JP1773329S - Susceptor - Google Patents
SusceptorInfo
- Publication number
- JP1773329S JP1773329S JP2024002982F JP2024002982F JP1773329S JP 1773329 S JP1773329 S JP 1773329S JP 2024002982 F JP2024002982 F JP 2024002982F JP 2024002982 F JP2024002982 F JP 2024002982F JP 1773329 S JP1773329 S JP 1773329S
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- wafer
- base
- constitutes
- serves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Abstract
本物品は、半導体製造装置等においてウェハを保持するために用いるサセプタユニットを構成するカバーベース一体型サセプタ部品であり、ウェハが載置される土台となる部品である。The present article is a cover-base integrated susceptor part that constitutes a susceptor unit used to hold a wafer in a semiconductor manufacturing device or the like, and serves as a base on which the wafer is placed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024002982F JP1773329S (en) | 2024-02-13 | 2024-02-13 | Susceptor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024002982F JP1773329S (en) | 2024-02-13 | 2024-02-13 | Susceptor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1773329S true JP1773329S (en) | 2024-06-18 |
Family
ID=91483714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024002982F Active JP1773329S (en) | 2024-02-13 | 2024-02-13 | Susceptor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP1773329S (en) |
-
2024
- 2024-02-13 JP JP2024002982F patent/JP1773329S/en active Active
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