TWI556344B - Article transport facility - Google Patents

Description

Item transport equipment Field of invention

The present invention relates to an article transporting apparatus which is provided with a top transporting vehicle and a middle scaffolding, and the top transporting vehicle is free to guide along a traveling rail disposed on the top side along the traveling path. a person who travels and has a grip portion and is freely movable up and down to support the article, and can move the article freely between the article receiving and receiving portion provided on the floor side, and the intermediate scaffolding is disposed on the article Above the part and below the top of the transport car, the item that is transported relative to the article receiving and receiving part can be temporarily placed.

Background of the invention

In the article transporting apparatus, the top transporting vehicle moves along the traveling path while the article is held by the gripping portion, and the articles carried into the article feeding and receiving portion or the articles carried out from the article receiving and receiving portion are transported to the plurality of articles. The items are supplied between the departments. The top transporting vehicle is generally provided in plurality, and each of the top transporting vehicles is stopped by the controller that manages the transporting operation, and is placed at the top of the article receiving and receiving section designated as the transport destination, or the gripping section. Lifting and moving items between the goods receiving and receiving parts.

When the top transport vehicle transports the article to the article receiving and receiving unit as the destination of the transfer, and the article receiving and receiving portion cannot accept the article, the subsequent top transport car must stand by until the article supply and receiving portion becomes an acceptable item. Became the reason for the top of the truck. Therefore, to date, in comparison with items An intermediate scaffolding is provided above the supply and receiving portion and below the top transporting vehicle, and an intermediate scaffold capable of temporarily placing the object relative to the article for transfer by the receiving portion is disposed, and the article is temporarily placed on the intermediate scaffold to prevent the top transporting the traffic jam. Further, by providing an intermediate scaffolding around the article receiving and receiving portion, it is possible to quickly carry in and carry out the article receiving and receiving portion when necessary.

A conventional example of the article transporting apparatus provided with the intermediate scaffolding is provided with a linear first path passing through the stop position for the receiving and receiving portion disposed directly above the article receiving and receiving portion, and being set in parallel with the first path. The linear second path at different positions in the lateral direction and the intermediate scaffold are disposed only below the second path. (For example, refer to FIG. 2 of Patent Document 1.)

In the article transporting apparatus of the above-described conventional example, the top transporting vehicle that travels on the first path has a gripping portion that is slidable in the lateral direction of the first path and the second path, and thus travels to the top of the first path. The transport vehicle can perform both the transfer of the article receiving and receiving portion directly below the first path and the transfer of the article to the intermediate scaffold disposed at different positions in the lateral direction of the first path, and proceed to the second The top of the path transports the transfer only to the intermediate scaffold located directly below the second path.

Advanced technical literature Patent literature

Patent Document 1: Japanese Laid-Open Patent Publication No. 2006-224944

Invention

In the article transporting device of the above conventional example, when temporarily placed in the middle When the article of the scaffolding is carried into the article receiving and receiving portion, the top transporting vehicle that has not held the article travels along the first path, and travels to the stop position for the receiving and receiving portion set directly above the article receiving and receiving portion, and the holding portion is held. The items of the intermediate scaffold are transferred to the article feeding and receiving portion by sliding and lifting movement. In the same manner, when the article is carried out from the article receiving and receiving unit, the top transporting vehicle that has not held the article travels along the first path to the stop position for the receiving and receiving portion that is set directly above the article receiving and receiving portion. The grip portion is moved up and down to carry the article out of the article supply and receiving portion. In addition, when the article carried out from the article supply/receiving section is temporarily placed in the intermediate scaffold, the gripping portion is slid and moved up and the article is temporarily placed while maintaining the stop position of the receiving and receiving portion in the first path. In the middle of the scaffolding.

In this way, the article is carried into the article supply and delivery unit, and the article is carried out from the article supply and receiving portion, and the article is temporarily placed in the intermediate scaffolding, and the article temporarily placed in the intermediate scaffold is carried into the article receiving and receiving portion. Since all the vehicles are transported by the top transport vehicle that travels on the first route, the work load on the top transport vehicle that travels on the first route becomes heavy. Therefore, the bottom conveyance vehicle that travels on the first path has a concentrated operation and a traffic jam.

Moreover, since the intermediate scaffold is present only directly below the second path, the number of items that can be temporarily placed is small, and even if the intermediate scaffold is added, the number of items that can be temporarily placed is increased, and the part is further away from the article supply and receiving unit in the traveling direction. The position of the intermediate scaffolding is increased, and the transport distance of the intermediate scaffolding article is increased when the article is transported to the article receiving and receiving section. Therefore, there is a fear that the item cannot be quickly moved into the article for the recipient.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an article that can be quickly carried out and carried into an article receiving and receiving portion, and can be prevented. The top transport vehicle of the first route generates the cargo transport equipment for the traffic jam.

In order to achieve the above object, the article transporting apparatus of the present invention is provided with a top transporting vehicle that freely travels along the traveling path in a state of guiding and supporting the traveling rail disposed on the top side, and has a grip for supporting the article. And can be freely lifted and lowered, and can be freely transferred between the article receiving and receiving portions provided on the floor side; and the intermediate scaffolding is disposed above the above-mentioned article receiving and receiving portion and below the top transporting vehicle In the article transporting apparatus as described above, the travel path is provided with a linear first path, which is set in the article receiving and receiving section. And a linear second path is parallel to the first path and is set at a different position in a lateral direction of the first path, and the intermediate scaffold is provided with: The first path side intermediate scaffold is located directly below the first path, and is different from the article receiving and receiving portion in the traveling direction of the top transport vehicle; and the second path side intermediate scaffold Is located directly below the second path, and is provided with an intermediate transfer device having a gripping portion for supporting the transfer device of the article and being freely movable up and down in the up and down direction, and The first path and the second path are slidable in the lateral direction, and are freely interposed between the first path side intermediate scaffold, the second path side intermediate scaffold, and the article receiving and receiving unit. Transfer item The intermediate transfer device is provided with at least one of a first path side intermediate transfer device or a second path side intermediate transfer device, and the first path side intermediate transfer device is provided to transport the vehicle from the top. In the direction in which the first path and the first path side intermediate scaffold are vertically overlapped, the height between the first path and the first path side intermediate scaffold may be along the top The traveling direction of the transport vehicle is freely movable back and forth, and the second path side intermediate transfer device is disposed so as to overlap the intermediate path of the second path and the second path side from the traveling direction of the top transport vehicle In the state of the second path, the height between the second path and the second path side intermediate scaffold can be freely moved back and forth along the traveling direction of the top transport vehicle.

According to the above configuration, if the gripping unit holds the article in the state in which the gripping unit holds the article, the gripping portion is lowered to stop the article, and the article can be carried to the floor. The side of the article for the recipient. In the same manner, if the gripping portion is not in the state of holding the article, the grip portion is lowered by stopping at the stop position for the receiving portion, and the article can be carried out from the article receiving and receiving portion provided on the floor side. In this way, the top transport vehicle that travels on the first path can be carried in and out of the article between the article receiving and receiving portions when the receiving portion is in the stop position, and along the traveling path toward the receiving portion stop position. Move the action and move the item.

In addition, since the intermediate scaffold for temporarily placing the article to be transported by the object receiving portion is provided with the first path side intermediate scaffold and the second path side intermediate scaffold, the first scaffold is transported to the top of the first path. If the car is controlled by the control department In the state of the article, the grip portion is lowered by stopping at a position different from the direction in which the receiving portion is stopped in the traveling direction, and the article can be temporarily placed on the first path side intermediate scaffold located directly below; If the gripping portion is not in the state of holding the article, the grip portion is lowered by stopping at a position different from the direction in which the receiving portion is stopped in the traveling direction, and the first position temporarily placed below the position can be received. Items on the side of the path side scaffolding. Similarly, the top transport vehicle that travels on the second path can temporarily place the article on the second path side intermediate scaffold located directly below, or the item temporarily placed on the second path side intermediate scaffold.

Further, the intermediate transfer device has a gripping portion for the transfer device and is freely movable up and down in the vertical direction, and is slidable in the lateral direction of the first path and the second path, and is movable on the first path side. The middle transfer device is provided with a first path side intermediate transfer device or a second path side intermediate portion between the intermediate scaffolding frame and the second path side intermediate scaffolding and between the article receiving and receiving portions. At least one of the transfer devices, the article that is temporarily placed on the first path side intermediate scaffold in the top transport vehicle of the first path can be moved by the first path side intermediate transfer device or the second path side The carrier device is carried into the article supply/receiving portion, and can also be moved to the second path side intermediate scaffold. Similarly, the article that is temporarily placed on the second path side intermediate scaffolding of the top path of the second path can be carried into the article by the first path side intermediate transfer device or the second path side intermediate transfer device. It can also be moved to the middle scaffold on the second path side. In this way, for example, the top transporting vehicle can carry out the loading from the intermediate scaffolding to the article receiving and receiving section, and from the article receiving and receiving section to the intermediate scaffolding, and can carry the articles from the transport source (for example, from other Goods supply and reception department The item is transported or transferred to the destination of the transfer (for example, to other parts for delivery). Of course, the top transport vehicle that travels on the first path can directly carry in and carry out the articles for the article receiving and receiving unit.

