WO2018101232A1 - 接触端子、検査治具、及び検査装置 - Google Patents
接触端子、検査治具、及び検査装置 Download PDFInfo
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- WO2018101232A1 WO2018101232A1 PCT/JP2017/042508 JP2017042508W WO2018101232A1 WO 2018101232 A1 WO2018101232 A1 WO 2018101232A1 JP 2017042508 W JP2017042508 W JP 2017042508W WO 2018101232 A1 WO2018101232 A1 WO 2018101232A1
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- Prior art keywords
- rod
- cylindrical body
- shaped main
- inspection
- main body
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- 238000007689 inspection Methods 0.000 title claims description 134
- 239000004020 conductor Substances 0.000 claims abstract description 156
- 230000002093 peripheral effect Effects 0.000 claims description 17
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- 238000003780 insertion Methods 0.000 description 20
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- 101100123718 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) pda-1 gene Proteins 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 8
- 101100353526 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) pca-2 gene Proteins 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
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- 229910052774 Proactinium Inorganic materials 0.000 description 3
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052745 lead Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
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- 238000009434 installation Methods 0.000 description 1
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- 229920005989 resin Polymers 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
- G01R1/07328—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support for testing printed circuit boards
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
- G01R1/0441—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
Definitions
- the present invention relates to a contact terminal used for inspection of an inspection object, an inspection jig for bringing the contact terminal into contact with the inspection object, and an inspection apparatus including the inspection jig.
- a contact terminal for an inspection apparatus in which a columnar center conductor (rod-shaped member) is inserted into a cylindrical body (cylindrical member) having a spring portion formed at an intermediate position, and an inspection treatment using the contact terminal.
- a tool is known (see, for example, Patent Document 1).
- This contact terminal is fixed by welding or caulking the center conductor near the tip of the cylindrical body with the end of the central conductor protruding from the cylindrical body.
- one end portion of the cylindrical body is brought into contact with the electrode portion according to the elastic restoring force of the spring portion.
- the other end portion of the center conductor is biased toward the inspection target, so that the contact state of the contact terminal with respect to the electrode portion and the inspection target is stabilized.
- the above-described inspection jig is provided with a large number of ultra-small contact terminals, and the center conductor (small-diameter conductive portion) constituting the contact terminal is a cylindrical body having a spring portion (large-diameter cylindrical portion). ) To be fixed by welding or caulking. However, since this adhering operation is extremely complicated, it has been difficult to properly manufacture the contact terminals. Further, there is a problem that it is difficult to set the contact pressure of the contact terminal with respect to the electrode and the inspection target to an appropriate value.
- An object of the present invention is to provide a contact terminal, an inspection jig, and an inspection apparatus that are easy to manufacture properly and that can easily set the contact pressure of the contact terminal to an electrode and an inspection object to an appropriate value. That is.
- a contact terminal includes a cylindrical body formed in a cylindrical shape from a conductive material, and a central conductor formed in a rod shape from a conductive material.
- a spring portion having a rod-shaped main body that is inserted through the tube-shaped body, the tube-shaped body being formed by providing a spiral groove along a circumferential surface of the tube-shaped body; and the rod-shaped body A holding portion that is externally fitted to the base end portion of the main body and holds the holding portion, and the holding portion extends in an axial direction of the cylindrical body from the end portion of the spiral groove that constitutes the spring portion. It consists of a peripheral wall partly divided in the circumferential direction of the cylindrical body by an extending slit.
- a contact terminal includes a cylindrical body formed in a cylindrical shape from a conductive material, and a central conductor formed in a rod shape from a conductive material, and the central conductor is A first central conductor having a first rod-shaped main body inserted on one end side of the cylindrical body, and a second central conductor having a second rod-shaped main body inserted on the other end side of the cylindrical body.
- a first holding portion that holds the proximal end portion of the first rod-shaped main body on one end side thereof, and a proximal end of the second rod-shaped main body on the other end portion side of the cylindrical body.
- a second holding part for holding the part, a first spring part connected to the first holding part, a second spring part connected to the second holding part, A cylindrical connecting portion for connecting the second spring portions to each other, and the first and second central conductors are arranged so that the front ends of the first and second rod-shaped main bodies are in front of each other. While it is inserted to the connection portion of the tubular body, so that the tip end faces of both the rod-shaped body is kept in a state of being opposed at a gap, the first, the total length of the second rod-like body is set.
- an inspection jig includes the above-described contact terminal and a support member that supports the contact terminal.
- an inspection apparatus is configured to inspect the inspection object based on the above-described inspection jig and an electrical signal obtained by bringing the contact terminal into contact with an inspection point provided on the inspection object. And an inspection processing unit to be performed.
- FIG. 1 It is a perspective view showing roughly the composition of the substrate inspection device provided with the contact terminal and inspection jig concerning one embodiment of the present invention. It is a perspective view which shows another example of the test
- FIG. 4 is a view corresponding to FIG. 3 showing a state in which a base plate is attached to the support member.
- FIG. 4 is a view corresponding to FIG. 3 showing an inspection state in which a probe is pressed against an inspection object.
- FIG. 5 is a diagram corresponding to FIG. 4 illustrating an example of a configuration of a probe according to a second embodiment of the present invention.
- FIG. 6 is a view corresponding to FIG.
- FIG. 5 illustrating an example of the configuration of the probe according to the second embodiment of the present invention.
- FIG. 8 is a view corresponding to FIG. 7 illustrating an example of the configuration of the probe according to the second embodiment of the present invention.
- FIG. 4 equivalent view which shows an example of a structure of the inspection jig which concerns on 3rd embodiment of this invention.
- FIG. 1 is a conceptual diagram schematically showing a configuration of a substrate inspection apparatus 1 including a contact terminal and an inspection jig according to an embodiment of the present invention.
- the substrate inspection apparatus 1 corresponds to an example of an inspection apparatus.
- a substrate inspection apparatus 1 shown in FIG. 1 is an apparatus for inspecting a circuit pattern formed on a substrate 101 which is an example of an inspection object.
- the substrate 101 may be various substrates such as a printed circuit board, a flexible substrate, a ceramic multilayer circuit board, an electrode plate for a liquid crystal display or a plasma display, a semiconductor substrate, a package substrate for a semiconductor package, or a film carrier.
- the inspection target is not limited to the substrate, but may be an electronic component such as a semiconductor element (IC: Integrated Circuit), for example, and may be any other target for electrical inspection.
