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FI81915C - Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav. - Google Patents

Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav. Download PDF

Info

Publication number
FI81915C
FI81915C FI874942A FI874942A FI81915C FI 81915 C FI81915 C FI 81915C FI 874942 A FI874942 A FI 874942A FI 874942 A FI874942 A FI 874942A FI 81915 C FI81915 C FI 81915C
Authority
FI
Finland
Prior art keywords
electrode
edge
central electrode
central
sensor
Prior art date
Application number
FI874942A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI81915B (fi
FI874942L (fi
FI874942A0 (fi
Inventor
Ari Lehto
Kalervo Jaeppinen
Anna-Maija Kaerkkaeinen
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of FI874942A0 publication Critical patent/FI874942A0/fi
Priority to FI874942A priority Critical patent/FI81915C/fi
Priority to FR888814564A priority patent/FR2622975B1/fr
Priority to KR1019880014655A priority patent/KR890008569A/ko
Priority to SE8804039A priority patent/SE468067B/sv
Priority to IT48532/88A priority patent/IT1224301B/it
Priority to ES8803392A priority patent/ES2012420A6/es
Priority to DE3837883A priority patent/DE3837883A1/de
Priority to GB8826263A priority patent/GB2212274A/en
Priority to CN88107822A priority patent/CN1022136C/zh
Priority to JP63283533A priority patent/JPH01259265A/ja
Publication of FI874942L publication Critical patent/FI874942L/fi
Publication of FI81915B publication Critical patent/FI81915B/fi
Application granted granted Critical
Publication of FI81915C publication Critical patent/FI81915C/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
FI874942A 1987-11-09 1987-11-09 Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav. FI81915C (fi)

Priority Applications (10)

Application Number Priority Date Filing Date Title
FI874942A FI81915C (fi) 1987-11-09 1987-11-09 Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.
KR1019880014655A KR890008569A (ko) 1987-11-09 1988-11-08 용량성 가속도계 및 그 제조방법
FR888814564A FR2622975B1 (fr) 1987-11-09 1988-11-08 Accelerometre capacitif et son procede de fabrication
SE8804039A SE468067B (sv) 1987-11-09 1988-11-08 Kapacitiv accelerometer och saett foer tillverkning av denna
IT48532/88A IT1224301B (it) 1987-11-09 1988-11-08 Accelerometro capacitivo e metodo per produrlo
ES8803392A ES2012420A6 (es) 1987-11-09 1988-11-08 Acelerometro capacitivo y metodo de fabricacion del mismo.
DE3837883A DE3837883A1 (de) 1987-11-09 1988-11-08 Kapazitiver beschleunigungsmesser und verfahren zu seiner herstellung
GB8826263A GB2212274A (en) 1987-11-09 1988-11-09 Capacitive accelerometer and its fabrication method
CN88107822A CN1022136C (zh) 1987-11-09 1988-11-09 容性加速度计及其制造方法
JP63283533A JPH01259265A (ja) 1987-11-09 1988-11-09 キャパシチブ加速度計およびその製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI874942 1987-11-09
FI874942A FI81915C (fi) 1987-11-09 1987-11-09 Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.

Publications (4)

Publication Number Publication Date
FI874942A0 FI874942A0 (fi) 1987-11-09
FI874942L FI874942L (fi) 1989-05-10
FI81915B FI81915B (fi) 1990-08-31
FI81915C true FI81915C (fi) 1990-12-10

Family

ID=8525381

Family Applications (1)

Application Number Title Priority Date Filing Date
FI874942A FI81915C (fi) 1987-11-09 1987-11-09 Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.

Country Status (10)

Country Link
JP (1) JPH01259265A (zh)
KR (1) KR890008569A (zh)
CN (1) CN1022136C (zh)
DE (1) DE3837883A1 (zh)
ES (1) ES2012420A6 (zh)
FI (1) FI81915C (zh)
FR (1) FR2622975B1 (zh)
GB (1) GB2212274A (zh)
IT (1) IT1224301B (zh)
SE (1) SE468067B (zh)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4983485A (en) * 1988-04-13 1991-01-08 Shikoku Chemicals Corporation Positively chargeable toner
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
US5228341A (en) * 1989-10-18 1993-07-20 Hitachi, Ltd. Capacitive acceleration detector having reduced mass portion
US6864677B1 (en) 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
JPH03210478A (ja) * 1990-01-12 1991-09-13 Nissan Motor Co Ltd 半導体加速度センサ
DE4000903C1 (zh) * 1990-01-15 1990-08-09 Robert Bosch Gmbh, 7000 Stuttgart, De
JP2786321B2 (ja) * 1990-09-07 1998-08-13 株式会社日立製作所 半導体容量式加速度センサ及びその製造方法
US5421213A (en) 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US6314823B1 (en) 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
DE4222472C2 (de) * 1992-07-09 1998-07-02 Bosch Gmbh Robert Beschleunigungssensor
JP2533272B2 (ja) * 1992-11-17 1996-09-11 住友電気工業株式会社 半導体デバイスの製造方法
FR2698447B1 (fr) * 1992-11-23 1995-02-03 Suisse Electronique Microtech Cellule de mesure micro-usinée.
EP1243930A1 (de) 2001-03-08 2002-09-25 EADS Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
DE10111149B4 (de) * 2001-03-08 2011-01-05 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
DE10117630B4 (de) * 2001-04-09 2005-12-29 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
DE10117257A1 (de) * 2001-04-06 2002-10-17 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
JP2005077349A (ja) * 2003-09-03 2005-03-24 Mitsubishi Electric Corp 加速度センサ
JP2009529697A (ja) 2006-03-10 2009-08-20 コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング 微小機械回転速度センサ
EP2259018B1 (en) * 2009-05-29 2017-06-28 Infineon Technologies AG Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system
DE112012005609T5 (de) * 2012-04-30 2014-09-25 Hewlett-Packard Development Company, L.P. Steuersignal basierend auf einem durch einen Benutzer geklopften Befehl
CN106771361B (zh) * 2016-12-15 2023-04-25 西安邮电大学 双电容式微机械加速度传感器及基于其的温度自补偿系统
CN106841683B (zh) * 2017-04-06 2023-09-01 中国工程物理研究院电子工程研究所 石英摆式加速度计及其制备方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
JPS6197572A (ja) * 1984-10-19 1986-05-16 Nissan Motor Co Ltd 半導体加速度センサの製造方法
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
US4744249A (en) * 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
DE3625411A1 (de) * 1986-07-26 1988-02-04 Messerschmitt Boelkow Blohm Kapazitiver beschleunigungssensor
DE3703793A1 (de) * 1987-02-07 1988-08-18 Messerschmitt Boelkow Blohm Detektorelement

Also Published As

Publication number Publication date
SE468067B (sv) 1992-10-26
IT1224301B (it) 1990-10-04
FR2622975A1 (fr) 1989-05-12
FI81915B (fi) 1990-08-31
CN1022136C (zh) 1993-09-15
IT8848532A0 (it) 1988-11-08
KR890008569A (ko) 1989-07-12
SE8804039D0 (sv) 1988-11-08
JPH01259265A (ja) 1989-10-16
GB8826263D0 (en) 1988-12-14
CN1033110A (zh) 1989-05-24
GB2212274A (en) 1989-07-19
FI874942L (fi) 1989-05-10
FI874942A0 (fi) 1987-11-09
FR2622975B1 (fr) 1991-07-12
ES2012420A6 (es) 1990-03-16
DE3837883A1 (de) 1989-05-18

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Owner name: VAISALA OY

MA Patent expired