AU2002228436A1 - Film forming method and film forming device - Google Patents

Film forming method and film forming device

Info

Publication number: AU2002228436A1
Authority: AU; Australia
Prior art keywords: film forming; forming method; forming device; film; forming
Prior art date: 2001-02-08
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

AU2002228436A

Other versions

AU2002228436B2 (en

Inventor

Shuji Hahakura

Kazuya Ohmatsu

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Sumitomo Electric Industries Ltd

Original Assignee

Sumitomo Electric Industries Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-02-08

Filing date

2002-02-05

Publication date

2003-02-13

2001-02-08 Priority claimed from JP2001032280A external-priority patent/JP2002235168A/en

2002-02-05 Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd

2003-02-13 Publication of AU2002228436A1 publication Critical patent/AU2002228436A1/en

2007-05-24 Application granted granted Critical

2007-05-24 Publication of AU2002228436B2 publication Critical patent/AU2002228436B2/en

2022-02-05 Anticipated expiration legal-status Critical

Status Ceased legal-status Critical Current

Links

AU2002228436A 2001-02-08 2002-02-05 Film forming method and film forming device Ceased AU2002228436B2 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP2001-32280		2001-02-08
JP2001032280A JP2002235168A (en)	2001-02-08	2001-02-08	Film forming method and film forming apparatus
PCT/JP2002/000936 WO2002063063A1 (en)	2001-02-08	2002-02-05	Film forming method and film forming device

Publications (2)

Publication Number	Publication Date
AU2002228436A1 true AU2002228436A1 (en)	2003-02-13
AU2002228436B2 AU2002228436B2 (en)	2007-05-24

Family

ID=18896239

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2002228436A Ceased AU2002228436B2 (en)	2001-02-08	2002-02-05	Film forming method and film forming device

Country Status (13)

Country	Link
US (1)	US20040096580A1 (en)
EP (1)	EP1371746B1 (en)
JP (1)	JP2002235168A (en)
KR (1)	KR100819719B1 (en)
CN (1)	CN1265016C (en)
AT (1)	ATE321154T1 (en)
AU (1)	AU2002228436B2 (en)
CA (1)	CA2436750C (en)
DE (1)	DE60210045T2 (en)
DK (1)	DK1371746T3 (en)
ES (1)	ES2261642T3 (en)
NZ (1)	NZ527521A (en)
WO (1)	WO2002063063A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US8038850B2 (en) *	2006-06-23	2011-10-18	Qimonda Ag	Sputter deposition method for forming integrated circuit
JP5244725B2 (en) *	2009-07-21	2013-07-24	株式会社日立ハイテクノロジーズ	Deposition equipment
EP2810298A1 (en) *	2012-02-03	2014-12-10	Seagate Technology LLC	Methods of forming layers
CN106544634B (en) *	2015-09-17	2019-03-12	宁波江丰电子材料股份有限公司	A kind of forming method of film layer, target and target production method
CN107630188A (en) *	2017-10-31	2018-01-26	安徽富芯微电子有限公司	A kind of film-coating mechanism and its application method for being used to improve metal level plating film uniformity
KR102783234B1 (en)	2017-12-22	2025-03-19	인스터튜트 오브 지오라지컬 앤드 뉴클리어 싸이언시즈 리미티드	Ion beam sputtering device and method
CN108165934B (en) *	2018-01-19	2020-06-16	武汉华美晨曦光电有限责任公司	Evaporation plating equipment
CN114250164B (en) *	2020-09-23	2023-11-17	中国农业大学	A kind of Acinetobacter 1502IPR-05 with nitrogen-fixing and phosphorus-solubilizing ability and its application