- the substrate inspection apparatus 1 shown in FIG. 1 includes inspection units 4U and 4D, a substrate fixing device 6, and an inspection processing unit 8.
- the substrate fixing device 6 is configured to fix the substrate 101 to be inspected at a predetermined position.
- the inspection units 4U and 4D include inspection jigs 3U and 3D and a drive mechanism (not shown).
- the inspection jigs 3U and 3D are supported by an unillustrated drive mechanism so as to be movable in three axial directions of X, Y, and Z that are orthogonal to each other, and supported so as to be rotatable about the Z axis.
- the inspection unit 4U is located above the substrate 101 fixed to the substrate fixing device 6.
- the inspection unit 4D is located below the substrate 101 fixed to the substrate fixing device 6.
- Inspection jigs 3U and 3D for inspecting circuit patterns formed on the substrate 101 are detachably disposed in the inspection units 4U and 4D.
- the inspection units 4U and 4D include connectors (not shown) that are detachably connected to the inspection jigs 3U and 3D, respectively.
- the inspection units 4U and 4D are collectively referred to as an inspection unit 4.
- the inspection jigs 3U and 3D each include a plurality of probes Pr (contact terminals), a support member 31 that supports the plurality of probes Pr, and a base plate 321.
- the probe Pr corresponds to an example of a contact terminal.
- the base plate 321 is provided with an electrode to be described later that is in contact with one end of each probe Pr and is conductive.
- the inspection units 4U and 4D have connection circuits (not shown) that electrically connect the rear ends of the probes Pr to the inspection processing unit 8 or switch the connection through the electrodes provided on the base plate 321. I have.
- the probe Pr has a substantially rod-like shape as a whole, and details of its specific configuration will be described later.
- the support member 31 has a plurality of through holes that support the probe Pr. Each through hole is arranged so as to correspond to the position of the inspection point set on the wiring pattern of the substrate 101 to be inspected.
- the support member 31 is configured such that one end portion of each probe Pr is in contact with the inspection point of the substrate 101.
- the plurality of probes Pr are arranged so as to correspond to the intersection positions of the lattice.
- the direction corresponding to the bars of the lattice is directed so as to coincide with the X-axis direction and the Y-axis direction orthogonal to each other.
- the point to be inspected includes, for example, a wiring pattern, a solder bump, a connection terminal, and the like.
- the inspection jigs 3U and 3D are configured in the same manner except that the arrangement of the probes Pr is different and the mounting direction to the inspection units 4U and 4D is upside down.
- the inspection jigs 3U and 3D are collectively referred to as an inspection jig 3.
- the inspection jig 3 is configured to be replaceable according to the type of the substrate 101 to be inspected.
- the inspection processing unit 8 includes, for example, a power supply circuit, a voltmeter, an ammeter, a microcomputer, and the like.
- the inspection processing unit 8 controls the driving mechanism (not shown) to move and position the inspection units 4U and 4D, and brings each probe Pr into contact with each inspection point of the substrate 101. Thereby, each to-be-inspected point and the test
- the inspection processing unit 8 supplies an inspection current or voltage to each inspection point of the substrate 101 via each probe Pr of the inspection jig 3, and the voltage signal or current obtained from each probe Pr. Based on the signal, for example, inspection of the substrate 101 such as disconnection or short circuit of the circuit pattern is performed.
- the inspection processing unit 8 may measure the impedance to be inspected based on the voltage signal or current signal obtained from each probe Pr by supplying an alternating current or voltage to each inspection point. Good.
- FIG. 2 is a perspective view showing another example of the inspection unit 4 provided in the substrate inspection apparatus 1 shown in FIG.
- the inspection unit 4a shown in FIG. 2 is configured by incorporating an inspection jig 3 into a so-called IC socket 35.
- the inspection unit 4 a does not include a drive mechanism like the inspection unit 4, and is configured such that the probe Pr contacts an IC pin, bump, electrode, or the like attached to the IC socket 35.
- the inspection unit 4a instead of the inspection units 4U and 4D shown in FIG. 1, it is possible to configure the inspection object as, for example, a semiconductor element (IC) and configure the inspection apparatus as an IC inspection apparatus.
- IC semiconductor element
- FIG. 3 is a schematic diagram showing an example of the configuration of the inspection jig 3 including the support member 31 and the base plate 321 shown in FIG.
- the support member 31 shown in FIG. 3 is configured, for example, by laminating plate-like support plates 31a, 31b, and 31c.
- a support plate 31 a located on the upper side in FIG. 3 is disposed on the front end side of the support member 31, and a support plate 31 c located on the lower side in FIG. 3 is disposed on the rear end side of the support member 31.
- a plurality of through holes are formed so as to penetrate the support plates 31a, 31b, 31c.
- the support plates 31a and 31b are formed with insertion hole portions Ha each having an opening hole with a predetermined diameter.
- the support plate 31c is formed with a through hole made of a narrow portion Hb having a diameter smaller than that of the insertion hole portion Ha.
- a small-diameter portion Ha1 having a hole diameter smaller than the insertion hole portion Ha is located at a portion of the upper support plate 31a that is located on the surface facing the substrate 101 to be inspected, that is, the front end side portion of the support member 31. Is formed.
- the through hole is formed by communicating the small-diameter portion Ha1 and the insertion hole portion Ha of the support plate 31a, the insertion hole portion Ha of the support plate 31b, and the narrow portion Hb of the support plate 31c.
- the support member 31 is not limited to an example in which the plate-like support plates 31a, 31b, and 31c are stacked.
- the support member 31 is an integral member that has a small diameter portion Ha1, an insertion hole portion Ha, and a narrow portion Hb. It is good also as a structure provided with the hole. Further, the narrow narrow portion Hb and the small diameter portion Ha1 may be omitted, and the entire through hole may be an insertion hole portion Ha having a predetermined diameter.
- a configuration in which the support plate 31a and the support plate 31b are separated from each other for example, may be connected by a column or the like.
- a base plate 321 made of, for example, an insulating resin material is attached to the rear end side of the support plate 31c.
- the base plate 321 closes the rear end opening of the through hole, that is, the rear end surface of the narrow portion Hb.
- a wiring 34 is attached to the base plate 321 so as to penetrate the base plate 321 at a position facing the rear end side opening of the through hole.
- the front surface of the base plate 321 facing the support plate 31c and the end surface of the wiring 34 are set to be flush with each other.
