TWD126122S1 - Wafer holding member - Google Patents
Wafer holding memberInfo
- Publication number
- TWD126122S1 TWD126122S1 TW096306623F TW96306623F TWD126122S1 TW D126122 S1 TWD126122 S1 TW D126122S1 TW 096306623 F TW096306623 F TW 096306623F TW 96306623 F TW96306623 F TW 96306623F TW D126122 S1 TWD126122 S1 TW D126122S1
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- article
- creation
- mechanical arm
- bottom side
- Prior art date
Links
- 238000001179 sorption measurement Methods 0.000 abstract 2
- 238000010586 diagram Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Abstract
【物品用途】;本創作的物品是一種晶圓保持具,其主要用途乃如各使用狀態參考圖所示,將本物品配置在伸縮、旋轉、移動自如的機械臂(未圖示)的前端,隨著該機械臂的伸縮、旋轉、移動,將晶圓搬送到所要的位置。;【創作特點】;在底面側具有六個吸盤狀的吸附部,並且具有四個突起狀的墊片,用來保持直徑8吋(約20cm)之半導體裝置用的晶圓,本物品是藉由該吸附部來吸附晶圓,讓晶圓保持在底面側,又藉由抵接各墊片的側面和晶圓的外周來調整晶圓相對於本物品的相對位置;綜上所述,本創作確為一理想美觀之設計。;[Purpose of the article]; The article of this creation is a wafer holder. Its main purpose is to place this article at the front end of a mechanical arm (not shown) that can be extended, rotated and moved freely, as shown in the reference diagrams of each use state, and to move the wafer to the desired position as the mechanical arm extends, rotates and moves. ; [Features of the creation]; There are six suction cup-shaped adsorption parts on the bottom side, and four protruding pads, which are used to hold a wafer with a diameter of 8 inches (about 20cm) for semiconductor devices. This article uses the adsorption parts to adsorb the wafer to keep the wafer on the bottom side, and adjusts the relative position of the wafer relative to this article by contacting the side surfaces of each pad and the outer periphery of the wafer; In summary, this creation is indeed an ideal and beautiful design. ;
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007015047 | 2007-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD126122S1 true TWD126122S1 (en) | 2008-11-21 |
Family
ID=40474450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096306623F TWD126122S1 (en) | 2007-06-06 | 2007-12-05 | Wafer holding member |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | USD589474S1 (en) |
| TW (1) | TWD126122S1 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101784850B1 (en) | 2010-06-11 | 2017-11-06 | 가부시키가이샤 리코 | Information storage system removably installable in image forming apparatus, removable device, and toner container |
| USD766850S1 (en) * | 2014-03-28 | 2016-09-20 | Tokyo Electron Limited | Wafer holder for manufacturing semiconductor |
| TWD172679S (en) * | 2014-06-09 | 2015-12-21 | 家登精密工業股份有限公司 | Gas diffusion device for wafer box |
| USD1046798S1 (en) * | 2020-12-17 | 2024-10-15 | Omron Corporation | Gripper for semiconductor wafer housing cassette |
| USD1054388S1 (en) * | 2021-10-15 | 2024-12-17 | Shin-Etsu Chemical Co., Ltd. | Carrier substrate for handling |
| JP1722253S (en) * | 2022-02-03 | 2022-08-12 | Gripper for semiconductor wafer storage cassette | |
| JP1722252S (en) * | 2022-02-03 | 2022-08-12 | Gripper for semiconductor wafer storage cassette | |
| USD1035600S1 (en) * | 2022-02-23 | 2024-07-16 | Rf Scientific, Llc | Semiconductor test fixture |
| JP1762250S (en) * | 2023-06-22 | 2024-01-25 | Gripping machine for semiconductor wafer storage cassettes |
-
2007
- 2007-12-05 TW TW096306623F patent/TWD126122S1/en unknown
- 2007-12-06 US US29/298,522 patent/USD589474S1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| USD589474S1 (en) | 2009-03-31 |
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