In this way, all or part of the article carrying and carrying in the article feeding and receiving unit can be carried out by the first path side intermediate transfer device or the second path side intermediate transfer device, and thus travels to the top of the first path. In the transport vehicle, it is only necessary to carry the articles into the article supply and receiving section and carry the articles out of the article supply and receiving section, and temporarily place the articles in the intermediate scaffolding and carry the articles temporarily placed in the intermediate scaffolding into the article receiving and receiving section. Some can be done without having to do all. Therefore, the work load of the top transport vehicle traveling on the first path can be reduced.

The present invention is different from the conventional method in that the intermediate scaffold is disposed only below the second path, and the top transport vehicle traveling on the first path has a grip portion and is slidable in the lateral direction of the first path and the second path. The sliding structure can avoid the work load of the top transport vehicle traveling on the first path. Thereby, it is possible to prevent the top transport vehicle from traveling in the first path as much as possible to stop the traffic.

Further, by providing the first path side intermediate scaffold located directly below the first path and the second path side intermediate scaffold located directly below the second path as the intermediate scaffold, when a plurality of intermediate scaffolds are provided, Since the intermediate scaffold is disposed at a position close to the article receiving and receiving portion in the traveling path direction, the article temporarily placed on the intermediate scaffold can be transported by the top transporting vehicle on the first path and the first path side intermediate transfer device Or the second path-side intermediate transfer device is quickly carried into the article supply/receiving portion, and the article in the article supply/receiving portion can be transported to the top of the first path, the first path-side intermediate transfer device, or Second path The side intermediate transfer device is quickly moved out and temporarily placed in the intermediate scaffold.

In addition, since the intermediate scaffolding is provided with the first path side intermediate scaffolding directly below the first path and the second path side intermediate scaffolding directly below the second path, the top transporting vehicle traveling on the first path Or the top transport vehicle traveling on the second path can utilize the intermediate scaffold located directly below. Therefore, the top transport vehicle that travels on the first path or the top transport vehicle that travels on the second path does not need to be provided to move the article to the intermediate scaffold, and the grip portion straddles the first path and the first path in the path width direction. The mechanism in which the path is slid by the distance between the two paths allows the structure of the top transport vehicle to be simple.

According to the above, an article transporting apparatus can be obtained, and the article can be quickly carried out by the article feeding and receiving section, and the top of the first path can be prevented from being transported.

In the embodiment of the article transporting apparatus of the present invention, it is preferable to provide both the first path side intermediate transfer device and the second path side intermediate transfer device, and the first path side intermediate transfer device has The transfer device holding portion is movable between the first path side position immediately below the first path and the second path side position immediately below the second path, and is configured to move the transfer device When the grip portion is located at the position of the first path side, the user can move freely along the traveling direction of the top transport vehicle, and the second path side intermediate transfer device has the grip portion for the transfer device. It is possible to advance and retreat between the second path side position and the first path side position, and to move the vehicle along the top portion while the transfer device holding portion is located at the second path side position. The direction of travel is free to move.

According to the configuration described above, when the article transporting and carrying the article into the article feeding and receiving portion, the first path side intermediate transfer device moves in the traveling direction of the top transport vehicle in a state where the transfer device grip portion is located at the first path side position. The second path side intermediate transfer device moves in the traveling direction of the top transport vehicle in a state where the transfer device holding portion is located at the second path side position. Therefore, since the first path side intermediate transfer device and the second path side intermediate transfer device can move in the traveling direction without interfering with each other as much as possible, the article feeding and carrying in the article feeding and receiving portion can be smoothly carried out.

Further, one of the intermediate transfer devices of the first path side intermediate transfer device and the second path side intermediate transfer device can be carried into the article by the article that is temporarily placed on the intermediate scaffold by the top transport vehicle. In the receiving portion, the article can be temporarily carried out from the article receiving and receiving portion by one of the intermediate transfer devices, and can be temporarily placed in the intermediate scaffold. Therefore, the first path side intermediate transfer device and the second path side can be used. The intermediate transfer device of both the intermediate transfer devices timely carries the articles out and carries them into the article feeding and receiving portion.

In the embodiment of the article transporting device of the present invention, the article feeding and receiving portion is preferably provided with an article receiving and receiving portion and another article receiving and receiving portion that are spaced apart from each other in the lateral direction of the first path and the second path. The first path and the second path provided in correspondence with the article receiving and receiving unit, and the first path and the second path provided corresponding to the other article receiving and receiving unit are The first path and the second path are arranged in parallel with each other in a horizontal direction, and at least one of the first path and the second path provided corresponding to the one of the article receiving and receiving units corresponds to the other At least one of the first path and the second path provided by the article receiving and receiving unit One end portion of each of the two ends is connected to the transfer path, and the top transfer train is connected to the transfer path in the first path and the second path provided in correspondence with the one-piece supply/receiving unit The first path and the second path provided in correspondence with the other article receiving and receiving unit are connected to the transfer path, and are freely movable via the transfer path; The intermediate transfer device provided by the article supply and receiving unit and the intermediate transfer device provided corresponding to the other article supply and receiving unit are provided to be freely extendable in the lateral direction of the first path and the second path. The transport mechanism for moving articles.

According to the above configuration, the top transport vehicle is connected to the transfer route along the first route and the second route provided corresponding to one article supply/receiver, and is provided corresponding to the other article supply/receiver. The route and the second route are connected to the transfer route and travel with the transfer route, and are connected to the transfer route in the first route and the second route provided corresponding to one article supply/receiver, and correspond to The other item is moved between the first path and the second path provided by the receiving unit and connected to the transfer path. Therefore, the top transport vehicle can be carried out from an article supply/receiving unit or an article temporarily removed from the one-piece supply/receiver by the intermediate transfer device and temporarily placed in the intermediate scaffold, and carried into another article supply/reception unit, Or temporarily placed in the middle scaffolding about the other item feeding and receiving part.

Further, according to the above configuration, the intermediate transfer device provided corresponding to one article supply/receiving portion and the intermediate transfer device provided corresponding to the other article supply/receiving portion are provided to be able to face the first path and the second Since the transport mechanism of the article is freely transported in the horizontal direction of the path, the article is correspondingly transported by the transport mechanism The intermediate transfer device provided in the article receiving and receiving portion is transported to the intermediate transfer device provided corresponding to the other article receiving and receiving portion, and the article can be carried out from the article receiving and receiving portion by the top transfer vehicle or the intermediate transfer device. Or the article temporarily placed on the intermediate scaffold from the article receiving and receiving portion, and the intermediate transfer device provided corresponding to the other article receiving and receiving portion, carried into another article receiving and receiving portion, or temporarily placed in Regarding the middle scaffolding of the other article feeding and receiving section. Therefore, even if the top transport vehicle does not carry the article in the bypass form that travels to the end of the first path or the second path to which the transfer path is connected and travels to the transfer path, the article transport unit and the corresponding article can be used. The intermediate scaffold is provided to directly transport the articles to another article transporting portion and an intermediate scaffold provided corresponding thereto.

In this way, the burden on the top transport vehicle can be further reduced, and the articles carried out from one article supply/receiver can be quickly carried into another article supply and reception unit.

In the embodiment of the article transporting apparatus of the present invention, the transporting mechanism is preferably constituted by a transport conveyor, and the transporting transporter is intermediateably movable with the first path side provided corresponding to the one of the article receiving and receiving sections. The support article is placed freely between the device and the second path-side intermediate transfer device at the side of the article to be transported, and the article can be freely placed and transported to and from the other article. And the other side transfer position between the first path side intermediate transfer device or the second path side intermediate transfer device provided between the first and second paths is provided.

According to the above configuration, the first path side intermediate transfer device or the second path side intermediate transfer device provided corresponding to one article supply/receiving portion is caused to be stopped in the state directly above the one transfer position. Transfer device with handle Lowering in the up and down direction, the goods are delivered from above to the transport conveyor. The transport conveyor that is in a state in which the support article is placed at the one-side transfer position is placed and transported to the other transfer position. Then, the first path side intermediate transfer device or the second path side intermediate transfer device provided corresponding to the other article supply/receiving portion is caused to be stopped in the state directly above the other transfer position. The transfer device lifts and lowers the grip portion in the up and down direction, and collects the articles supported by the transport conveyor at the other transfer position.