- An end face of the wiring 34 is an electrode 34a.
- the probe Pr that is inserted into and attached to each through hole of the support member 31 has a cylindrical body Pa that is formed into a cylindrical shape from a conductive material, and a rod that is formed into a rod shape from a conductive material. Center conductors Pb and Pc are provided.
- FIG. 4 is a plan view showing a specific configuration of the probe
- FIG. 5 is an explanatory view showing the probe Pr disassembled into a cylindrical body Pa, a first center conductor Pb, and a second center conductor Pc.
- the cylindrical body Pa can be formed using, for example, a nickel or nickel alloy tube having an outer diameter of about 25 to 300 ⁇ m and an inner diameter of about 10 to 250 ⁇ m.
- the cylindrical body Pa can have an outer diameter of about 120 ⁇ m, an inner diameter of about 100 ⁇ m, and a total length of about 1700 ⁇ m.
- a plating layer such as gold plating may be applied to the inner periphery of the cylindrical body Pa, and the peripheral surface of the cylindrical body Pa may be insulated and coated as necessary.
- first and second spring portions Pe1 and Pe2 made of a spiral body extending in a spiral shape are configured.
- the cylindrical body Pa can be expanded and contracted in the axial direction by compressing and deforming the first and second spring portions Pe1 and Pe2.
- 1st, 2nd spring part Pe1, Pe2 which consists of a spiral body by etching the surrounding wall of the cylindrical body Pa, for example, and forming 1st, 2nd spiral groove Pg1, Pg2.
- the first and second spring portions Pe1 and Pe2 can also be provided by forming the first and second spiral grooves Pg1 and Pg2 on the peripheral wall of the cylindrical body Pa by electroforming, for example.
- the connecting portion Pf is constituted by a peripheral wall portion of the cylindrical body Pa remaining by providing the cylindrical body Pa with the non-formed portions of the first and second spiral grooves Pg1, Pg2.
- the connection part Pf is formed in the center part of the cylindrical body Pa over predetermined length.
- a portion of the first holding portion Pd1 is formed by a first slit Ph1 extending from the end of the first spiral groove Pg1 toward one end of the cylindrical body Pa and substantially parallel to the axial direction of the cylindrical body Pa. It is comprised by the surrounding wall of the cylindrical body Pa divided.
- the second holding portion Pd2 is formed by a second slit Ph2 extending from the end portion of the second spiral groove Pg2 toward the other end portion side of the cylindrical body Pa and substantially parallel to the axial direction of the cylindrical body Pa. It is comprised by the surrounding wall where a part of cylindrical body Pa was divided.
- the first and second holding portions Pd1 and Pd2 have a point-symmetric shape centered on an intermediate point in the length direction of the cylindrical body Pa. Therefore, only the specific structure of the second holding part Pd2 will be described below, and the description of the specific structure of the first holding part Pd1 will be omitted.
- FIG. 6A to 6C show a specific configuration of the second holding portion Pd2 provided at the end of the cylindrical body Pa.
- FIG. 6A is an enlarged plan view of an end portion of the cylindrical body Pa
- FIG. 6B is an end view of the second holding portion Pd2 as viewed from below in FIG. 6A.
- FIG. 6C is a plan view showing a state in which the second holding part Pd2 is developed.
- the developed shape of the second holding portion Pd2 includes a tip surface Pd21 corresponding to one side of the second slit Ph2, and an inclined surface Pd22 corresponding to one side of the second spiral groove Pg2.
- this trapezoidal body has a structure that is curved in an arc shape, so that a C-shaped retaining ring-shaped second holding portion Pd2 having a part of a predetermined width is partly cylindrical. It is comprised by the surrounding wall of Pa.
- the first center conductor Pb is configured to be insertable into the cylindrical body Pa by setting the outer diameter to be slightly smaller than the inner diameter of the cylindrical body Pa.
- the first rod-like main body Pb1 is set so that its entire length is longer than the formation range of the first spring portion Pe1 of the cylindrical body Pa. Thereby, when the first rod-shaped main body Pb1 is inserted into the cylindrical body Pa and the first central conductor Pb is assembled, the tip of the first rod-shaped main body Pb1 is inserted into the connecting portion Pf of the cylindrical body Pa. It is comprised so that it may be in a state.
- the press-fit portion Pb2 of the first rod-shaped main body Pb1 has an outer diameter larger than the inner diameter of the first holding portion Pd1 of the tubular body Pa when the first rod-shaped main body Pb1 is not inserted into the tubular body Pa. Is set. As a result, when the first rod-like main body Pb1 is inserted into the cylindrical body Pa and the first central conductor Pb is assembled, the press-fit portion Pb2 expands and displaces the first holding portion Pd1, thereby causing the first holding. It is press-fitted into the holding part Pd1.
- the press-fit part Pb2 of the first rod-shaped main body Pb1 is held by the first holding part Pd1 in a state where the first holding part Pd1 is crimped to the peripheral surface of the press-fit part Pb2, the first center conductor Pb Is maintained in the cylindrical body Pa.
- the outer diameter of the flange portion Pb3 of the first rod-shaped main body Pb1 is set larger than the inner diameter of the cylindrical body Pa and larger than the press-fit portion Pb2.
- the first rod-shaped main body Pb1 is configured so that the probe Pr can be supported by the support member 31 in a state where the cylindrical body Pa of the probe Pr is inserted into the insertion hole Ha of the support member 31.
- the flange portion Pb3 has an outer diameter smaller than the inner diameter of the insertion hole Ha. Furthermore, when the outer diameter of the flange portion Pb3 is set larger than the inner diameter of the small diameter portion Ha1 formed on the support plate 31a, the first central conductor Pb is supported when the probe Pr is supported by the support member 31. It is prevented from falling off from the support member 31.
- the connecting portion Pb4 of the first central conductor Pb is configured to be able to be inserted into the small diameter portion Ha1 by setting the outer diameter to be smaller than the inner diameter of the small diameter portion Ha1 formed in the support plate 31a. Further, with the probe Pr supported by the support member 31, the entire length of the connection portion Pb4 is such that the end of the connection portion Pb4 protrudes outward from the small diameter portion Ha1 of the support plate 31a. However, it is set larger than the length of the small diameter part Ha1.
