JP2017069444A - Substrate case, housing section, and substrate transporter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a novel substrate case including a housing section which can prevent the top face of the substrate from being scratched, while reducing the form for transporting the substrate.SOLUTION: A substrate case 30 having a plurality of housing sections for housing substrates has a plurality of trays 10. A substrate 20 is supported on the inside of locking parts 11a-11d in the surface of one tray 10, and the end of the substrate 20 is locked by locking protrusions 13b, 13d, 13f and 13h in the rear surface of other tray 10 located above that tray 10, thus holding the substrate 20.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a substrate case, a storage unit constituting the substrate case, and a substrate transporter including the substrate case.

  With the increasing functionality of mobile phones, digital AV devices, IC cards, etc., there is a demand for higher integration of the chip in the package by reducing the size and thickness of the mounted semiconductor silicon chip (hereinafter referred to as the chip). It is growing. For example, in an integrated circuit that integrates a plurality of chips into one package such as CSP (chip size package) or MCP (multi-chip package), a reduction in thickness is required. In order to achieve high integration of chips in the package, it is necessary to reduce the thickness of the chip to a range of 25 to 150 μm. As described above, a case for storing a substrate when a highly thinned wafer substrate or the like is transferred is used.

  For example, in Patent Document 1, an elastic film that substantially covers the opening cross-section at a position shallower than the bottom surface in a groove-shaped storage chamber that can store a substrate is supported, and the elastic film supports the substrate. The board case is described.

  Patent Document 2 describes a semiconductor wafer storage case in which a peripheral portion of a semiconductor wafer is clamped by a holder having a cross section with an open tip formed in a “<” shape.

  Patent Document 3 describes a storage case in which a holding portion that holds the peripheral edge of a disk body is provided inside a disk storage space for storing a disk.

  Patent Document 4 discloses a single wafer type wafer case that holds and holds a wafer on the wafer case by holding the wafer peripheral portion with a lower wafer presser and an upper wafer presser when the wafer is stored. Is described.

  In patent document 5, while holding the tape with which the wafer was stuck with a flame | frame, when stacking the packaging member which has this flame | frame in a packaging box, it is made to pile up via a buffering material, A wafer packing method for preventing the tape from peeling off from the frame due to impact or the like is described.

JP-A-8-17903 (published January 19, 1996) JP-A-8-236605 (published September 13, 1996) JP 2001-148417 A (published May 29, 2001) JP 2009-43862 A (published February 26, 2009) JP 2002-145380 A (published on May 22, 2002)

  However, in the substrate cases described in Patent Documents 1 to 4, the substrate is fixed by sandwiching or holding the peripheral portions of the upper surface and the bottom surface of the substrate. In the technique described in Patent Document 5, the bottom surface of the substrate is fixed by a dicing tape.

  In the techniques described in Patent Literatures 1 to 4, a part of the upper surface and the bottom surface of the substrate is in contact with a member for fixing the substrate. For this reason, when a board | substrate is accommodated in a board | substrate case and conveyed, there exists a problem that the upper surface of the said board | substrate is damaged. Further, a novel substrate case that can accommodate the substrate more easily than the substrate case described in Patent Document 5 and can prevent the upper surface of the substrate from being scratched is useful.

  Further, in the substrate cases and the like described in Patent Documents 1 to 5, since a plurality of substrates are accommodated in individual spaces, there is a problem that when a large number of substrates are conveyed, the conveyance form becomes large.

  The present invention has been made in view of the above problems, and its main purpose is to prevent the upper surface of the substrate from being scratched and to reduce the form for transporting the substrate. It is to provide a novel substrate case provided with

  In order to solve the above problem, a substrate case having a plurality of storage portions for storing a substrate, the storage portion having a locking portion having a step for locking an end portion of the substrate And a back surface portion provided with a locking projection for locking the end portion of the substrate, the substrate is supported inside the locking portion on the front surface portion of one storage portion, and the storage The board | substrate is hold | maintained by latching the edge part of the said board | substrate by the latching convex part in the back surface part of another accommodating part located on a part.

  ADVANTAGE OF THE INVENTION According to this invention, it can prevent that the upper surface of a board | substrate is damaged, and can provide the novel board | substrate case provided with the accommodating part which can make the form for conveying a board | substrate small. There is an effect.

It is a figure explaining the outline of the storage part concerning one embodiment (first embodiment) of the present invention. It is sectional drawing explaining the outline of the accommodating part and board | substrate case which concern on one Embodiment (1st embodiment) of this invention. It is sectional drawing explaining the outline of the accommodating part and board | substrate case which concern on one Embodiment (1st embodiment) of this invention. It is sectional drawing explaining the outline of the accommodating part and board | substrate case which concern on one Embodiment (1st embodiment) of this invention. It is a side view explaining the outline of the storage part and substrate case concerning one embodiment of the present invention. It is another side view explaining the outline of the storage part and substrate case concerning one embodiment of the present invention. It is a figure explaining the outline of the substrate conveyance machine concerning one embodiment of the present invention. It is sectional drawing explaining the outline of the accommodating part and board | substrate case which concern on one Embodiment (2nd embodiment) of this invention. It is a figure explaining the outline of the storage part concerning one embodiment (third embodiment) of the present invention. It is sectional drawing explaining the outline of the accommodating part and board | substrate case which concern on one Embodiment (3rd embodiment) of this invention.

<Substrate Case According to First Embodiment>
Below, it demonstrates in detail about the board | substrate case 30 which concerns on one Embodiment (1st embodiment).

  The substrate case 30 according to the present embodiment includes a plurality of trays (storage units) 10 for storing substrates shown in FIG.

  The substrate case 30 holds the substrate 20 between the front surface portion of one tray 10 and the back surface portion of another tray 10 (FIGS. 2 and 3). The substrate case 30 holds the end portion 20a of the substrate 20 at the step of the locking portion 11c while supporting a part of the bottom surface 20c of the substrate 20 on the surface portion of one tray 10 ((c in FIG. 2). )). Further, in a state where the substrate 20 is supported as shown in FIG. 2C, the substrate is formed by the back surface portion of another tray 10 positioned on the one tray 10 as shown in FIG. The 20 end portions 20a are locked.

  As a result, the substrate case 30 can accommodate the substrate 20 without bringing the back surface portion of the tray 10 positioned on the substrate 20 into contact with the inner side of the upper surface 20b of the substrate 20 (FIG. 2). (C) and (c) of FIG. Thereby, it is possible to prevent the upper surface 20b of the substrate 20 from being scratched when the substrate 20 is transported.

  Further, the substrate case 30 alternately stacks the trays 10 and the substrates 20, and thereby stores the substrates 20 one by one between the trays 10. For this reason, the substrate case 30 prevents the case itself from becoming bulky as compared with a mode in which the substrates are stored one by one in an internal space provided in each individual substrate case and the substrate cases are stacked and conveyed. be able to. Accordingly, the substrate case 30 can greatly reduce the space for storing the substrate 20, and can reduce the form for transporting the substrate 20 (FIG. 2B and FIG. 3B). ).

  When stacking another tray 10 on one tray 10, the substrate case 30 changes the direction parallel to the lower tray 10 by 180 ° and stacks the upper tray 10. Since the shape of the outer peripheral portion of the tray 10 as viewed from above is substantially square, it is easy to stack each tray 10 by changing the direction by 180 ° in parallel according to the shape of the outer peripheral portion. The tray 10 may be provided with a display (not shown) indicating a specific direction.

