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TWD232581S - Inner tube of reaction tube for semiconductor manufacturing equipment - Google Patents

Inner tube of reaction tube for semiconductor manufacturing equipment Download PDF

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Publication number
TWD232581S
TWD232581S TW111305738F TW111305738F TWD232581S TW D232581 S TWD232581 S TW D232581S TW 111305738 F TW111305738 F TW 111305738F TW 111305738 F TW111305738 F TW 111305738F TW D232581 S TWD232581 S TW D232581S
Authority
TW
Taiwan
Prior art keywords
semiconductor manufacturing
tube
manufacturing equipment
reaction tube
inner tube
Prior art date
Application number
TW111305738F
Other languages
Chinese (zh)
Inventor
平野敦士
Original Assignee
日商國際電氣股份有限公司 (日本)
日商國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商國際電氣股份有限公司 (日本), 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司 (日本)
Publication of TWD232581S publication Critical patent/TWD232581S/en

Links

Abstract

【物品用途】;本設計的物品是半導體製造裝置用反應管的內管，係安裝於反應管之內側而被使用的內管，而該反應管係被使用於半導體製造裝置。;【設計說明】;(無)[Purpose of the article]; The article of this design is an inner tube of a reaction tube for a semiconductor manufacturing device, which is an inner tube installed on the inner side of the reaction tube and used, and the reaction tube is used in a semiconductor manufacturing device. ;[Design description];(None)

Description

半導體製造裝置用反應管的內管Inner tube of reaction tube for semiconductor manufacturing equipment

本設計的物品是半導體製造裝置用反應管的內管，係安裝於反應管之內側而被使用的內管，而該反應管係被使用於半導體製造裝置。The article of this design is an inner tube of a reaction tube for a semiconductor manufacturing device, which is an inner tube installed on the inner side of a reaction tube and used, and the reaction tube is used in a semiconductor manufacturing device.

(無)(without)

TW111305738F 2022-05-30 2022-11-18 Inner tube of reaction tube for semiconductor manufacturing equipment TWD232581S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022011409F JP1731673S (en) 2022-05-30 2022-05-30
JP2022-011409 2022-05-30

Publications (1)

Publication Number Publication Date
TWD232581S true TWD232581S (en) 2024-08-01

Family

ID=84322290

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111305738F TWD232581S (en) 2022-05-30 2022-11-18 Inner tube of reaction tube for semiconductor manufacturing equipment

Country Status (3)

Country Link
US (1) USD1019581S1 (en)
JP (1) JP1731673S (en)
TW (1) TWD232581S (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1054992S1 (en) * 2023-05-05 2024-12-24 Molex, Llc Connector
USD1065091S1 (en) 2023-05-05 2025-03-04 Molex, Llc Connector
USD1051061S1 (en) 2023-05-05 2024-11-12 Molex, Llc Connector

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD213081S (en) 2020-06-15 2021-08-01 日商東京威力科創股份有限公司 Reaction tube for semiconductor manufacturing equipment (1)

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TWD167985S (en) * 2013-06-28 2015-05-21 日立國際電氣股份有限公司 part of reaction tube
TWD168774S (en) * 2013-06-28 2015-07-01 日立國際電氣股份有限公司 part of reaction tube
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Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD213081S (en) 2020-06-15 2021-08-01 日商東京威力科創股份有限公司 Reaction tube for semiconductor manufacturing equipment (1)

Also Published As

Publication number Publication date
JP1731673S (en) 2022-12-08
USD1019581S1 (en) 2024-03-26

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