
- 2004-08-12 WO PCT/US2004/026458 patent/WO2005019899A1/en active Application Filing
- 2004-08-12 JP JP2005518934A patent/JP4468307B2/ja not_active Expired - Fee Related
- 2004-08-18 TW TW093124794A patent/TWI358550B/zh not_active IP Right Cessation
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2005
- 2005-09-29 US US11/240,796 patent/US20060220160A1/en not_active Abandoned
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2006
- 2006-02-12 IL IL173672A patent/IL173672A0/en unknown
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2008
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Also Published As
Publication number | Publication date |
---|---|
TW200517701A (en) | 2005-06-01 |
US20090080060A1 (en) | 2009-03-26 |
US20040051929A1 (en) | 2004-03-18 |
CN1853130A (zh) | 2006-10-25 |
JP2006514756A (ja) | 2006-05-11 |
AU2004266407A1 (en) | 2005-03-03 |
US7672035B2 (en) | 2010-03-02 |
RU2006108553A (ru) | 2007-10-20 |
WO2005019899A1 (en) | 2005-03-03 |
JP4468307B2 (ja) | 2010-05-26 |
IL173672A0 (en) | 2006-07-05 |
KR20060098362A (ko) | 2006-09-18 |
US7460291B2 (en) | 2008-12-02 |
RU2351969C2 (ru) | 2009-04-10 |
CA2536145C (en) | 2012-04-03 |
TWI358550B (en) | 2012-02-21 |
US20060220160A1 (en) | 2006-10-05 |
US20100214645A1 (en) | 2010-08-26 |
EP1656579A1 (en) | 2006-05-17 |
CA2536145A1 (en) | 2005-03-03 |
US7852544B2 (en) | 2010-12-14 |
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