KR20090032952A - Manufacturing apparatus and manufacturing method of the photosensitive laminate - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing apparatus and a manufacturing method of a photosensitive laminate, wherein the glass substrate 24 is uniformly and rapidly up to the first heating temperature by the hot plates 110a and 110b constituting the first heating mechanism 104. After being heated, it is supplied to the 2nd heating mechanisms 106a and 106b by the board | substrate supply mechanism 108, and is conveyed by the conveyance parts 134a and 134b, and is heated by the infrared heaters 136a-136d. After being heated and maintained at a second heating temperature lower than the temperature, a long-length photosensitive web 22 is supplied between the rubber rollers 80a and 80b constituting the attachment mechanism 46, and the glass substrate 24 is provided. The photosensitive laminated body 24b is manufactured by crimping | bonding the photosensitive resin layer 28 to it.

Description

The manufacturing apparatus and manufacturing method of a photosensitive laminated body {APPARATUS AND METHOD FOR MANUFACTURING A PHOTOSENSITIVE LAMINATED BODY}

According to the present invention, a long photosensitive web formed by forming a photosensitive material layer on a support is sent together with a substrate between a pair of heated pressing rollers, and the photosensitive material layer is attached to the substrate. The manufacturing apparatus and the manufacturing method of the photosensitive laminated body which manufacture a laminated body are related.

For example, the board | substrate for liquid crystal panels, the board for printed wirings, and the board | substrate for PDP are comprised by attaching the photosensitive sheet body (photosensitive web) which has a photosensitive resin layer (photosensitive material layer) to the board | substrate surface. As for the photosensitive sheet body, the photosensitive resin layer and the protective film are laminated | stacked in order on the flexible plastic support body, for example.

8 shows a schematic configuration of a manufacturing apparatus 1 used for attaching a photosensitive sheet body (see Japanese Patent Laid-Open No. 8-183146). In the manufacturing apparatus 1, the photosensitive web 3 withdrawn from the photosensitive web roll 2 and the protective film peeled is supplied between the crimping rollers 4a and 4b, and the board | substrate heating provided with the far-infrared heater 5 etc. The board | substrate 7 heated to the predetermined temperature by the part 6 is supplied between the crimping rollers 4a and 4b. The photosensitive web 3 and the substrate 7 heated and compressed by the pressing rollers 4a and 4b are cooled in the cooling unit 8, and the photosensitive web 3 between the substrates 7 is cut by the cutter 9. After being cut apart and separated, the photosensitive laminate is produced by peeling the support from the photosensitive material layer by the film chuck 10.

By the way, in the photosensitive laminated body manufactured as mentioned above, if the board | substrate 7 is not adjusted to the appropriate heating temperature in the board | substrate heating part 6, a bubble may mix or the photosensitive material may be mixed between the photosensitive material layer and the board | substrate 7 Wrinkles may arise in a layer.

9 and 10 show measurement points A1 to A4, X1 to X3 of the temperature of the substrate 7 heated by the substrate heating unit 6, and temperatures measured at each measurement point A1 to A4, X1 to X3. The temporal change of. Since the amount of heat supplied from the far infrared heater 5 to the substrate 7 is smaller than the amount of heat supplied to the measurement points X1 to X3 at the measurement points A1 to A4 on the peripheral edge side of the substrate 7, When the heat generation amount of the far-infrared heater 5 is set in consideration of heat being transferred from the measuring points X1 to X3 to the measuring points A1 to A4, the target temperature is measured at the measuring points A1 to A4 as shown in FIG. In the measurement points (X1 to X3), once the target temperature is greatly exceeded, the temperature characteristic gradually approaches the target temperature.

In this case, it is made small so that the temperature difference (DELTA) Tir of the temperature of the measurement points A1-A4 in the peripheral part side of the board | substrate 7, and the temperature of the measurement points X1-X3 in the center part side may be in an allowable range, In order to bring the whole surface of the board | substrate 7 to the target temperature which becomes a substantially uniform temperature distribution, it is necessary to set heating time of the board | substrate 7 long enough.

However, when it is going to ensure sufficient heating time, the time required for manufacture of a photosensitive laminated body will become long, and a fall of productivity will be caused. On the other hand, when the board | substrate heating part 6 is comprised long in the conveyance direction of the board | substrate 7, it becomes possible to ensure heating time, but in this case, a device becomes large and the problem of installation cost rises. .

An object of the present invention is to provide an apparatus and a manufacturing method of a photosensitive laminate which can heat a substrate uniformly to a desired temperature in a short time without increasing the size of the apparatus and can produce a high quality photosensitive laminate. do.

