TW201727805A - Substrate case, compartment, and substrate transfer container - Google Patents

Abstract

To provide a novel substrate case including a housing section which can prevent the top face of the substrate from being scratched, while reducing the form for transporting the substrate. A substrate case 30 having a plurality of housing sections for housing substrates has a plurality of trays 10. A substrate 20 is supported on the inside of locking parts 11a-11d in the surface of one tray 10, and the end of the substrate 20 is locked by locking protrusions 13b, 13d, 13f and 13h in the rear surface of other tray 10 located above that tray 10, thus holding the substrate 20.

Description

Substrate box, storage unit and substrate carrier

The present invention relates to a substrate cassette, a housing portion constituting the substrate cassette, and a substrate carrier including the substrate cassette.

With the high functionality of mobile phones, digital AV devices, and IC cards, the mounted semiconductor wafers (hereinafter referred to as wafers) are miniaturized and thinned, and accordingly, it is increasingly required to make the wafers high in the package. Integrated. For example, in an integrated circuit in which a plurality of wafers are packaged in a single package, which is represented by a CSP (chip size package) or an MCP (multi-chip package), thinning is required. In order to achieve high integration of the wafer in the package, it is necessary to make the thickness of the wafer as thin as 25 to 150 μm. In this manner, when a highly thinned wafer substrate or the like is transported, a case accommodating the substrate is used.

For example, Patent Document 1 discloses that in a trench-shaped housing chamber in which a substrate can be housed, an elastic film slightly covering the opening cross section is provided at a position shallower than the bottom surface thereof, and the substrate case supporting the substrate is supported by the elastic film. .

Patent Document 2 describes a semiconductor wafer storage case in which a peripheral portion of a semiconductor wafer is sandwiched by a holder having a U-shaped cross section formed by a front end opening.

Patent Document 3 describes a storage case in which a holding portion for holding a peripheral portion of a disk is provided inside a disk housing space in which the disk is housed.

Patent Document 4 describes a one-piece wafer cassette in which a wafer peripheral portion is sandwiched by a lower wafer press and an upper wafer presser to fix and hold the wafer when the wafer is stored. The wafer cassette in the wafer cassette.

Patent Document 5 describes that a tape for adhering a wafer to a wafer is held while a stacking member having the frame is stacked in a packing box, and is stacked by a buffer material to prevent transportation. A method of packing a wafer in the case where the tape is peeled off from the frame, such as impact.

[Advanced technical literature] [Patent Literature]

Patent Document 1: Japanese Patent Publication No. 8-17903 (published on January 19, 1996)

Patent Document 2: Japanese Laid-Open Patent Publication No. Hei 8-236605 (published on September 13, 1996)

Patent Document 3: Japanese Laid-Open Patent Publication No. 2001-148417 (published on May 29, 2001)

Patent Document 4: Japanese Laid-Open Patent Publication No. 2009-43862 (published on Feb. 26, 2009)

Patent Document 5: Japanese Laid-Open Patent Publication No. 2002-145380 (published on May 22, 2002)

However, in the substrate cassettes described in Patent Documents 1 to 4, the substrate is fixed by being sandwiched or held on the upper surface of the substrate and the peripheral portion of the bottom surface. Further, in the technique described in Patent Document 5, the bottom surface of the substrate is fixed by a dicing tape.

In the techniques described in Patent Documents 1 to 4, one of the upper surface and the bottom surface of the substrate is in contact with a member for fixing the substrate. Therefore, when the substrate is housed in the substrate cassette and transported, there is a problem that scratches occur on the upper surface of the substrate. Further, the substrate cassette described in Patent Document 5 can be used to easily accommodate the substrate, and it is possible to prevent the occurrence of scratches on the upper surface of the substrate.

Further, in the substrate cassettes and the like described in Patent Documents 1 to 5, since the plurality of substrates are housed in the individual spaces, there is a problem that the conveyance pattern becomes large when a large number of substrates are transported.

The present invention has been made in view of the above problems, and a main object thereof is to provide a novel substrate cassette having a housing portion that can prevent scratches on the upper surface of the substrate and that reduces the shape of the substrate to be transported.

In order to solve the above problems, a plurality of The substrate cassette accommodating the accommodating portion of the substrate, wherein the accommodating portion includes a surface portion having a locking portion having a step that locks an end portion of the substrate; The back surface portion includes a locking convex portion that locks an end portion of the substrate, and the substrate is supported inside the locking portion of the surface portion of the one storage portion, and is further positioned above the storage portion The locking convex portion on the back surface portion of the accommodating portion locks the end portion of the substrate, thereby holding the substrate.

According to the present invention, it is possible to provide a novel substrate cassette having a accommodating portion capable of preventing scratches on the upper surface of the substrate and reducing the type of the substrate to be transported.

10, 10', 10" ‧ ‧ tray (storage department)

11a, 11b, 11c, 11d‧‧‧ carding

11’a, 11’c‧‧‧ carding

11"a, 11"b, 11"c, 11"d‧‧‧ carding

12, 12a, 12b, 12c, 12d, 12e‧ ‧ support

12’d, 12’e‧‧‧ support

12f‧‧‧Support

13a, 13c, 13e, 13g‧‧‧ locking recesses

13’a, 13’e‧‧‧ card recess

13"a, 13"c, 13"e, 13"g‧‧‧ card recess

13b, 13d, 13f, 13h‧‧‧ locking projections

13’b, 13’f‧‧‧ carding convex

13"b, 13"d, 13"f, 13"h‧‧‧ stuck convex

14a, 14b, 14c, 14d, 14e, 14e, 14f, 14g, 14h, 14J, 14k, 14l, 14m, 14n‧‧‧ fitting

15a, 15b, 15c, 15d, 15e, 15e, 15f, 15g, 15h, 15i, 15J, 15k, 15l, 16a, 16b, 16c, 16d, 16e, 16f‧‧‧ third abutment

17a, 17c, 17e, 17g‧‧‧ first abutment

17’a, 17’e‧‧‧ first abutment

17b, 17d, 17f, 17h‧‧‧ second abutment

18a, 18b, 18c, 18d, 18e, 18f, 18g, 18h‧‧‧ second abutment

20‧‧‧Substrate

20a‧‧‧End (substrate)

20b‧‧‧Bottom (substrate)

A1‧‧‧Chamfering part (end)

A2‧‧‧Chamfering part (end)

30, 30'‧‧‧ substrate box

40‧‧‧Table (board)

40a‧‧‧Gap section (board part)

41‧‧‧Bundle belt (belt)

50‧‧‧Substrate carrier

Fig. 1 is a view for explaining an outline of a housing portion relating to an embodiment (first embodiment) of the present invention.

Fig. 2 is a cross-sectional view showing the outline of a housing portion and a substrate cassette according to an embodiment (first embodiment) of the present invention.

Fig. 3 is a cross-sectional view showing the outline of a housing portion and a substrate cassette according to an embodiment (first embodiment) of the present invention.

Fig. 4 is a cross-sectional view showing the outline of a housing portion and a substrate cassette according to an embodiment (first embodiment) of the present invention.

Fig. 5 is a side view showing the outline of a housing portion and a substrate cassette according to an embodiment of the present invention.

Fig. 6 is a side view showing another outline of a housing portion and a substrate cassette according to an embodiment of the present invention.

Fig. 7 is a view for explaining an outline of a substrate carrier according to an embodiment of the present invention.

Fig. 8 is a cross-sectional view showing the outline of a housing portion and a substrate cassette according to an embodiment (second embodiment) of the present invention.

Fig. 9 is a view for explaining an outline of a housing portion according to an embodiment (third embodiment) of the present invention.

