[go: up one dir, main page]

ZA200306360B - Method and device for producing thin wafers from a film of active ingredients. - Google Patents

Method and device for producing thin wafers from a film of active ingredients.

Info

Publication number
ZA200306360B
ZA200306360B ZA200306360A ZA200306360A ZA200306360B ZA 200306360 B ZA200306360 B ZA 200306360B ZA 200306360 A ZA200306360 A ZA 200306360A ZA 200306360 A ZA200306360 A ZA 200306360A ZA 200306360 B ZA200306360 B ZA 200306360B
Authority
ZA
South Africa
Prior art keywords
film
active ingredients
producing thin
thin wafers
wafers
Prior art date
Application number
ZA200306360A
Other languages
English (en)
Inventor
Wolfgang Schaefer
Ronald Hackbarth
Detlev Neuland
Original Assignee
Lohmann Therapie Syst Lts
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lohmann Therapie Syst Lts filed Critical Lohmann Therapie Syst Lts
Publication of ZA200306360B publication Critical patent/ZA200306360B/xx

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H35/00Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers
    • B65H35/04Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers from or with transverse cutters or perforators
    • B65H35/06Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers from or with transverse cutters or perforators from or with blade, e.g. shear-blade, cutters or perforators
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61KPREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K9/00Medicinal preparations characterised by special physical form
    • A61K9/20Pills, tablets, discs, rods
    • A61K9/2072Pills, tablets, discs, rods characterised by shape, structure or size; Tablets with holes, special break lines or identification marks; Partially coated tablets; Disintegrating flat shaped forms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H35/00Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers
    • B65H35/02Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers from or with longitudinal slitters or perforators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H39/00Associating, collating, or gathering articles or webs
    • B65H39/16Associating two or more webs
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61KPREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K9/00Medicinal preparations characterised by special physical form
    • A61K9/20Pills, tablets, discs, rods
    • A61K9/2095Tabletting processes; Dosage units made by direct compression of powders or specially processed granules, by eliminating solvents, by melt-extrusion, by injection molding, by 3D printing
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61KPREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K9/00Medicinal preparations characterised by special physical form
    • A61K9/70Web, sheet or filament bases ; Films; Fibres of the matrix type containing drug
    • A61K9/7007Drug-containing films, membranes or sheets
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00Cutting
    • Y10T83/202With product handling means
    • Y10T83/2033Including means to form or hold pile of product pieces
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00Cutting
    • Y10T83/202With product handling means
    • Y10T83/2033Including means to form or hold pile of product pieces
    • Y10T83/2037In stacked or packed relation
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00Cutting
    • Y10T83/202With product handling means
    • Y10T83/2033Including means to form or hold pile of product pieces
    • Y10T83/2037In stacked or packed relation
    • Y10T83/2046Including means to move stack bodily
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00Cutting
    • Y10T83/202With product handling means
    • Y10T83/2033Including means to form or hold pile of product pieces
    • Y10T83/2037In stacked or packed relation
    • Y10T83/2046Including means to move stack bodily
    • Y10T83/2048By movement of stack holder
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00Cutting
    • Y10T83/202With product handling means
    • Y10T83/2092Means to move, guide, or permit free fall or flight of product
    • Y10T83/2183Product mover including gripper means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00Cutting
    • Y10T83/647With means to convey work relative to tool station
    • Y10T83/6476Including means to move work from one tool station to another
    • Y10T83/6489Slitter station
    • Y10T83/6491And transverse cutter station
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00Cutting
    • Y10T83/647With means to convey work relative to tool station
    • Y10T83/6572With additional mans to engage work and orient it relative to tool station
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00Cutting
    • Y10T83/647With means to convey work relative to tool station
    • Y10T83/664Roller
    • Y10T83/6644With work-supplying reel
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00Cutting
    • Y10T83/889Tool with either work holder or means to hold work supply
    • Y10T83/896Rotatable wound package supply

Landscapes

  • Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Pharmacology & Pharmacy (AREA)
  • Epidemiology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Veterinary Medicine (AREA)
  • Containers And Plastic Fillers For Packaging (AREA)
  • Medicinal Preparation (AREA)
  • Auxiliary Devices For And Details Of Packaging Control (AREA)
  • Medical Preparation Storing Or Oral Administration Devices (AREA)
  • Nonmetal Cutting Devices (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Details Of Cutting Devices (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Seasonings (AREA)
ZA200306360A 2001-02-14 2003-08-15 Method and device for producing thin wafers from a film of active ingredients. ZA200306360B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US26880501P 2001-02-14 2001-02-14

Publications (1)

Publication Number Publication Date
ZA200306360B true ZA200306360B (en) 2003-11-04

Family

ID=23024559

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA200306360A ZA200306360B (en) 2001-02-14 2003-08-15 Method and device for producing thin wafers from a film of active ingredients.

Country Status (19)

Country Link
US (2) US7749417B2 (xx)
EP (1) EP1359903B1 (xx)
JP (1) JP4312460B2 (xx)
CN (1) CN1262456C (xx)
AR (1) AR034207A1 (xx)
AT (1) ATE292459T1 (xx)
AU (1) AU2002231765B2 (xx)
BR (1) BR0207489B1 (xx)
CA (1) CA2440539C (xx)
DE (2) DE10110494C1 (xx)
DK (1) DK1359903T3 (xx)
ES (1) ES2240716T3 (xx)
MX (1) MXPA03007276A (xx)
NZ (1) NZ527581A (xx)
PT (1) PT1359903E (xx)
RU (1) RU2285518C2 (xx)
TW (1) TW505514B (xx)
WO (1) WO2002064123A2 (xx)
ZA (1) ZA200306360B (xx)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19925339C2 (de) * 1999-06-02 2003-02-27 Lohmann Therapie Syst Lts Verfahren und Vorrichtung zum Herstellen eines Produktes aus Streifenband, insbesondere eines medizinischen und/oder wirkstoffhaltigen Produktes sowie befüllbaren Behältern oder Siegelrandbeuteln
US7243480B2 (en) * 2003-07-25 2007-07-17 Lts Lohmann Therapie-Systeme Ag Wafer fixing and marking
GB2418408A (en) * 2004-09-22 2006-03-29 Medway Science Technologies Lt Packaging of polymeric films containing pharmaceutical etc agents
US20060104910A1 (en) * 2004-11-15 2006-05-18 Keith Lerner Over dosage indicating medicated film strip
ITBO20070368A1 (it) * 2007-05-23 2008-11-24 Gd Spa Metodo ed unita per la realizzazione di bollini per pacchetti di sigarette.
CN101143660B (zh) * 2007-10-23 2010-12-08 张春华 流延膜机收卷机构的收卷圆盘翻转装置
WO2009092646A2 (en) * 2008-01-25 2009-07-30 Oerlikon Assembly Equipment Ag, Steinhausen Method and apparatus for mounting a piece of foil on a substrate
FR2933959B1 (fr) * 2008-07-16 2010-09-10 Roquette Freres Procede de fabrication de films directement en alveole.
FR2959990B1 (fr) * 2010-05-17 2012-06-08 Kern Dispositif d'alimentation d'une machine de coupe transversale d'au moins une bande de materiau souple
US20120107402A1 (en) * 2010-10-29 2012-05-03 Monosol Rx, Llc Process for analyzing and establishing dosage size in an ingestible film
DE102011006905A1 (de) * 2011-04-06 2012-10-11 Kugler-Womako Gmbh Maschine zum Herstellen von Büchern, insbesondere Fotobüchern und/oder Bildbänden
US11129799B2 (en) * 2011-04-12 2021-09-28 Aquestive Therapeutics, Inc. Dual lane coating
CN104349995B (zh) * 2012-04-26 2016-10-12 倍耐力轮胎股份公司 用于可控地收集用于构建轮胎的连续条状元件的处理和生产线
TWI445655B (zh) * 2012-07-13 2014-07-21 Mas Automation Corp Multi - groove cutting and feeding device for striped objects
KR101648660B1 (ko) * 2013-05-16 2016-08-16 코르쉬 아게 태블릿 프레스 내로 필름을 피착시키기 위한 장치 및 방법
KR101547219B1 (ko) * 2014-12-31 2015-08-25 (주)씨엘팜 다열 다제 구강용해 필름 제조장치 및 제조방법
CN106003219A (zh) * 2016-06-30 2016-10-12 苏州市盛百威包装设备有限公司 一种塑料膜切割输送消毒装置
CN107877584B (zh) * 2017-11-10 2024-11-08 徐振华 一种固体颜料自动切断机
DE102018109008B3 (de) * 2018-04-16 2019-09-05 Muhr Und Bender Kg Verfahren und Vorrichtung zur Herstellung von mehrlagigen Blechstreifenpaketen
CN109822635B (zh) * 2019-03-23 2020-07-24 北京昊园药业有限公司 一种方便下料的往复式切药机
DE102019006046A1 (de) * 2019-08-27 2021-03-04 Mühlbauer Gmbh & Co. Kg Vorrichtung und Verfahren zum intermittierenden Fördern einer Warenbahn längs einer Förderrichtung und zum Schneiden der Warenbahn
DE102019125352B4 (de) * 2019-09-20 2022-01-27 Bernd Leising Bahnversetzeinrichtung für Etiketten-Druckmaschinen und Etiketten-Verarbeitungsmaschinen
CN111015759B (zh) * 2019-11-14 2021-06-04 绍兴日月新材料有限公司 一种聚酯薄膜生产中的质检装置
EP4094650A4 (en) * 2020-05-13 2023-03-01 Corelex Shin-Ei Co., Ltd. TOILET PAPER HOLDER
CN113352389B (zh) * 2021-06-08 2022-10-21 宁波市江北宏菱新兴绝缘材料有限公司 一种耐高温玻纤加强环切割装置
KR102652856B1 (ko) * 2023-10-23 2024-04-01 박진용 건강 기능용 필름의 절단 장치

