[go: up one dir, main page]

KR870009495A - 반도체 변형게이지 브리지회로 - Google Patents

반도체 변형게이지 브리지회로 Download PDF

Info

Publication number
KR870009495A
KR870009495A KR870002555A KR870002555A KR870009495A KR 870009495 A KR870009495 A KR 870009495A KR 870002555 A KR870002555 A KR 870002555A KR 870002555 A KR870002555 A KR 870002555A KR 870009495 A KR870009495 A KR 870009495A
Authority
KR
South Korea
Prior art keywords
bridge circuit
resistance
semiconductor strain
strain gauge
resistance element
Prior art date
Application number
KR870002555A
Other languages
English (en)
Other versions
KR900004369B1 (ko
Inventor
아츠시 미야자키
료이치 고바야시
Original Assignee
미타 가츠시게
가부시키가이샤 히타치세이사쿠쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미타 가츠시게, 가부시키가이샤 히타치세이사쿠쇼 filed Critical 미타 가츠시게
Publication of KR870009495A publication Critical patent/KR870009495A/ko
Application granted granted Critical
Publication of KR900004369B1 publication Critical patent/KR900004369B1/ko
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Force In General (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)

Abstract

내용 없음

Description

반도체 변형게이지 브리지회로
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본원 발명의 제1의 실시예에 의한 반도체 변형게이지 브리지 회로장치의 회로도.
제2A도는 본원 발명의 반도체 변형게이지 브리지 회로장치를 사용한 압력트랜스듀서의 구성을 나타낸 측면단면도.
제2B도는 제2A도의 트랜스 듀서내의 반도체 변형게이지의 구성을 나타낸 평면도.
제3A도, 제3B도, 제3C도는 제1도의 브리지회로에 있어서의 감도온도 특성의 보상을 설명하기 위한 도면.

Claims (6)

  1. 반도체 변형게이지 에 의해서 구성되는 브리지회로와,
    이 브리지회로의 1쌍의 출력단자의 한쪽에 접속되고, 소정온도에 있어서의 이 한쪽의 출력단자의 전위 와 실질적으로 동일한 전압을 발생하는 수단을 포함한 제1의 영점온도 보상회로와,
    상기 출력단자의 다른 쪽의 단자에 접속되고, 상기 반도체 변형게이지의 온도특성과 동일한 온도특성을 가진 저항소자를 포함한 제2의 영점온도 보상회로로 이루어진 것을 특징으로 하는 반도체 변형게이지 브리지 회로장치.
  2. 제1항에 있어서, 상기 제2의 영점온도 보상회로는 마이너스성 온도저항특성를 가진 저항소자와, 이 저항소자에 직렬 접속된 고정저항을 포함한 것을 특징으로 하는 반도체 변형게이지 브리지 회로장치.
  3. 제1항에 있어서, 상기 제2의 영점온도 보상회로는 마이너스성 온도 저항특성를 가진 저항소자와, 이 저항소자에 병렬로 접속된 제1의 고정저항과, 상기 저항소자와 상기 제1의 고정저항의 병렬접속에 직렬로 접속된 제2의 고정저항을 포함한 것을 특징으로 하는 반도체 변형게이지 브리지 회로장치.
  4. 제1항에 있어서, 상기 브리지회로의 온도감도를 보상하기 위하여 다시 상기 반도체 변형게이지 브리지회로의 1쌍의 전원단자의 한쪽의 단자에 접속된 상기 브리지회로의 감도온도 보상회로를 포함한 것을 특징으로 하는 반도체 변형게이지 브리지 회로장치.
  5. 제4항에 있어서, 상기 제2의 영점온도 보상회로는 마이너스성 온도저항 특성을 가진 저항소자와, 이 저항소자에 직렬 접속된 고정저항을 포함한 것을 특징으로 하는 반도체 변형게이지 브리지 회로장치.
  6. 제4항에 있어서, 상기 제2의 영점온도 보상회로는 마이너스성 온도저항 특성을 가진 저항소자와, 이 저항소자에 병렬로 접속된 제1의 고정저항과, 상기 저항소자와 상기 제1의 고정저항의 병렬 접속에 직렬로 접속된 제2의 고정저항을 포함한 것을 특징으로 하는 반도체 변형게이지 브리지 회로장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019870002555A 1986-03-26 1987-03-20 반도체 변형게이지 브리지회로 Expired KR900004369B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP86-65713 1986-03-26
JP61065713A JPH0797010B2 (ja) 1986-03-26 1986-03-26 半導体歪ゲ−ジブリツジ回路
JP65713 1986-03-26

Publications (2)

Publication Number Publication Date
KR870009495A true KR870009495A (ko) 1987-10-27
KR900004369B1 KR900004369B1 (ko) 1990-06-23

Family

ID=13294932

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870002555A Expired KR900004369B1 (ko) 1986-03-26 1987-03-20 반도체 변형게이지 브리지회로

Country Status (5)