〔substrate〕
The substrate 20 is, for example, a glass substrate having a circular shape when viewed from above. The substrate 20 is chamfered. More specifically, as shown in FIG. 2D, the substrate 20 is c-chamfered both from the upper surface 20b side and from the bottom surface 20c side in the entire circumference of the end portion 20a. Thereby, the chamfered part a1 and the chamfered part a2 are provided in the edge part 20a in the board | substrate 20. As shown in FIG.

  In addition, in the board | substrate accommodated in a board | substrate case, the angle of inclination of the chamfered chamfering part is not limited to an angle as shown to (d) of FIG. In addition, although the chamfered substrate is used as the substrate 20 accommodated in the substrate case 30, the substrate accommodated in the substrate case according to the embodiment of the present invention is not limited to the c-chamfered substrate. For example, a substrate whose end is chamfered can be accommodated in the substrate case.

  The substrate 20 housed and transported in the substrate case 30 is then taken out of the substrate case 30 and a circuit can be formed on the upper surface 20b. Moreover, although the board | substrate 20 accommodated in the substrate case 30 which concerns on this embodiment is a glass substrate, a board | substrate is not limited to a glass substrate. The material of the substrate stored in the substrate case is not limited, and a silicon substrate, a ceramic substrate, a resin substrate, and the like can be stored in addition to the glass substrate.

〔tray〕
FIG. 1 is a diagram for explaining the outline of the tray 10 constituting the substrate case 30 according to the present embodiment. (A) of FIG. 1 is a four-side view including a top view of the tray 10 and a side view in three directions, and (b) of FIG. 1 is a cross-sectional view of the tray 10 taken along the line AA ′. FIG. 1C is a cross-sectional view of the tray 10 taken along line BB ′.

  As shown in FIG. 1A, the tray 10 has a substantially square shape when viewed from above. In this specification, the surface portion of the tray (storage portion) is a surface on the side where the locking portion, the support portion, and the locking recess are provided, and the back surface portion of the storage portion is the locking convex portion. It means the surface on the side where is provided.

  As shown in FIG. 1A, the tray 10 has locking portions 11a to 11d, support portions 12a to 12e, locking recesses 13a, 13c, 13e and 13g, and a first contact portion on the surface thereof. 17a, 17c, 17e and 17g are formed.

  As shown in FIG. 1B, the support portions 12 a to 12 e are formed inside the steps of the locking portion 11 a and the locking portion 11 c formed on the surface portion of the tray 10. Similarly, the support portions 12a to 12e are located inside the steps of the locking portions 11b and 11d. The tray 10 locks the end portion 20a of the substrate 20 at the surface portion, and supports a part of the bottom surface 20c of the substrate 20.

  As shown in FIG. 1C, the tray 10 has locking projections 13b and 13f formed on the back surface thereof. Similarly to the locking projections 13b and 13f, locking projections 13d and 13h shown in FIG. 1A are formed on the back surface of the tray 10. The tray 10 locks the end portion 20a of the substrate 20 by a locking projection formed on the back surface thereof.

  Further, second contact portions 17b, 17d, 17f and 17h are formed on the back surface of the tray 10 on the back side of the first contact portions 17a, 17c, 17e and 17g on the front surface portion of the tray 10. ((A) of FIG. 1).

  Further, the tray 10 includes fitting portions 14a to 14n that are fitted only when the plurality of trays 10 are aligned in the same direction on the side surface portion (FIGS. 1, 5 and 6).

  The tray 10 can be manufactured by forming a flat plate by, for example, vacuum forming or press forming. Although the flat plate for shape | molding an accommodating part is not limited, It is preferable that it is a resin-made flat plate, for example, a polystyrene foam etc. can be mentioned. The storage part may be protected by a coating layer.

(Locking part)
The locking portions 11a to 11d provided in the tray 10 according to the present embodiment will be described in more detail with reference to FIGS. 2A to 2C are views for explaining a state in which the substrate 20 is accommodated by the plurality of trays 10 based on the cross section taken along the line AA ′ in FIG.

  As shown in FIG. 2A, the level difference between the locking portions 11a and 11c is inclined so as to increase as the distance from the support portion 12e increases. Similarly to the locking portions 11a and 11c, the locking portions 11b and 11d are also inclined so as to spread away from the support portion 12e. Moreover, the latching | locking part 11a-11d is curving along the shape of the outer peripheral part of the board | substrate 20 latched inside the latching | locking part 11a-11d ((a) of FIG. 1). That is, the locking portions 11a to 11d of the tray 10 have a step having the same shape, and the substrate 20 is accommodated in a region formed inside the step.

  From another point of view, the locking portions 11a to 11d are formed on the surface of the tray 10 by forming the locking recesses 13a, 13c, 13e and 13g and the first contact portions 17a, 17c, 17e and 17g. The step formed so as to surround the substrate 20 supported by the portion is formed by cutting out the outer side of the position where the outer peripheral portion of the substrate 20 is disposed. In the surface portion of the tray 10, the four notches forming the locking portions 11 a to 11 d are symmetrical with respect to each other with the notches facing each other sandwiching the region supporting the substrate 20 in the surface portion of the tray 10. It has a nice shape.

  The steps of the locking portions 11a to 11d formed as described above are positions at equal intervals from the center of gravity of the substrate 20 when the substrate 20 is held, and the end portion 20a of the substrate 20 is locked. It is provided at a position. Moreover, the distance between one locking part adjacent to each other and another locking part is equal ((a) of FIG. 1). For this reason, as shown in FIG. 2A, when stacking a plurality of trays 10, if the trays 10 are stacked in different directions by 180 ° in parallel, they are locked with the locking portions 11 a having the same shape. The arrangement with the portion 11c is switched, and the arrangement of the locking portion 11b and the locking portion 11d having the same shape is only switched, and the locking portion 11a to 11d is changed to lock the end portion 20a of the substrate 20. There is no. Therefore, as shown in FIG. 2B, the substrate case 30 composed of the plurality of trays 10 can lock the substrates 20 one by one in the same state on the surface portion of each tray 10.

(Support part)
In the tray 10 according to the present embodiment, the support portion 12 is a plurality of circular convex portions whose shape in a top view of the tray 10 is centered on the center of gravity of the substrate 20 when the substrate 20 is held. It consists of support parts 12a-12e ((a) and (b) of FIG. 1). Thereby, the support parts 12a-12e are formed in the surface part of the tray 10, and support a part of bottom face 20c in the board | substrate 20 (FIG.2 and FIG.3). Therefore, in the surface portion of the tray 10, the area for supporting the bottom surface 20c of the substrate 20 can be reduced, and the bottom surface 20c of the substrate 20 can be hardly damaged. Moreover, since the support parts 12a-12e are comprised by the circular convex part which is a some circular convex part centering on the gravity center point of the board | substrate 20, the board | substrate 20 is supported equally from the bottom face 20c. can do.

[Locking recess]
1 and 3, the locking recesses 13a, 13c, 13e and 13g and the first contact portions 17a, 17c, 17e and 17g provided in the tray 10 according to this embodiment will be described in more detail. explain.

  FIG. 3A is a diagram illustrating a state in which the substrate 20 is accommodated by the plurality of trays 10 based on the cross section taken along the line B-B ′ in FIG.

