KR890008569A - 용량성 가속도계 및 그 제조방법 - Google Patents
용량성 가속도계 및 그 제조방법 Download PDFInfo
- Publication number
- KR890008569A KR890008569A KR1019880014655A KR880014655A KR890008569A KR 890008569 A KR890008569 A KR 890008569A KR 1019880014655 A KR1019880014655 A KR 1019880014655A KR 880014655 A KR880014655 A KR 880014655A KR 890008569 A KR890008569 A KR 890008569A
- Authority
- KR
- South Korea
- Prior art keywords
- intermediate electrode
- electrode structure
- electrodes
- accelerometer
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000004519 manufacturing process Methods 0.000 title claims 3
- 238000000034 method Methods 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000005304 joining Methods 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 230000001568 sexual effect Effects 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000002210 silicon-based material Substances 0.000 claims 1
- 238000003466 welding Methods 0.000 claims 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI874942 | 1987-11-09 | ||
| FI874942A FI81915C (fi) | 1987-11-09 | 1987-11-09 | Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR890008569A true KR890008569A (ko) | 1989-07-12 |
Family
ID=8525381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019880014655A Ceased KR890008569A (ko) | 1987-11-09 | 1988-11-08 | 용량성 가속도계 및 그 제조방법 |
Country Status (10)
| Country | Link |
|---|---|
| JP (1) | JPH01259265A (zh) |
| KR (1) | KR890008569A (zh) |
| CN (1) | CN1022136C (zh) |
| DE (1) | DE3837883A1 (zh) |
| ES (1) | ES2012420A6 (zh) |
| FI (1) | FI81915C (zh) |
| FR (1) | FR2622975B1 (zh) |
| GB (1) | GB2212274A (zh) |
| IT (1) | IT1224301B (zh) |
| SE (1) | SE468067B (zh) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4983485A (en) * | 1988-04-13 | 1991-01-08 | Shikoku Chemicals Corporation | Positively chargeable toner |
| JPH0623782B2 (ja) * | 1988-11-15 | 1994-03-30 | 株式会社日立製作所 | 静電容量式加速度センサ及び半導体圧力センサ |
| US5228341A (en) * | 1989-10-18 | 1993-07-20 | Hitachi, Ltd. | Capacitive acceleration detector having reduced mass portion |
| US6864677B1 (en) | 1993-12-15 | 2005-03-08 | Kazuhiro Okada | Method of testing a sensor |
| JPH03210478A (ja) * | 1990-01-12 | 1991-09-13 | Nissan Motor Co Ltd | 半導体加速度センサ |
| DE4000903C1 (zh) * | 1990-01-15 | 1990-08-09 | Robert Bosch Gmbh, 7000 Stuttgart, De | |
| JP2786321B2 (ja) * | 1990-09-07 | 1998-08-13 | 株式会社日立製作所 | 半導体容量式加速度センサ及びその製造方法 |
| US5421213A (en) | 1990-10-12 | 1995-06-06 | Okada; Kazuhiro | Multi-dimensional force detector |
| US6314823B1 (en) | 1991-09-20 | 2001-11-13 | Kazuhiro Okada | Force detector and acceleration detector and method of manufacturing the same |
| DE4222472C2 (de) * | 1992-07-09 | 1998-07-02 | Bosch Gmbh Robert | Beschleunigungssensor |
| JP2533272B2 (ja) * | 1992-11-17 | 1996-09-11 | 住友電気工業株式会社 | 半導体デバイスの製造方法 |
| FR2698447B1 (fr) * | 1992-11-23 | 1995-02-03 | Suisse Electronique Microtech | Cellule de mesure micro-usinée. |
| DE10111149B4 (de) * | 2001-03-08 | 2011-01-05 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
| DE10117630B4 (de) * | 2001-04-09 | 2005-12-29 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
| EP1243930A1 (de) | 2001-03-08 | 2002-09-25 | EADS Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
| DE10117257A1 (de) * | 2001-04-06 | 2002-10-17 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