- a tapered portion Pb5 having a tapered shape is formed at the end of the connection portion Pb4 so that the tip surface of the Pb5 comes into contact with a point to be inspected (bump BP) when inspecting the substrate 101 or the like described later. It has become.
- the second central conductor Pc includes the second rod-shaped main body Pc1, the press-fit portion Pc2, and the flange portion Pc3 having the same configuration as the first rod-shaped main body Pb1, the press-fit portion Pb2, and the flange portion Pb3 of the first center conductor Pb. have.
- the front end surface of the connection part Pc4 provided in a row with the flange part Pc3 is configured to come into contact with an electrode 34a provided on the base plate 321 at the time of inspection to be described later.
- connection portion Pc4 is inserted into the narrow portion Hb because its outer diameter is smaller than the inner diameter of the narrow portion Hb formed on the support plate 31c. Further, with the probe Pr supported by the support member 31, the entire length of the connection portion Pc4 is such that the end of the connection portion Pc4 protrudes outward from the narrow portion Hb of the support plate 31c. Is set larger than the thickness of the support plate 31c. Furthermore, the front end surface of the connection part Pc4 is formed substantially flat.
- the second rod-shaped main body Pc1 of the second central conductor Pc is set to have a length that is longer than the formation range of the second spring portion Pe2 of the cylindrical body Pa.
- first and second center conductors Pb and Pc are assembled to the cylindrical body Pa, as shown in FIG. 4, between the front end surface of the first bar-shaped main body Pb1 and the front end surface of the second bar-shaped main body Pc1.
- the overall lengths of the first rod-shaped main body Pb1 and the second rod-shaped main body Pc1 are set so that a predetermined gap KG is formed.
- the first rod shape The total length of the first rod-shaped main body Pb1 and the second rod-shaped main body Pc1 is set so that the distal end surface of the main body Pb1 and the distal end surface of the second rod-shaped main body Pc1 are maintained apart from each other.
- the length of the main body of the probe Pr that is inserted and supported in the insertion holes Ha and Ha formed in the support plates 31a and 31b that is, the total length of the cylindrical body Pa, and the first and second center conductors Pb and Pc.
- the length ⁇ obtained by adding the plate thicknesses of the flange portions Pb3 and Pc3 is a value obtained by adding the total length of the insertion hole portion Ha formed in the support plate 31a and the total length of the insertion hole portion Ha formed in the support plate 31b. It is preferable to set a value equal to the insertion hole length ⁇ .
- the cylindrical body has a length corresponding to the difference dimension ( ⁇ ) between them. It is necessary to attach the probe Pr to the support member 31 in a state where the first and second spring portions Pe1 and Pe2 of Pa are compressed and deformed. In this configuration, there is an advantage that the probe Pr can be prevented from being scattered and the probe Pr can be stably held in the insertion holes Ha and Ha of the support plates 31a and 31b, but the probe Pr is attached to the support member 31. There is a drawback that the work becomes complicated.
- the body portion length ⁇ of the probe Pr is smaller than the insertion hole length ⁇ of the support plates 31a and 31b, the first and second spring portions Pe1 and Pe2 of the cylindrical body Pa are compressed and deformed.
- the probe Pr can be easily attached to the support member 31 without making it.
- the lengths of the body Pr of the probe Pr and the insertion hole length ⁇ of the support plates 31a and 31b are set to be equal to each other, the length of the probe Pr with respect to the support member 31 is set. In the state where the probe Pr is attached to the support member 31, it is possible to prevent the probe Pr from becoming uneven.
- FIG. 7 is a schematic cross-sectional view showing an example of the configuration of the inspection jig 3, and shows a state where the base plate 321 is attached to the support plate 31 c of the support member 31.
- connection portion Pc4 of the second central conductor Pc slightly protrudes from the support plate 31c as shown in FIG.
- the rear end portion of the second central conductor Pc that is, the front end surface of the connection portion Pc 4 is the base plate 321. In contact with the electrode 34 a and pressed against the front end portion side of the support member 31.
- the first spring portion Pe1 and the second spring portion Pe2 of the cylindrical body Pa are compressed and elastically deformed, so that the connection portion Pc4 resists the urging force of the first and second spring portions Pe1 and Pe2.
- the protruding portion is pushed into the support member 31.
- the rear end portion of the probe Pr that is, the rear end surface of the connection portion Pc4 is pressed against the electrode 34a according to the urging force of the first and second spring portions Pe1 and Pe2, so that the rear end portion of the probe Pr
- the electrode 34a is maintained in a stable conductive contact state.
- the front end surface of the connecting portion Pc4 is formed to be substantially flat and the electrode 34a is also formed to be substantially flat, when the two are brought into pressure contact, the flat surfaces come into contact with each other. As a result, the contact area between them increases, and the contact resistance between the electrode 34a and the probe Pr is reduced.
- the rear end surface of the connecting portion Pc4 is not necessarily limited to a flat shape, and may be, for example, a crown shape, a hemispherical shape, a conical shape or a truncated cone shape, and various shapes. can do.
- FIG. 8 is a schematic cross-sectional view showing an inspection state in which the front end portion of the probe Pr is pressed against the bump BP of the substrate 101 to be inspected.
- connection portion Pb4 of the one central conductor Pb comes into contact with the bump BP of the substrate 101 and is pressed toward the rear end portion side of the support member 31.
- the first spring portion Pe1 and the second spring portion Pe2 of the cylindrical body Pa are further compressed and elastically deformed, thereby resisting the biasing force of the first and second spring portions Pe1 and Pe2.
- the protruding portion of the portion Pb4 is pushed into the rear end portion side of the support member 31.
- the front end portion of the probe Pr that is, the front end surface of the connection portion Pb4 is pressed against the bump BP of the substrate 101, and the front end portion of the probe Pr
- the inspected point (bump BP) of the substrate 101 is held in a stable conductive contact state.
- the first and second center conductors Pb and Pc formed in a cylindrical shape with a cylindrical body Pa formed of a conductive material and a rod-shaped material with a conductive material are provided.
- the second central conductors Pb and Pc have first and second rod-like main bodies Pb1 and Pc1 inserted through the cylindrical body Pa, and the cylindrical body Pa extends along the circumferential surface of the cylindrical body Pa.
- the first and second spring portions Pe1 and Pe2 formed of a spiral body formed by providing the first and second spiral grooves Pg1 and Pg2, and the base end portions of the first and second rod-like main bodies Pb1 and Pc1
- the first and second holding parts Pd1 and Pd2 that are fitted and hold the first and second holding parts Pd1 and Pd2 are provided, and the first and second holding parts Pd1 and Pd2 are provided at the end of the cylindrical body Pa.