  As shown in FIG. 3 (a), the locking recesses 13a and 13e facing each other are formed on the substrate 20 on the surface portion of the tray 10 inside a total of four notches forming the locking portions 11a to 11d. Are arranged symmetrically with respect to the region for supporting (FIGS. 1A and 1C). Each of the locking recesses 13a and 13e has a diagonal line passing through the locking recess 13a and the locking recess 13e in the substantially square tray 10 (that is, BB ′ shown in FIG. 1A). The shape is asymmetric across the line.

  Moreover, as shown to (a) of FIG. 3, the latching recessed parts 13a and 13e which mutually oppose are the far side with respect to the board | substrate 20 to hold | maintain by the level | step difference which the latching | locking parts 11a-11d have. The recess is formed so that the step located closer to the substrate 20 is lower than the step. Here, the concave portions of the locking concave portions 13a and 13e are formed at positions lower than the support portions 12a to 12e when the tray 10 is horizontally disposed. For this reason, by gripping the end 20a of the substrate 20 and putting a hand into one of the locking recesses 13a and 13e, the substrate 20 is placed on the support portions 12a to 12e inside the locking portions 11a to 11d. Can be placed successfully. Moreover, if the end 20a of the board | substrate 20 is hold | gripped in either of the latching recessed parts 13a and 13e, the board | substrate 20 enclosed by the latching | locking parts 11a-11d can be taken out successfully.

  Similarly to the locking recesses 13a and 13e, the locking recesses 13c and 13g are provided so as to face each other, and are disposed symmetrically with respect to the region for supporting the substrate 20 on the surface portion of the tray 10. ((A) and (c) in FIG. 1). Each of the locking recesses 13a and 13e has an asymmetric shape with a diagonal line (not shown) passing through the center of gravity of the substrate 20 supported by the locking recess 13a, the locking recess 13e, and the surface portion of the tray 10 interposed therebetween. I am doing. Further, the locking recesses 13c and 13g are positioned closer to the substrate 20 than the steps positioned farther from the substrate 20 to be held by the steps of the locking portions 11a to 11d. The concave portion is formed so that the step to be lowered becomes lower. Therefore, it goes without saying that the locking recesses 13c and 13g can also be used for placing or removing the substrate 20 on the surface portion of the tray 10 in the same manner as the locking recesses 13a and 13e.

[First contact part]
The first contact portions 17a, 17c, 17e, and 17g are individually arranged with respect to the locking recesses 13a, 13c, 13e, and 13g along the shape of the outer peripheral portion of the substrate 20 held in the top view of the tray 10. It is formed to be adjacent.

  The first abutting portions 17a and 17e facing each other inside the four cutouts forming the locking portions 11a to 11d are symmetrical with respect to the region for supporting the substrate 20 in the surface portion of the tray 10. ((A) of FIG. 1).

  Moreover, as shown to (a) of FIG. 3, in the cross section BB 'arrow, the 1st contact parts 17a and 17e which mutually oppose are the back side toward the paper surface rather than the latching recessed parts 13a and 13e. When the tray 10 is horizontally disposed, the tray 10 is provided at a position higher than the recesses of the locking recesses 13a and 13e and lower than the support portions 12a to 12e.

  The first contact portions 17c and 17g facing each other are arranged symmetrically across the region for supporting the substrate 20 on the surface portion of the tray 10, similarly to the first contact portions 17a and 17e. When the tray 10 is disposed horizontally, the tray 10 is provided at a position higher than the recesses of the locking recesses 13c and 13g and lower than the support portions 12a to 12e.

(Locking projection)
As shown to (a) of FIG. 3, the latching convex parts 13b and 13f are formed by protruding the back surface of the latching recessed parts 13a and 13e as a convex part fitted to the latching recessed parts 13a and 13e. It is a convex part.

  Further, each of the locking projections 13b and the locking projections 13f is a diagonal line passing through the locking projections 13b and the locking projections 13f (that is, (a) in FIG. BB 'line) shown in FIG.

  Further, the two opposing surfaces of the locking projections 13b and 13f are curved along the shape of the outer peripheral portion of the substrate 20 disposed on the front surface portion of the tray 10, and as the distance from the back surface portion of the tray 10 increases. It has a widening slope ((c) in FIG. 1). Here, when the board | substrate 20 is hold | maintained at the board | substrate case 30, it opposes mutually in the latching convex parts 13b and 13f so that it may contact the chamfering site | part a1 of the edge part 20a in the board | substrate 20 shown in FIG.2 (d). Each of the two surfaces is provided with an inclination.

  Further, the two opposing surfaces of the locking projections 13b and 13f are spaced apart from the center of gravity of the substrate 20 arranged on the surface portion of the tray 10 at equal intervals. For this reason, even if the trays 10 are stacked in parallel by changing the direction by 180 °, the two opposing surfaces of the locking projections 13b and 13f are merely replaced, and the chamfered portion a1 of the end 20a of the substrate 20 is replaced. Can be locked (FIG. 3).

  In addition, the latching convex parts 13d and 13h shown to (a) of FIG. 1 are formed by projecting the back surface of the latching recessed parts 13c and 13g as a convex part fitted to the latching recessed parts 13c and 13g. Yes. Further, the two opposing surfaces of the locking projections 13 d and 13 h are curved along the shape of the outer peripheral portion of the substrate 20 disposed on the front surface portion of the tray 10, and the farther away from the back surface portion of the tray 10. Has a widening slope. Here, when the substrate 20 is stored in the substrate case 30, each of the two opposing surfaces of the locking projections 13 d and 13 h is in contact with the chamfered portion a 1 of the end 20 a of the substrate 20. An inclination is provided. Similarly to the locking projections 13b and 13f, the locking projections 13d and 13h have an asymmetric shape with a diagonal line (not shown) passing over the locking projections 13d and 13h. Further, the two opposing surfaces of the locking projections 13 d and 13 h are spaced apart from the center of gravity of the substrate 20 arranged on the surface portion of the tray 10 at equal intervals.

(Arrangement of locking recess, locking protrusion and first contact portion)
The arrangement of the locking recesses, the locking projections, and the first contact portions when the plurality of trays 10 are stacked will be described with reference to FIGS. 3 and 4. FIGS. 4A to 4D are views for explaining a state in which a plurality of trays 10 are stacked based on the cross section taken along the line CC ′ shown in FIG. In FIG. 4, the trays 10 are stacked in parallel by changing the direction by 180 °. For this reason, the cross section based on DD 'arrow cross section is arrange | positioned among the trays 10 located in the middle among the three trays 10 shown to (a) and (b) of FIG.

  The locking projections 13b and 13f are asymmetric with respect to the diagonal line passing through the locking projections 13b and 13f (that is, the BB ′ line shown in FIG. 1A) in the substantially square tray 10. It has a nice shape. For this reason, as shown in FIG. 4 (a), when the trays 10 are stacked in different directions by 180 ° in parallel, the center of the tray 10 located at the top is below the locking projection 13b. The first abutting portion 17e in the tray 10 located at is located. A first contact portion 17a in the tray 10 positioned below the locking projection 13f in the tray 10 positioned in the middle is disposed. For this reason, when the trays 10 are stacked, as shown in FIG. 4B, a part of the locking projection 13b of the tray 10 positioned at the top is first applied to the tray 10 positioned in the middle. Abutting on the contact portion 17e, the locking projection 13b and the locking recess 13a are not fitted. Similarly, the latching convex portion 13f in the tray 10 located in the middle abuts on the first abutting portion 17a in the tray 10 located below, and the latching convex portion 13f and the latching concave portion 13e are fitted. do not do.