Fig. 10 is a cross-sectional view showing the outline of a housing portion and a substrate cassette according to an embodiment (third embodiment) of the present invention.

[Substrate case related to the first embodiment]

Hereinafter, the substrate cassette 30 relating to one embodiment (first embodiment) will be described in detail.

The substrate cassette 30 according to this embodiment has a plurality of trays (accommodating portions) 10 for housing the substrates shown in FIG.

The substrate cassette 30 is held between the surface of one of the trays 10 and the back surface of the other tray 10, and holds the substrate 20 (Figs. 2 and 3). The substrate cassette 30 is attached to one surface portion of one tray 10, supports one portion of the bottom surface 20c of the substrate 20 on one surface, and latches the substrate on the step of the locking portion 11c. End portion 20a of 20 ((c) of Fig. 2). Further, as shown in FIG. 2(c), in the state of supporting the substrate 20, as shown in FIG. 3(c), the card is placed on the back side of the other tray 10 above the one tray 10. The end portion 20a of the substrate 20 is stopped.

Accordingly, the substrate cassette 30 does not allow the back surface portion of the tray 10 located above the substrate 20 to be in contact with the upper surface 20b of the substrate 20, and the substrate 20 can be housed (FIG. 2(c) and FIG. 3(c)). Accordingly, it is possible to prevent the occurrence of scratches on the upper surface 20b of the substrate 20 when the substrate 20 is transported.

Further, the substrate cassette 30 alternately stacks the tray 10 and the substrate 20, whereby the substrate 20 is housed one by one between the trays 10. Therefore, the substrate cassette 30 is housed one by one in a space provided inside the individual substrate cassettes, and the cassette body itself can be prevented from being bulky compared to the type in which the substrate cassette is stacked. Therefore, the substrate cassette 30 can greatly reduce the space in which the substrate 20 is housed, and the form for transporting the substrate 20 can be reduced (FIG. 2(b) and FIG. 3(b)).

Further, the substrate cassette 30 is such that when the other trays 10 are stacked on one tray 10, the trays 10 located above are stacked in the direction of 180° in parallel with the trays 10 located below. Since the shape of the outer peripheral portion in the plan view of the tray 10 is slightly square, it is easy to match the shape of the outer peripheral portion, and the trays 10 are stacked each time the direction of 180° is changed in parallel. Further, even if the tray 10 is provided with a mark indicating a specific direction (not shown).

[substrate]

The substrate 20 is, for example, a glass substrate having a circular shape in plan view. Furthermore, the substrate 20 is subjected to chamfering. More specifically, as shown in FIG. 2(d), the substrate 20 is inverted from the upper surface 20b side of the entire circumference of the end portion 20a and the bottom surface 20c side. Accordingly, the end portion 20a in the substrate 20 is provided with a chamfered portion a1 and a chamfered portion a2.

Further, in the substrate housed in the substrate cassette, the angle of inclination of the chamfered portion of the inverted c-angle is not limited to the angle shown in FIG. 2(d). In addition, although the substrate which is placed on the substrate 20 of the substrate cassette 30 is inverted, the substrate accommodated in the substrate cassette according to an embodiment of the present invention is not limited to the substrate which is inverted. . The substrate cassette may also house, for example, a substrate whose end portion is inverted.

The substrate 20 accommodated in the substrate cassette 30 and transported is taken out from the substrate cassette 30, and an electric circuit can be formed on the upper surface 20b. In addition, the substrate 20 accommodated in the substrate cassette 30 according to the present embodiment is a glass substrate, but the substrate is not limited to the glass substrate. The material of the substrate housed in the substrate cassette is not limited, and a ruthenium substrate, a ceramic substrate, a resin substrate, or the like can be accommodated in addition to the glass substrate.

[tray]

Fig. 1 is a view for explaining the outline of a tray 10 constituting a substrate cassette 30 according to the present embodiment. Fig. 1(a) is a four-side view of a top view of the tray 10 and a side view of the three directions, and Fig. 1(b) is a cross-sectional view of the tray 10 along the arrow A-A', and Fig. 1(c) is A cross-sectional view of the tray 10 along the B-B' arrow line.

As shown in Fig. 1(a), the tray 10 has a substantially square shape in plan view. In the present specification, the surface portion of the tray (accommodating portion) refers to a surface on which the locking portion, the support portion, and the locking concave portion are provided, and the back portion of the storage portion refers to the side on which the locking convex portion is provided. Face.

As shown in Fig. 1(a), the tray 10 has locking portions 11a to 11d, support portions 12a to 12e, locking recesses 13a, 13c, 13e, and 13g and first abutting portions 17a and 17c on the surface portion thereof. 17e and 17g.

As shown in FIG. 1(b), the support portions 12a to 12e are formed on the inner side of the stepped portion 11a and the locking portion 11c formed on the surface portion of the tray 10. The support portions 12a to 12e are also located inside the step of the locking portions 11b and 11d. The tray 10 is attached to the surface portion thereof, latches the end portion 20a of the substrate 20, and supports a portion of the bottom surface 20c of the substrate 20.

As shown in Fig. 1(c), the tray 10 has locking projections 13b and 13f formed on the back surface portion thereof. Similarly to the locking projections 13b and 13f, the locking projections 13d and 13h shown in Fig. 1(a) are formed on the back surface of the tray 10. The tray 10 locks the end portion 20a of the substrate 20 by a locking convex portion formed on the back surface portion thereof.

Further, on the back side of the tray 10, second abutting portions 17b, 17d, 17f, and 17h are formed on the back sides of the first abutting portions 17a, 17c, 17e, and 17g in the surface portion of the tray 10 ( Figure 1 (a)).

Further, the tray 10 has fitting portions 14a to 14n (FIGS. 1, 5, and 6) that are fitted when the plurality of trays 10 are aligned only in the same direction on the side surface portion.

The tray 10 can be formed by, for example, vacuum forming or compression molding Etc., the flat plate is formed and manufactured. The flat plate for forming the accommodating portion is not limited, but a flat plate made of a resin is preferable, and examples thereof include foamed polystyrene. Further, the accommodating portion may be protected by the coating layer.

[locking part]

The locking portions 11a to 11d provided in the tray 10 according to the present embodiment will be described in detail with reference to Figs. 1 and 2 . 2(a) to 2(c) are diagrams showing a state in which the substrate 20 is housed by the plurality of trays 10, based on the A-A' arrow line cross section in Fig. 1(a).

As shown in Fig. 2(a), the step of the locking portions 11a and 11c is inclined so as to be wider as far as the support portion 12e. Similarly to the locking portions 11a and 11c, the locking portions 11b and 11d are also inclined so as to be wider from the support portion 12e. Further, the locking portions 11a to 11d are curved along the shape of the outer peripheral portion of the substrate 20 that is locked inside the locking portions 11a to 11d (Fig. 1(a)). In other words, the locking portions 11a to 11d of the tray 10 have a step having the same shape, and the substrate 20 is housed in a region formed inside the step.

Further, from another viewpoint, the locking portions 11a to 11d are formed by forming the locking recesses 13a, 13c, 13e, and 13g, and the first abutting portions 17a, 17c, 17e, and 17g, and will be on the tray. The surface portion of the surface portion 10 is formed with a step that surrounds the substrate 20 to be supported, and is formed by applying a notch to the outer side of the outer peripheral portion where the substrate 20 is disposed. In the surface portion of the tray 10, a total of four notches of the locking portions 11a to 11d are formed, and the notches facing each other are the regions sandwiching the support substrate 20 on the surface portion of the tray 10. The domain becomes a symmetrical shape.