- the probe Pr (contact terminal) used for the inspection of the substrate 101 and the like can be manufactured easily and appropriately, and the contact pressure of the probe Pr with respect to the inspection point of the substrate 101 and the electrode 34a of the wiring 34 is set to an appropriate value. be able to.
- the slit Ph1 is expanded and displaced, thereby the first holding portion Pd1 of the cylindrical body Pa.
- the press-fit portion Pb2 of the first center conductor Pb can be easily press-fitted into the first holding portion Pd1.
- the 1st holding part Pd1 can be crimped
- the second holding of the cylindrical body Pa is achieved by expanding the slit Ph2.
- the portion Pd2 can be elastically deformed, and the press-fit portion Pc2 of the second center conductor Pc can be easily press-fitted into the second holding portion Pd2.
- the 2nd holding part Pd2 can be crimped
- the press-fit portions Pb2 and Pc2 provided at the base end portions of the first and second rod-like main bodies Pb1 and Pc1 are omitted, and the first and second holding portions Pd1 and Pd2 of the cylindrical body Pa are used as the first and second It is also possible to adopt a configuration in which the base end portions of the two-bar shaped main bodies Pb1 and Pc1 are directly held.
- the outer diameters of the first and second rod-shaped main bodies Pb1 and Pc1 are set smaller than the inner diameters of the first and second holding portions Pd1 and Pd2 of the cylindrical body Pa as described above,
- the first and second center conductors Pb and Pc can be easily assembled by smoothly inserting the second rod-like main bodies Pb1 and Pc1 into the cylindrical body Pa.
- the press-fit portions Pb2 and Pc2 having outer diameters larger than the inner diameters of the first and second holding portions Pd1 and Pd2 in a state where the first rod-shaped main body Pb1 is not inserted into the cylindrical body Pa
- the first and second holding portions Pd1 and Pd2 of the cylindrical body Pa are crimped to the peripheral surfaces of the press-fit portions Pb2 and Pc2.
- the press-fit portions Pb2 and Pc2 can be stably held by the first and second holding portions Pd1 and Pd2.
- the flange portions Pb3 and Pc3 of the first and second central conductors Pb and Pc can be omitted.
- the first and second rod-like main bodies Pb1 are provided.
- Pc1 is inserted into the cylindrical body Pa and the first and second center conductors Pb, Pc can be positioned by the flanges Pb3, Pc3 when the first and second center conductors Pb, Pc are assembled. The assembling work can be easily performed.
- the first slit Ph1 constituting the first holding part Pd1 is connected to the end of the first spiral groove Pg1 constituting the first spring part Pe1, and the axial direction of the cylindrical body Pa
- the second slit Ph2 constituting the second holding part Pd2 is connected to the end of the second spiral groove Pg2 constituting the second spring part Pe2, and the shaft of the cylindrical body Pa is formed.
- first and second slits Ph1 and Ph2 are replaced with the first and second slits Ph1 and Ph2 instead of the above-described first embodiment in which the first and second slits Ph1 and Ph2 extend substantially parallel to the axial direction of the cylindrical body Pa.
- the shape may be inclined at a predetermined angle with the axial direction of Pa.
- the second central conductor Pc having the two-rod body Pc1 is provided and the first and second holding portions Pd1, Pd2 are provided at both ends of the cylindrical body Pa.
- a structure in which a single central conductor and a single holding portion are provided may be employed.
- the first center conductor Pb and the second center conductor Pc are formed separately, and the first and second housings provided at both ends of the cylindrical body Pa.
- the holding portions Pd1 and Pd2 are configured to hold the base ends of the first and second rod-like main bodies Pb1 and Pc1, respectively, the first and second are compared with the case where a single central conductor is provided.
- the first and second rod-shaped main bodies Pb1 and Pc1 constituting the central conductors Pb and Pc are formed to have short overall lengths, so that the first and second central conductors Pb and Pb, The work of assembling Pc can be facilitated.
- first spring portion Pe1 connected to the first holding portion Pd1, the second spring portion Pe2 connected to the second holding portion Pd2, and the first and second spring portions thereof.
- Cylindrical connecting portions Pf that connect Pe1 and Pe2 to each other are provided in the cylindrical body Pa, and the first and second rod-shaped main bodies Pb1 and Pc1 of the first central conductors Pb and Pc are respectively connected to the distal ends thereof.
- the first and second center conductors Pb and Pc are connected in parallel to the first and second spring portions Pe1 and Pe2.
- the current flowing through the probe Pr has a coil shape, a large inductance, and a long current path. Therefore, the current flowing through the probe Pr is difficult to flow through the first and second spring portions Pe1, Pe2 having a large resistance value. Since the path is short, it tends to flow to the first and second center conductors Pb and Pc having a small resistance value.
- the current flowing through the first and second spring portions Pe1 and Pe2 having a large inductance and resistance value can be reduced when inspecting the substrate 101 and the like using the probe Pr, so the first and second spring portions Pe1. , Pe2 can be suppressed from increasing, and the inspection accuracy using the probe Pr can be effectively improved.
- the connecting portion Pf may be omitted, and a spring portion made of a spiral body may be provided on substantially the entire cylindrical body Pa excluding the installation portions of the first and second holding portions Pd1 and Pd2.
- a spring portion made of a spiral body may be provided on substantially the entire cylindrical body Pa excluding the installation portions of the first and second holding portions Pd1 and Pd2.
- the tip portions of the first and second rod-like main bodies Pb1 and Pc1 are positioned in the connecting portion Pf, respectively, and the first and second rod-like main bodies are connected to the connecting portion Pf.
- the tip portions of Pb1 and Pc1 are configured to contact each other, the first center conductor is reduced while reducing the current flowing through the first and second spring portions Pe1 and Pe2 during the inspection of the substrate 101 and the like using the probe Pr.
- Pb and the second central conductor Pc can be electrically connected. As a result, it is possible to reduce the increase in impedance and the generation of eddy currents in the first and second spring portions Pe1, Pe2.
- the first and second rod-shaped main bodies Pb1 and Pc1 are arranged so that the tip portion reaches the connecting portion Pf of the cylindrical body Pa. Since the overall length is set, the first and second rod-shaped main bodies Pb1 and Pc1 can reinforce substantially the entire cylindrical body Pa, and thus there is an advantage that the mechanical strength of the probe Pr can be improved.