Moreover, an object of this invention is to provide the manufacturing apparatus and manufacturing method of the photosensitive laminated body which can reduce installation cost and can improve the productivity of a photosensitive laminated body.

According to the present invention, a long photosensitive web formed by forming a photosensitive material layer on a support is fed together with a substrate between a pair of heated pressing rollers, and the photosensitive laminate is attached to the substrate by attaching the photosensitive material layer to the substrate. In the manufacturing apparatus of the photosensitive laminated body to manufacture,

It is provided in front of a pair of crimping rollers, and has a board | substrate heating part which adjusts the said board | substrate to predetermined | prescribed heating temperature, and supplies between the said crimping rollers,

The substrate heating unit,

A first heating mechanism for heating the substrate to a first heating temperature by bringing first heating means into contact with the entire surface of the substrate;

A second heating mechanism that is heated and maintained at a second heating temperature in a non-contact state by the second heating means by the second heating means, and is conveyed between the pressing rollers by a conveying means;

And a substrate supply mechanism for supplying the substrate from the first heating mechanism to the second heating mechanism.

Moreover, this invention sends out the photosensitive web of the elongate shape which forms the photosensitive material layer on a support body with a board | substrate between a pair of heated crimping rollers, and attaches the said photosensitive material layer to the said board | substrate, and is photosensitive laminated In the manufacturing method of the photosensitive laminated body which manufactures a sieve,

Contacting a first heating means with an entire surface of the substrate, and heating the substrate to a first heating temperature;

Holding and heating the substrate heated to the first heating temperature at a second heating temperature in a non-contact state by a second heating means;

It characterized by having the step of conveying the said board | substrate heated and maintained by the said 2nd heating temperature between the said crimping rollers.

In the present invention, the substrate can be quickly heated to a uniform temperature by bringing the first heating means into contact with the entire surface of the substrate. Subsequently, by maintaining the substrate in a non-contact state by the second heating means and conveying it between the pressing rollers, a photosensitive material layer can be attached to the substrate in a desired heating state to produce a high-quality photosensitive laminate. In this case, since the temperature of a board | substrate can be heated quickly by a 1st heating means, it is not necessary to comprise the 2nd heating mechanism which comprises a 2nd heating means in large size, and it is possible to reduce installation cost, The productivity of the photosensitive laminate can be improved.

The above objects, features, and advantages will become more apparent from the following description of the preferred embodiments in cooperation with the accompanying drawings.

1 is a schematic configuration diagram of an apparatus 20 for manufacturing a photosensitive laminate according to the present embodiment, the apparatus 20 having a length having a predetermined width dimension in a manufacturing process such as a liquid crystal or a color filter for an organic EL. The thermal transfer (laminating) of the photosensitive resin layer 28 (described later) of the elongate photosensitive web 22 to the glass substrate 24 is performed.

2 is a cross-sectional view of the elongated photosensitive web 22 used in the manufacturing apparatus 20. The long photosensitive web 22 is formed by stacking a flexible base film (support) 26, a photosensitive resin layer (photosensitive material layer) 28, and a protective film 30.

As shown in FIG. 1, the manufacturing apparatus 20 accommodates the photosensitive web roll 23 which wound the long photosensitive web 22 in roll shape, and has the said long shape from the photosensitive web roll 23 Cut in the width direction of the web delivery mechanism 32 capable of sending the photosensitive web 22, and the protective film 30 and the photosensitive resin layer 28 of the elongated shape photosensitive web 22. The processing mechanism 36 which forms the half cut site | part (processing site) 34a, 34b (refer FIG. 2) which is two boundary parts which can be made, and the adhesive label 38 which has a non-adhesive part 38a in a part ( 3, a label adhesive mechanism 40 is attached to the protective film 30.

Downstream of the label adhesive mechanism 40, a protective film (42) for changing the long-length photosensitive web 22 from tact transfer to continuous feed and the long-length photosensitive web 22 from the protective film ( The peeling mechanism 44 which peels 30 at predetermined length space | intervals, the 1st heating mechanism 104 which heats the glass substrate 24 to predetermined temperature, and the 1st heating mechanism 104 were heated by The second heating mechanisms 106a and 106b for supplying the glass substrate 24 to the attachment position while the glass substrate 24 is kept heated, and the glass substrate 24 are supplied from the first heating mechanism 104 to the second heating mechanism 106a. The attachment mechanism 46 which integrally attaches the board | substrate supply mechanism 108 and the photosensitive resin layer 28 exposed by peeling of the said protective film 30 to the said glass substrate 24 is arrange | positioned. In addition, the 1st heating mechanism 104 and the 2nd heating mechanism 106a, 106b comprise a board | substrate heating part.