The step of the locking portions 11a to 11d formed as described above is provided at a position separated from the center of gravity of the substrate 20 at equal intervals when the substrate 20 is held, and is provided at the position of the end portion 20a of the locking substrate 20. . Further, the distance between the adjacent one of the locking portions and the other locking portion is equal (Fig. 1 (a)). Therefore, as shown in FIG. 2(a), when the plurality of trays 10 are stacked, when the trays 10 are stacked each time the direction is changed by 180 degrees in parallel, the locking portions 11a and the locking portions having the same shape are exchanged. In the arrangement of the portion 11c, only the arrangement of the locking portion 11b and the locking portion 11d having the same shape is exchanged, and the locking portions 11a to 11d do not change in the end portion 20a of the locking substrate 20. Therefore, as shown in FIG. 2(b), the substrate cassette 30 composed of the plurality of trays 10 can lock the substrate 20 one by one in the same state on the surface portion of each tray 10.

[support]

In the tray 10 according to the present embodiment, the support portion 12 is constituted by the support portions 12a to 12e, and the shape of the tray 10 in a plan view is such that the center of gravity of the substrate 20 when the substrate 20 is held is The center of the circular plurality of convex parts (Fig. 1 (a) and (b)). Accordingly, the support portions 12a to 12e are formed on the surface portion of the tray 10, and support one portion of the bottom surface 20c of the substrate 20 (Figs. 2 and 3). Therefore, in the surface portion of the tray 10, the area of the bottom surface 20c of the support substrate 20 can be made small, and the bottom surface 20c of the substrate 20 can be hardly scratched. Further, the support portions 12a to 12e are formed by a circular convex portion, and are formed by a circular complex convex centering on the center of gravity of the substrate 20. Therefore, the substrate 20 can be equally supported from the bottom surface 20c thereof.

[Locking recess]

The locking recesses 13a, 13c, 13e, and 13g and the first abutting portions 17a, 17c, 17e, and 17g provided in the tray 10 according to the present embodiment will be described in more detail with reference to Figs. 1 and 3 . .

Fig. 3(a) is a view showing a state in which the substrate 20 is housed by the plurality of trays 10, based on the cross section taken along line B-B' in Fig. 1(a).

As shown in Fig. 3 (a), the locking recesses 13a and 13e facing each other are inside the notch forming the locking portion 11a to 11d, and sandwiching the surface of the substrate 10 supporting the substrate 20 It is symmetrically configured (Fig. 1 (a) and (c)). Further, the locking recesses 13a and 13e respectively sandwich the diagonal line above the locking recess 13a and the locking recess 13e in the slightly square tray 10 (that is, the B-B shown in Fig. 1(a) 'Line' and become an asymmetrical shape.

Further, as shown in Fig. 3(a), the locking recesses 13a and 13e facing each other are the portions of the step portions of the locking portions 11a to 11d which are located away from the substrate 20 which is held away from the substrate 20 The step of the step is such that the step closer to the side of the substrate 20 is relatively low, and the recess is formed. Here, the recessed portions of the locking recesses 13a and 13e are formed at positions lower than the support portions 12a to 12e when the tray 10 is horizontally placed. Therefore, by holding the end portion 20a of the substrate 20 and placing the hand in any of the locking recesses 13a and 13e, it is possible to arrange the head and tail of the substrate 20 well on the inner side of the locking portions 11a to 11d. On the parts 12a~12e. Furthermore, if you put your hand When the end portion 20a of the substrate 20 is held by any of the locking recesses 13a and 13e, the substrate 20 surrounded by the locking portions 11a to 11d can be taken out head and tail.

Further, the locking recesses 13c and 13g are disposed symmetrically with respect to the locking recesses 13a and 13e, and are disposed symmetrically with respect to the region of the surface of the tray 10 supporting the substrate 20 (Fig. 1(a) and c)). Further, the locking recesses 13a and 13e are asymmetrically opposed by a diagonal line (not shown) passing through the center of gravity of the substrate 20 supported by the locking recess 13a, the locking recess 13e, and the surface portion of the tray 10, respectively. Sexual shape. Further, the locking recesses 13c and 13g are portions of the step portions of the locking portions 11a to 11d which are located closer to the side of the substrate 20 than the step which is located away from the side of the substrate 20 held. The step is relatively low, forming a recess. Therefore, the locking recesses 13c and 13g are of course the same as the locking recesses 13a and 13e, and can be used for the arrangement or removal of the substrate 20 on the surface portion of the tray 10.

[First Abutment]

The first abutting portions 17a, 17c, 17e, and 17g are formed adjacent to the locking recesses 13a, 13c, 13e, and 13g, respectively, in the plan view of the tray 10 along the outer peripheral portion of the substrate 20. .

The first abutting portions 17a and 17e facing each other inside the notch forming the locking portions 11a to 11d are symmetrically arranged with the first substrate portions 17a and 17e facing each other sandwiching the surface portion of the tray 10 (Fig. 1(a)).

Furthermore, as shown in Fig. 3(a), the section taken along the B-B' arrow line In the surface, the first abutting portions 17a and 17e facing each other are disposed on the deep side of the paper with respect to the locking recesses 13a and 13e, and are disposed in the recesses of the locking recesses 13a and 13e when the tray 10 is horizontally disposed. High, lower than the support portions 12a to 12e.

Further, the first abutting portions 17c and 17g that face each other are identical to the first abutting portions 17a and 17e, and are disposed symmetrically with respect to the region of the surface of the tray 10 supporting the substrate 20, and when the tray 10 is horizontally arranged It is disposed at a position higher than the recesses of the locking recesses 13c and 13g and lower than the support portions 12a to 12e.

[Locking convex part]

As shown in Fig. 3 (a), the locking projections 13b and 13f are projections formed by projecting the back surfaces of the locking recesses 13a and 13e so as to be convexly fitted to the locking recesses 13a and 13e. unit.

Further, the locking convex portion 13b and the locking convex portion 13f are respectively on the diagonally upper tray 10, and sandwich the diagonal line above the locking convex portion 13b and the locking convex portion 13f (that is, Fig. 1 (a) ) The B-B' line shown) becomes an asymmetrical shape.

Further, the mutually opposing surfaces of the locking projections 13b and 13f are curved along the outer peripheral portion of the substrate 20 disposed on the surface portion of the tray 10, and have a wider width from the back portion of the tray 10. Tilt (Fig. 1(c)). Here, when the substrate 20 is held by the substrate cassette 30, in contact with the chamfered portion a1 of the end portion 20a of the substrate 20 shown in FIG. 2(d), the mutual locking portions 13b and 13f are mutually engaged. Two sides of the opposite direction Tilted.

Further, on both surfaces of the locking convex portions 13b and 13f facing each other, they are separated from the center of gravity of the substrate 20 disposed on the surface portion of the tray 10 at equal intervals. Therefore, even if the trays 10 are stacked each time the direction of 180° is changed in parallel, the chamfering of the end portion 20a of the substrate 20 can be locked only by the arrangement of the mutually opposing faces in the locking projections 13b and 13f. Part a1 (Fig. 3).

Further, as shown in Fig. 1(a), the locking projections 13d and 13h are formed by projecting the back surfaces of the locking recesses 13c and 13g as convex portions fitted to the locking recesses 13c and 13g. Further, the mutually opposing surfaces of the locking projections 13d and 13h are curved along the outer peripheral portion of the substrate 20 disposed on the surface portion of the tray 10, and are wider as far as the back portion of the tray 10 is wider. The slope. Here, when the substrate 20 is housed in the substrate cassette 30, the two opposite surfaces of the locking convex portions 13d and 13h are inclined so as to be in contact with the chamfered portion a1 of the end portion 20a of the substrate 20. Further, similarly to the locking convex portions 13b and 13f, the locking convex portions 13d and 13h have an asymmetrical shape sandwiching a diagonal line (not shown) above the locking convex portions 13d and 13h. Further, on both surfaces of the locking convex portions 13d and 13h facing each other, they are separated from the center of gravity of the substrate 20 disposed on the surface portion of the tray 10 at equal intervals.

(Arrangement of the locking concave portion, the locking convex portion, and the first abutting portion)

The arrangement of the locking concave portion, the locking convex portion, and the first abutting portion when the plurality of trays 10 are stacked will be described with reference to FIGS. 3 and 4 . Figure 4(a) to (d) are diagrams showing the state of stacking the plurality of trays 10 according to the cross section along the C-C' arrow line shown in Fig. 1(a). In addition, in FIG. 4, the tray 10 is stacked every time the direction of 180 is changed in parallel. Therefore, in the three trays 10 shown in Figs. 4(a) and 4(b), the tray 10 located in the middle is disposed in a section according to the section along the arrow line D-D'.

The locking projections 13b and 13f sandwich the diagonal line above the locking convex portion 13b and the locking convex portion 13f in the slightly square tray 10 (that is, the B-B' shown in Fig. 1(a) Line) becomes an asymmetrical shape. Therefore, as shown in FIG. 4(a), when the respective trays 10 are stacked each time the direction of 180° is changed in parallel, the positioning convex portion 13b in the tray 10 located at the uppermost position is disposed in the center The first abutting portion 17e of the tray 10. Further, a first abutting portion 17a of the tray 10 located below is disposed below the locking convex portion 13f of the tray 10 located at the center. Therefore, when the trays 10 are stacked, as shown in FIG. 4(b), a portion of the locking projections 13b of the tray 10 located at the uppermost portion abuts against the first abutting portion in the tray 10 at the center. 17e, and the locking convex portion 13b and the locking concave portion 13a are not fitted. Similarly, the locking convex portion 13f in the tray 10 at the center thereof abuts against the first abutting portion 17a in the tray 10 located below, and the locking convex portion 13f and the locking concave portion 13e are not fitted.

Similarly, as shown in FIG. 4(c), when the trays 10 are stacked each time the direction of 180° is changed in parallel, the locking convex portion 13h located in the uppermost tray 10 is disposed at the center. The first abutting portion 17c in the tray 10. Further, under the locking convex portion 13d in the tray 10 located in the center, the tray 10 located below it is disposed An abutting portion 17g. Therefore, when the trays 10 are stacked, as shown in FIG. 4(d), a portion of the locking projections 13h of the tray 10 located at the uppermost portion abuts against the first abutting portion in the tray 10 at the center. 17c, and the locking convex portion 13h and the locking concave portion 13c are not fitted. Similarly, the locking convex portion 13d in the tray 10 in the center thereof abuts against the first abutting portion 17g in the tray 10 located below, and the locking convex portion 13d and the locking concave portion 13g are not fitted.

In this manner, the locking projections 13b, 13d, 13f, and 13h formed along the outer circumference of the substrate 20 are brought into contact with the first abutment on the surface portion of the tray 10 at the back surface portion of the tray 10. The joint portions 17a, 17c, 17e, and 17g can obtain a sufficient space between the surface portion and the back surface portion of each tray 10 in the region where the substrate 20 is held (Fig. 3(b)). Further, as shown in FIGS. 4(a) to 4(d), the second abutting portions 17b, 17d, 17f, and 17h of the respective trays 10 abut against one of the surface portions of the trays 10 located below.

(Configuration of the substrate 20 in the substrate cassette 30)

As shown in FIGS. 4(a) to 4(d), between the stacked trays 10, the substrate 20 is placed between the surface portion of one tray 10 and the back portion of the other tray 10, and the substrate 20 is housed (FIG. 2 (FIG. 2) b) and Figure 3(b)).

In this state, as shown in Fig. 3(c), the locking convex portion 13b provided on the back surface portion of the upper tray 10 is lower than the support portion 12e of the other tray 10 located below it. Abutting against the first abutting portion 17e. Even for other locking projections, it is also set The first abutting portion is abutted at a position lower than the support portion 12e of the other tray 10 located below. Therefore, when the respective trays are stacked, the end portion 20a of the substrate 20 is locked from the upper surface 20b side by the inclined faces of the locking projections 13b, 13d, 13f, and 13h provided on the back surface portion of one tray 10. In this state, the one tray 10 (or the plurality of stacked trays 10 and the plurality of substrates 20) can be prevented from being applied by causing the locking projections 13b, 13d, 13f, and 13h to abut against the first abutting portions. Therefore, the end portion 20a of the substrate 20 accommodated in the substrate cassette 30 can be prevented from being damaged.

Further, the locking projections 13b, 13d, 13f, and 13h formed on the back surface of one tray 10 lock the substrate supported by the support portions 12a to 12e on the surface portion of the other tray 10 located below the tray 10. Since the chamfered portion a1 of the end portion 20a of the 20a is not brought into contact with the upper surface 20b of the substrate 20, the substrate 20 can be held, and scratching on the upper surface 20b of the substrate 20 can be prevented (Fig. 3(c)).

[fitting part]

The fitting portions 14a to 14n provided in the tray 10 according to the present embodiment will be described in detail with reference to Figs. 5 and 6 . 5(a) and (b) are side views showing a state in which the other trays 10 are changed in the 180° direction and stacked on one tray 10. 6(a) and 6(b) are side views showing another state in which the other trays 10 are stacked in a 180° direction and stacked on one tray 10, from the side different from those in Figs. 5(a) and 5(b).

The fitting portions 14a to 14n provided on the side surface portions of the tray 10 shown in Figs. 5(a) and 5(a) are protruded toward the front of the sheets of the respective drawings. The convex portion is formed by a concave portion formed in the back surface portion of the tray 10 and fitted to the convex portion. Further, the fitting portions 14a to 14n have a convex shape having at least one step of two steps in a side view.

In the side surface portion shown in Fig. 5 (a), since the other tray 10 located on one tray 10 is disposed by changing the direction of 180, the fitting portions 14a to 14e of the tray 10 located above and below are located below. The fitting portions 14h, 14i, 14l to 14n of the tray 10 are arranged in the same direction. Further, in the side surface portion on the side opposite to the side surface shown in Fig. 5 (a), the fitting portions 14h, 14i, 14l to 14n are placed on the tray 10 located above, and the tray 10 is placed below. Parts 14a to 14e. Therefore, the shape of the fitting portion does not match even in any of the side portions on the side and the deep side before the sheet of FIG. 5(a).

In this way, when the tray 10 is placed in a 180° direction in parallel, the other side portions shown in FIG. 6(a), the fitting portions 14e to 14h of the upper tray 10, and the tray 10 located below The fitting portions 14i to 14k and 14a are arranged in the same direction. Further, in the side surface portion on the opposite side to the side surface portion shown in Fig. 6(a), the fitting portions 14i to 14k and 14a are disposed on the tray 10 located above, and the fitting portion 14e is disposed on the tray 10 located below. ~14h. Therefore, the shape of the fitting portion does not match even in any of the side portions on the side and the deep side of the sheet of the sheet of Fig. 6(a).

That is, when the trays 10 are stacked while changing the direction of 180° in parallel, the fitting portions 14a to 14n formed on the side faces of the trays 10 having the substantially square shape of the outer peripheral portion are disposed so as not to be fitted to each other.

[Third Abutment]

On one side shown in Fig. 5(a), the fitting portions 14a to 14e, 14h, 14i, and 14l to 14n are each formed into a convex shape having a step of two layers, and the fitting portions 14h, 14i, 14l to 14n are formed. The third abutting portions 15b, 15d, 15f, and 15h are provided between the step of the first layer and the step of the second layer from the top.