As described above, the first path side intermediate transfer device or the second path side intermediate transfer device provided corresponding to one article supply/receiving portion does not need to move to the upper side of the transfer position or move The function of the existing device such as the lifting and lowering of the gripping unit in the vertical direction can be greatly changed, and the article can be received and received between the transporting mechanism and the transporting mechanism. That is, when the reset position is reset directly above the one-side transfer position, the position of the hardware (for example, the position detecting sensor) or the software (for example, the position determining program based on the position information of the traveling path) is set. The means of detection can be. The same applies to the first path side intermediate transfer device or the second path side intermediate transfer device provided corresponding to the other article supply and receiving unit.

In this way, when a transfer mechanism capable of freely transporting an article is provided between the intermediate transfer device of the one-piece supply and receiving unit and the intermediate transfer device of the other article supply/receiving unit, the existing configuration of the intermediate transfer device can be utilized. To form a transport mechanism.

Further, in the embodiment of the article conveying device of the present invention, the first path and the second path are preferably provided at the same height, and the first path side intermediate scaffold and the second path side intermediate scaffold Set each other Place at the same height. Thereby, the construction of the entire apparatus or the transfer operation can be relatively simple.

Simple illustration

Fig. 1 is a plan view showing the entire article transport apparatus of the embodiment.

Fig. 2 is a partially enlarged plan view of Fig. 1.

Fig. 3 is a partial enlarged side view of Fig. 1.

Figure 4 is a front elevational view of the direction of travel of the top transport vehicle.

Figure 5 is an enlarged front elevational view of a portion of Figure 4.

Fig. 6 is a plan view showing the arrangement state of the transport conveyor.

Fig. 7 is a front view showing the configuration state of the transport conveyor.

Figure 8 is a plan view showing the stop position of the intermediate transfer device.

Figure 9 is a control block diagram.

Fig. 10 is a plan view showing a conveying mechanism of another embodiment.

The best form for implementing the invention

An embodiment of the article transporting apparatus of the present invention will be described with reference to the drawings.

[all composition]

Fig. 1 is a plan view showing the whole of the article transporting apparatus of the present embodiment, and Fig. 2 is an enlarged plan view showing the upper left portion of the paper in Fig. 1. Here, the upper left portion of the paper surface refers to the upper left portion when the figure is attached in the direction in which the numbers of the respective elements shown in the drawing appear to be correct. Similarly, in the following description, when the left, right, upper, lower, and the like of the paper surface are used, the directions in the paper surface when arranged as described above are indicated. The direction of the upper and lower sides of the paper refers to the direction in the plane of the paper and is perpendicular to the left and right direction of the paper. This item transport equipment is set at In the semiconductor manufacturing plant, the top transport vehicle 2 that transports the substrate storage container such as the FOUP that accommodates a plurality of semiconductor wafers as the article W is provided so as to be guided and supported by the traveling rail 1 disposed on the top side. The travel path travels in one direction.

The traveling rail 1 is disposed at a height above the set height from the bottom surface, and is arranged as shown in Fig. 1 in plan view. On the top side, three annular paths LP1 to LP3 arranged in the left-right direction of the paper surface are provided. Each of the annular paths LP1 to LP3 extends in the longitudinal direction as a whole, and has two straight portions extending along the longitudinal direction and two curved portions connecting the straight portions at the ends. Between the first annular path LP1 and the second annular path LP2, a plurality of pairs of paths are set in a state of being arranged in a direction perpendicular to the paper surface, and the pair of paths are extended perpendicularly to the longitudinal direction of the annular path. The linear first path L1 and the second path L2 are formed. Similarly, a plurality of paths (consisting of the first path L1 and the second path L2) are provided between the second annular path LP2 and the third annular path LP3. As shown in Fig. 4, the traveling rail 1 is configured to include a pair of rail members 1a and 1b, and the pair of rail members 1a and 1b are oriented in a horizontal direction which is straight in the horizontal direction with respect to the traveling direction of the top transporting vehicle 2. On, the person is placed at intervals. The pair of rail members 1a, 1b are suspended by a plurality of pairs of rail support members 9 disposed at the top.

One end portion of the first path L1 and the second path L2 disposed between the annular paths LP1 and LP2 is connected to the annular path LP1 by the connecting portion K, and the other end portion is connected by the connecting portion K is connected to the annular path LP2. Similarly, one end portion of the first path L1 and the second path L2 disposed between the annular paths LP2 and LP3 is connected to the annular path LP2 by the connection portion K, and The one end portion is connected to the annular path LP3 by the connecting portion K. Thereby, the top transport vehicle 2 can travel from the first path L1 or the second path L2 to the annular paths LP1 to LP3, and can travel from the annular paths LP1 to LP3 to the first path L1 or the second path L2. As shown in Fig. 1, the second annular path LP2 is configured as a double loop path that is connected to each other at a plurality of locations (that is, the entire system of one annular path is disposed in the other annular path). Since the plurality of top transport vehicles 2 travel in only one direction, the traveling directions of the top transport vehicles 2 in the first path L1 and the second path L2 arranged one above the other in the paper sheets of the first and second drawings are set to each other. The opposite direction.

In the horizontal direction of the paper surface of the first and second figures (that is, the direction perpendicular to the longitudinal direction of the annular path), the plurality of processing devices 8 provided in the plural processing device 8 are directly above the station 4 as the article receiving and receiving portion, along which The first path L1 is disposed in the direction in which the stations 4 are arranged (the left and right directions of the paper in the first and second figures). The second path L2 is set in parallel with the first path L1 at a position different in the lateral direction of the first path L1 (the longitudinal direction of the paper path in the first and second figures, that is, the longitudinal direction of the annular path).

[Processing device]

Between the first annular path LP1 and the second annular path LP2, and between the second annular path LP2 and the third annular path LP2, the paper is aligned in the lower left and right directions on the paper surface of the first and second figures. In a state in which a plurality of processing apparatuses 8 are disposed on the bottom surface, the processing apparatuses 8 can take out semiconductor wafers accommodated in the substrate storage container, and process or inspect the semiconductor wafer. At the end of the processing device 8, a platform 4 is provided, and the processing device 8 transmits and receives the article W between the top transport vehicle 2 and the intermediate transfer device 6 described later through the station 4.

The processing device 8 is arranged in pairs in the downward direction of the paper in the first and second figures in a posture in which the stations 4 are opposed to each other. For example, the platform 4 provided with respect to the processing device 8 on the upper left side of the second drawing surface faces the platform 4 provided with respect to the processing device 8 at the lower left side of the paper surface in the downward direction of the paper surface. In this manner, the station 4 is provided with one station 4 and another station 4 which are spaced apart from each other in the arrangement direction of the first path L1 and the second path L2. The first path L1 and the second path L2 provided corresponding to the one station 4 and the first path L1 and the second path L2 provided corresponding to the other station 4 are in the first path L1 and the second path L2 The lateral direction is arranged in parallel with each other across the interval, and both of the first path L1 and the second path L2 are connected to the annular paths LP1 to LP3. Therefore, for the top transport vehicle 2 that travels between the first path L1 and the second path L2 disposed between the annular path LP1 and the annular path LP2, the annular path LP1 and the annular path LP2 can be used as The other transition path of the first path L1 or the second path L2. Similarly, for the top transport vehicle 2 that travels on the first path L1 or the second path L2 disposed between the annular path LP2 and the annular path LP3, the annular path LP2 and the annular path LP3 can be used as movement The transition path to the other first path L1 or the second path L2.

As shown in FIGS. 2 to 4, the station 4 is provided at the end of the processing device 8 so that the support article W can be freely placed at a lower level than the height of the processing device 8. The article W delivered to the platform 4 by the top transport vehicle 2 or the intermediate transfer device 6 is placed inside the processing device 8, and the finished article W is again sent by the station 4, and is transported by the top transport vehicle 2 or the middle. The transfer device 6 collects.

In the present embodiment, the length of the traveling direction of the station 4 is set to be three in a state in which the support can be placed in a state of being adjacently arranged in the traveling direction of the top transport vehicle 2. Item W. That is, three items are received and received at the station 4, and in the traveling path 1, from the first path L1 in the traveling direction of the top transporting vehicle 2, the three items in the station 4 are sequentially received and received. In the upper right side, three stop positions such as the first supply/receiving unit stop position Q1a, the second supply/receiving unit stop position Q1b, and the third supply/receiving unit stop position Q1c are set as the top transport vehicle 2. The supply/reception part stop position Q1 is stopped when the article is subjected to the position (for example, transfer) of the article W.