  Similarly, as shown in FIG. 4 (c), when the trays 10 are stacked in parallel by changing the direction by 180 °, the center of the tray 10 located at the top is below the locking projection 13h. The first abutting portion 17c in the tray 10 located at is disposed. A first abutting portion 17g of the tray 10 positioned below the locking projection 13d of the tray 10 positioned in the middle is disposed. For this reason, when the trays 10 are stacked, as shown in FIG. 4D, a part of the locking projection 13h of the tray 10 positioned at the top is the first hit in the tray 10 positioned in the middle. The locking projection 13h and the locking recess 13c do not fit in contact with the contact portion 17c. Similarly, the latching convex portion 13d in the tray 10 located in the middle abuts on the first abutting portion 17g in the tray 10 located below, and the latching convex portion 13d and the latching concave portion 13g are fitted. do not do.

  As described above, the locking projections 13b, 13d, 13f, and 13h formed along the outer peripheral shape of the substrate 20 on the back surface of the tray 10 are arranged on the front surface of the tray 10 as the first contact portions 17a, 17c. , 17e and 17g, a sufficient space can be obtained in the region for holding the substrate 20 between the front surface and the back surface of each tray 10 ((b) of FIG. 3). In addition, as shown to (a)-(d) of FIG. 4, the 2nd contact parts 17b, 17d, 17f, and 17h in each tray 10 are a part of surface part of the tray 10 located under these. It is in contact.

(Arrangement of the substrate 20 in the substrate case 30)
Between each tray 10 stacked as shown in FIGS. 4A to 4D, the substrate 20 is disposed between the front surface portion of one tray 10 and the back surface portion of another tray 10. ((B) in FIG. 2 and (b) in FIG. 3).

  In this state, as shown in FIG. 3 (c), the locking projection 13b provided on the back surface of the tray 10 positioned above is supported by another tray 10 positioned below it. It is in contact with the first contact portion 17e at a position lower than the portion 12e. Similarly, the other locking projections are in contact with the first contact portion at a position lower than the support portion 12e provided on another tray 10 positioned below the other locking projection. For this reason, when each tray is stacked, the end portion 20a of the substrate 20 is moved from the upper surface 20b side by the inclined projections 13b, 13d, 13f, and 13h provided on the back surface portion of one tray 10. When the load of the one tray 10 (or the plurality of stacked trays 10 and the plurality of substrates 20) is applied in the locked state, the locking projections 13b, 13d, and 13f are applied to the first contact portion. And 13h can be prevented by contacting. Therefore, the end portion 20a of the substrate 20 accommodated in the substrate case 30 can be prevented from being damaged.

  Moreover, the latching convex parts 13b, 13d, 13f, and 13h formed on the back surface part of one tray 10 are supported by the support parts 12a to 12e on the surface part of another tray 10 positioned below the same. Since the chamfered portion a1 of the end portion 20a of the substrate 20 is locked, the substrate 20 can be held without bringing the tray 10 into contact with the upper surface 20b of the substrate 20, and the upper surface 20b of the substrate 20 is scratched. It can prevent sticking ((c) of FIG. 3).

〔Fitting portion〕
The fitting portions 14a to 14n included in the tray 10 according to the present embodiment will be described in more detail with reference to FIGS. FIGS. 5A and 5B are side views illustrating a state in which another tray 10 is stacked on one tray 10 while changing the direction of 180 °. 6 (a) and 6 (b) show a state in which another tray 10 is stacked on one tray 10 by changing the direction of 180 ° from a different side from that of FIGS. 5 (a) and 5 (b). It is another side view to explain.

  5A and 5A, the fitting portions 14a to 14n provided on the side surface portion of the tray 10 include a convex portion protruding toward the front of the paper surface of each drawing, and the tray 10. And a concave portion formed so as to be fitted to the convex portion. Further, the fitting portions 14a to 14n have a convex shape having at least one two-step difference in a side view.

  In the side surface portion shown in FIG. 5 (a), the other tray 10 positioned on one tray 10 is arranged by changing the direction of 180 °, so that the fitting portion 14a of the tray 10 positioned above is arranged. To 14e and the fitting portions 14h, 14i and 14l to 14n of the tray 10 positioned below are arranged in the same direction. In addition, in the side part located on the opposite side to the one side shown in FIG. 5A, the fitting parts 14h, 14i, and 14l to 14n are arranged in the upper tray 10, and the lower tray 10 is located. , The fitting portions 14a to 14e are arranged. Therefore, the shape of the fitting portion does not match in any of the side portions located on the near side and the far side of the paper surface in FIG.

  As described above, when the tray 10 is disposed in parallel by changing the direction by 180 °, in the other side surface portion shown in FIG. 6A, the fitting portions 14e to 14h of the upper tray 10 and the lower portion are positioned. The fitting portions 14i to 14k and 14a of the tray 10 are arranged in the same direction. In addition, in the side part located on the opposite side of the side part shown in (a) of FIG. 6, the fitting parts 14 i to 14 k and 14 a are arranged in the upper tray 10 and are fitted in the lower tray 10. Joint portions 14e to 14h are arranged. Therefore, the shape of the fitting portion does not match in any of the side portions located on the near side and the far side of the paper surface in FIG.

  That is, when the trays 10 are stacked by changing the direction by 180 ° in parallel, the fitting portions 14a to 14n formed on the four side surfaces of the tray 10 whose outer peripheral shape is substantially square are arranged so as not to fit each other. The

[Third contact part]
5 (a), each of the fitting portions 14a to 14e, 14h, 14i, and 14l to 14n has a convex shape having two steps, and the fitting portions 14h, 14i, Third contact portions 15b, 15d, 15f and 15h are provided between the first step and the second step from the top in 14l to 14n.

  Moreover, in another side surface shown to (a) of FIG. 6, each of fitting part 14e-14h, 14i, 14k, and 14a is carrying out the convex shape which has at least 1 level | step difference of two steps, and fitting part Third contact portions 16b, 16d, and 16f are provided between the first step and the second step from the top in 14i, 14k, and 14a.

  As shown in FIG. 5 (a), when the two trays are arranged in parallel so as to be turned 180 ° in this way, the third contact portions 15a, 15c, 15e provided on the tray 10 located above and 15 g and the third contact portions 15 b, 15 d, 15 f and 15 h provided in the fitting portions 14 h and 14 l to 14 n of the tray 10 located above are arranged in pairs.

  Similarly, as shown in FIG. 6A, the third contact portions 16a, 16c and 16e provided on the upper tray 10 and the fitting portions 14h, 14l to 14l of the lower tray 10 are provided. It arrange | positions so that the 3rd contact parts 16b, 16d, and 16f provided in 14n may become a pair. In addition, also in the side surface part which is not illustrated in Fig.5 (a) and FIG.6 (a), it arrange | positions so that the contact part provided in fitting part 14a-14n may become a pair.

  When the two upper and lower trays 10 are stacked from the state shown in FIG. 5A, as shown in FIG. 6B, the third contact portions 15a and 15b, the third contact portions 15c and 15d, The three contact portions 15e and 15f and the third contact portions 15g and 15h are contacted in pairs.