Further, on the other side surface shown in Fig. 6 (a), the fitting portions 14e to 14h, 14i, 14k, and 14a are each formed into a convex shape having at least one step of two layers, and the fitting portions 14i, 14k are provided. The third abutting portions 16b, 16d, and 16f are provided between the step of the first layer and the step of the second layer from the top of 14a.

As shown in FIG. 5(a), when the two trays are arranged in such a manner that the 180° direction is changed in parallel, the third abutting portions 15a, 15c, 15e, and 15g of the tray 10 located above are disposed, and are arranged. The third abutting portions 15b, 15d, 15f, and 15h of the fitting portions 14h, 14l to 14n of the tray 10 located above are arranged in pairs.

Similarly, as shown in Fig. 6(a), the third abutting portions 16a, 16c, and 16e of the tray 10 positioned above and the fitting portions 14h, 14l to 14n of the tray 10 positioned below are provided. The third abutting portions 16b, 16d, and 16f are disposed in pairs. Further, even in the side portions (not shown) in FIGS. 5(a) and 6(a), the abutting portions provided in the fitting portions 14a to 14n are arranged in pairs.

When the upper and lower trays 10 are overlapped from the state shown in Fig. 5 (a), as shown in Fig. 6 (b), the third abutting portions 15a and 15b and the third abutment The joints 15c and 15d, the third abutting portions 15e and 15f, and the third abutting portions 15g and 15h are abutted in pairs.

Similarly, from the state shown in Fig. 6 (a), when the upper and lower trays 10 are overlapped, as shown in Fig. 6 (b), the third abutting portions 16a and 16b and the third abutting portions 16c and 16d, The third abutting portions 16e and 16f are abutted in pairs. Further, even in the side portions (not shown) in FIGS. 5(b) and 6(b), the abutting portions provided in the fitting portions 14a to 14n and the bottom surface of the side surface portion of the tray 10 are provided. The abutment is abutted. In this way, the third side portions of the trays 10 having the substantially square shape in the outer peripheral portion are in contact with each of the third abutting portions, and in the step of the two layers of the respective fitting portions 14a to 14n, The step on the upper side is engaged with one of the inner sides of the fitting portions 14a to 14n of the upper tray 10, and the upper tray 10 and the lower tray 10 are engaged.

Further, as shown in FIG. 5(b), in a state where the third abutting portions 15c and 15d are in contact with each other, as shown in FIG. 4(b), the locking convex portion 13f abuts against the first abutment. The receiving portion 17a abuts the locking convex portion 13b against the first abutting portion 17e. Similarly, the third abutting portions 15i and 15j are abutted in pairs. That is, in a state in which the third abutting portions abut each other, the first abutting portion and the locking convex portion abut each other. As a result, in the substrate cassette 30 according to the present embodiment, the first abutting portion and the locking convex portion abut each other, and by the pair of the third abutting portions abutting each other, it is possible to prevent the The weight of the upper tray 10 (or the plurality of stacked trays 10 and the plurality of substrates 20) is such that the force is excessively applied to the substrate 20 supported by the support portions 12a to 12e of the tray 10 positioned below via the end portion 20a.

(with the fitting of the tray of the fitting portion)

As shown in Fig. 4(c), when the two trays 10 arranged in the vertical direction are arranged in the same direction, the fitting portions 14a to 14e on the side surface portions of the tray 10 (the fitting portions on the opposite side portions) The configurations of 14h, 14i, 14l~14n) are consistent. Therefore, as shown in FIG. 5(d), the two trays 10 located above and below can be fitted to each other.

Similarly, as shown in FIG. 6(c), when the two trays 10 arranged in the vertical direction are arranged in the same direction, the fitting portions 14e to 14h on the side surface portions of the tray 10 are embedded in the opposite side portions. The configurations of the joints 14i to 14k and 14a) are the same. Therefore, as shown in FIG. 6(d), the two trays 10 located above and below can be fitted to each other.

Further, as shown in FIGS. 5(c) and 6(c), when the plurality of trays 10 are stacked in the same direction, the locking recesses 13a and the locking projections 13b are engaged. Similarly, the engagement concave portion 13c and the locking convex portion 13d, the locking concave portion 13e and the engagement convex portion 13f, the locking concave portion 13g, and the locking convex portion 13h are fitted to each other. Further, the concave portion formed by the step formed by the locking portions 11a to 11d formed on the surface portion of the tray 10 can be embedded in the convex portion formed by the step on the back portion of the tray 10. Hehe.

Therefore, the plurality of trays 10 can be stacked so as to be in the same direction so as not to be loose (Fig. 5 (d) and Fig. 6 (d)).

[Substrate carrier]

The substrate carrier 50 according to this embodiment will be described in more detail with reference to Fig. 7 . Fig. 7(a) is a plan view of the substrate carrier 50 according to the present embodiment, and Fig. 7(b) is a side view of the substrate carrier 50 according to the present embodiment.

As shown in FIGS. 7( a ) and ( b ), the substrate carrier 50 includes a substrate cassette 30 , a pair of flat plates (plate portions) 40 , and a binding tape (belt portion) 41 .

In this manner, the substrate cassette 30 composed of the plurality of trays 10 is held by the pair of flat plates 40, and bundled by the binding tape 41. Accordingly, the substrate cassette 30 can be easily transported without being collapsed.

[flat]

As shown in Fig. 7(a), the flat plate 40 has a substantially square shape in plan view, and a notch portion 40a is provided at a central portion of the four sides of the outer periphery of the flat plate 40. The flat plate 40 is made of a metal such as aluminum. The flat plate 40 is conveyed so as not to cause the substrate cassette 30 to collapse, and is prevented from being damaged by the substrate cassette 30 during transportation, and is placed above and below the substrate cassette 30. The shape of the notch portion 40a is not particularly limited, and may be a shape that is bundled by the binding tape 41 as appropriate.

By passing the binding tape 41 through the notch portion 40a of the flat plate 40, it is possible to prevent the binding of the binding tape 41 to the flat plate 40 when the substrate cassette 30 is held up and down by the flat plate 40. Accordingly, the bundling of the substrate cassette 30 can be prevented from being slack when the substrate carrier 50 is transported.

[Bundle belt]

The binding tape 41 bundles the substrate cassette 30 via the flat plate 40. The binding tape 41 is not limited as long as it can bundle the substrate cassette 30 and the pair of flat plates 40. For example, a buckle type binding belt used in a general packaging or a polypropylene belt heated by welding may be used. Rubber, etc.

In the substrate carrier 50 according to this embodiment, a pair of flat plates 40 and a substrate cassette 30 are bundled using two binding bands. In the substrate carrier 50, the flat plates 40 are disposed on the uppermost and lowermost sides of the substrate cassette 30, and the binding tapes are passed through the mutually facing notches 40a of the uppermost flat plates 40, and the notched portions 40a with respect to the opposing faces. The substrate cassette 30 is bundled in the notch portion 40a facing each other in the lowermost flat plate 40.

As shown in FIG. 7(b), the substrate carrier 50 holds the substrate cassette 30 composed of the resin-formed tray 10 via the pair of flat plates 40 via the uppermost and lowermost sides of the substrate cassette 30. Accordingly, it is possible to prevent the substrate cassette 30 from being bent due to its own weight when lifting the substrate case 30. Accordingly, the substrate 20 can be appropriately transported by the substrate cassette 30. Further, since the substrate cassette 30 is bundled via the pair of flat plates 40 by the binding band 41, the force applied by the binding tape 41 is equally applied to the most of the substrate cassette 30 in order to bundle the substrate cassette 30. Above and below. Therefore, it is possible to appropriately prevent the tray 10 constituting the substrate cassette 30 from being damaged due to the force applied by the binding band 41 being concentrated on one portion of the substrate cassette 30.