Country Link
US (1) US4911016A (ko)
EP (1) EP0239094B1 (ko)
JP (1) JPH0797010B2 (ko)
KR (1) KR900004369B1 (ko)
DE (1) DE3776931D1 (ko)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8908518D0 (en) * 1989-04-14 1989-06-01 Lucas Ind Plc Transducer temperature compensation circuit
US5184520A (en) * 1989-10-18 1993-02-09 Ishida Scales Mfg. Co., Ltd. Load sensor
US5178016A (en) * 1989-11-15 1993-01-12 Sensym, Incorporated Silicon pressure sensor chip with a shear element on a sculptured diaphragm
US5031461A (en) * 1990-02-05 1991-07-16 Motorola, Inc. Matched pair of sensor and amplifier circuits
DE4115288C2 (de) * 1991-05-10 1995-05-04 Bosch Gmbh Robert Einrichtung zum Abgleich von Exemplarstreuung und Temperatureinflüssen mindestens eines Sensors
JPH05256716A (ja) * 1992-03-13 1993-10-05 Mitsubishi Electric Corp 半導体装置
FR2690524B1 (fr) * 1992-04-24 1997-09-26 Sextant Avionique Procede de compensation en temperature d'un pont de jauges de mesure de pression.
US5343755A (en) * 1993-05-05 1994-09-06 Rosemount Inc. Strain gage sensor with integral temperature signal
FR2719375B1 (fr) * 1994-04-28 1996-07-26 Sextant Avionique Procédé de compensation des dérives thermiques d'un pont de jauges de mesure de pression.
US8280682B2 (en) 2000-12-15 2012-10-02 Tvipr, Llc Device for monitoring movement of shipped goods
US5568815A (en) * 1994-11-21 1996-10-29 Becton Dickinson And Company Self-powered interface circuit for use with a transducer sensor
US7386401B2 (en) 1994-11-21 2008-06-10 Phatrat Technology, Llc Helmet that reports impact information, and associated methods
US6266623B1 (en) * 1994-11-21 2001-07-24 Phatrat Technology, Inc. Sport monitoring apparatus for determining loft time, speed, power absorbed and other factors such as height
FR2776384B1 (fr) * 1998-03-20 2000-06-23 Snecma Capteur de pression avec compensation de la non-linearite de la derive de zero aux tres basses temperatures
US6725165B1 (en) 2000-08-10 2004-04-20 Autoliv Asp, Inc. Weight measurement system, method and weight sensor
US7171331B2 (en) 2001-12-17 2007-01-30 Phatrat Technology, Llc Shoes employing monitoring devices, and associated methods
GB2370122B (en) * 2000-12-16 2005-04-27 Senstronics Ltd Temperature compensated strain gauge
US6870236B2 (en) 2003-05-20 2005-03-22 Honeywell International, Inc. Integrated resistor network for multi-functional use in constant current or constant voltage operation of a pressure sensor
US20040252290A1 (en) * 2003-06-10 2004-12-16 Ferguson Gary W. Optical strain gauge and methods of use including a wind measurement device
US8121687B2 (en) * 2004-11-01 2012-02-21 Proteus Biomedical, Inc. Cardiac motion characterization by strain measurement
JP2008151596A (ja) * 2006-12-15 2008-07-03 Tanita Corp ロードセルおよび質量計
TW201227753A (en) * 2010-12-28 2012-07-01 British Virgin Islands Central Digital Inc Sensor temperature compensation circuit and method thereof
US8878598B2 (en) 2010-12-28 2014-11-04 British Virgin Islands Central Digital Inc. Sensing module
US8720276B2 (en) 2011-03-24 2014-05-13 Medtronic, Inc. Moment fraction computation for sensors
CN102507081A (zh) * 2011-10-24 2012-06-20 山东佰测仪表有限公司 使用温敏电阻对扩散硅压力传感器温敏系数的归一化补偿电路
CN104457796A (zh) * 2013-09-17 2015-03-25 英属维京群岛商中央数位公司 感测模块
RU2569925C1 (ru) * 2014-08-22 2015-12-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Косвенный способ настройки тензорезисторных датчиков с мостовой измерительной цепью по мультипликативной температурной погрешности с учетом нелинейности температурной характеристики выходного сигнала датчика
RU2585486C1 (ru) * 2015-04-07 2016-05-27 Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский университет "Московский институт электронной техники" (МИЭТ) Способ измерения давления и калибровки на основе тензомостового интегрального преобразователя давления
JP6357182B2 (ja) * 2016-03-15 2018-07-11 アルプス電気株式会社 センサ装置
CN105910531B (zh) * 2016-06-22 2019-04-12 北京科技大学 基于完全温度补偿技术的原位数字化型三维孔壁应变计
JP6633581B2 (ja) * 2017-08-28 2020-01-22 ファナック株式会社 検出装置
EP4431896A1 (en) * 2023-03-16 2024-09-18 Worthington Cylinders GmbH Device for measuring a pressure in an interior chamber of a pressure vessel and pressure vessel equipped with such a device
WO2024208949A1 (en) * 2023-04-05 2024-10-10 Huba Control Ag Pressure measuring cell

