Test Process and ATE 2015
Test Process and ATE 2015
Test Process and ATE 2015
Lecture 2:
Test Process and Equipment
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Lecture 2
VLSI Testing Process and
Equipment
• Motivation
• Types of Testing
• Test Specifications and Plan
• Test Programming
• Test Data Analysis
• Automatic Test Equipment
• Parametric Testing
• Summary
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Motivation
• Need to understand some Automatic Test Equipment
(ATE) technology
– Influences what tests are possible
– Serious analog measurement limitations at high digital
frequency or in the analog domain
– Need to understand capabilities for digital logic, memory, and
analog test in System-on-a-Chip (SOC) technology
• Need to understand parametric testing
– Used to take setup, hold time measurements
– Use to compute VIL , VIH , VOL , VOH , tr , tf , td , IOL, IOH , IIL,
IIH
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Types of Testing
• Verification testing, characterization testing, or
design debug
– Verifies correctness of design and of test procedure
– usually requires correction to design
• Manufacturing testing
– Factory testing of all manufactured chips for
parametric faults and for random defects
• Acceptance testing (incoming inspection)
– User (customer) tests purchased parts to ensure
quality
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Testing Principle
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Characterization Test
• Worst-case test
– Choose test that passes/fails chips
– Select statistically significant sample of chips
– Repeat test for every combination of 2+ environmental
variables
– Plot results in Schmoo plot
– Diagnose and correct design errors
• Continue throughout production life of chips to
improve design and process to increase yield
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Schmoo Plot
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Manufacturing Test
• Determines whether manufactured chip meets
specs
• Must cover high % of modeled faults
• Must minimize test time (to control cost)
• No fault diagnosis
• Tests every device on chip
• Test at speed of application or speed guaranteed
by supplier
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Types of Manufacturing Tests
• Wafer sort or probe test – done before wafer is
scribed and cut into chips
– Includes test site characterization – specific test
devices are checked with specific patterns to
measure:
• Gate threshold
• Polysilicon field threshold
• Poly sheet resistance, etc.
• Packaged device tests
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Sub-types of Tests
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Two Different Meanings of
Functional Test
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Test Programming
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ADVANTEST Model T6682
ATE
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Multi-site Testing – Major
Cost Reduction
• One ATE tests several (usually identical) devices at the
same time
• For both probe and package test
• DUT interface board has > 1 socket
• Add more instruments to ATE to handle multiple
devices simultaneously
• Usually test 2 or 4 DUTS at a time, usually test 32 or 64
memory chips at a time
• Limits: # instruments available in ATE, type of
handling equipment available for package
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Wrap-Up
• Parametric tests – determine whether pin electronics
system meets digital logic voltage, current, and delay
time specs
• Functional tests – determine whether internal logic/
analog sub-systems behave correctly
• ATE Cost Problems
– Pin inductance (expensive probing)
– Multi-GHz frequencies
– High pin count (1024)
• ATE Cost Reduction
– Multi-Site Testing
– DFT methods like Built-In Self-Test
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Benefits and Costs of DFT
Level Design Fabri- Manuf. Maintenance Diagnosis Service
and test cation Test test and repair interruption
Chips +/- + -
Boards +/- + - -
System +/- + - - - -
+ Cost increase
- Cost saving
+/- Cost increase may balance cost reduction
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Summary
• Economics teaches us how to make the right trade-offs.
• It combines common sense, experience and mathematical
methods.
• The overall benefit/cost ratio for design, test and
manufacturing should be maximized; one should select the
most economic design over the cheapest design.
• A DFT or test method should be selected to improve the
product quality with minimal increase in cost due to area
overhead and yield loss.
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