[Substrate case related to the second embodiment]

The substrate cassette according to the present invention is not limited to the above-described embodiment (first embodiment). For example, in the substrate cassette relating to an embodiment (second embodiment), one tray (storage portion) supports the substrate from the bottom surface side of the substrate by the step of the locking portion provided on the surface portion thereof. At the end portion, the end portion of the substrate is locked from the upper surface side of the substrate by the locking convex portion on the back surface portion of the other housing portion located above the housing portion, thereby holding the substrate.

The substrate cassette 30' according to the present embodiment is different from the tray 10 in that the end portion 20a of the substrate 20 is locked in the middle of the step of the locking portion of the surface portion of the tray 10' (Fig. 8(a) and (c)). Further, the tray 10' is adjusted so that the end portion 20a of the substrate 20 that is locked in the middle of the step of the locking portion of one tray 10' is locked from the upper surface side of the substrate 20. The arrangement of the locking projections on the back side of the other tray 10' located above the tray 10', and the arrangement of the locking recesses integrally formed by the locking projections and the front and back, and the tray 10 Different (Figures 8(b) and (d)). In addition to these two points, the tray 10' has the same arrangement as the tray 10 shown in Fig. 1 with respect to the first abutting portion, the third abutting portion, and the supporting portion.

Therefore, the tray 10' is the same as the tray 10, and can be stacked every time the direction of 180 is changed in parallel. In addition, the description of the fitting portion, the first abutting portion, the third abutting portion, and the locking recess portion of the tray 10' having the same function as the tray 10 will be omitted.

As shown in Fig. 8 (a), the tray 10' in the substrate cassette 30' is engaged with the end portion of the substrate 20 from the bottom surface side while being placed on the step of the surface portion of each of the trays 10'. Furthermore, in the state shown in FIG. 8(a), In the surface portion of one tray 10', the end portion of the substrate is locked from the upper side by the locking portion of the other tray 10' located on the tray 10 supported at the end of the substrate 20 End (Fig. 8(b)). Accordingly, the substrate 20 is housed between the surface portion of one of the trays 10' and the back portion of the other tray 10' located above the one tray 10' (Figs. 8(a) and (b)).

The step of the locking portion 11'c in one of the trays 10' is curved along the shape of the outer peripheral portion of the substrate 20, and has a width that is wider as the distance from the support portion 12'e is wider. Here, the step of the locking portion 11'c is inclined to the chamfered portion a2 of the end portion 20a of the substrate 20 shown in FIG. 2(d) when the substrate 20 is housed in the surface portion of the tray 10'. Are configured in parallel. Further, the other locking portions are also bent along the shape of the outer peripheral portion of the substrate 20, similarly to the locking portion 11'c shown in Fig. 8(c), and have a wider inclination from the support portion 12'e. . Further, the step of the other locking portions is also inclined so as to be arranged in parallel at the chamfered portion a2 of the end portion 20a of the substrate 20 shown in Fig. 2(d). As a result, the end portion 20a of the substrate 20 is locked from the bottom surface 20c side of the substrate 20 via the chamfered portion a2 on the surface portion of the tray 10' (Fig. 8(c)).

Further, as shown in FIG. 8(d), the locking projection 13'b is in the state of abutting against the first abutting portion 17'e, and has the inclined surface thereof to lock the end of the substrate 20. The chamfered portion a1 of the portion 20a. Further, similarly to the locking convex portion 13'b, the other locking convex portions also have the inclined surface thereof, and the chamfered portion a1 of the end portion 20a of the substrate 20 is locked. In this state, the substrate cassette 30' is disposed between the support portions 12'd and 12'e of the lower tray 10' and the bottom surface 20c of the substrate 20, and the upper surface 20b of the substrate 20 and the base. A space is provided between both sides of the back surface of the tray 10' above the plate 20. Therefore, the substrate cassette 30' can be prevented from being scratched on the upper surface 20b and the bottom surface 20c of the substrate 20 by the tray 10' contacting the inner side of the chamfered portions a1 and a2 of the end portion 20a of the substrate 20. Furthermore, since the first abutting portion is provided even in the tray 10', it is possible to prevent the end portion 20a of the substrate 20 from being attached to the tray 10' (or the plurality of stacked trays 10' and the plurality of substrates 20) The weight causes the force to be excessively applied to the substrate 20 that is locked by the step of the locking portion of the tray 10' positioned below via the end portion 20a.

Further, in the substrate case 30' according to the present embodiment, the support portion provided on the tray 10' is not a member that is in contact with the bottom surface 20c of the substrate 20 to be accommodated and supported. The support portion is preferably provided when the substrate 20 is handled, when the substrate 20 is deflected by an impact, or the substrate 20 is deflected by its own weight or the like in order to support the substrate 20 from the back surface.

[Substrate case related to the third embodiment]

The substrate cassette according to the present invention is not limited to the above-described embodiment (first embodiment and second embodiment). For example, in the substrate case relating to an embodiment (third embodiment), the back portion is provided with the second abutting portions 18a to 18h, and the second abutting portions 18a to 18h are coupled to the locking projections. 13"b, 13"d, 13"f, and 13"h are adjacent to each other, and when the tray 10" is horizontally disposed, it can be higher at the lowermost portion of the back portion and lower than the highest surface of the back portion. The position abuts on one of the highest faces in the surface portion of the other tray 10" a~h.

According to this, the stacking is repeated each time the direction of 180° is changed in parallel. In the case of the number of trays 10", a sufficient space can be obtained between the surface portion and the back surface portion of each tray 10" in the region where the substrate 20 is held.

As shown in Fig. 9(a), the tray 10" is provided with a locking portion 11"a to 11"d having a step, a supporting portion 12f having a plurality of concave portions r, and locking recesses 13"a, 13" on the surface portion. c, 13"e and 13"h. The tray 10" is provided with locking projections 13"b, 13"d, 13"f and 13"h and second abutting portions 18a-18g on the back side. Further, the tray 10" has fitting portions 14a to 14n in the same manner as the tray 10 according to the first embodiment, and each of the fitting portions includes a third abutting portion.

In addition, since the shape and function of the fitting portion and the third abutting portion provided in the tray 10" are the same as those of the fitting portion and the third abutting portion of the tray 10 according to the first embodiment, the description thereof is omitted. .

Figure 9 (b) is a cross-sectional view along the E-E' arrow line of the tray 10" in Figure 9 (a). As shown in Figure 9 (b), the tray 10" is along the arrow along the E-E' In the line cross section, the step of the locking portion 11"a and the step of the locking portion 11"c face each other, and the inclination is wider as the distance from the support portion 12f is wider. Further, the step of the locking portion 11"b in Fig. 9(a) and the step of the locking portion 11"d face each other. That is, the locking portions 11"a to 11d" are formed by notching the recesses 13"a, 13"c, 13"e, and 13"g, and forming the step on the surface portion to form a notch, and other trays. The card stoppers 11a to 11d of 10 are the same.

Figure 9(c) is a cross-sectional view taken along line F-F' of Figure 9(a). As shown in Fig. 9(c), locking recesses 13"a and 13"e are formed on the surface portion of the tray 10". Further, in the back portion of the tray 10", the locking recess 13"a and a manner in which the back side of the 13" e protrudes to form a locking projection 13"b and 13"f. Further, the locking concave portions 13"c and 13"g provided on the surface portion of the tray 10" shown in Fig. 9(a) are protruded from the back surface portion, and the locking convex portion 13 is formed. "d and 13" h.

The locking recesses 13"a, 13"c, 13"e, and 13"g are slightly square in shape in plan view, and the locking recess 13"a and the locking recess 13"e sandwich the center of the tray 10" In the shape of the symmetry, the locking recess 13"c and the locking recess 13"g have a symmetrical shape sandwiching the center point of the tray 10", and the other has the locking recess 13a in the tray 10, 13c, 13e and 13g have the same function.

Similarly, the locking projections 13"b, 13"d, 13"f, 13"h are also slightly square, and the locking projections 13"b and the locking projections 13"f sandwich the tray 10" The center point becomes a symmetrical shape, and the locking convex portion 13"d and the locking portion convex portion 13"h sandwich the center point of the tray 10" to have a symmetrical shape, and the other has a card in the tray 10. The functions of the convex portions 13b, 13d, 13f, and 13h are the same.

[support section (third embodiment)]

As shown in Figs. 9(a) to 9(c), in the tray 10" according to the present embodiment, the bottom surface 20c of the substrate 20 is supported by the support portion 12f having the plurality of recesses r. In the surface portion of the tray 10", the area of the bottom surface 20c of the support substrate 20 can be reduced. As shown in FIGS. 9(b) and 9(c), the concave portion r provided in the support portion 12f has a convex portion formed on the back surface portion of the tray 10", but the convex portion is not accommodated in the lower portion. The upper surface 20b of the substrate 20 of the surface portion of the other tray 10" contact.

Further, when the concave portion is provided in the support portion, the size and the number of the concave portions may be appropriately adjusted depending on the shape of the substrate to be housed and the like.

[Second abutment]

The second abutting portion provided in the tray 10" according to the present embodiment will be described in more detail with reference to Fig. 10. As shown in Fig. 10(a), the second abutting portions are respectively slightly in plan view. The square locking recesses 13"a, 13"c, 13"e, and 13"h are each disposed adjacent to the two sides facing each other. That is, the second abutting portions are respectively formed into a slightly square locking convex portion. 13"b, 13"d, 13"f, and 13"g are each disposed adjacent to the two sides facing each other. Here, when the tray 10" is rotated by 180° each time in parallel, the stacking is performed. The second abutting portions of the trays 10" do not overlap each other with the second abutting portions of the other trays 10" located below, and abut against one of the surface portions of the other trays 10".

Figure 10 (a) is a cross-sectional view along the G-G' arrow line according to the tray 10" in Figure 9 (a), and according to the cross-sectional view along the H-H' arrow line, one side of the plurality of trays 10" A schematic view of the arrangement of one of the surface portions of the second abutting portion and the tray 10" when stacked in parallel with a parallel rotation of 180°. In addition, in the three trays 10" shown in Fig. 10(a), from above The first and third trays 10" are shown in the section along the G-G' arrow line, and the second tray 10" from the top indicates the section along the arrow line along the G-G'.

As shown in FIG. 10(a), when the three trays 10" are rotated by 180° in parallel each time, they are disposed in the upper tray 10" The second abutting portion 18g on the back surface is disposed so as to be located at the highest surface of the surface portion of the tray 10" at the center, and is abuttable with a portion d of the outer peripheral portion of the opening of the locking recess 13"g. Here, the second abutting portion 18e provided on one side of the locking recess 13"e of the upper tray 10" may be engaged with the locking recess 13"a of the other tray 10" disposed in the center One of the peripheral portions of the opening is abutted. Further, the second abutting portion 18f provided on one side of the locking recess 13"e of the upper tray 10" is disposed so as to be engageable with the locking recess 13"a of the other tray 10" located at the center One portion g of the outer peripheral portion of the opening abuts.

In this state, the second abutting portion 18a provided on the back surface of the tray 10" located at the center is disposed to be located at the highest surface of the surface portion of the tray 10" below, and can be engaged with the locking recess 13 A part a of the peripheral portion of the opening of the g is abutted. Here, the second abutting portion 18c provided on one side of the locking recess 13"c of the tray 10" located in the center is disposed to be located below The portion e of the outer peripheral portion of the opening of the locking recess 13"g of the other tray 10" abuts. Further, the second abutment of one of the locking recesses 13"c of the tray 10" located at the center The joint portion 18d is disposed so as to be abuttable with a portion f of the outer peripheral portion of the opening of the locking recess portion 13"a of the other tray 10" located at the center.

Figure 10 (b) is a cross-sectional view taken along line I-I' of the tray 10" in Figure 9 (a), and according to a cross-sectional view along the J-J' arrow line, the side of the plurality of trays 10" A schematic view of the arrangement of one of the surface portions of the second abutting portion and the tray 10" when stacked in parallel with a parallel rotation of 180°. In addition, in the three trays 10" shown in Fig. 10(a), from above Counting the first and the first The three trays 10" indicate the second tray 10' from the top according to the section along the I-I' arrow line, which indicates the section according to the arrow line along the J-J'. That is, as shown in FIG. 10(a), when three trays 10" are overlapped, as shown in FIG. 10(b), according to the I-I' arrow line section and along the J-J' arrow The line section, the plurality of trays 10" are overlapped.

As shown in Fig. 10 (b), when the three trays 10" are rotated by 180° in parallel each time, the second abutment is provided on the back surface of the locking recess 13"a of the upper tray 10". The joint portion 18a is disposed so as to be located at the highest surface of the surface portion of the tray 10" at the center thereof, and is abuttable with a portion a of the outer peripheral portion of the opening of the locking recess portion 13"e, and is configured to be second abutted The portion 18b can abut against a portion b of the surface portion. Similarly, the second abutting portion 18h provided on the back surface of the locking recess 13"g of the upper tray 10" is disposed to be located in the center of the tray The highest surface of the surface portion of the 10" is abuttable with a portion c of the outer peripheral portion of the opening of the locking recess 13"g, and is disposed such that the second abutting portion 18g can abut against a portion d of the surface portion.

In this state, the second abutting portion 18e provided on the back surface of the locking recess 13"e of the tray 10" located at the center is disposed so as to be located at the highest surface of the surface portion of the tray 10" below. Further, it is possible to abut against a portion h of the outer peripheral portion of the opening of the locking recess 13"a. Further, similarly, the second abutting portion 18d provided on the back surface of the locking recess 13"c of the tray 10" located at the center is disposed so as to be located at the highest surface of the surface portion of the tray 10" below. Further, it is possible to abut against a portion f of the outer peripheral portion of the opening of the locking recess 13"g.

As described above, by arranging the second abutting portions 18a to 18h, the second abutting portions 18a to 18h are located at the locking recesses 13"a, 13"c when the trays 10" are rotated and overlapped each time in parallel. The outer peripheral portion of the opening of the 13"e, 13"g, and the surface portion of the tray 10" may abut against one of the highest surface portions a to g.

Further, even in the tray 10", as in the case of the tray 10 and the tray 10", the end portion 20a of the substrate 20 is card-carded by adjusting the arrangement of the locking portions 11"a to 11"d in accordance with the size of the substrate 20. It is of course also possible to stop the locking portions 11"a to 11"d.

[Substrate case related to another embodiment]

The substrate cassette according to the present invention is not limited to the above-described embodiment (first embodiment and second embodiment). For example, the locking convex portion provided in the accommodating portion is not limited to the two pairs of convex portions facing each other.

When the locking convex portion of the accommodating portion is appropriately designed to lock the end portion of the substrate in accordance with the shape of the outer periphery of the substrate, the arrangement and the number thereof are not limited. Similarly, the arrangement and number of the locking portions of the accommodating portion are not limited. When the accommodating portion constituting the substrate cassette supports the substrate on the surface portion thereof, the end portion of the substrate can be locked by the locking convex portion provided on the back surface portion of the other accommodating portion, and the substrate can be held. The arrangement and the number of the locking projections and the locking portions are not limited.

Therefore, the shape of the outer peripheral portion of the substrate housed in the substrate cassette is not limited to a circular shape, and may be a cube or a rectangular parallelepiped. If the accommodating portion is in accordance with the shape of the substrate, the support portion, the locking portion, and the card are appropriately designed. The shape and arrangement of the convex portion can be eliminated.

In the same manner as in the above-described embodiment, when the storage portion located below is placed in a direction in which the upper storage portion is changed and stacked, the center of gravity of the substrate supported by the surface portion of each storage portion is used. The position at which the spacers are separated at equal intervals may be provided with a surface having an inclination of the locking convex portion at a position at the peripheral end portion of the arrangement substrate 20. For example, in the configuration in which the substrate is locked by the locking projections provided in the total of three places, the surfaces of the locking portions of the three locking portions are centered on the center of gravity of the substrate. The point may be arranged on the circumference of the outer peripheral end portion of the arrangement substrate by changing the angle of 120° each time. In this embodiment, in the embodiment in which the storage portions are stacked while changing the direction in parallel, if the inclined surface having the respective locking projections is formed, the center of gravity of the substrate is held as a center point, and the surfaces are separated at equal intervals. When the shape is along the outer circumference of the substrate, the number of the locking projections formed in the housing portion is not limited.

Further, in the substrate cassette according to another embodiment, the shape of the support portion of the housing portion is not limited to a circular shape centering on the center of gravity of the substrate 20 when the substrate 20 is held. The shape of the support portion may be appropriately designed in accordance with the shape of the support substrate, and may be formed in an arc shape centering on the center of gravity of the substrate to be supported.

Further, in the substrate cassette relating to still another embodiment, the locking projection has a slope which is in line contact with the outer peripheral end portion of the upper surface of the substrate. Even with this configuration, it is possible to prevent the back surface portion of the accommodating portion from coming into contact with the inner peripheral end portion of the upper surface of the substrate. Therefore, it is possible to prevent the occurrence of scratches on the inner side of the outer peripheral end portion of the upper surface of the substrate.

Further, in the substrate cassette according to another embodiment, even if the locking convex portion is formed on the surface portion of the housing portion, a locking portion having a step on the back surface portion of the housing portion may be formed. In the accommodating portion, it is obvious that the surface portion and the back surface portion are not excessively expressed. Even in the above configuration, the substrate can be appropriately held by merely locking the end portion of the substrate.

The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the claims, and even an embodiment obtained by appropriately combining the respective disclosed technical means and different embodiments can be used. It is included in the technical scope of the present invention.

[Industry use feasibility]

The present invention can suitably utilize the transportation of a semiconductor wafer substrate or a glass substrate.

10‧‧‧Tray (storage department)

11a, 11b, 11c, 11d‧‧‧ carding

12, 12a, 12b, 12c, 12d, 12e‧ ‧ support

13a, 13c, 13e, 13g‧‧‧ locking recesses

13b, 13d, 13f, 13h‧‧‧ locking projections

14a, 14b, 14c, 14d, 14e, 14e, 14f, 14g, 14h, 14i, 14J, 14k‧ ‧ fitting

17a, 17c, 17e, 17g‧‧‧ first abutment

17b, 17d, 17f, 17h‧‧‧ second abutment

Claims (13)

A substrate cassette having a plurality of accommodating portions for accommodating a substrate, wherein the accommodating portion includes a surface portion having a locking portion having a step that locks an end portion of the substrate, and a back portion And a locking convex portion that locks an end portion of the substrate, and supports the substrate inside the locking portion of a surface portion of the one storage portion, and is further stored above the storage portion The locking convex portion of the back portion of the portion locks the end portion of the substrate, thereby holding the substrate. The substrate cassette according to claim 1, wherein the surface portion includes a support portion that supports one of the bottom surfaces of the substrate, and the support portion of the surface portion of the one storage portion supports one of the bottom surfaces of the substrate and borrows The end portion of the substrate is locked by a locking convex portion on the back surface portion of the other housing portion located above the housing portion, thereby holding the substrate. The substrate cassette according to claim 1, wherein one of the storage portions supports an end portion of the substrate by a step of the locking portion provided on the surface portion, and is further provided above the storage portion. The locking convex portion on the back surface portion of the accommodating portion locks the end portion of the substrate, thereby holding the substrate. The substrate cassette as recited in claim 2, wherein The support portion is formed by a circular or arc-shaped plurality of convex portions having a shape in a plan view of the surface portion as a center of gravity of the substrate when the substrate is held. The substrate cassette according to claim 1, wherein the locking convex portion is formed by a plurality of convex portions, and has an inclination so as to be locked to a surface of an end portion of the substrate of each convex portion, and when the substrate is held The chamfered portion of the end of the substrate is in contact. The substrate cassette according to claim 1, wherein the locking projections are formed by two pairs of convex portions facing each other. The substrate cassette according to claim 1, wherein the surface portion is provided at a portion where the end portion of the substrate is disposed, and includes a locking recess portion into which the locking convex portion provided on a back surface portion of the other housing portion can be fitted The locking convex portion and the locking concave portion are fitted to each other only when one storage portion and another storage portion are overlapped in a specific arrangement. The substrate cassette according to claim 7, wherein the surface portion is provided adjacent to the locking concave portion, and when the storage portion is horizontally disposed, is lower than a highest surface of the surface portion and is locked a position at which the bottom surface of the concave portion is high, and a first abutting portion that is in contact with an end portion of the locking convex portion provided on a back surface portion of the other storage portion, an end portion of the locking convex portion and the first abutting portion The joint portion abuts each other when one of the storage portions and the other storage portion overlaps with the arrangement different from the specific arrangement described above. The substrate cassette according to claim 7 or 8, wherein the back surface portion is provided adjacent to the locking convex portion and horizontally disposed on the storage portion, and is higher than a lowest surface of the back surface portion a position at which the highest surface of the back surface portion is low may be in contact with one of the highest surfaces of the surface portions of the other accommodating portion, and one of the surface portions of the second abutting portion and the other accommodating portion is attached to one When the accommodating portion and the other accommodating portion overlap each other in the arrangement different from the specific arrangement described above, they come into contact with each other. The substrate cassette according to claim 7, wherein the storage portion includes a plurality of fitting portions that are fitted to a front surface portion of one of the storage portions and a rear surface portion of the other storage portion, and the one storage portion and the other storage portion are When the specific arrangement is overlapped, the plurality of fitting portions are fitted, and the locking convex portion and the locking concave portion are fitted. The substrate cassette according to claim 10, wherein each of the plurality of fitting portions includes a third abutting portion that abuts the fitting portion of the other housing portion, and one of the storage portions and the other storage unit are overlapped in the other arrangement. At the time of the part, the third abutting portion of the plurality of fitting portions is brought into contact with the third abutting portion of the other accommodating portion, so that one of the accommodating portions and the other accommodating portion are engaged with each other. A storage unit is configured as the substrate cassette described in claim 1. A substrate carrier comprising: the substrate cassette according to claim 1; a pair of plate portions for holding the uppermost surface and the lowermost surface of the substrate cassette; and a belt portion bundled in a state in which the substrate cassette is held by the pair of plate portions, wherein the pair of plate portions are respectively A notch portion in which the belt portion is disposed inside is provided at a position facing each other in an end portion of each of the plate portions.