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3717038A (en) * 1971-04-30 1973-02-20 Gen Electric Direct current pressure ratio circuit
US3967188A (en) * 1973-05-24 1976-06-29 Bell & Howell Company Temperature compensation circuit for sensor of physical variables such as temperature and pressure
JPS5453877A (en) * 1977-10-07 1979-04-27 Hitachi Ltd Temperature compensation circuit of semiconductor strain gauge
US4414853A (en) * 1981-08-10 1983-11-15 The Foxboro Company Pressure transmitter employing non-linear temperature compensation
JPS5896202U (ja) * 1981-12-23 1983-06-30 株式会社石田衡器製作所 歪みゲ−ジの温度補償回路
JPS58114199A (ja) * 1981-12-26 1983-07-07 株式会社東芝 ２線式圧力差圧伝送器
US4463274A (en) * 1982-02-01 1984-07-31 Motorola, Inc. Temperature compensation circuit for pressure sensor
JPS58140604A (ja) * 1982-02-17 1983-08-20 Hitachi Ltd 温度補償回路付き集積化センサ
JPS5937417A (ja) * 1982-08-25 1984-02-29 Mitsubishi Electric Corp 半導体圧力センサのオフセツト電圧温度補償回路
DE3427743A1 (de) * 1984-07-27 1986-02-06 Keller AG für Druckmeßtechnik, Winterthur Verfahren zur temperaturkompensation und messschaltung hierfuer

Also Published As

Publication number Publication date
JPS62223601A (ja) 1987-10-01
KR900004369B1 (ko) 1990-06-23
US4911016A (en) 1990-03-27
DE3776931D1 (de) 1992-04-09
EP0239094B1 (en) 1992-03-04
JPH0797010B2 (ja) 1995-10-18
EP0239094A2 (en) 1987-09-30
EP0239094A3 (en) 1989-06-14

Similar Documents

Publication Publication Date Title
KR870009495A (ko) 반도체 변형게이지 브리지회로
KR880008032A (ko) 부하를 흐르는 전류의 선형 측정용 회로
KR880003177A (ko) 반도체 압력센서
KR880701362A (ko) 기계적 변형 측정용 회로장치
KR830005760A (ko) 온도 보상하는 압력 센서 증폭회로
JPH0797117B2 (ja) 温度に非線形に依存する出力信号の発生回路装置
KR840005624A (ko) 온도보상용 바이어스 회로
GB1263673A (en) Improvements in or relating to resistance bridge circuits
GB1179337A (en) Improvements in Measuring Bridge Circuits
GB902087A (en) Improvements in or relating to electrical bridge networks
ATE35459T1 (de) Elektromechanische waegezelle mit biegemesskoerper.
IT1183962B (it) Circuiti di interfaccia fra un sensore in particolare un sensore di pressione del tipo a film spesso ed uno strumento indicatore elettrodinamico e sensore incorporante tale circuito particolarmente per l'impiego a bordo di autoveicoli
GB1482494A (en) Pressure transducers
SU1500862A2 (ru) Устройство дл измерени температуры
SU885842A1 (ru) Тензометрический преобразователь
SU434284A1 (ru) Устройство температурной компенсации датчиков с тензорезисторными преобразователями
SU1642231A1 (ru) Тензочувствительный мост
SU638896A1 (ru) Термоанемометрический преобразователь
SU765646A1 (ru) Устройство дл преобразовани деформации упругого чувствительного элемента в токовый выходной сигнал
SU1157346A1 (ru) Тензорезисторный датчик
SU418821A1 (ru) Преобразователь излучения
SU853735A1 (ru) Устройство дл защиты операционногоуСилиТЕл
GB1453078A (en) Transducer device with temperature compensation mechanical actuator having presettable positions
SU1663753A1 (ru) Усилитель
SU953447A1 (ru) Тензометрическое устройство

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19870320

PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 19870320

Comment text: Request for Examination of Application

PG1501 Laying open of application
G160 Decision to publish patent application
PG1605 Publication of application before grant of patent

Comment text: Decision on Publication of Application

Patent event code: PG16051S01I

Patent event date: 19900524

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 19900903

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 19900907

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 19900907

End annual number: 3

Start annual number: 1

PR1001 Payment of annual fee

Payment date: 19930331

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 19940413

Start annual number: 5

End annual number: 5

PR1001 Payment of annual fee

Payment date: 19950411

Start annual number: 6

End annual number: 6

PR1001 Payment of annual fee

Payment date: 19960329

Start annual number: 7

End annual number: 7

PR1001 Payment of annual fee

Payment date: 19970411

Start annual number: 8

End annual number: 8

PR1001 Payment of annual fee

Payment date: 19980325

Start annual number: 9

End annual number: 9

FPAY Annual fee payment

Payment date: 19990514

Year of fee payment: 10

PR1001 Payment of annual fee

Payment date: 19990514

Start annual number: 10

End annual number: 10

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee