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JP1658652S - - Google Patents

Info

Publication number
JP1658652S
JP1658652S JPD2019-17637F JP2019017637F JP1658652S JP 1658652 S JP1658652 S JP 1658652S JP 2019017637 F JP2019017637 F JP 2019017637F JP 1658652 S JP1658652 S JP 1658652S
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JPD2019-17637F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JPD2019-17637F priority Critical patent/JP1658652S/ja
Priority to TW108307123F priority patent/TWD208179S/en
Priority to US29/716,458 priority patent/USD939459S1/en
Application granted granted Critical
Publication of JP1658652S publication Critical patent/JP1658652S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JPD2019-17637F 2019-08-07 2019-08-07 Active JP1658652S (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JPD2019-17637F JP1658652S (en) 2019-08-07 2019-08-07
TW108307123F TWD208179S (en) 2019-08-07 2019-11-21 Part of wafer boat for substrate processing equipment
US29/716,458 USD939459S1 (en) 2019-08-07 2019-12-10 Boat for wafer processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2019-17637F JP1658652S (en) 2019-08-07 2019-08-07

Publications (1)

Publication Number Publication Date
JP1658652S true JP1658652S (en) 2020-04-27

Family

ID=70335647

Family Applications (1)

Application Number Title Priority Date Filing Date
JPD2019-17637F Active JP1658652S (en) 2019-08-07 2019-08-07

Country Status (3)

Country Link
US (1) USD939459S1 (en)
JP (1) JP1658652S (en)
TW (1) TWD208179S (en)

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Publication number Priority date Publication date Assignee Title
KR102552458B1 (en) * 2019-07-31 2023-07-06 가부시키가이샤 코쿠사이 엘렉트릭 Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device
USD989012S1 (en) * 2020-09-17 2023-06-13 Ebara Corporation Elastic membrane
USD1006768S1 (en) * 2021-01-07 2023-12-05 Solaero Technologies Corp. Semiconductor wafer for mosaic solar cell fabrication
JP1718604S (en) 2021-10-15 2022-06-29 Carrier board for handling
JP1727916S (en) 2021-10-15 2022-10-21 Carrier substrate for handling
JP1724567S (en) 2021-10-15 2022-09-12 Carrier substrate for handling
JP1724481S (en) 2021-10-15 2022-09-12 Carrier substrate for handling
USD1054388S1 (en) 2021-10-15 2024-12-17 Shin-Etsu Chemical Co., Ltd. Carrier substrate for handling
JP1718541S (en) 2021-10-15 2022-06-29 Carrier board for handling
USD1055006S1 (en) * 2022-03-18 2024-12-24 Applied Materials, Inc. Support ring for an interlocking process kit for a substrate processing chamber
USD1042374S1 (en) 2022-03-18 2024-09-17 Applied Materials, Inc. Support pipe for an interlocking process kit for a substrate processing chamber
USD1042373S1 (en) 2022-03-18 2024-09-17 Applied Materials, Inc. Sliding ring for an interlocking process kit for a substrate processing chamber
JP1731674S (en) * 2022-05-30 2022-12-08
JP1731673S (en) * 2022-05-30 2022-12-08
JP1731675S (en) * 2022-05-30 2022-12-08
USD1064005S1 (en) * 2022-08-04 2025-02-25 Applied Materials, Inc. Grounding ring of a process kit for semiconductor substrate processing
JP1768691S (en) 2023-12-19 2024-04-19 Metal Gasket

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USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
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USD380454S (en) * 1995-05-30 1997-07-01 Tokyo Electron Limited Wafer boat
JP3122364B2 (en) * 1996-02-06 2001-01-09 東京エレクトロン株式会社 Wafer boat
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USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
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US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
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TWD130137S1 (en) * 2006-10-25 2009-08-01 東京威力科創股份有限公司 Crystal Boat
TWD133942S1 (en) * 2008-03-28 2010-03-21 東京威力科創股份有限公司 Crystal Boat
USD600221S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
USD616396S1 (en) * 2009-03-12 2010-05-25 Tokyo Electron Limited Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
USD655682S1 (en) * 2010-06-18 2012-03-13 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
TWD163542S (en) * 2013-03-22 2014-10-11 日立國際電氣股份有限公司 Wafer boat for substrate processing equipment
TWD166332S (en) * 2013-03-22 2015-03-01 日立國際電氣股份有限公司 Part of the wafer boat for substrate processing equipment
TWD168827S (en) * 2013-07-29 2015-07-01 日立國際電氣股份有限公司 Wafer boats for semiconductor manufacturing equipment
TWD167988S (en) * 2013-07-29 2015-05-21 日立國際電氣股份有限公司 Wafer boats for semiconductor manufacturing equipment
TWD165429S (en) * 2013-07-29 2015-01-11 日立國際電氣股份有限公司 Wafer boats for semiconductor manufacturing equipment
JP1563649S (en) * 2016-02-12 2016-11-21
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus

Also Published As

Publication number Publication date
USD939459S1 (en) 2021-12-28
TWD208179S (en) 2020-11-11

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