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE949169C (de) 1953-03-07 1956-09-13 Karl Maria Biehl Eirnichtung zur UEberfuehrung einer aus einer Rotationsmaschine kommenden Druckbahn in ein Falzwerk
US3046823A (en) * 1957-10-04 1962-07-31 Riegel Paper Corp Tensioning device for a web in a slitting apparatus
US2942643A (en) * 1957-10-11 1960-06-28 Pucci Joseph Method of and apparatus for cutting and shaping strip material
US3656513A (en) * 1966-10-31 1972-04-18 Continental Can Co Method of manufacturing container bodies from composite strip material; container body blanks and container bodies
US3379390A (en) * 1966-11-16 1968-04-23 Gen Electric Canada Tension control for a moving web
JPS5319345B2 (xx) * 1974-05-17 1978-06-20
US4197289A (en) * 1975-12-15 1980-04-08 Hoffmann-La Roche Inc. Novel dosage forms
US4117422A (en) * 1977-12-27 1978-09-26 Motorola, Inc. Circuit for compensating vco nonlinearities in frequency modulated phase-locked loops and method thereof
DE3151848A1 (de) * 1981-12-30 1983-07-28 M. Lehmacher & Sohn Gmbh Maschinenfabrik, 5216 Niederkassel Vorrichtung zur herstellung von kunststoffbeuteln
JPH07102518B2 (ja) * 1992-05-25 1995-11-08 忠男 宇野 断裁装置
DE4230589C1 (de) * 1992-09-12 1994-02-03 Lohmann Therapie Syst Lts Dosierverfahren für leicht flüchtige oder thermolabile Substanzen in flüssiger Form zur Herstellung von u.a. flächigen Arzneiformen, insbesondere zur Herstellung von transdermalen oder dermalen therapeutischen Systemen
DE19646836B4 (de) * 1996-11-13 2006-06-14 Lts Lohmann Therapie-Systeme Ag Zubereitung, bestehend aus einer flächenhaften, film- oder oblatenartigen Darreichungsform
US5816030A (en) * 1997-09-16 1998-10-06 Kinematic Automation, Inc. Apparatus for packaging cut strips
US5953971A (en) * 1997-09-23 1999-09-21 Moore U.S.A., Inc. Dual web singulating cutter
DE19806966A1 (de) * 1998-02-19 1999-09-09 Lohmann Therapie Syst Lts Verfahren und Vorrichtung zum Einbringen einer Vielzahl vereinzelter folienförmiger Darreichungsformen in einen Spender unter Bildung eines viellagigen Stapels
US6196370B1 (en) * 1998-03-27 2001-03-06 Tonoga Limited Package conveying surface with liner
DE19925339C2 (de) * 1999-06-02 2003-02-27 Lohmann Therapie Syst Lts Verfahren und Vorrichtung zum Herstellen eines Produktes aus Streifenband, insbesondere eines medizinischen und/oder wirkstoffhaltigen Produktes sowie befüllbaren Behältern oder Siegelrandbeuteln