- the tip surfaces of the first and second rod-shaped main bodies Pb1 and Pc1 are in contact with each other. If it contacts, the compression deformation of 1st, 2nd spring part Pe1, Pe2 will be inhibited at that time. Therefore, even when the first and second spring portions Pe1 and Pe2 are compressed and deformed during the inspection of the substrate 101 and the like using the probe Pr, the distance between the tip surfaces of the first and second rod-shaped main bodies Pb1 and Pc1 It is preferable to set the total length of the first and second rod-like main bodies Pb1 and Pc1 so that they are in a separated state. (Second embodiment)
- FIG. 9 is a schematic plan view showing the configuration of the probe (contact terminal) PR according to the second embodiment of the present invention.
- FIG. 10 is an explanatory diagram showing the probe PR disassembled into a cylindrical body PA and a central conductor PB.
- FIG. 11 shows a state in which the probe PR is assembled to the support member 31 and the base plate 321 is attached to the support member 31.
- the probe PR has a cylindrical body PA formed in a cylindrical shape from a conductive material and a single central conductor PB formed in a rod shape from a conductive material.
- segmented into the 1 center conductor and the 2nd center conductor, and the point by which the holding part is not provided in the rear-end side part PI of the cylindrical body PA differ from 1st embodiment.
- the full length of the cylindrical body PA is formed longer than Pa of the first embodiment.
- the central conductor PB includes a rod-shaped main body PB1 configured to be insertable into the cylindrical body PA, a press-fit portion PB2 provided at a base end portion thereof, a flange portion PB3 provided continuously to the press-fit portion PB2, Except for the point that the entire length of the rod-like main body PB1 is formed longer than that of the first rod-like main body Pb1 of the first embodiment.
- the configuration is substantially the same as that of the first center conductor Pb.
- the rod-shaped main body PB1 of the center conductor PB is inserted into the cylindrical body PA, and the press-fit portion PB2 provided at the base end portion is held at one end portion of the cylindrical body PA.
- the probe PR supported in a state in which the connecting portion PB4 of the center conductor PB protrudes to the front end side of the cylindrical body PA is configured by being press-fitted into the portion PD and held.
- the contact terminal made of the probe PR is inserted into the insertion holes Ha and Ha formed in the support member 31 and assembled.
- the connection portion PB4 provided on the front end side portion of the probe PR is inserted into the small diameter portion Ha1 provided on the support plate 31a, and the tip portion thereof is outside the support member 31 from the opening portion of the small diameter portion Ha1.
- the probe PR is assembled to the support member 31 in a state where the probe PR protrudes in the direction and the rear end side portion PI of the cylindrical body PA is brought into contact with the electrode 34 a provided on the base plate 321.
- FIG. 12 is a schematic cross-sectional view showing an example of the configuration of the probe (contact terminal) PRa according to the third embodiment of the present invention.
- the probe PRa includes a cylindrical body PAa configured substantially the same as the cylindrical body Pa of the first embodiment except that slits Ph1 and Ph2 are not formed at both ends, and the first and second embodiments of the first embodiment.
- First and second center conductors PBa and PCa configured similarly to the second center conductors Pb and Pc are provided.
- the first central conductor PBa has a first rod-like main body PBa1 configured in the same manner as the first rod-like main body Pb1 of the first embodiment, a press-fit portion PBa2 provided at the base end portion thereof, and the press-fit portion PBa2.
- a flange portion PBa3 provided continuously and a connection portion PBa4 provided continuously to the flange portion PBa3 are provided.
- the second central conductor PCa includes a second rod-shaped main body PCa1 configured in the same manner as the second rod-shaped main body Pc1 of the first embodiment, a press-fit portion PCa2 provided at the base end portion thereof, and the press-fit portion PCa2.
- a collar part PCa3 provided continuously and a connection part PCa4 provided continuously to the collar part PCa3 are provided.
- the tubular body PAa includes first and second spring portions PEa1 and PEa2 formed by the first and second spiral grooves PGa1 and PGa2, and a connecting portion PFa provided between the spring portions PEa1 and PEa2. is doing. Further, at both ends of the cylindrical body PAa, there are provided holding portions made of peripheral walls thereof, that is, cylindrical first and second holding portions PDa1 and PDa2 without the above-described dividing portions.
- the above-mentioned press-fit portions PBa2 and PCa2 are omitted, and the first and second rod-like main bodies PBa1 and PCa1 are inserted into the cylindrical body PAa, respectively, and the base end portion and the end portion of the cylindrical body PAa, that is, the first
- the probe PRa may be configured by connecting the first and second holding portions PDa1 and PDa2 by other connection means such as welding or caulking.
- the total length of the first rod-shaped main body PBa1 and the second rod-shaped main body PCa1 is set so that a predetermined gap KG is formed.
- the probe PRa including the cylindrical body PAa formed in a cylindrical shape from a conductive material, and the first and second central conductors PBa and PCa formed in a rod shape from a conductive material.
- the first central conductor PBa has a first rod-like main body PBa1 inserted into one end side of the cylindrical body PAa, and the second central conductor PCa is inserted into the other end side of the cylindrical body PAa.
- a first holding portion PDa1 that has a second rod-shaped main body PCa1 and the tubular body PAa holds the proximal end portion of the first rod-shaped main body PBa1 on one end side thereof, and the other end side of the tubular body PAa
- the second holding portion PDa2 for holding the base end portion of the second rod-shaped main body PCa1, the first spring portion PEa1 connected to the first holding portion PDa1, and the second holding portion PDa2.
- Second spring part PEa2 and the first and second spring parts PEa1 And the first and second central conductors PBa and PCa are connected to the first and second rod-like main bodies PBa1 and PCa1 at the tip ends of the cylindrical body PAa.
- the first and second rod-shaped main bodies PBa1 so that the tip surfaces of the first and second rod-shaped main bodies PBa1, PCa1 are maintained facing each other across the gap KG.
- the first and second central conductors PBa and PCa constituting the first and second central conductors PBa are compared with the case where a single central conductor PB is provided as in the second embodiment described above. Since the total length of the two-bar main bodies PBa1 and PCa1 can be shortened, the operation of assembling the first and second center conductors PBa and PCa by inserting them into both ends of the cylindrical body PAa can be facilitated.
