TWD172679S - Gas diffusion device for wafer box - Google Patents
Gas diffusion device for wafer boxInfo
- Publication number
- TWD172679S TWD172679S TW103303461F TW103303461F TWD172679S TW D172679 S TWD172679 S TW D172679S TW 103303461 F TW103303461 F TW 103303461F TW 103303461 F TW103303461 F TW 103303461F TW D172679 S TWD172679 S TW D172679S
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer box
- design
- gas diffusion
- air inlet
- accommodation space
- Prior art date
Links
- 238000009792 diffusion process Methods 0.000 title abstract 5
- 230000004308 accommodation Effects 0.000 abstract 4
Abstract
【物品用途】;本設計物品係設置於晶圓盒內，用以將氣體均勻擴散至晶圓盒內。;【設計說明】;本設計晶圓盒之氣體擴散裝置，其中左側視圖與右側視圖相對稱，故省略左側視圖。;本設計晶圓盒之氣體擴散裝置，包括一本體，該本體具有一容置空間；一進氣部，位於容置空間底側；一檔止件位於容置空間，該檔止件與本體後側形成一間隙。;該檔止件面向本體前側具有一平面，該平面具有靠近進氣部之一第一部分(B’-B’端面剖視圖)，及遠離進氣部之一第二部分(A’-A’端面剖視圖)；該第一部分寬度不變，該第二部分寬度往遠離進氣部方向漸增。;綜上所述，本設計之晶圓盒擴散裝置，利用內部容置空間設計，完成氣體擴散均勻之效果。[Use of article]; This designed article is placed in the wafer box to evenly diffuse gas into the wafer box. ;[Design Description];In this design of the gas diffusion device of the wafer box, the left view and the right view are symmetrical, so the left view is omitted. ;The gas diffusion device of the wafer box of this design includes a body with an accommodation space; an air inlet located at the bottom side of the accommodation space; a stopper located in the accommodation space, and the stopper is in contact with the body A gap is formed on the back side. ;The stopper has a plane facing the front side of the body. The plane has a first part close to the air inlet (B'-B' end section view), and a second part far away from the air inlet (A'-A' end face). Cross-sectional view); the width of the first part remains unchanged, and the width of the second part gradually increases toward the direction away from the air inlet. ; In summary, the wafer box diffusion device of this design utilizes the internal accommodation space design to achieve uniform gas diffusion.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW103303461F TWD172679S (en) | 2014-06-09 | 2014-06-09 | Gas diffusion device for wafer box |
| US29/510,673 USD749531S1 (en) | 2014-06-09 | 2014-12-02 | Diffusion assembly for front opening unified pod |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW103303461F TWD172679S (en) | 2014-06-09 | 2014-06-09 | Gas diffusion device for wafer box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD172679S true TWD172679S (en) | 2015-12-21 |
Family
ID=55275808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103303461F TWD172679S (en) | 2014-06-09 | 2014-06-09 | Gas diffusion device for wafer box |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | USD749531S1 (en) |
| TW (1) | TWD172679S (en) |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD342529S (en) * | 1992-04-30 | 1993-12-21 | S & K Products | Holder for carrying wafers |
| US5452795A (en) * | 1994-11-07 | 1995-09-26 | Gallagher; Gary M. | Actuated rotary retainer for silicone wafer box |
| US5844683A (en) * | 1996-05-22 | 1998-12-01 | Applied Materials, Inc. | Position sensor system for substrate holders |
| US5960959A (en) * | 1998-01-13 | 1999-10-05 | Industrial Technology Research Institute | Wafer retaining mechanism |
| US6615994B2 (en) * | 2001-09-18 | 2003-09-09 | Intel Corporation | Wafer boat |
| US6981594B1 (en) * | 2003-06-17 | 2006-01-03 | National Semiconductor Corporation | Method and apparatus to facilitate transport of semiconductor wafers |
| KR100573896B1 (en) * | 2004-08-16 | 2006-04-26 | 동부일렉트로닉스 주식회사 | Wafer departure prevention apparatus and method |
| KR101075512B1 (en) * | 2005-12-06 | 2011-10-21 | 후지쯔 세미컨덕터 가부시키가이샤 | Semiconductor wafer storage case and method of storing wafers |
| FR2896912B1 (en) * | 2005-12-09 | 2008-11-28 | Alcatel Sa | SEALED ENCLOSURE FOR TRANSPORTING AND STORING SEMICONDUCTOR SUBSTRATES |
| TWM309202U (en) * | 2006-08-15 | 2007-04-01 | Gudeng Prec Industral Co Ltd | Wafer pod and wafer holding device thereof |
| TWD126123S1 (en) * | 2007-06-06 | 2008-11-21 | 東京威力科創股份有限公司 | Wafer holding member |
| TWD126122S1 (en) * | 2007-06-06 | 2008-11-21 | 東京威力科創股份有限公司 | Wafer holding member |
| USD594424S1 (en) * | 2007-07-12 | 2009-06-16 | Hiwin Mikrosystem Corp. | Wafer carrier |
| US7857139B2 (en) * | 2007-09-24 | 2010-12-28 | Intel Corporation | Invertible front opening unified pod |
| JP5524093B2 (en) * | 2008-03-13 | 2014-06-18 | インテグリス・インコーポレーテッド | Wafer container with tubular control element |
| USD674366S1 (en) * | 2011-01-20 | 2013-01-15 | Tokyo Electron Limited | Wafer holding member |
| USD674761S1 (en) * | 2011-10-20 | 2013-01-22 | Tokyo Electron Limited | Wafer holding member |
| US8544651B2 (en) * | 2012-01-20 | 2013-10-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer transfer pod for reducing wafer particulate contamination |
-
2014
- 2014-06-09 TW TW103303461F patent/TWD172679S/en unknown
- 2014-12-02 US US29/510,673 patent/USD749531S1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| USD749531S1 (en) | 2016-02-16 |
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