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SE8804039D0 - Capacitive accelerometer and its fabrication method - Google Patents

Capacitive accelerometer and its fabrication method

Info

Publication number
SE8804039D0
SE8804039D0 SE19888804039A SE8804039A SE8804039D0 SE 8804039 D0 SE8804039 D0 SE 8804039D0 SE 19888804039 A SE19888804039 A SE 19888804039A SE 8804039 A SE8804039 A SE 8804039A SE 8804039 D0 SE8804039 D0 SE 8804039D0
Authority
SE
Sweden
Prior art keywords
centre electrode
electrode
centre
body element
wall
Prior art date
Application number
SE19888804039A
Other languages
English (en)
Other versions
SE468067B (sv
Inventor
*Letho A
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of SE8804039D0 publication Critical patent/SE8804039D0/sv
Publication of SE468067B publication Critical patent/SE468067B/sv

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
SE8804039A 1987-11-09 1988-11-08 Kapacitiv accelerometer och saett foer tillverkning av denna SE468067B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI874942A FI81915C (sv) 1987-11-09 1987-11-09 Kapacitiv accelerationsgivare och förfarande för framställning därav

Publications (2)

Publication Number Publication Date
SE8804039D0 true SE8804039D0 (sv) 1988-11-08
SE468067B SE468067B (sv) 1992-10-26

Family

ID=8525381

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8804039A SE468067B (sv) 1987-11-09 1988-11-08 Kapacitiv accelerometer och saett foer tillverkning av denna

Country Status (10)

Country Link
JP (1) JPH01259265A (sv)
KR (1) KR890008569A (sv)
CN (1) CN1022136C (sv)
DE (1) DE3837883A1 (sv)
ES (1) ES2012420A6 (sv)
FI (1) FI81915C (sv)
FR (1) FR2622975B1 (sv)
GB (1) GB2212274A (sv)
IT (1) IT1224301B (sv)
SE (1) SE468067B (sv)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4983485A (en) * 1988-04-13 1991-01-08 Shikoku Chemicals Corporation Positively chargeable toner
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
US5228341A (en) * 1989-10-18 1993-07-20 Hitachi, Ltd. Capacitive acceleration detector having reduced mass portion
US6864677B1 (en) 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
JPH03210478A (ja) * 1990-01-12 1991-09-13 Nissan Motor Co Ltd 半導体加速度センサ
DE4000903C1 (sv) * 1990-01-15 1990-08-09 Robert Bosch Gmbh, 7000 Stuttgart, De
JP2786321B2 (ja) * 1990-09-07 1998-08-13 株式会社日立製作所 半導体容量式加速度センサ及びその製造方法
US5421213A (en) 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US6314823B1 (en) 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
DE4222472C2 (de) * 1992-07-09 1998-07-02 Bosch Gmbh Robert Beschleunigungssensor
JP2533272B2 (ja) * 1992-11-17 1996-09-11 住友電気工業株式会社 半導体デバイスの製造方法
FR2698447B1 (fr) * 1992-11-23 1995-02-03 Suisse Electronique Microtech Cellule de mesure micro-usinée.
DE10111149B4 (de) * 2001-03-08 2011-01-05 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
DE10117630B4 (de) * 2001-04-09 2005-12-29 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
EP1243930A1 (de) 2001-03-08 2002-09-25 EADS Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
DE10117257A1 (de) * 2001-04-06 2002-10-17 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
RU2207658C2 (ru) * 2001-07-09 2003-06-27 ФГУП "НИИ физических измерений" Способ изготовления микромеханического инерциального чувствительного элемента емкостного типа
JP2005077349A (ja) * 2003-09-03 2005-03-24 Mitsubishi Electric Corp 加速度センサ
JP2009529697A (ja) 2006-03-10 2009-08-20 コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング 微小機械回転速度センサ
EP2259018B1 (en) 2009-05-29 2017-06-28 Infineon Technologies AG Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system
DE112012005609T5 (de) * 2012-04-30 2014-09-25 Hewlett-Packard Development Company, L.P. Steuersignal basierend auf einem durch einen Benutzer geklopften Befehl
CN106771361B (zh) * 2016-12-15 2023-04-25 西安邮电大学 双电容式微机械加速度传感器及基于其的温度自补偿系统
CN117368525A (zh) * 2017-04-06 2024-01-09 中国工程物理研究院电子工程研究所 石英摆式加速度计

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
JPS6197572A (ja) * 1984-10-19 1986-05-16 Nissan Motor Co Ltd 半導体加速度センサの製造方法
US4744249A (en) * 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
DE3625411A1 (de) * 1986-07-26 1988-02-04 Messerschmitt Boelkow Blohm Kapazitiver beschleunigungssensor
DE3703793A1 (de) * 1987-02-07 1988-08-18 Messerschmitt Boelkow Blohm Detektorelement

Also Published As

Publication number Publication date
KR890008569A (ko) 1989-07-12
DE3837883A1 (de) 1989-05-18
CN1033110A (zh) 1989-05-24
CN1022136C (zh) 1993-09-15
IT1224301B (it) 1990-10-04
GB2212274A (en) 1989-07-19
GB8826263D0 (en) 1988-12-14
FI81915C (sv) 1990-12-10
ES2012420A6 (es) 1990-03-16
SE468067B (sv) 1992-10-26
FR2622975A1 (fr) 1989-05-12
FI874942A0 (fi) 1987-11-09
IT8848532A0 (it) 1988-11-08
FI81915B (fi) 1990-08-31
FR2622975B1 (fr) 1991-07-12
JPH01259265A (ja) 1989-10-16
FI874942L (fi) 1989-05-10

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