[middle scaffolding]

As shown in FIGS. 1 to 4, the intermediate scaffold 5 is disposed below the first path L1 and the second path L2 in the vertical direction, with the platform 4 being above and the top transport vehicle 2 being below. The intermediate scaffolding 5 can temporarily place the articles W to be delivered to the platform 4 or the articles W received from the platform 4 (i.e., temporarily place the articles W). In the present embodiment, the processing device 8 is arranged adjacent to each other in the traveling direction of the top transport vehicle 2 in the first path L1 or the second path L2, and the first processing device 8a and the second processing device 8b are disposed adjacent to each other. The plurality of intermediate scaffolds 5 are disposed from the upper side region of the processing device 8 of one of the processing devices 8 to the upper region of the other processing device 8. The intermediate scaffold 5 is provided with a first path side intermediate scaffold 5n located immediately below the first path L1 and located at a position different from the platform 4 in the traveling direction of the top transport vehicle 2; and the second path side The intermediate scaffold 5f is located directly below the second path L2.

As shown in the third and fourth figures, the intermediate scaffold 5 is provided in a state of protruding downward from the lower portion of the cushioning frame 55, and the cushioning frame 55 is suspended and supported by the top. As shown in Fig. 6, the buffering frame 55 has: traveling The upstream side portion 55a on the upstream side and the downstream side portion 55b on the downstream side in the traveling direction of the top transport vehicle 2 in the first path L1, as shown in Figs. 4, 5 and 6, The first path side frame body 55n and the second path side frame body 55f are arranged in a state in which they are arranged in the lateral direction of the traveling path. Since the upstream side portion 55a and the downstream side portion 55b have the same configuration, the upstream side portion 55a will be described below as a representative.

In the first path side frame body 55n and the second path side frame body 55f of the upstream side portion 55a, the frame-shaped horizontal frame member 25 is disposed at intervals in the vertical direction, and the width direction and the traveling direction of the top transport vehicle 2 are The plurality of points are connected by a longitudinal joint member 26. The horizontal frame member 25 is formed by interconnecting a plurality of vertical horizontal members 25Y and a horizontal horizontal member 25T, and the vertical horizontal members 25Y are along the longitudinal direction of the first path L1 and the second path L2. The horizontal member 25T is along the width direction of the first path L1 and the second path L2. Further, the vertical horizontal member 25Y and the vertical joint member 26 are continuous from the upstream side portion 55a to the downstream side portion 55b.

The first path side frame body 55n and the second path side frame body 55f are suspended from the top by a plurality of scaffolding hangers 24 from the top. The scaffolding suspension 24 is longer than the rail supporting member 9 that supports the traveling rail 1 and has a length corresponding to the height of the top and bottom of the top transporting vehicle 2. Therefore, the first path L1 or the second path L2 of the top transport vehicle 2 is located between the scaffolding hangers 24 in the plural from the traveling direction, and the first path side housing 55n in the upstream side portion 55a is located. The first path L1 of the top transport vehicle 2 is directly below, and the second path side frame 55f of the upstream side portion 55a is located immediately below the second path L2 of the top transport vehicle 2.

As shown in Fig. 6, the first path side frame in the upstream side portion 55a 55n is provided with an intermediate shelf member 27 that forms the first path-side intermediate scaffold 5n on the upstream side and the downstream side end in the traveling direction of the top transport vehicle 2 that travels on the first path L1. In addition, the second path side frame body 55f of the upstream side portion 55a is provided with a second path side intermediate shed in addition to the downstream side end portion in the traveling direction of the top transport vehicle 2 traveling on the second path L2. The intermediate shed member 27 of the frame 5f.

As shown in FIGS. 5 and 6, the intermediate frame member 27 has a horizontal mounting surface portion 27a and has three engaging grooves formed for positioning on the bottom surface of the article W to position the article W. The three positioning pins 28; and the connecting plate portion 27b facing upward from the one end portion of the mounting surface portion 27a and the connecting plate portion 27c facing upward from the other end portion. The upper end of the connecting plate portion 27b on one side is coupled to the vertical horizontal member 25Y, and the upper end of the connecting plate portion 27c on the other side is coupled to the one horizontal longitudinal member 25Y in the lateral direction by the connecting bracket 29. In the other vertical horizontal member 25Y, the placement surface portion 27a is positioned below the lower end of the buffer frame 55 at the height of the article W, and the intermediate frame member 27 is fixed to the buffer frame 55 in the above state. . With the above configuration, the front surface of the article W (the surface on which the front surface of the substrate storage container is opened) faces the side of the connecting plate portion 27b (the posture toward the right of the paper surface in Fig. 5) to mount the face. The support item W is placed on the portion 27a.

As shown in the second and sixth figures, the two first path side intermediate scaffolding 5n on the first path L1 side and the fourth second side on the second path L2 side in the upstream side portion 55a of the buffering frame 55 are provided. The path side intermediate scaffold 5f and the station 4 in the first processing device 8a constitute a group corresponding to the first processing device 8a. The first transfer target group G1 of the transfer target group. In the same manner, the two first path side intermediate scaffolds 5n on the first path L1 side and the four second path side intermediate scaffolds 5f on the second path L2 side in the downstream side portion 55b of the buffering frame 55 are provided. The station 4 in the second processing device 8b constitutes a second transfer target group G2 which is a group of transfer target groups provided corresponding to the second processing device 8b. In this way, a plurality of transfer target groups are provided to the first processing device 8a and the second processing device 8b, respectively.

In the transfer target other than the station 4 in the first transfer target group G1, the stop position at which the top transport vehicle 2 that has traveled on the first path L1 is stopped, and the top transport vehicle 2 that has traveled on the second path L2 is stopped. Stop position. In other words, the stop position of the first transfer target group G1 is in the direction along the first path L1 in addition to the three supply/receiver stop positions Q1a to Q1c corresponding to the three article supply/receiving positions of the station 4. The position of the first supply/receiver stop position Q1a adjacent to the most upstream side on the upstream side, and the position of the supply/receiver stop position Q1c adjacent to the most downstream side in the downstream direction on the downstream side in the direction along the first path L1 The first path side intermediate scaffolding stop position Q2n is set so that the top transport vehicle 2 traveling on the first path L1 transfers the article W between the first path side intermediate scaffolding 5n. In the second path L2, the second path side intermediate scaffolding stop position Q2f is set at four places corresponding to the four second path side intermediate scaffolds 5f so as to travel on the top of the second path L2. The transport vehicle 2 transfers the article W between the second path side intermediate scaffold 5f.

[Top conveyor]

As shown in the third, fourth, and seventh diagrams, the top transport vehicle 2 is configured to include a traveling portion 10 having a traveling drive wheel that can travel on the traveling rail 1; The body portion 11 is a member that suspends and supports the traveling portion 10 and can support the article W by freely moving up and down and swinging. Further, the connection system connecting the traveling portion 10 and the main body portion 11 is provided in a state of being positioned between the pair of rail members 1a and 1b. Further, the traveling unit 10 is provided with a traveling motor 51 that rotationally drives the traveling drive wheel (see FIG. 9).

As shown in Fig. 4, the main body portion 11 is configured to include a grip portion 3 for holding the article W, and a lifting operation means 12 for moving the lifting support member 22 supporting the grip portion 3 up and down; The operation means is to rotate the entire lifting support 22 so that the grip portion 3 is rotated around the vertical axis; and the covering body 13 covers both the upper and the front and rear directions of the article W held by the grip portion 3 and One of the left and right directions. Further, the main body portion 11 is provided with the power receiving coil 14 so as to be positioned between the pair of rail members 1a and 1b, and the alternating current is supplied to the power supply line 15 disposed along the traveling rail 1 to generate a magnetic field. This magnetic field causes the power receiving coil 14 to generate the required electric power on the side of the top transport vehicle 2, and supplies power to the top transport vehicle 2 in a non-contact state.

The lifting operation unit 12 is configured to include a lifting motor 52 (see FIG. 9) and a rotating drum. The rotating drum 52 is rotated in one direction and in the opposite direction by the rotation operation of the lifting motor 52, and the winding belt 16 is wound. By winding and pulling out, the lifting support 22 can be lifted up and down freely.

The turning operation means includes a turning motor 53 (see FIG. 9), and the lifting support motor 22 is rotated around the vertical axis by the rotation of the turning motor 53. In the lifting support 22, a switching mechanism is provided, and the posture of the gripping unit 3 is switched to the gripping posture of the gripping article W and the grip releasing posture for releasing the grip by the operation of the gripping motor 54 (see FIG. 9).

According to the above configuration, the top transport vehicle 2 is moved in one direction by guiding and supporting the traveling rail 1, thereby being freely movable along the first path L1 and the second path L2, and the loop paths LP1 to LP3. Go on.

The top transport vehicle 2 that has traveled on the first path L1 is moved up and down by any one of the plurality of supply/reception part stop positions Q1a to Q1c, and the elevating support 22 is moved up and down by the elevating operation means 12 to The turning operation means rotates the lifting support body 22, and the switching mechanism switches the gripping portion 3 into the holding posture and the grip releasing posture, thereby transferring between the article receiving and receiving positions of the station 4 located directly below. In the same manner, the article W is transferred between the first path side intermediate scaffolding 5n located immediately below the first path side intermediate scaffolding stop position.