  Similarly, when the two upper and lower trays 10 are overlapped from the state shown in FIG. 6A, as shown in FIG. 6B, the third contact portions 16a and 16b, the third contact portion 16c, 16d and the third contact portions 16e and 16f are contacted in pairs. 5B and 6B, the contact portions provided in the fitting portions 14a to 14n and the contact portions provided on the bottom surfaces of the side portions of the tray 10 are also provided. The contact part comes into contact. Thus, each 3rd contact part is made to contact in the 4 side surface part of the tray 10 whose outer peripheral part is a substantially square shape, and it is on the upper side among the two steps of each fitting part 14a-14n. By engaging the stepped portion with a part of the inside of the fitting portions 14a to 14n of the upper tray 10, the upper tray 10 and the lower tray 10 are engaged.

  Further, as shown in FIG. 5B, when the third contact portions 15c and 15d are in contact with each other, as shown in FIG. 4B, the first contact portion 17a is engaged. The stop convex part 13f contacts, and the locking convex part 13b contacts the first contact part 17e. Similarly, the third contact portions 15i and 15j are in contact with each other in pairs. That is, in a state where the third contact portions are in contact with each other, the first contact portion and the locking projection are in contact with each other. As described above, in the substrate case 30 according to the present embodiment, the first contact portion and the locking projection are brought into contact with each other, and the paired third contact portions are brought into contact with each other, thereby End 20a with respect to the substrate 20 supported by the support portions 12a to 12e of the tray 10 positioned below due to the weight of the tray 10 positioned in the stack (or the plurality of stacked trays 10 and the plurality of substrates 20). It is possible to prevent excessive force from being applied via the.

(Tray mating by mating part)
As shown in FIG. 4C, when the two trays 10 arranged vertically are arranged in the same direction, the fitting portions 14a to 14e in the side surface portion of the tray 10 (the fitting portion in the opposite side surface portion). 14h, 14i, and 14l to 14n) match. For this reason, as shown in (d) of Drawing 5, two trays 10 located up and down can be fitted mutually.

  Similarly, as shown in FIG. 6C, when the two trays 10 arranged up and down are arranged in the same direction, the fitting portions 14e to 14h in the side surface portion of the tray 10 ( The arrangement of the fitting portions 14i to 14k and 14a) matches. For this reason, as shown to (d) of FIG. 6, the two trays 10 located up and down can be mutually fitted.

  As shown in FIGS. 5C and 6C, when the plurality of trays 10 are stacked in the same direction, the locking recess 13a and the locking projection 13b are fitted. Similarly, the locking recess 13c and the locking projection 13d, the locking recess 13e and the locking projection 13f, and the locking recess 13g and the locking projection 13h can be fitted together. Further, the concave portion formed by being surrounded by the steps of the locking portions 11 a to 11 d formed on the front surface portion of the tray 10 is also a convex portion formed by the step on the back surface portion of the tray 10. Can be fitted.

  Therefore, the plurality of trays 10 can be stored so as not to be bulky by overlapping the plurality of trays 10 in the same direction ((d) in FIG. 5 and (d) in FIG. 6).

<Substrate transporter>
The substrate transport device 50 according to the present embodiment will be described in more detail with reference to FIG. FIG. 7A is a top view of the substrate transporter 50 according to the present embodiment, and FIG. 7B is a side view of the substrate transporter 50 according to the present embodiment.

  As shown in FIGS. 7A and 7B, the substrate transporter 50 includes a substrate case 30, a pair of plates (plate portions) 40, and a binding band (band portion) 41.

  As described above, the substrate case 30 including the plurality of trays 10 is gripped by the pair of plates 40 and bound by the binding band 41. Thereby, the substrate case 30 can be suitably transported without breaking.

〔plate〕
As shown in FIG. 7A, the plate 40 has a substantially square shape when viewed from the top, and is provided with a notch 40 a at the center of four sides constituting the outer periphery of the plate 40. The plate 40 is made of a metal such as aluminum. The plates 40 are transported without breaking the substrate case 30 and are disposed above and below the substrate case 30 in order to prevent damage to the substrate case 30 during transportation or the like. The shape of the notch 40a is not particularly limited as long as the binding by the binding band 41 is suitably performed.

  By passing the binding band 41 through the notch 40a provided in the plate 40, the binding band 41 is prevented from being displaced in the plate 40 when the substrate case 30 is gripped and bound by the plate 40 up and down. be able to. Thereby, it is possible to prevent the binding of the substrate case 30 from being loosened when the substrate transporter 50 is transported.

[Bundling band]
The binding band 41 binds the substrate case 30 through the plate 40. The binding band 41 is not limited as long as it can bind the substrate case 30 and the pair of plates 40, for example, a buckle type binding band used for general packaging, or heating. A polypropylene band, rubber, or the like that is fused with the above can be used.

  In the substrate transport device 50 according to the present embodiment, the pair of plates 40 and the substrate case 30 are bound using two binding bands. In the substrate transporter 50, the plates 40 are disposed on the uppermost surface and the lowermost surface of the substrate case 30, and the notch portions 40a facing each other and the notch portions 40a facing each other on the uppermost plate 40 are arranged on the uppermost surface. The binding case is passed through the notches 40a facing each other in the lower plate 40, and the substrate case 30 is bound.

  As shown in FIG. 7B, the substrate transporter 50 is configured such that the substrate case 30 formed of the tray 10 formed of resin by the pair of plates 40 is connected to the uppermost surface and the lowermost surface of the substrate case 30. Grip through. This can prevent the substrate case 30 from being bent by its own weight when the substrate case 30 is lifted for transport. For this reason, the board | substrate case 30 can convey the board | substrate 20 suitably. Further, since the substrate case 30 is bound by the binding band 41 via the pair of plates 40, the force applied by the binding band 41 to bind the substrate case 30 is evenly applied to the uppermost surface and the lowermost surface of the substrate case 30. Added to. Therefore, it is possible to suitably prevent the tray 10 constituting the substrate case 30 from being damaged by the force applied by the binding band 41 being concentrated on a part of the substrate case 30.

<Substrate Case According to Second Embodiment>
The substrate case according to the present invention is not limited to the above embodiment (first embodiment). For example, in the substrate case according to one embodiment (second embodiment), one tray (storage portion) is configured such that the end portion of the substrate is positioned on the bottom surface side of the substrate by the step of the engaging portion provided on the surface portion. The substrate is held by locking the end portion of the substrate from the upper surface side of the substrate by the locking protrusion on the back surface of the other storage portion positioned above the storage portion.

  The substrate case 30 ′ according to this embodiment is different from the tray 10 in that the end portion 20a of the substrate 20 is locked in the middle of the step of the locking portion on the surface portion of one tray 10 ′ (FIG. ) And (c)). Further, the tray 10 ′ is configured so that the end 20 a of the substrate 20 that is locked in the middle of the level difference of the locking portion of one tray 10 ′ is locked from the upper surface side of the substrate 20. The arrangement of the locking projections provided on the back surface of the other tray 10 located above 'has been adjusted, and accordingly, the locking recesses formed integrally with the locking projections and the front and back sides are adjusted. It differs from the tray 10 in that the arrangement is adjusted ((b) and (d) in FIG. 8). Except for these two points, the tray 10 ′ has the same arrangement as the tray 10 shown in FIG. 1 with respect to the first contact portion, the third contact portion, and the support portion.

  Therefore, the tray 10 ′ can be stacked in the same direction by 180 ° in parallel with the tray 10. The description of the fitting portion, the first contact portion, the third contact portion, and the locking recess in the tray 10 ′ having the same function as the tray 10 is omitted.

