SE8804039D0 - Capacitive accelerometer and its fabrication method - Google Patents
Capacitive accelerometer and its fabrication methodInfo
- Publication number
- SE8804039D0 SE8804039D0 SE19888804039A SE8804039A SE8804039D0 SE 8804039 D0 SE8804039 D0 SE 8804039D0 SE 19888804039 A SE19888804039 A SE 19888804039A SE 8804039 A SE8804039 A SE 8804039A SE 8804039 D0 SE8804039 D0 SE 8804039D0
- Authority
- SE
- Sweden
- Prior art keywords
- centre electrode
- electrode
- centre
- body element
- wall
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI874942A FI81915C (sv) | 1987-11-09 | 1987-11-09 | Kapacitiv accelerationsgivare och förfarande för framställning därav |
Publications (2)
Publication Number | Publication Date |
---|---|
SE8804039D0 true SE8804039D0 (sv) | 1988-11-08 |
SE468067B SE468067B (sv) | 1992-10-26 |
Family
ID=8525381
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE8804039A SE468067B (sv) | 1987-11-09 | 1988-11-08 | Kapacitiv accelerometer och saett foer tillverkning av denna |
Country Status (10)
Country | Link |
---|---|
JP (1) | JPH01259265A (sv) |
KR (1) | KR890008569A (sv) |
CN (1) | CN1022136C (sv) |
DE (1) | DE3837883A1 (sv) |
ES (1) | ES2012420A6 (sv) |
FI (1) | FI81915C (sv) |
FR (1) | FR2622975B1 (sv) |
GB (1) | GB2212274A (sv) |
IT (1) | IT1224301B (sv) |
SE (1) | SE468067B (sv) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4983485A (en) * | 1988-04-13 | 1991-01-08 | Shikoku Chemicals Corporation | Positively chargeable toner |
JPH0623782B2 (ja) * | 1988-11-15 | 1994-03-30 | 株式会社日立製作所 | 静電容量式加速度センサ及び半導体圧力センサ |
US5228341A (en) * | 1989-10-18 | 1993-07-20 | Hitachi, Ltd. | Capacitive acceleration detector having reduced mass portion |
US6864677B1 (en) | 1993-12-15 | 2005-03-08 | Kazuhiro Okada | Method of testing a sensor |
JPH03210478A (ja) * | 1990-01-12 | 1991-09-13 | Nissan Motor Co Ltd | 半導体加速度センサ |
DE4000903C1 (sv) * | 1990-01-15 | 1990-08-09 | Robert Bosch Gmbh, 7000 Stuttgart, De | |
JP2786321B2 (ja) * | 1990-09-07 | 1998-08-13 | 株式会社日立製作所 | 半導体容量式加速度センサ及びその製造方法 |
US5421213A (en) | 1990-10-12 | 1995-06-06 | Okada; Kazuhiro | Multi-dimensional force detector |
US6314823B1 (en) | 1991-09-20 | 2001-11-13 | Kazuhiro Okada | Force detector and acceleration detector and method of manufacturing the same |
DE4222472C2 (de) * | 1992-07-09 | 1998-07-02 | Bosch Gmbh Robert | Beschleunigungssensor |
JP2533272B2 (ja) * | 1992-11-17 | 1996-09-11 | 住友電気工業株式会社 | 半導体デバイスの製造方法 |
FR2698447B1 (fr) * | 1992-11-23 | 1995-02-03 | Suisse Electronique Microtech | Cellule de mesure micro-usinée. |
DE10111149B4 (de) * | 2001-03-08 | 2011-01-05 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
DE10117630B4 (de) * | 2001-04-09 | 2005-12-29 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
EP1243930A1 (de) | 2001-03-08 | 2002-09-25 | EADS Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
DE10117257A1 (de) * | 2001-04-06 | 2002-10-17 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
RU2207658C2 (ru) * | 2001-07-09 | 2003-06-27 | ФГУП "НИИ физических измерений" | Способ изготовления микромеханического инерциального чувствительного элемента емкостного типа |
JP2005077349A (ja) * | 2003-09-03 | 2005-03-24 | Mitsubishi Electric Corp | 加速度センサ |
JP2009529697A (ja) | 2006-03-10 | 2009-08-20 | コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング | 微小機械回転速度センサ |
EP2259018B1 (en) | 2009-05-29 | 2017-06-28 | Infineon Technologies AG | Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system |
DE112012005609T5 (de) * | 2012-04-30 | 2014-09-25 | Hewlett-Packard Development Company, L.P. | Steuersignal basierend auf einem durch einen Benutzer geklopften Befehl |
CN106771361B (zh) * | 2016-12-15 | 2023-04-25 | 西安邮电大学 | 双电容式微机械加速度传感器及基于其的温度自补偿系统 |
CN117368525A (zh) * | 2017-04-06 | 2024-01-09 | 中国工程物理研究院电子工程研究所 | 石英摆式加速度计 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH642461A5 (fr) * | 1981-07-02 | 1984-04-13 | Centre Electron Horloger | Accelerometre. |
JPS6197572A (ja) * | 1984-10-19 | 1986-05-16 | Nissan Motor Co Ltd | 半導体加速度センサの製造方法 |
US4744249A (en) * | 1985-07-25 | 1988-05-17 | Litton Systems, Inc. | Vibrating accelerometer-multisensor |
US4679434A (en) * | 1985-07-25 | 1987-07-14 | Litton Systems, Inc. | Integrated force balanced accelerometer |
DE3625411A1 (de) * | 1986-07-26 | 1988-02-04 | Messerschmitt Boelkow Blohm | Kapazitiver beschleunigungssensor |
DE3703793A1 (de) * | 1987-02-07 | 1988-08-18 | Messerschmitt Boelkow Blohm | Detektorelement |
-
1987
- 1987-11-09 FI FI874942A patent/FI81915C/sv not_active IP Right Cessation
-
1988
- 1988-11-08 IT IT48532/88A patent/IT1224301B/it active
- 1988-11-08 KR KR1019880014655A patent/KR890008569A/ko not_active Ceased
- 1988-11-08 DE DE3837883A patent/DE3837883A1/de not_active Ceased
- 1988-11-08 FR FR888814564A patent/FR2622975B1/fr not_active Expired - Lifetime
- 1988-11-08 ES ES8803392A patent/ES2012420A6/es not_active Expired - Fee Related
- 1988-11-08 SE SE8804039A patent/SE468067B/sv unknown
- 1988-11-09 CN CN88107822A patent/CN1022136C/zh not_active Expired - Lifetime
- 1988-11-09 JP JP63283533A patent/JPH01259265A/ja active Pending
- 1988-11-09 GB GB8826263A patent/GB2212274A/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
KR890008569A (ko) | 1989-07-12 |
DE3837883A1 (de) | 1989-05-18 |
CN1033110A (zh) | 1989-05-24 |
CN1022136C (zh) | 1993-09-15 |
IT1224301B (it) | 1990-10-04 |
GB2212274A (en) | 1989-07-19 |
GB8826263D0 (en) | 1988-12-14 |
FI81915C (sv) | 1990-12-10 |
ES2012420A6 (es) | 1990-03-16 |
SE468067B (sv) | 1992-10-26 |
FR2622975A1 (fr) | 1989-05-12 |
FI874942A0 (fi) | 1987-11-09 |
IT8848532A0 (it) | 1988-11-08 |
FI81915B (fi) | 1990-08-31 |
FR2622975B1 (fr) | 1991-07-12 |
JPH01259265A (ja) | 1989-10-16 |
FI874942L (fi) | 1989-05-10 |
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NAL | Patent in force |
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