In the top transport vehicle 2 that has traveled on the second path L2, the elevating support 22 is moved up and down by the elevating operation means 12 in a state where it stops at any of the plurality of second path side intermediate scaffolding stop positions. The lifting support 22 is rotated by the turning operation means, and the switching mechanism 3 is switched between the gripping posture and the grip releasing posture by the switching mechanism, thereby being disposed between the second path side intermediate scaffold 5f located immediately below. Transfer item W.

In the third and fourth figures, the top conveyance vehicle 2 that has traveled on the first path L1 is stopped in the supply/reception stop positions Q1a to Q1c at the three upstream side portions 55a, and stops in the third diagram. In the traveling direction indicated by the arrow a, the supply/receiver stop position Q1a on the most upstream side, and the top transport vehicle 2 on the second path L2, and the second path side intermediate shed on the downstream side 55b. In the frame stop position Q2f, the stop direction indicated by the arrow b in the third figure is stopped. The upper position is the stop position Q2f for the intermediate scaffold on the most upstream side.

[Intermediate Transfer Device]

As shown in Figs. 3 to 7, an intermediate transfer device 6 is provided which is provided with a buffer frame 55 provided with an intermediate scaffold 5. The intermediate transfer device 6 is provided with one first intermediate transfer device 6n and one second intermediate transfer device 6f for one buffer frame 55. The first intermediate transfer device 6n is in a state of being vertically overlapped with the first path L1 and the first path side intermediate scaffold 5n from the traveling direction of the top transport vehicle 2 (that is, viewed from the traveling direction of the top transport vehicle 2) The state between the first path L1 and the first path side intermediate scaffold 5n is preferably set to be directly below the first path L1 and directly above the first path side intermediate scaffold 5n. The height between the first path L1 and the first path side intermediate scaffold 5n can be freely moved back and forth in the direction in which the top transport vehicle 2 travels. The second intermediate transfer device 6f is in a state of being vertically overlapped with the second path L2 and the second path side intermediate scaffold 5f from the traveling direction of the top transport vehicle 2 (that is, the travel from the top transport vehicle 2) The direction between the second path L2 and the second path side intermediate scaffold 5f is preferably located immediately below the second path L2 and immediately above the second path side intermediate scaffold 5f. It is provided so as to be movable back and forth in the direction of the traveling direction of the top transport vehicle 2 in the height between the second path L2 and the second path side intermediate scaffold 5f.

Both the first intermediate transfer device 6n and the second intermediate transfer device 6f are provided so as to be freely movable back and forth including the entire range of the buffer frame 55 in the moving directions. Thereby, each of the first intermediate transfer device 6n and the second intermediate transfer device 6f can be moved back and forth between the upstream side portion 55a and the downstream side portion 55f, and the first shift is provided corresponding to the first processing device 8a. Object group G1, and The object W can be freely transferred by any of the transfer destinations G2 provided in association with the second processing device 8b. The details will be described below.

As shown in Fig. 5, the first intermediate transfer device 6n has a traverse operation means 31 which is provided with a gripping portion 7 for supporting the article W so as to be movable up and down in the vertical direction, and the transfer device The grip portion 7 is traversed in the lateral direction of the transfer device (the horizontal width direction of the first path L1 and the second path L2, and is the left-right direction of the paper in FIG. 5).

The first intermediate transfer device 6n is configured such that the transfer device holding portion 7 can be moved back to the first path side position immediately below the first path L1 by the horizontal operation means 31, and is configured as the second path. The protruding position of the second path side position in the downward direction of L2 is freely advanced and retracted, and the transfer device holding portion 7 is freely movable in the traveling direction of the top transport vehicle 2 in a state of being located at the retracted position. Thereby, interference with the top transport vehicle 2 during the transfer operation or interference with the second intermediate transfer device 6f is prevented.

4 is a view showing the state in which the first intermediate transfer device 6n and the second intermediate transfer device 6f retract the transfer device holding portion 7 to the retracted position, as seen from the traveling direction of the top transport vehicle 2, and 5 is a view showing that the first intermediate transfer device 6n and the second intermediate transfer device 6f are both in the stopped state, and the transfer device holding portion 7 is protruded to the protruding position. The state of the person.

As shown in FIGS. 3 to 5, the buffer frame 55 is provided with a guide support 17 that supports the first intermediate transfer device 6n and guides the movement in the traveling direction of the top transport vehicle 2, and the guide support 17 is provided. It is configured to be placed at the top of the state of the supply/reception part stop position Q1 and the intermediate scaffolding stop position Q2. When the delivery vehicle 2 transfers the article W, a space through which the grip portion 3 and the article W can pass in the vertical direction is formed.

Specifically, the guide support body 17 is constituted by a pair of lower guide rails 18, 19 which are formed to form the grip portion 3 of the top transport vehicle 2 holding the article W in the up and down direction. The state of the freely passable gap is arranged at intervals in the lateral direction of the transfer device of the first intermediate transfer device 6n. The pair of lower guide rails 18, 19 are attached to the lower surfaces of the two rail mounting members 20, 21 which are connected to one of the opposite ends in the traveling direction of the upper portion of the cushioning frame 55. For the horizontal member 25T.

Sliding blocks 34 and 35 are provided in a fixed state at both end portions in the lateral direction of the transfer substrate of the moving substrate 32 provided on the upper portion of the first intermediate transfer device 6n, and the sliders 34 and 35 are slidably Engaged in a pair of lower guide rails 18, 19. The operated bracket 33 is attached to one end portion of the moving base material 32 as seen from the traveling direction. As shown in the third and fifth figures, the operated bracket 33 has a horizontal portion 33a formed by bending the lower end portion, and is wound around a longitudinal winding surface of the toothed drive pulley 36a and the driven pulley 36b that are rotated around the horizontal axis. The upper surface of the winding portion of the timing belt 38 for moving operation is connected to the operated bracket 33.

Further, the moving operation motor 37 for winding the moving operation timing belt 38 is rotationally driven in one direction and in the reverse direction, whereby the moving substrate 32 can be moved back and forth along the pair of lower guiding rails 18, 19. Straight line movement operation. That is, by controlling the rotational operation of the movement operation motor 37, the movement of the first intermediate transfer device 6n can be controlled. In addition, the positioning of the intermediate transfer device 6 is moved The control can be performed by servo control using the servo motor as the movement operation motor 37, or a plurality of photodetectors can be provided corresponding to the respective stop positions, and arranged in the traveling direction along the first intermediate transfer device 6n. The position detecting means for detecting the stop position for transfer is used for the movement path, and the positioning control is performed based on the detection information of the sensors.

As shown in Fig. 5, a ball screw 40 that can freely move the guide block 39 in the lateral direction of the transfer device is provided on the upper surface of the moving base material 32 of the first intermediate transfer device 6n. The guide block 39 is coupled to the rear side end portion of the base fork of the slide fork 42 that can move the lift support 41 forward and backward in the lateral direction of the transfer device in the advancing and retracting direction. The slide fork 42 includes, for example, a base fork, a middle fork slidable in the lateral direction with respect to the base fork, and a primary fork slidable in the lateral direction with respect to the intermediate fork. Each of the segments of the sliding fork 42 is coupled to each other by a linear movement guide mechanism in a state of being engaged with each other by a linear movement guiding mechanism. By moving forward and backward of the base fork, the transmission lifting operation means 45 and the turning operation means 46 are coupled to each other. The lifting support 41 of the main fork suddenly advances and retreats. Further, the lateral operation motor 44 that rotationally drives the screw 40a of the ball screw 40 is rotationally driven in one direction and the opposite direction, whereby the guide block 39 can be moved in the lateral direction of the transfer device (that is, with the first and second sides). The direction of the long direction of the path is vertical and the operation is moved back and forth. In this way, the horizontal operation motor 44, the ball screw 40, and the slide fork 42 constitute the lateral operation means 31 for traversing the transfer device holding portion 7 in the lateral direction of the transfer device in the intermediate transfer device 6.

The lifting operation means 45 is configured to rotate the rotary motor 48 by rotating the lifting motor 47 in one direction and the opposite direction, and The winding belt 49 is pulled out and wound, and the lifting support body 41 can be lifted up and down. The turning operation means 46 can rotationally drive the turning motor 50 to rotate the transfer device holding portion 7 around the vertical axis. Thereby, the plane view posture of the article W with respect to the platform 4 and the intermediate scaffold 5 can be adjusted to an appropriate posture.

According to the above configuration, as shown in Fig. 8, the first intermediate transfer device 6n is configured such that each of the upstream side portion 55a and the downstream side portion 55b of the buffer frame 55 is stopped at the setting of 2 Two transfer stop positions Pn1 and Pn5 that are directly above the first path side intermediate scaffold 5n and stop between the transfer positions in the transfer direction of the first intermediate transfer device 6n. In the state of any of the three transfer stop positions Pn2 to Pn4, the transfer device holding unit 7 is moved in the lateral direction and moved up and down, and can be placed between the first path side intermediate scaffold 5n and the second stage. The article W is freely transferred between the path side intermediate scaffolding 5f and between the article receiving and receiving positions in the platform 4.

The second intermediate transfer device 6f has the same configuration as the first intermediate transfer device 6n except that the horizontal operation device 31 reverses the direction in which the transfer device holding portion 7 advances and retracts. Further, the second intermediate transfer device 6f is configured such that each of the upstream side portion 55a and the downstream side portion 55b of the buffer frame 55 is stopped at the intermediate frame 5f which is set on the four second path sides. The four transfer stop positions Pf2 to Pf5 directly above and the first path side on the inner side of the buffer frame 55 in the traveling direction of the top transfer vehicle 2 in the two first path side intermediate scaffolds 5n. In the state in which any one of the transfer holding positions Pf1 corresponding to the intermediate scaffolding 5n is moved, the transfer device 7 can be moved and moved in the lateral direction, and can be moved between the intermediate path scaffold 5n and the first path side. First The article W is freely transferred between the two path side intermediate scaffolds 5f and between the articles receiving and receiving positions in the station 4.

[transport transporter]

In the intermediate portion of the buffering frame 55 in the traveling direction of the top transporting vehicle 2, a transport conveyor 56 is provided, and one of the stations 4 is disposed opposite to the paper surface in the first and second figures (four shown in FIG. 2) Between the station on the upper left of the station 4 and the station 4 (the station on the lower left in the second figure), the transfer target group corresponding to one station 4 and the transfer corresponding to the other station 4 The article W is freely transported between the target groups. Similarly, a transport conveyor 56 that can transport articles W freely between the transfer target group provided in correspondence with the station 4 on the upper right side of FIG. 2 and the transfer target group provided corresponding to the lower right station 4 is provided. As shown in Fig. 7, the pair of transport conveyors 56 are connected to each other in a state in which the upstream side portion 55a and the downstream side portion 55b of the cushioning frame 55 are suspended and supported. Since the two have the same configuration, the transport conveyor 56 connected to the upstream side portion 55a of the buffer frame 55 will be described below as a representative.

As shown in the sixth and seventh drawings, the transport conveyor 56 is configured to include a transport path portion 57, and is connected to the buffer frame 55 provided corresponding to one of the other stations 4; and is freely movable back and forth. The transporting movable body 59 in the transport path portion 57 is provided with an article mounting table 58 on which the support article W can be freely placed and freely movable up and down. One side end portion of the transport path portion 57 is connected to the buffer frame 55 provided corresponding to one of the stations 4, and the other end portion of the transport path portion 57 is connected to the other station 4. The buffer frame 55 and the transport conveyor 56 are suspended and supported by the two buffer frames 55. In addition, in order to reinforce, The intermediate portion and the top portion of the transport conveyor 56 can also be connected by the same members as the scaffolding hanger 24.

As shown in Fig. 9, the transporting movable body 59 includes a traveling motor 61 that drives the driving wheel to rotate, a lifting motor 62 that drives the article mounting table 58 up and down, and a turning motor 63 that will The article mounting table 58 is rotated by the driver. In the article mounting table 58, like the intermediate frame member 27 forming the intermediate scaffolding 5, three positioning pins for positioning the article W are engaged with the three engaging grooves formed on the bottom surface of the article W. It protrudes upwards.

The conveyance path portion 57 is constituted by a casing, and a slit 60 along the longitudinal direction is formed on the upper surface portion. In order to prevent the dust from scattering to the outside, the transporting movable body 59 is disposed inside the casing of the transporting path portion 57, and the article placing table 58 in the transporting movable body 59 is inserted into the support shaft outside the plane of the slit 60. The upper part of the upper part is connected to the moving body for transport in a freely movable manner. Further, the transporting movable body 59 is freely movable back and forth along the long direction inside the transport path portion 57 by being driven by the guide mechanism outside the guide wheel by driving the drive wheel in one direction and the reverse direction. .

As shown in FIG. 8, the transporter 56 is transported in the traveling direction of the top transport vehicle 2 in each of the movement paths of the first intermediate transfer device 6n and the second intermediate transfer device 6f provided corresponding to one of the stations 4. The transporter transfer position Pc is set to allow the first intermediate transfer device 6n and the second intermediate transfer device 6f to be on the side of the platform 4 side of the transport conveyor 56. The item W is transferred between the parts. Similarly, the first intermediate transfer device 6n and the second intermediate transfer device provided corresponding to the other station 4 are provided. In each moving path of 6f, where the transport conveyor 56 is located in the traveling direction of the top transport vehicle 2, a transport position Pc for transporting the first intermediate transfer device 6n and the transport position Pc is set. The second intermediate transfer device 6f transfers the article W between the end on the other station 4 side of the transport conveyor 56.

The first intermediate transfer device 6n or the second intermediate transfer device 6f provided corresponding to one of the stations 4 is configured to be installed in a state in which the transport position Pc is set at each of the transport paths. The article W is transferred between the receiving stations 64 at the one-side transfer position (that is, the end portion on the side of the transport conveyor 56). Similarly, the first intermediate transfer device 6n or the second intermediate transfer device 6f provided corresponding to the other station 4 is configured to be stopped in the state of the transport position Pc set to each of the travel paths. The article W is transferred between the receiving platform 64 disposed at the other side transfer position (i.e., the end of the other side of the transport conveyor 56).

In the present embodiment, the transporter transfer position Pc is set to be the first intermediate transfer with the transfer stop positions Pn5 and Pf5 of the upstream side portion 55a or the transfer stop positions Pn1 and Pf1 of the downstream side portion 55b. The device 6n or the second intermediate transfer device 6f is in the same position in the moving direction. Further, since the transporter transfer position Pc is located immediately below the second path L2, the first intermediate transfer device 6n causes the transfer device gripping portion 7 to protrude to the protruding position, and is transferred between the transporting movable body 59 and the transporting movable body 59. Item W. In the second intermediate transfer device 6f, the transfer device holding portion 7 is held at the retracted position, and the article W is transferred between the transporting movable body 59 and the transfer.

As shown in Figures 4, 6 and 7, the transfer position on one side of the transport conveyor 56 Both the transfer position and the other transfer position are provided with a receiving platform 64 on which the support article W can be freely placed. On the receiving platform 64, three positioning pins for positioning the article W are provided to protrude upward. The positioning pins are disposed so as to be engageable with the bottom surface of the article W at a position different from the article mounting table 58 of the transporting movable body 59, and the article mounting table 58 is raised from the article W positioned under the receiving platform 64. The support can be placed in the state of the article mounting table 58 and the shoveling transfer of the article W from the receiving platform 64 to the transporting movable body 59 can be performed without shifting the position and posture of the article W. In the same manner, the unloading of the article W from the transporting movable body 59 to the receiving platform 64 can be reversed without shifting the position and posture of the article W.

In this way, in the present embodiment, the first intermediate transfer device 6n and the second intermediate transfer device 6f provided corresponding to one of the stations 4 and the first intermediate portion corresponding to the other station 4 are provided. Between the transfer device 6n and the second intermediate transfer device 6f, a transport mechanism for transporting the articles W in the lateral direction of the first path L1 and the second path L2 is provided, and the transport mechanism is constituted by the transport conveyor 56. The transport conveyor 56 can freely mount the support article W between the first intermediate transfer device 6n and the second intermediate transfer device 6f provided in correspondence with one of the stations 4, and at the side transfer position where the article is received. Further, the article can be freely placed and transported to the other transfer position of the article to be received between the first intermediate transfer device 6n and the second intermediate transfer device 6f provided corresponding to the other station 4.

Further, in the present embodiment, the transport conveyor 56 is configured to include the transporting movable body 59, and the transporting movable body 59 can freely transfer the articles W at the one-side transfer position and the other-side transfer position, and can be Side shift position and another The transported article W is freely placed between the one transfer positions. Further, the one-side transfer position is provided with a receiving platform 64, and the first intermediate transfer device 6n and the second intermediate transfer device 6f provided by the one station 4 can be freely supported. The article W is provided; and the receiving side 64 is provided at the other side transfer position, and the first intermediate transfer device 6n and the second intermediate transfer provided by the platform 4 corresponding to one of the stations 4 can be freely placed. The item W to which the device 6f is supplied.