  As shown in FIG. 8A, the tray 10 'in the substrate case 30' locks the end portion of the substrate 20 from the bottom side in the middle of the step provided on the surface portion of each tray 10 '. Further, in the state shown in FIG. 8A, in the surface portion of one tray 10 ′, the locking projection of another tray 10 ′ positioned on the tray 10 supporting the end portion of the substrate 20 Thus, the end portion of the substrate is locked from the upper surface side (FIG. 8B). Thereby, the board | substrate 20 is accommodated between the surface part of one tray 10 ', and the back surface part of another tray 10' located on the said one tray 10 '((a) of FIG. 8). And (b)).

  The level difference of the locking portion 11 ′ c in one tray 10 ′ is curved along the shape of the outer peripheral portion of the substrate 20, and has a slope that widens away from the support portion 12 ′ e. Here, when the substrate 20 is stored in the surface portion of the tray 10 ′, the level difference between the locking portions 11 ′ c is such that the chamfered portion a 2 of the end portion 20 a of the substrate 20 shown in FIG. Inclined to be. Note that the other locking portions are also curved along the shape of the outer peripheral portion of the substrate 20 as in the locking portion 11′c shown in FIG. 8C, and the further away from the support portion 12′e. It has a slope that spreads out. Further, the steps of the other locking portions are also inclined so that the chamfered portions a2 of the end portions 20a in the substrate 20 shown in FIG. As a result, the end portion 20a of the substrate 20 is locked from the bottom surface 20c side of the substrate 20 through the chamfered portion a2 on the surface portion of the tray 10 '((c) in FIG. 8).

  Further, as shown in FIG. 8D, the locking projection 13′b is in contact with the first contact portion 17′e, and the end portion of the substrate 20 on the inclined surface. The chamfered portion a1 of 20a is locked. Similarly to the locking projection 13'b, the other locking projections also lock the chamfered portion a1 of the end portion 20a of the substrate 20 on the inclined surface. In this state, in the substrate case 30 ′, the support portions 12′d and 12′e of the tray 10 ′ positioned below and the bottom surface 20c of the substrate 20 and the upper surface 20b of the substrate 20 and the substrate 20 A space is provided both between the upper surface of the tray 10 ′ and the rear surface portion. Therefore, in the substrate case 30 ′, the tray 10 ′ is in contact with the chamfered portions a1 and a2 of the end portion 20a of the substrate 20 to prevent the top surface 20b and the bottom surface 20c of the substrate 20 from being scratched. Can do. In addition, since the first abutting portion is also provided in the tray 10 ′, the weight of the tray 10 ′ (or the plurality of stacked trays 10 ′ and the plurality of substrates 20) is arranged on the end 20 a of the substrate 20. Further, it is possible to prevent an excessive force from being applied to the substrate 20 locked at the step of the locking portion of the tray 10 ′ positioned below through the end portion 20a.

  In the substrate case 30 ′ according to the present embodiment, the support portion provided on the tray 10 ′ is not always in contact with and supported by the bottom surface 20 c of the stored substrate 20. The support portion is provided to support the substrate 20 from the back surface when the substrate 20 is bent by an impact or when the substrate 20 is bent by its own weight when the substrate case 30 ′ is transported. Is preferred.

<Substrate Case According to Third Embodiment>
The substrate case according to the present invention is not limited to the above embodiments (first embodiment and second embodiment). For example, in the substrate case according to one embodiment (third embodiment), the back surface portion is adjacent to the locking projections 13 ″ b, 13 ″ d, 13 ″ f, and 13 ″ h, and the tray 10 ″. Are horizontally positioned at positions higher than the lowest surface of the back surface and lower than the highest surface of the back surface, and are a part of the highest surface a to h of the surface of another tray 10 ″. It is the structure provided with the 2nd contact parts 18a-18h which can contact | connect.

  Thus, when the plurality of trays 10 ″ are stacked in parallel by changing the direction by 180 °, a sufficient space is obtained in the region for holding the substrate 20 between the front surface portion and the back surface portion of each tray 10 ″. be able to.

  As shown in FIG. 9 (a), the tray 10 ″ includes a locking portion 11 ″ a to 11 ″ d having a step on the surface portion, a support portion 12f having a plurality of recesses r, and a locking recess. 13 "a, 13" c, 13 "e and 13" h. The tray 10 "has locking projections 13" b, 13 "d, 13" f and 13 "h on the back side. And second contact portions 18a to 18g. Further, the tray “10” has fitting portions 14a to 14n on its side surface portions, like the tray 10 according to the first embodiment, and each fitting portion includes a third contact portion. ing.

  Note that the shape and function of the fitting portion and the third contact portion provided in the tray 10 ″ are the same as the fitting portion and the third contact portion provided in the tray 10 according to the first embodiment. The description is omitted.

  9B is a cross-sectional view taken along the line EE ′ of the tray 10 ″ in FIG. 9A. As shown in FIG. 9B, the tray 10 ″ has a line EE ′. In the cross section taken along the arrow, the step of the locking portion 11 ″ a and the step of the locking portion 11 ″ c are opposed to each other and have a slope that widens away from the support portion 12f. Further, the step of the latching portion 11 ″ b and the step of the latching portion 11 ″ d in FIG. 9A are opposed to each other. In other words, the locking portions 11 "a to 11d" are formed so that the step provided on the surface portion is notched by the locking recesses 13 "a, 13" c, 13 "e and 13" g. Is the same as the locking portions 11 a to 11 d of the tray 10.

  FIG. 9C is a cross-sectional view taken along line F-F ′ in FIG. As shown in FIG. 9 (c), locking concave portions 13 "a and 13" e are formed on the front surface portion of the tray 10 ". Further, the locking concave portion 13 is formed on the back surface portion of the tray 10". Locking projections 13 "b and 13" f are formed so that the back surfaces of "a and 13" e protrude. Further, by engaging locking recesses 13 "c and 13" g provided in the front surface portion of the tray 10 "as shown in FIG. h is formed.

  The locking recesses 13 ″ a, 13 ″ c, 13 ″ e, and 13 ″ g have a substantially square shape when viewed from above, and the locking recess 13 ″ a and the locking recess 13 ″ e include the tray 10. ”Except that the locking recess 13 ″ c and the locking recess 13 ″ g are symmetrical with respect to the center of the tray 10 ″. Has a function with the locking recesses 13a, 13c, 13e and 13g in the tray 10.

  Similarly, the latching projections 13 ″ b, 13 ″ d, 13 ″ f, and 13 ″ h are also substantially square, and the latching projections 13 ″ b and the latching projections 13 ″ f The shape is symmetrical with respect to the center point of the tray 10 ″, and the locking convex portion 13 ″ d and the locking portion convex portion 13 ″ h are symmetrical with respect to the central point of the tray 10 ″. Except for this, it has the same function as the locking projections 13b, 13d, 13f, and 13h in the tray 10.

[Supporting part (third embodiment)]
As shown in FIGS. 9A to 9C, in the tray 10 ″ according to the present embodiment, the bottom surface 20c of the substrate 20 is supported by the support portion 12f provided with a plurality of concave portions r. As a result, the area for supporting the bottom surface 20c of the substrate 20 can be reduced in the surface portion of the tray 10 ″. As shown in FIGS. 9B and 9C, the concave portion r provided in the support portion 12f forms a convex portion that protrudes on the back surface portion of the tray 10 ″. It does not come into contact with the upper surface 20b of the substrate 20 accommodated in the surface portion of another tray 10 ″ positioned at the position.