- the first and second rod-like main bodies PBa1 and PCa1 are brought into contact with the connecting portion PFa provided on the cylindrical body PAa, thereby making the first The first center conductor PBa and the second center conductor PCa can be electrically connected while reducing the current flowing through the second spring portions PEa1 and PEa2.
- the first and second rod-shaped main bodies PBa1 and PCa1 are arranged so that the distal end reaches the connecting portion PFa of the cylindrical body PAa. Since the overall length is set, it is possible to reinforce substantially the entire cylindrical body Pa, which has the advantage that the mechanical strength of the probe PRa can be improved.
- a contact terminal includes a cylindrical body formed in a cylindrical shape from a conductive material and a central conductor formed in a rod shape from a conductive material, and the central conductor is A spring portion comprising a rod-shaped body inserted through the tube-shaped body, the tube-shaped body being formed by providing a spiral groove along the peripheral surface of the tube-shaped body; A holding portion that is externally fitted to the base end portion of the rod-shaped main body and holds the rod-shaped main body, and the holding portion extends from the end of the spiral groove constituting the spring portion to the shaft of the cylindrical body It consists of the surrounding wall partly parted in the circumferential direction of the said cylindrical body by the slit extended in a direction.
- the rod-shaped main body of the central conductor is set to have an outer diameter smaller than an inner diameter of the holding portion of the cylindrical body, and the outer diameter of the base end portion of the rod-shaped main body is the rod-shaped main body. It is preferable that a press-fit portion that is set larger than the inner diameter of the holding portion of the cylindrical body in a state where the main body is not inserted is provided.
- the rod-shaped main body when the central conductor is assembled to the cylindrical body, the rod-shaped main body can be smoothly inserted into the cylindrical body to facilitate the assembly of the central conductor.
- the holding portion of the cylindrical body can be pressure-bonded to the peripheral surface of the press-fit portion provided in the center conductor, and the press-fit portion can be stably held by the hold portion.
- the slit may be configured to be connected to an end portion of the spiral groove constituting the spring portion and extend in the axial direction of the cylindrical body.
- the said center conductor has the 1st center conductor which has the 1st rod-shaped main body inserted in the one end part side of the said cylindrical body, and the 2nd rod-shaped main body inserted in the other end part side of the said cylindrical body.
- a second center conductor, and the cylindrical body includes a first holding portion that holds the base end portion of the first rod-shaped main body on one end side, and the other end portion side of the cylindrical body. It is preferable that the second holding portion for holding the proximal end portion of the second rod-shaped main body is provided.
- the first and second rod-shaped main bodies constituting the first and second center conductors are shortened so that they are connected to both ends of the cylindrical body.
- the cylindrical body includes a first spring portion provided continuously with the first holding portion, a second spring portion provided continuously with the second holding portion, and the first and second springs.
- a cylindrical connecting part that connects the parts to each other, and the first and second center conductors are inserted into the connecting part of the cylindrical body, respectively, at the tip ends of the first and second rod-like bodies.
- the lengths of the first and second rod-shaped main bodies are set such that the front end surfaces of both the rod-shaped main bodies are maintained facing each other with a gap therebetween.
- the first and second spring portions of the cylindrical body since the current easily flows from the first center conductor to the second center conductor via the connecting portion when inspecting the substrate using the contact terminal, the first and second spring portions of the cylindrical body.
- the first central conductor and the second central conductor can be electrically connected via the connecting portion while reducing the current flowing through the first and second conductors. For this reason, the increase in the impedance in the spring part and the generation of eddy current can be reduced. As a result, the accuracy of the inspection using the contact terminal can be effectively improved.
- the first and second rod-shaped main bodies in the state where the central conductor is assembled to the cylindrical body, the first and second rod-shaped main bodies can reinforce substantially the entire cylindrical body, so that the mechanical strength of the contact terminal can be sufficiently secured. is there.
- a contact terminal includes a cylindrical body formed in a cylindrical shape from a conductive material, and a central conductor formed in a rod shape from a conductive material, and the central conductor is A first central conductor having a first rod-shaped main body inserted on one end side of the cylindrical body, and a second central conductor having a second rod-shaped main body inserted on the other end side of the cylindrical body.
- a first holding portion that holds the proximal end portion of the first rod-shaped main body on one end side thereof, and a proximal end of the second rod-shaped main body on the other end portion side of the cylindrical body.
- a second holding part for holding the part, a first spring part connected to the first holding part, a second spring part connected to the second holding part, A cylindrical connecting portion for connecting the second spring portions to each other, and the first and second central conductors are arranged so that the front ends of the first and second rod-shaped main bodies are in front of each other.
- the total lengths of the first and second rod-shaped main bodies are set so that they are inserted into the connecting portion of the cylindrical body and the tip surfaces of the two rod-shaped main bodies are maintained facing each other with a gap therebetween. .
- the overall length of the first and second rod-shaped main bodies constituting the center conductor can be shortened compared to a contact terminal having a single center conductor, this can be applied to both ends of the cylindrical body.
- the work of inserting and assembling the first and second center conductors can be facilitated.
- the total length of the first and second rod-shaped main bodies is set so that the tip portion reaches the connecting portion of the cylindrical body, thereby Since substantially the entire cylindrical body can be reinforced, there is an advantage that the mechanical strength of the probe can be improved.
- the first and second spring portions are brought into contact with the connecting portions provided on the cylindrical body by contacting the tip portions of the first and second rod-shaped main bodies, respectively.
- the first center conductor and the second center conductor can be electrically connected while reducing the flowing current. Therefore, an increase in impedance and generation of eddy current in the spring portion can be reduced. As a result, the inspection accuracy using the contact terminals can be effectively improved.
- an inspection jig includes the above-described contact terminal and a support member that supports the contact terminal.
- an inspection apparatus is configured to inspect the inspection object based on the above-described inspection jig and an electrical signal obtained by bringing the contact terminal into contact with an inspection point provided on the inspection object. And an inspection processing unit to be performed.
- the contact terminal, inspection jig, and inspection apparatus having such a configuration are easy to manufacture appropriately, and it is easy to set the contact pressure of the contact terminal with respect to the electrode and the inspection object to an appropriate value. is there.