Figure 9 is a control block diagram of the article transporting device. The top transporting vehicle 2 has a top transport controller VCq, an intermediate transfer device controller VCp of the intermediate transfer device 6, and a transporter controller VCr of the transport transporter 56, which is connectable to the main controller HC in a freely wireless manner. The main controller HC manages the processing stroke of the article W, and appropriately transports the article W in response to the transfer request from each processing device, and sets a transfer command for the source of the article W and the destination of the transfer. Then, the operations of the top transport vehicle 2, the intermediate transfer device 6, and the transport transporter 56 are controlled by the respective controllers in accordance with the transport command instructed by the main controller HC.

When the processing device 8 ends the processing of the article W, for example, the main controller HC instructs the transport command to carry the processed article W from the station 4 and transport it to the processing device 8 of the next process. In the transport operation, the top transport vehicle 2 that transports the other articles W is transported to the station 4 or to the station 4 (the transfer target group belonging to the same buffer frame 55 to which the transfer target group of the station 4 belongs). The other article W is temporarily placed in the intermediate scaffold 5 in the buffer frame 55, whereby the above-described carry-out operation can be quickly processed even if the top transport vehicle 2 in the standby state does not exist. Moreover, the temporary placement of the intermediate scaffold 5 is performed, and the top transport vehicle 2 can be excluded as much as possible for the entire equipment. It is wasteful to travel in an empty state without holding the article W.

In the present embodiment, since the intermediate scaffold 5 is provided directly below both the first path L1 and the second path L2, the top transport vehicle 2 that travels on the first path L1 or the second path L2 can be positive for itself. Since the transfer is performed below, it is possible to avoid the disadvantage that the burden of the transfer operation is concentrated on the top transport vehicle 2 of the first route. Further, since the article W of the station 4 in the processing device 8 is transferred, a plurality of intermediate scaffolds 5 provided in the buffer frame 55 provided across the platform 4 adjacent to the platform in the traveling direction can be utilized. Therefore, it is possible to avoid the occurrence of the fact that the article W that the top transport vehicle 2 carries into the platform 4 or the article W that is carried out cannot be temporarily placed in the intermediate scaffold 5 because the number of the intermediate scaffolds 5 is small. Further, by providing the intermediate transfer device 6 directly below both the first path L1 and the second path L2, the burden of the transfer operation of the top transport vehicle 2 can be further reduced. Further, when the article W is transported from the transfer target group on the station 4 to the transfer target group to the station 4, the transport conveyor 56 can be used between the intermediate transfer devices facing the two stations 4. The article W is quickly transported to replace the route that the top transport vehicle 2 transports via the loop paths LP1 to LP3.

[Other Embodiments]

The invention of the present invention has been described in detail above with reference to the embodiments of the invention. However, the invention is not limited thereto, and various modifications may be made without departing from the spirit and scope of the invention. Hereinafter, other embodiments of the present invention will be described.

(1) In the above embodiment, the both ends of the second path L2 are connected to the loop paths LP1 to LP3 which are the transition paths, but It is possible that the both ends of the second path L2 are not connected to any of the paths. At this time, the top transport vehicle 2 that has traveled on the second path L2 travels back and forth on the second path L2.

(2) In the above-described embodiment, the intermediate carrier device 6 is shown as an intermediate carrier unit 55, and the buffer frame 55 is shared by the adjacent plurality of stations 4, and the upstream side portion 55a and the downstream side of the buffer frame 55 can be provided. The portion 55b is freely movable, but a special buffer frame 55 can be provided for the single station 4 so that the intermediate transfer device 6 can be freely in the moving direction of the buffer frame 55 for the single station 4. Move instead of the above embodiment.

(3) In the above embodiment, the top transport vehicle may be configured to have a grip portion and be freely movable in the lateral direction of the travel path.

(4) In the above embodiment, the first intermediate transfer device 6n or the second intermediate transfer device 6f is configured to be in a state in which the transfer device holding portion 7 is located at the retracted position. The first intermediate transfer device 6n or the second intermediate transfer device 6f may be configured so that the intermediate transfer device 6n or the second intermediate transfer device 6f does not interfere with the intermediate transfer device on the other side and performs the transfer operation. In the top transport vehicle 2, the movement of the transfer device holding portion 7 in the protruding position or the movement of the transfer device gripping portion 7 can be allowed to move.

(5) In the above embodiment, for example, one first intermediate transfer device 6n or the second intermediate transfer device 6f is provided for one buffer frame 55; however, one buffer frame may be used. Each of the bodies 55 is provided with a plurality of first intermediate transfer devices 6n or second intermediate transfer devices 6f.

(6) In the above-described embodiment, an example is shown in which the transporting movable body that can move freely on the transport path portion is transported as a transport. Instead of the above configuration, it is also possible to transport the article by a transport operation or a reciprocating operation by a transporting body such as a belt conveyor.

(7) In the above embodiment, the transport mechanism is configured by the transport conveyor. For example, the transporter is configured as shown in Fig. 10. The transport mechanism is configured to have a ferry rail and is arranged in the travel path. The longitudinal direction is perpendicular to the space between the pair of article receiving and receiving frames; and the intermediate transfer device is configured to be freely transferable to the track. In the example of Fig. 10, the transport mechanism is exemplified by a ferry rail and a second path side intermediate transfer device. However, the transport mechanism may be constituted by the ferry rail and the first path side intermediate transfer device. In the above case, it is preferable to provide a moving direction switching means for switching the moving direction of the intermediate transfer device from the direction along the traveling direction of the top transporting vehicle to the direction along the lateral direction of the traveling path. By. Hereinafter, a specific example will be described.

As shown in FIG. 10, the intermediate transfer device 6 is configured to be able to transport the vehicle relative to the top in a state where it can be suspended by the upper rail 65 in the traveling direction of the top transport vehicle 2. The first rail L1 and the second rail L2 are disposed between the buffering frames 55 of the pair of stations 4 arranged in the vertical direction in the vertical direction, and the rails 67 are disposed at the same height as the upper rails 65. At both end portions of the rail 67, a movement direction switching rail 66 (moving direction switching means) that is rotatable about the vertical axis is disposed as a second intermediate transfer device of the buffer frames 55. One part of the upper rail 65 of 6f.

According to the above configuration, the second intermediate transfer device 6f holding the article W travels along the traveling direction of the top transport vehicle 2 to the moving direction switching rail 66. The installation is stopped in a state where the suspension is supported by the movement direction switching rail 66, and then the movement direction switching rail 66 is switched from the direction along the first path L1 and the second path L2 of the top conveyance cart 2 to the edge. The direction of the horizontal direction of the first path L1 and the second path L2, whereby the second intermediate transfer device 6f can move from one of the buffer frames 55 to the other of the buffer frames along the rail 67 Body 55.

When the second intermediate transfer device 6f reaches the other buffer frame 55, the moving direction switching rail 66 in the other buffer frame 55 is transported from the first path L1 and the second path along the top transport vehicle 2. The direction of the lateral direction of the path L2 is switched to the direction along the first path L1 and the second path L2, whereby the second intermediate transfer device 6f can follow the upper rail in the other buffer frame 55 65 moves, and the article W is transferred to the article in the other station 4 or to the intermediate scaffold 5 in the buffer frame of the platform 4. Thus, the same second intermediate transfer device 6f can be used for the buffer frame 55 of one of the stations 4 and the buffer frame 55 of the other station 4.