  In addition, when providing a recessed part in a support part, the magnitude | size and number of a recessed part are good to adjust suitably according to the shape etc. of the board | substrate to accommodate.

[Second contact part]
The second contact portion provided in the tray 10 ″ according to the present embodiment will be described in more detail with reference to FIG. 10. As shown in FIG. Each of the locking recesses 13 ″ a, 13 ″ c, 13 ″ e, and 13 ″ h, which is a substantially square when viewed from above, is provided so as to be adjacent to two sides facing each other. Each of the portions is also provided so as to be adjacent to two sides facing each other in each of the locking convex portions 13 ″ b, 13 ″ d, 13 ″ f, and 13 ″ g each having a substantially square shape. Here, when the trays 10 ″ are stacked while being rotated by 180 ° in parallel, each of the second contact portions in the upper tray 10 ″ is in contact with the second contact in another lower tray 10 ″. The surface of the other tray 10 "does not overlap with each other. It abuts on the part of the.

  FIG. 10 (a) shows a plurality of trays 10 ″ 180 ° at a time based on the GG ′ arrow sectional view and the HH ′ arrow sectional view of the tray 10 ″ in FIG. 9 (a). FIG. 11 is a schematic diagram for explaining the arrangement of the second abutting portion and a part of the surface portion of the tray 10 ″ when stacked while being rotated in parallel. Note that FIG. Among the three trays 10 ″, the first and third trays 10 ″ from the top are shown in cross section based on the line of GG ′, and the second tray 10 ″ from the top is A cross section based on the line of GG ′ is shown.

  As shown in FIG. 10 (a), when the three trays 10 ″ are rotated in parallel by 180 °, the second contact portion 18g provided on the back surface of the upper tray 10 ″ is in the middle. Is located on the highest surface of the front surface portion of the tray 10 ″ and is arranged so as to contact a part d of the outer peripheral portion of the opening of the locking recess 13 ″ g. Here, the second abutting portion 18e provided on one side of the locking recess 13 ″ e in the tray 10 ″ positioned above the opening of the locking recess 13 ″ a of another tray 10 ″ positioned in the middle is provided. It arrange | positions so that it can contact | abut part h of an outer peripheral part. In addition, the second contact portion 18f provided on one side of the locking recess 13 ″ e of the upper tray 10 ″ has an outer periphery of the opening of the locking recess 13 ″ a of another tray 10 ″ positioned in the middle. It arrange | positions so that it may contact | abut to a part g of a part.

  In this state, the second contact portion 18a provided on the back surface of the tray 10 ″ positioned in the middle is positioned at the highest surface of the front surface portion of the tray 10 ″ positioned below, and the locking recess 13 ″ g It arrange | positions so that it can contact | abut to the part a of the outer peripheral part of opening. Here, the 2nd contact part 18c provided in one side of latching recessed part 13 "c in tray 10" located in the center is provided. The tray 10 ″ is positioned so as to be able to contact a part e of the outer peripheral portion of the opening of the latching recess 13 ″ g of the other tray 10 ″ positioned below. The second contact portion 18d provided on one side of the recess 13 ″ c can contact a part f of the outer peripheral portion of the opening of the locking recess 13 ″ a of another tray 10 ″ located in the middle. Placed in.

  FIG. 10 (b) shows a plurality of trays 10 ″ at 180 °, based on the cross-sectional view taken along the line II ′ and the cross-sectional view taken along the line JJ ′ of the tray 10 ″ in FIG. 9 (a). FIG. 11 is a schematic diagram for explaining the arrangement of the second abutting portion and a part of the surface portion of the tray 10 ″ when stacked while being rotated in parallel. Note that FIG. Among the three trays 10 ″, the first and third trays 10 ″ from the top are shown in cross section based on the line II ′, and the second tray 10 ″ from the top is A cross section based on the line of JJ ′ is shown. That is, as shown in FIG. 10 (a), when three trays 10 ″ are stacked, as shown in FIG. 10 (b), the cross section taken along the line II ′ and the line JJ ′. Based on the above, a plurality of trays 10 ″ are stacked.

  As shown in FIG. 10B, when the three trays 10 ″ are rotated in parallel by 180 °, the second tray provided on the back surface of the locking recess 13 ″ a of the tray 10 ″ positioned above. The abutting portion 18a is located on the highest surface of the surface portion of the tray 10 '' located in the middle, and is arranged so as to be able to abut on a part a of the outer peripheral portion of the opening of the locking recess 13''e, The second contact portion 18b is disposed so as to be able to contact a part b of the front surface portion. Similarly, the second contact portion 18b is provided on the back surface of the locking recess 13 ″ g of the tray 10 ″ positioned above. The abutting portion 18h is located on the highest surface of the surface portion of the tray 10 ″ located in the middle, and is disposed so as to be able to abut on a part c of the outer peripheral portion of the opening of the locking recess 13 ″ g. Arranged so that the second abutting portion 18g can abut against a part d of the surface portion. That.

  In this state, the second contact portion 18e provided on the back surface of the locking recess 13 ″ e of the tray 10 ″ positioned in the middle is positioned on the highest surface of the surface portion of the tray 10 ″ positioned below, It arrange | positions so that it can contact | abut to a part h of the outer peripheral part of opening of latching recessed part 13''a. Similarly, the second contact portion 18d provided on the back surface of the locking recess 13 ″ c of the tray 10 ″ positioned in the middle is positioned on the highest surface of the surface portion of the tray 10 ″ positioned below. The engaging recess 13 ″ g is disposed so as to be able to contact a part f of the outer peripheral portion of the opening.

  As described above, by arranging the second contact portions 18a to 18h, the trays 10 "are rotated by 180 ° in parallel and overlapped, and the second contact portions 18a to 18h are moved to the locking recesses 13" a. , 13 ″ c, 13 ″ e, and 13 ″ g are located on the outer peripheral portion of the opening, and can contact a part ag of the highest surface in the surface portion of the tray 10 ″.

  In the tray 10 ″ as well, as in the case of the tray 10 and the tray 10 ″, by adjusting the arrangement of the locking portions 11 ″ a to 11 ″ d according to the size of the substrate 20, the locking portion 11 Needless to say, the end 20a of the substrate 20 can be locked to "a to 11" d.

<Substrate Case According to Another Embodiment>
The substrate case according to the present invention is not limited to the above-described embodiments (first embodiment and second embodiment). For example, the locking projections provided in the storage unit are not limited to two pairs of projections facing each other.

  The arrangement and the number of the locking projections of the storage portion are not limited as long as they are appropriately designed to lock the end of the substrate according to the shape of the outer periphery of the substrate. Similarly, the arrangement and number of the locking portions of the storage portion are not limited. The storage portion constituting the substrate case supports the substrate on the front surface portion, and holds the substrate by locking the end portion of the substrate with a locking projection provided on the back surface portion of another storage portion. However, the arrangement and number of the locking projections and the locking portions are not limited.

  Therefore, the shape of the outer peripheral portion of the substrate stored in the substrate case is not limited to a circle, and may be a cube or a rectangular parallelepiped. This is because the storage portion may be designed in accordance with the shape and arrangement of the support portion, the locking portion, and the locking protrusion as appropriate according to the shape of the substrate.