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5736437A (en) *	1980-08-14	1982-02-27	Fuji Photo Film Co Ltd	Producing device of magnetic recording medium
JPS6194242A (en) *	1984-10-16	1986-05-13	Fuji Photo Film Co Ltd	Manufacture of magnetic recording medium
JPH0533124A (en) *	1991-07-26	1993-02-09	Olympus Optical Co Ltd	Laser flash vapor-deposition device
US5332133A (en) *	1991-11-01	1994-07-26	Nisshin Flour Milling Co., Ltd.	Powder supplying apparatus and powder spraying apparatus
JPH06101037A (en) *	1992-09-22	1994-04-12	Hitachi Ltd	Ion beam sputtering system
US5650378A (en) *	1992-10-02	1997-07-22	Fujikura Ltd.	Method of making polycrystalline thin film and superconducting oxide body
JP2996568B2 (en) *	1992-10-30	2000-01-11	株式会社フジクラ	Method for producing polycrystalline thin film and method for producing oxide superconducting conductor
AU6132494A (en) *	1993-03-12	1994-09-26	Neocera, Inc.	Superconducting films on alkaline earth fluoride substrates with multiple buffer layers
JPH06271394A (en) *	1993-03-19	1994-09-27	Chodendo Hatsuden Kanren Kiki Zairyo Gijutsu Kenkyu Kumiai	Target for laser beam vapor deposition device and production of oxide superconductor using the same
US5411772A (en) *	1994-01-25	1995-05-02	Rockwell International Corporation	Method of laser ablation for uniform thin film deposition
JPH0870144A (en) *	1994-08-26	1996-03-12	Sumitomo Electric Ind Ltd	How to make superconducting parts
JPH08144051A (en) *	1994-11-21	1996-06-04	Matsushita Electric Ind Co Ltd	Thin film forming method using laser ablation and laser ablation apparatus
JPH08246134A (en) *	1995-03-07	1996-09-24	Sumitomo Electric Ind Ltd	Thin film manufacturing method and thin film manufacturing apparatus by laser deposition method
US5624722A (en) *	1995-03-07	1997-04-29	Sumitomo Electric Industries, Ltd.	Apparatus and method for depositing films on substrate via on-axis laser ablation
JP3771012B2 (en) *	1997-09-02	2006-04-26	株式会社フジクラ	Oxide superconducting conductor
US6090207A (en) *	1998-04-02	2000-07-18	Neocera, Inc.	Translational target assembly for thin film deposition system
JP3877903B2 (en) *	1999-04-28	2007-02-07	株式会社フジクラ	Thin film formation method
JP2002266072A (en) *	2001-03-09	2002-09-18	Sumitomo Electric Ind Ltd	Laminated film and film forming method

2001
- 2001-02-08 JP JP2001032280A patent/JP2002235168A/en not_active Withdrawn
2002
- 2002-02-05 US US10/466,330 patent/US20040096580A1/en not_active Abandoned
- 2002-02-05 DE DE60210045T patent/DE60210045T2/en not_active Expired - Lifetime
- 2002-02-05 AU AU2002228436A patent/AU2002228436B2/en not_active Ceased
- 2002-02-05 KR KR1020037010471A patent/KR100819719B1/en not_active Expired - Fee Related
- 2002-02-05 CN CNB028044746A patent/CN1265016C/en not_active Expired - Fee Related
- 2002-02-05 AT AT02710513T patent/ATE321154T1/en not_active IP Right Cessation
- 2002-02-05 CA CA002436750A patent/CA2436750C/en not_active Expired - Fee Related
- 2002-02-05 WO PCT/JP2002/000936 patent/WO2002063063A1/en active IP Right Grant
- 2002-02-05 DK DK02710513T patent/DK1371746T3/en active
- 2002-02-05 NZ NZ527521A patent/NZ527521A/en unknown
- 2002-02-05 ES ES02710513T patent/ES2261642T3/en not_active Expired - Lifetime
- 2002-02-05 EP EP02710513A patent/EP1371746B1/en not_active Expired - Lifetime

Publication	Publication Date	Title
AU2002221122A1 (en)	2002-06-24	Thin film forming method and thin film forming device
AU2003289383A1 (en)	2004-07-22	Coating device and coating film forming method
AU2002357309A1 (en)	2003-06-30	Photoactivation device and method
AU2001286419A1 (en)	2002-11-11	Endourethral device and method
AU2002253574A1 (en)	2002-11-11	Exposure method and apparatus
AU2002306898A1 (en)	2002-11-18	Optical device and method therefor
AU2002312813A1 (en)	2003-05-22	Slicing method and device
AU2002245675A1 (en)	2002-09-24	Electromanipulation device and method
AUPR645501A0 (en)	2001-08-09	Attachment device and method
EP1179436A3 (en)	2004-03-31	Laminating film and laminating method using it
AU2002228436A1 (en)	2003-02-13	Film forming method and film forming device
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AU2002315775A1 (en)	2003-01-21	Thin film forming method and thin film forming device
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