1‧‧‧Travel track, path of travel

1a, 1b‧‧‧ rail components

2‧‧‧Top transporter

3‧‧‧Control Department

4‧‧‧ Platform

5‧‧‧Intermediate scaffolding

5n‧‧‧1st path side intermediate scaffolding

5f‧‧‧2nd path side intermediate scaffolding

6‧‧‧Intermediate transfer device

6n‧‧‧1st intermediate transfer device

6f‧‧‧2nd intermediate transfer device

7‧‧‧Handling device

8‧‧‧Processing device

8a‧‧‧1st treatment unit

8b‧‧‧2nd treatment unit

9‧‧‧ rail support components

10‧‧‧Travel Department

11‧‧‧ Body Department

12‧‧‧ Lifting operation

13‧‧‧ Coverage

14‧‧‧Power coil

15‧‧‧Power supply line

16, 49‧‧‧ Winding belt

17‧‧‧Guidance support

18, 19‧‧‧A pair of lower guide rails

20, 21‧‧‧ rail mounting components

22‧‧‧ Lifting support

24‧‧‧ Scaffolding

25‧‧‧Horizontal frame members

25T‧‧‧ horizontal horizontal members

25Y‧‧‧Longitudinal members

26‧‧‧Longitudinal joint members

27‧‧‧Intermediate shed frame

27a‧‧‧Loading section

27b‧‧‧Connector section on one side

27c‧‧‧Connector section on the other side

28‧‧‧Locating pin

29‧‧‧Link bracket

31‧‧‧Wave operations

32‧‧‧Mobile substrate

33‧‧‧ operated bracket

33a‧‧‧ horizontal section

34, 35‧‧ ‧ sliding block

36a‧‧‧With tooth drive pulley

36b‧‧‧driven pulley

37‧‧‧Moving motor

38‧‧‧Time belt for mobile operation

39‧‧‧ Guide block

40‧‧‧Rolling screw

40a‧‧‧screw

41‧‧‧ Lifting support

42‧‧‧Sliding fork

43‧‧‧Connected belt

44‧‧‧Wave operation motor

45‧‧‧ Lifting operation

46‧‧‧ gyroscopic operation

47‧‧‧Moving motor

48‧‧‧Rotating drum

50‧‧‧Rotary motor

51‧‧‧Travel motor

52‧‧‧ Lifting motor

53‧‧‧Rotary motor

54‧‧‧Control motor

55‧‧‧Blocking frame

55a‧‧‧ upstream part

55b‧‧‧ downstream part

55n‧‧‧1st path side frame

55f‧‧‧2nd path side frame

56‧‧‧Transporting transport aircraft

57‧‧‧Transport path section

58‧‧‧ article placement table

59‧‧‧Transporting mobile body

60‧‧‧ gap

61‧‧‧Travel motor

62‧‧‧Moving motor

63‧‧‧Rotary motor

64‧‧‧ receiving platform

65‧‧‧Upper rail

66‧‧‧Moving direction switching rail

67‧‧‧ Ferry

a, b‧‧‧ direction of travel

G1‧‧‧1st transfer target group

G2‧‧‧2nd transfer target group

HC‧‧‧ main controller

LP1‧‧‧1st circular path

LP2‧‧‧2nd circular path

LP3‧‧‧3rd circular path

L1‧‧‧1st path

L2‧‧‧2nd path

Pc‧‧‧Transporter transfer position

Pf1~Pf5, Pn1~Pn5‧‧‧Load stop position

Q1‧‧‧Stop position for the recipient

Q1a‧‧‧1st supply and delivery department stop position

Q1b‧‧‧2nd supply and delivery department stop position

Q1c‧‧‧3rd supply and delivery department stop position

Q2n‧‧‧1st path side intermediate scaffolding stop position

Q2f‧‧‧2nd path side intermediate scaffolding stop position

VCp‧‧Intermediate Transfer Device Controller

VCq‧‧‧Top transport controller

VCr‧‧‧Transporter Controller

W‧‧‧ items

Fig. 1 is a plan view showing the entire article transport apparatus of the embodiment.

Fig. 2 is a partially enlarged plan view of Fig. 1.

Fig. 3 is a partial enlarged side view of Fig. 1.

Figure 4 is a front elevational view of the direction of travel of the top transport vehicle.

Figure 5 is an enlarged front elevational view of a portion of Figure 4.

Fig. 6 is a plan view showing the arrangement state of the transport conveyor.

Fig. 7 is a front view showing the configuration state of the transport conveyor.

Figure 8 is a plan view showing the stop position of the intermediate transfer device.

Figure 9 is a control block diagram.

Fig. 10 is a plan view showing a conveying mechanism of another embodiment.

1a, 1b‧‧‧ rail components

2‧‧‧Top transporter

3‧‧‧Control Department

4‧‧‧ Platform

5‧‧‧Intermediate scaffolding

5n‧‧‧1st path side intermediate scaffolding

5f‧‧‧2nd path side intermediate scaffolding

6n‧‧‧1st intermediate transfer device

6f‧‧‧2nd intermediate transfer device

7‧‧‧Handling device

8‧‧‧Processing device

9‧‧‧ rail support components

10‧‧‧Travel Department

11‧‧‧ Body Department

12‧‧‧ Lifting operation

13‧‧‧ Coverage

14‧‧‧Power coil

15‧‧‧Power supply line

16‧‧‧Wind belt

17‧‧‧Guidance support

18, 19‧‧‧A pair of lower guide rails

20, 21‧‧‧ rail mounting components

22‧‧‧ Lifting support

25‧‧‧Horizontal frame members

25T‧‧‧ horizontal horizontal members

26‧‧‧Longitudinal joint members

27‧‧‧Intermediate Shed Architecture

55‧‧‧Blocking frame

55n‧‧‧1st path side frame

55f‧‧‧2nd path side frame

56‧‧‧Transporting transport aircraft

57‧‧‧Transport path section

64‧‧‧ receiving platform

Q1a‧‧‧1st supply and delivery department stop position

Q2f‧‧‧2nd path side intermediate scaffolding stop position

W‧‧‧ items

Claims (5)

An article transporting device is provided with: a top transporting vehicle that travels freely along a traveling path in a state of guiding and supporting a traveling rail disposed on a top side, and has a gripping portion for supporting an article and allowing it to freely move up and down And the article can be freely transferred between the article receiving and receiving portion provided on the floor side; and the intermediate scaffolding is disposed above the feeding and receiving portion of the article and below the top transporting vehicle, and can temporarily place the opposite article In the case of the article to be transferred by the receiving portion, the traveling path is provided with a linear first path, and is provided by the supply/receiving portion stop position disposed directly above the article supply and receiving portion; and the linear second portion The path is parallel to the first path and is set at a different position in the lateral direction of the first path. The intermediate scaffolding is provided with a first path-side intermediate scaffold located directly below the first path. And a position different from the article receiving and receiving portion in the traveling direction of the top transporting vehicle; and the second trailing side intermediate scaffolding being located directly below the second path, and having an intermediate shifting load The intermediate transfer device has a gripping portion for supporting the transfer device and is capable of freely moving up and down in the vertical direction, and is slidable in the lateral direction of the first path and the second path. The intermediate transfer device is provided with a first path side intermediate portion between the first path side intermediate scaffold, the second path side intermediate scaffold, and the article receiving and receiving unit. Transfer device Or at least one of the second path side intermediate transfer device, wherein the first path side intermediate transfer device is provided in the middle of the first path and the first path side as viewed from a traveling direction of the top transport vehicle In a state in which the scaffolding is vertically overlapped, a height between the first path and the intermediate side scaffold of the first path side is freely movable back and forth along a traveling direction of the top transport vehicle, and the second path side is intermediately moved. The carrier device is provided in a state in which the second path and the second path side intermediate scaffold are vertically overlapped in a state in which the second path and the second path side intermediate scaffold are vertically overlapped, and the second path and the second path side intermediate scaffolding are provided The height between them can be freely moved back and forth along the direction of travel of the aforementioned top transport vehicle. In the article transporting apparatus of the first aspect of the invention, the first path side intermediate transfer device and the second path side intermediate transfer device are provided, and the first path side intermediate transfer device has the aforementioned The transfer device holding portion is movable between the first path side position immediately below the first path and the second path side position immediately below the second path, and is configured to be used for the transfer device The gripping unit is freely movable along the traveling direction of the top transport vehicle in a state where the grip portion is located at the first path side position, and the second path side intermediate transfer device has the gripping portion for the transfer device. Advancing and retreating between the second path side position and the first path side position, and being configured to be able to travel along the top transporting vehicle while the transfer device gripping portion is located at the second path side position The direction is free to move. The article transporting apparatus according to claim 1 or 2, wherein the article receiving and receiving section is provided with an article feeding and receiving section and another article spaced apart from a width direction of the first path and the second path. The receiving portion corresponds to the first path and the second path provided in the article receiving and receiving unit, and the first path and the second path provided in correspondence with the other article receiving and receiving unit. The first path and the second path are arranged in parallel in a horizontal direction, and at least one of the first path and the second path provided corresponding to the one-piece supply/receiving unit corresponds to at least one of Both ends of at least one of the first path and the second path provided by the other article receiving and receiving unit are connected to a transfer path, and the top transport vehicle is configured to correspond to the aforementioned one. The first path and the second path provided in the receiving portion are connected to the transfer path, and the first path and the second path provided in the other item supply/receiving unit are connected to the transfer Between paths It is freely movable via the transfer path, and is provided between the intermediate transfer device provided corresponding to the one-piece supply/receiving portion and the intermediate transfer device provided corresponding to the other article supply/receiving portion. A transport mechanism that transports articles freely in the lateral direction of the first path and the second path. The article transporting apparatus according to claim 3, wherein the transporting mechanism is constituted by a transporting transporter, and the transporting transporter is intermediately movable with the first path side provided corresponding to the one of the article receiving and receiving sections. Receiving and receiving items between the device or the aforementioned second path side intermediate transfer device The support item is freely placed at the one-side transfer position, and the article can be freely placed and transported to the first path-side intermediate transfer device or the second device provided in correspondence with the other article supply/receiving portion. The other side of the path-side intermediate transfer device is the transfer position of the other side of the article. The article transporting apparatus according to claim 1 or 2, wherein the first path and the second path are disposed at the same height, and the first path side intermediate scaffold and the second path side intermediate scaffold They are set at the same height with each other.