  Similarly to the above-described embodiment, when the stacking unit is stacked with the stacking unit positioned on the lower side being stacked, the center of gravity of the substrate supported on the surface of each storing unit is stacked. The surface which has the inclination of a latching convex part should just be provided in the position where it is distant from the space | interval and the position where the outer peripheral edge part of the board | substrate 20 is arrange | positioned. For example, in the configuration in which the substrate is locked by the locking projections provided in a total of three locations, the surface of the locking projections at these three locations that locks the substrate is centered on the center of gravity of the substrate. It is only necessary that the angle is changed every 120 ° on the circumference where the outer peripheral edge of the substrate is arranged. As described above, in the embodiment in which the storage portions are stacked while changing the direction in parallel, the inclined surfaces of the locking projections are spaced apart at equal intervals with the center of gravity of the substrate being held as the center point. As long as it is formed so as to follow the shape of the outer periphery, the number of the locking projections formed in the storage portion is not limited.

  In the substrate case according to another embodiment, the shape of the support portion in the storage portion is not limited to a circular shape centered on the center of gravity of the substrate 20 when the substrate 20 is held. The shape of the support portion may be appropriately designed according to the shape of the substrate to be supported, and may be formed in an arc shape around the center of gravity of the substrate to be supported.

  Moreover, in the board | substrate case which concerns on another embodiment, the latching convex part has the inclination which carries out a line contact with the outer peripheral edge part in the upper surface of a board | substrate. Also according to this configuration, it is possible to prevent the back surface portion of the storage portion from contacting the inner side of the outer peripheral end portion on the upper surface of the substrate. For this reason, it is possible to prevent scratches on the inner side of the outer peripheral end portion of the upper surface of the substrate.

  Further, the substrate case according to another embodiment may have a configuration in which a locking projection is formed on the front surface portion of the storage portion and a locking portion having a step is formed on the back surface portion of the storage portion. . In the storage portion, the front surface portion and the back surface portion are merely relative expressions, and it is clear that the substrate can be suitably held by locking only the end portion of the substrate even in the above configuration. It is.

  The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope shown in the claims, and embodiments obtained by appropriately combining technical means disclosed in different embodiments. Is also included in the technical scope of the present invention.

  The present invention can be suitably used for transporting a semiconductor wafer substrate or a glass substrate.

10, 10 ', 10 "tray (storage section)
11a, 11b, 11c, 11d Locking portions 11'a, 11'c Locking portions 11 "a, 11" b, 11 "c, 11" d Locking portions 12, 12a, 12b, 12c, 12d, 12e Part 12'd, 12'e Support part 12f Support part 13a, 13c, 13e, 13g Locking recess 13'a, 13'e Locking recess 13 "a, 13" c, 13 "e, 13" g Locking Recesses 13b, 13d, 13f, 13h Locking projections 13'b, 13'f Locking projections 13 "b, 13" d, 13 "f, 13" h Locking projections 14a, 14b, 14c, 14d, 14e, 14e, 14f, 14g, 14h, 14J, 14k, 14l, 14m, 14n Fitting portions 15a, 15b, 15c, 15d, 15e, 15e, 15f, 15g, 15h, 15i, 15J, 15k, 15l, 16a, 16b, 16c, 16d, 16e 16f 3rd contact part 17a, 17c, 17e, 17g 1st contact part 17'a, 17'e 1st contact part 17b, 17d, 17f, 17h 2nd contact part 18a, 18b, 18c, 18d, 18e, 18f, 18g, 18h Second contact portion 20 Substrate 20a End portion (substrate)
20b Bottom (substrate)
a1 Chamfered part (end)
a2 Chamfered part (end)
30, 30 'Substrate case 40 Plate (plate part)
40a Notch (plate part)
41 Tying band (band part)
50 Substrate transporter

Claims (13)

A substrate case having a plurality of storage portions for storing substrates,
The storage section is
A surface portion provided with a locking portion having a step for locking the end portion of the substrate;
A back surface portion having a locking projection for locking the end of the substrate,
The substrate is supported inside the locking portion on the front surface portion of one storage portion, and the end portion of the substrate is engaged by a locking protrusion on the back surface of another storage portion located on the storage portion. A substrate case for holding the substrate by stopping. The surface portion includes a support portion that supports a part of the bottom surface of the substrate,
A part of the bottom surface of the substrate is supported by the support portion on the front surface portion of one storage portion, and an end portion of the substrate is formed by a locking convex portion on a back surface portion of another storage portion located on the storage portion. The board case according to claim 1, wherein the board is held by locking the board.   One storage portion supports the end portion of the substrate by the step of the locking portion provided on the front surface portion, and the locking convex portion on the back surface of another storage portion located on the storage portion. The substrate case according to claim 1, wherein the substrate is held by locking an end portion of the substrate.   The support portion includes a plurality of convex portions having a circular shape or an arc shape centered on a center of gravity of the substrate when the surface portion is held in a top view. The substrate case according to claim 2.   The latching convex portion is composed of a plurality of convex portions, and the surface that latches the end portion of the substrate at each convex portion is in contact with the chamfered portion at the end portion of the substrate when the substrate is held. The substrate case according to any one of claims 1 to 4, wherein the substrate case has an inclination.   The substrate case according to claim 1, wherein the locking convex portion includes two pairs of convex portions facing each other. The surface portion includes a locking recess that can fit the locking protrusion provided on the back surface of the other storage portion at a portion where the end of the substrate is disposed,
The locking protrusion and the locking recess are adapted to be fitted to each other only when one storage portion and another storage portion are stacked in a specific arrangement. Item 7. The substrate case according to any one of Items 1 to 6. When the surface portion is adjacent to the locking recess and the storage portion is horizontally disposed, the surface portion is lower than the highest surface of the surface portion and higher than the bottom surface of the locking recess. Comprising a first abutting portion capable of abutting on an end of the locking projection provided on the back surface of another storage portion;
The end portion of the locking projection and the first contact portion are in contact with each other when one storage portion and another storage portion are stacked in a different arrangement from the specific arrangement. The board case according to claim 7, wherein: The back surface portion is adjacent to the locking projection, and is higher than the lowest surface of the back surface portion and lower than the highest surface of the back surface portion when the storage portion is horizontally disposed. And a second abutting portion capable of abutting on a part of the highest surface of the surface portion of the other storage portion,
The second abutting portion and a part of the surface portion of the other storage portion are contacted with each other when one storage portion and another storage portion are stacked in a different arrangement from the specific arrangement. The substrate case according to claim 7 or 8, wherein the substrate case is in contact with each other. The storage portion includes a plurality of fitting portions that are fitted on the front surface portion of one storage portion and the back surface portion of another storage portion,
Only when one storage portion and another storage portion are overlapped in the specific arrangement, the plurality of fitting portions are fitted, and the locking projections and the locking recesses are fitted. The substrate case according to claim 7, wherein the substrate case is configured as follows. Each of the plurality of fitting portions includes a third contact portion that contacts the fitting portion of another storage portion,
When one storage portion and another storage portion are stacked in the different arrangement, the third contact portion of the plurality of fitting portions and the third contact portion of the other storage portion are contacted. The board case according to claim 10, wherein one storage portion and another storage portion are engaged with each other.   The accommodating part which comprises the board | substrate case of any one of Claims 1-11. The substrate case according to any one of claims 1 to 11,
A pair of plate portions for gripping the uppermost surface and the lowermost surface of the substrate case;
A band part for binding the substrate case in a state of being gripped by the pair of plate parts,
Each of said pair of board parts is provided with the notch which arrange | positions the said band part inside in the position which mutually opposes in the edge part of each board part.