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Abstract
Description
(第一実施形態)
(第二実施形態)
(第三実施形態)
3,3U,3D 検査治具
KG 間隙
Pa,PA,PAa 筒状体
Pb,PBa 第一中心導体
Pc,PCa 第二中心導体
PB 中心導体
Pb1,PBa1 第一棒状本体
Pc1,PCa1 第二棒状本体
PB1 棒状本体
Pb2,Pc2,PB2,PBa2,PCa2 圧入部
Pb3,Pc3,PB3,PBa3,PCa3 鍔部
Pb4,Pc4,PB4,PBa4,PCa4 接続部
Pd1,PDa1 第一抱持部
Pd2,PDa2 第二抱持部
PD 抱持部
Pe1,PE1,PEa1 第一ばね部
Pe2,PE2,PEa2 第二ばね部
Pf,PF,PFa 連結部
Pg1,PG1,PGa1 第一螺旋溝
Pg2,PG2,PGa2 第二螺旋溝
Ph1 第一スリット
Ph2 第二スリット
PH スリット
Pr,PR,PRa プローブ
Claims (8)
- 導電性を有する素材により筒状に形成された筒状体と、
導電性を有する素材により棒状に形成された中心導体とを備え、
当該中心導体は、前記筒状体に挿通される棒状本体を有し、
前記筒状体は、
当該筒状体の周面に沿って螺旋溝が設けられることにより構成された螺旋状体からなるばね部と、
前記棒状本体の基端部に外嵌されてこれを抱持する抱持部とを有し、
当該抱持部は、前記筒状体の端部に設けられたスリットにより、前記筒状体の周方向に一部が分断された周壁からなっている接触端子。 - 前記中心導体の前記棒状本体は、その外径が前記筒状体の前記抱持部の内径よりも小さく設定され、
前記棒状本体の前記基端部には、その外径が、前記棒状本体が挿通されていない状態の前記筒状体の抱持部の内径よりも大きく設定された圧入部が設けられている請求項1記載の接触端子。 - 前記スリットは、前記ばね部を構成する前記螺旋溝の端部に連設されて前記筒状体の軸方向に延びている請求項1または2に記載の接触端子。
- 前記中心導体は、前記筒状体の一端部側に挿入される第一棒状本体を有する第一中心導体と、前記筒状体の他端部側に挿入される第二棒状本体を有する第二中心導体とを備え、
前記筒状体には、その一端部側において前記第一棒状本体の基端部を抱持する第一抱持部と、前記筒状体の他端部側において前記第二棒状本体の基端部を抱持する第二抱持部とが設けられている請求項1~3のいずれか1項に記載の接触端子。 - 前記筒状体には、前記第一抱持部に連設された第一ばね部と、前記第二抱持部に連設された第二ばね部と、当該第一,第二ばね部を互いに連結する筒状の連結部とが設けられ、
前記第一,第二中心導体は、前記第一,第二棒状本体の先端部がそれぞれ前記筒状体の前記連結部内に挿入されるとともに、両棒状本体の先端面が間隙を隔てて相対向した状態に維持されるように、前記第一,第二棒状本体の全長が設定されている請求項4記載の接触端子。 - 導電性を有する素材により筒状に形成された筒状体と、
導電性を有する素材により棒状に形成された第一,第二中心導体とを備え、
当該第一中心導体は、前記筒状体の一端部側に挿入される第一棒状本体を有し、
かつ前記第二中心導体は、前記筒状体の他端部側に挿入される第二棒状本体を有し、
前記筒状体は、
その一端部側において前記第一棒状本体の基端部を抱持する第一抱持部と、
筒状体の他端部側において前記第二棒状本体の基端部を抱持する第二抱持部と、
前記第一抱持部に連設された第一ばね部と、
前記第二抱持部に連設された第二ばね部と、
当該第一,第二ばね部を互いに連結する筒状の連結部とを備え、
前記第一,第二中心導体は、前記第一,第二棒状本体の先端部がそれぞれ前記筒状体の前記連結部内に挿入されるとともに、両棒状本体の先端面が間隙を隔てて相対向した状態に維持されるように、前記第一,第二棒状本体の全長が設定されている接触端子。 - 請求項1~6のいずれか1項に記載の接触端子と、
前記接触端子を支持する支持部材とを備える検査治具。 - 請求項7記載の検査治具と、
前記接触端子を検査対象に設けられた被検査点に接触させることにより得られる電気信号に基づき、前記検査対象の検査を行う検査処理部とを備える検査装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
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US16/464,718 US10656179B2 (en) | 2016-11-30 | 2017-11-28 | Contact terminal, inspection jig, and inspection device |
JP2018528807A JP6432017B2 (ja) | 2016-11-30 | 2017-11-28 | 接触端子、検査治具、及び検査装置 |
EP17875451.1A EP3550310B1 (en) | 2016-11-30 | 2017-11-28 | Contact terminal, inspection jig, and inspection device |
CN201780073901.5A CN110036300B (zh) | 2016-11-30 | 2017-11-28 | 接触端子、检查夹具和检查装置 |
KR1020197015582A KR101996789B1 (ko) | 2016-11-30 | 2017-11-28 | 접촉 단자, 검사 지그 및 검사 장치 |
SG11201903814UA SG11201903814UA (en) | 2016-11-30 | 2017-11-28 | Contact terminal, inspection jig, and inspection device |
Applications Claiming Priority (2)
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EP (1) | EP3550310B1 (ja) |
JP (1) | JP6432017B2 (ja) |
KR (1) | KR101996789B1 (ja) |
CN (1) | CN110036300B (ja) |
MY (1) | MY177005A (ja) |
SG (1) | SG11201903814UA (ja) |
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Also Published As
Publication number | Publication date |
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KR20190065460A (ko) | 2019-06-11 |
TW201821807A (zh) | 2018-06-16 |
JPWO2018101232A1 (ja) | 2018-11-29 |
EP3550310A1 (en) | 2019-10-09 |
TWI693406B (zh) | 2020-05-11 |
CN110036300B (zh) | 2020-03-06 |
EP3550310A4 (en) | 2020-08-19 |
EP3550310B1 (en) | 2021-10-20 |
US20190346485A1 (en) | 2019-11-14 |
MY177005A (en) | 2020-09-01 |
CN110036300A (zh) | 2019-07-19 |
KR101996789B1 (ko) | 2019-07-04 |
JP6432017B2 (ja) | 2018-12-05 |
SG11201903814UA (en) | 2019-05-30 |
US10656179B2 (en) | 2020-05-19 |
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