| RU2207658C2 (ru) * | 2001-07-09 | 2003-06-27 | ФГУП "НИИ физических измерений" | Способ изготовления микромеханического инерциального чувствительного элемента емкостного типа |
| JP2005077349A (ja) * | 2003-09-03 | 2005-03-24 | Mitsubishi Electric Corp | 加速度センサ |
| JP2009529697A (ja) | 2006-03-10 | 2009-08-20 | コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング | 微小機械回転速度センサ |
| EP2259018B1 (en) | 2009-05-29 | 2017-06-28 | Infineon Technologies AG | Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system |
| DE112012005609T5 (de) * | 2012-04-30 | 2014-09-25 | Hewlett-Packard Development Company, L.P. | Steuersignal basierend auf einem durch einen Benutzer geklopften Befehl |
| CN106771361B (zh) * | 2016-12-15 | 2023-04-25 | 西安邮电大学 | 双电容式微机械加速度传感器及基于其的温度自补偿系统 |
| CN117368525A (zh) * | 2017-04-06 | 2024-01-09 | 中国工程物理研究院电子工程研究所 | 石英摆式加速度计 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH642461A5 (fr) * | 1981-07-02 | 1984-04-13 | Centre Electron Horloger | Accelerometre. |
| JPS6197572A (ja) * | 1984-10-19 | 1986-05-16 | Nissan Motor Co Ltd | 半導体加速度センサの製造方法 |
| US4744249A (en) * | 1985-07-25 | 1988-05-17 | Litton Systems, Inc. | Vibrating accelerometer-multisensor |
| US4679434A (en) * | 1985-07-25 | 1987-07-14 | Litton Systems, Inc. | Integrated force balanced accelerometer |
| DE3625411A1 (de) * | 1986-07-26 | 1988-02-04 | Messerschmitt Boelkow Blohm | Kapazitiver beschleunigungssensor |
| DE3703793A1 (de) * | 1987-02-07 | 1988-08-18 | Messerschmitt Boelkow Blohm | Detektorelement |
-
1987
- 1987-11-09 FI FI874942A patent/FI81915C/fi not_active IP Right Cessation
-
1988
- 1988-11-08 IT IT48532/88A patent/IT1224301B/it active
- 1988-11-08 KR KR1019880014655A patent/KR890008569A/ko not_active Ceased
- 1988-11-08 DE DE3837883A patent/DE3837883A1/de not_active Ceased
- 1988-11-08 FR FR888814564A patent/FR2622975B1/fr not_active Expired - Lifetime
- 1988-11-08 ES ES8803392A patent/ES2012420A6/es not_active Expired - Fee Related
- 1988-11-08 SE SE8804039A patent/SE468067B/sv unknown
- 1988-11-09 CN CN88107822A patent/CN1022136C/zh not_active Expired - Lifetime
- 1988-11-09 JP JP63283533A patent/JPH01259265A/ja active Pending
- 1988-11-09 GB GB8826263A patent/GB2212274A/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| DE3837883A1 (de) | 1989-05-18 |
| SE8804039D0 (sv) | 1988-11-08 |
| CN1033110A (zh) | 1989-05-24 |
| CN1022136C (zh) | 1993-09-15 |
| IT1224301B (it) | 1990-10-04 |
| GB2212274A (en) | 1989-07-19 |
| GB8826263D0 (en) | 1988-12-14 |
| FI81915C (fi) | 1990-12-10 |
| ES2012420A6 (es) | 1990-03-16 |
| SE468067B (sv) | 1992-10-26 |
| FR2622975A1 (fr) | 1989-05-12 |
| FI874942A0 (fi) | 1987-11-09 |
| IT8848532A0 (it) | 1988-11-08 |
| FI81915B (fi) | 1990-08-31 |
| FR2622975B1 (fr) | 1991-07-12 |
| JPH01259265A (ja) | 1989-10-16 |
| FI874942L (fi) | 1989-05-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 19881108 |
|
| PG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 19910831 Comment text: Request for Examination of Application Patent event code: PA02011R01I Patent event date: 19881108 Comment text: Patent Application |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 19940228 Patent event code: PE09021S01D |
|
| E601 | Decision to refuse application | ||
| PE0601 | Decision on rejection of patent |
Patent event date: 19940616 Comment text: Decision to Refuse Application Patent event code: PE06012S01D Patent event date: 19940228 Comment text: Notification of reason for refusal Patent event code: PE06011S01I |