Also Published As

Publication number Publication date
CA2440539C (en) 2010-02-02
MXPA03007276A (es) 2004-02-26
CN1262456C (zh) 2006-07-05
ATE292459T1 (de) 2005-04-15
ES2240716T3 (es) 2005-10-16
JP2004529781A (ja) 2004-09-30
EP1359903B1 (de) 2005-04-06
BR0207489A (pt) 2004-08-10
PT1359903E (pt) 2005-07-29
US20100224042A1 (en) 2010-09-09
US8291798B2 (en) 2012-10-23
RU2003126190A (ru) 2005-02-27
PL366917A1 (en) 2005-02-07
WO2002064123A2 (de) 2002-08-22
DE10110494C1 (de) 2002-12-05
JP4312460B2 (ja) 2009-08-12
NZ527581A (en) 2005-12-23
DE50202712D1 (de) 2005-05-12
US7749417B2 (en) 2010-07-06
US20040076799A1 (en) 2004-04-22
BR0207489B1 (pt) 2013-12-31
DK1359903T3 (da) 2005-06-27
CN1525853A (zh) 2004-09-01
WO2002064123A3 (de) 2003-02-27
AU2002231765B2 (en) 2005-11-10
EP1359903A2 (de) 2003-11-12
RU2285518C2 (ru) 2006-10-20
TW505514B (en) 2002-10-11
AR034207A1 (es) 2004-02-04
CA2440539A1 (en) 2002-08-22

Similar Documents

Publication Publication Date Title
ZA200306360B (en) Method and device for producing thin wafers from a film of active ingredients.
AU2002231765A1 (en) Method and device for producing thin wafers from a film of active ingredients
AU2002354254A1 (en) Method for making nitride semiconductor substrate and method for making nitride semiconductor device
EP1130626A3 (en) Method and apparatus for manufacturing semiconductor device
AU2002246319A1 (en) Exposure device and substrate processing system and device producing method
AU2002349589A1 (en) Semiconductor device and production method therefor
AU2000226927A1 (en) Semiconductor integrated circuit device and method of producing the same, and method of producing masks
AU2001277779A1 (en) Semiconductor device and method of its manufacture
AU2544900A (en) Method for fabricating thin film semiconductor devices
SG115478A1 (en) Thin film transistor and method for manufacturing the same
AU2001294188A1 (en) Device and method for manufacturing semiconductor
AU2002349581A1 (en) Semiconductor device and manufacturing method thereof
GB0009280D0 (en) Method of cystallising a semiconductor film
EP1431425A4 (en) APPARATUS AND METHOD FOR MANUFACTURING SINGLE CRYSTALLINE SEMICONDUCTOR AND MONOCRYSTALLINE INGOT
IL158094A0 (en) Deposition method, deposition apparatus, insulating film and semiconductor integrated circuit
AU2001230409A1 (en) A method and apparatus for implanting semiconductor wafer substrates
AU2002354196A1 (en) Substrate holding apparatus, exposure apparatus, and device manufacturing method
AU2002223125A1 (en) Method and device for transfer, method and device for exposure, and method of manufacturing device
AU2002255557A1 (en) Lithography method for forming semiconductor devices on a wafer and apparatus
AU2002238901A1 (en) Thin film forming method and apparatus
AU2002228436A1 (en) Film forming method and film forming device
AU2002348933A1 (en) Heterojunction semiconductor device and method of manufacturing such device
AU2002324875A1 (en) Semiconductor wafer positioning system and method
AU2002367509A1 (en) Apparatus and method for etching the edges of semiconductor wafers
GB2378317B (en) A semiconductor device and a method of forming a semiconductor device and/or substrate