Near the upstream of the attachment position in the attachment mechanism 46, the imaging | photography part 47 which image | photographs the image of the elongate photosensitive web 22 containing the half cut parts 34a and 34b is arrange | positioned. The manufacturing apparatus 20 calculates the position shift amount of the half cut parts 34a and 34b with respect to the attachment mechanism 46 based on the image of the half cut parts 34a and 34b photographed by the imaging part 47, Then, the feed amount of the long photosensitive web 22 is corrected.

In the downstream vicinity of the web delivery mechanism 32, the mounting table 49 attaches the rear end of the long-used photosensitive web 22 to the end of the long-length photosensitive web 22 newly used. ) Is placed. Downstream of the mounting table 49, a film terminal position detector 51 is disposed in order to control the deviation in the width direction due to the winding deviation of the photosensitive web roll 23. Here, although film terminal position adjustment is performed by moving the web delivery mechanism 32 to the width direction, you may install and install the position adjustment mechanism which combined the roller.

The processing mechanism 36 is disposed downstream of the roller pair 50 for calculating the roll diameter of the photosensitive web roll 23 accommodated and wound in the web delivery mechanism 32. The processing mechanism 36 has a pair of round blades 52a and 52b spaced apart by the distance M (FIG. 2). The round blades 52a and 52b travel in the width direction of the elongate photosensitive web 22 and have half-cut portions at two predetermined positions between the remaining portions 30b of the protective film 30. 34a, 34b). In addition, the protective film 30 before and behind the remaining part 30b is the peeling part 30a from which the protective film 30 peels.

As shown in FIG. 2, the half cut portions 34a and 34b need to cut at least the protective film 30 and the photosensitive resin layer 28, and are actually rounded to be cut to the flexible base film 26. The cutting depths of the blades 52a and 52b are set. The round blades 52a and 52b move in the width direction of the long photosensitive web 22 in a fixed state without being rotated to form half cut portions 34a and 34b, but the long lengths A method of forming the half cut portions 34a and 34b by moving in the width direction while rotating without slipping on the photosensitive web 22 having a shape is adopted. Instead of the round blades 52a and 52b, the half cut portions 34a and 34b may be formed by a knife blade, a small blade (thomson blade) or the like, in addition to a cut method using, for example, laser light or ultrasonic waves.

The half cut portions 34a and 34b are set such that when the photosensitive resin layer 28 is attached to the glass substrate 24, for example, the half cut portions 34a and 34b are inwardly inserted by 10 mm from both ends of the glass substrate 24, respectively. In addition, when the remaining part 30b of the protective film 30 between the glass substrates 24 attaches the photosensitive resin layer 28 to the said glass substrate 24 in a frame shape in the attachment mechanism 46 mentioned later, It functions as a mask of.

The label adhesive mechanism 40 peels off the half cut part 34a and the half cut part 34a on the half cut part 34b side in order to leave the remaining part 30b of the protective film 30 correspondingly between the glass substrates 24. The adhesive label 38 which connects the peeling part 30a of the side) is supplied.

As shown in FIG. 3, the adhesive label 38 is comprised in rectangular shape, for example, is formed with the same resin material as the protective film 30. As shown in FIG. The adhesive label 38 has a non-adhesive portion (including non-adhesive) 38a to which a pressure-sensitive adhesive is not applied, and both sides of the non-adhesive portion 38a, that is, in the longitudinal direction of the adhesive label 38. It has a 1st adhesion part 38b adhering to the front peeling part 30a at both ends, and the 2nd adhesion part 38c adhering to the back peeling part 30a.

As shown in FIG. 1, the label adhesion mechanism 40 is equipped with the adsorption pads 54a-54g which can attach up to 7 adhesive labels 38 at predetermined intervals, and the said adsorption pads 54a-54g. At the attachment position of the adhesive label 38 by), a pedestal 56 for holding the photosensitive web 22 having an elongated shape from below is liftable.

In order to absorb the speed difference of the tact conveyance of the long photosensitive web 22 of the upstream length, and the continuous conveyance of the said long photosensitive web 22 of the downstream side, the reservoir mechanism 42 has an arrow. The dancer roller 60 which can rock in the direction is provided.

The peeling mechanism 44 disposed downstream of the reservoir mechanism 42 prevents the tension fluctuation on the feeding side of the elongated photosensitive web 22 and provides a suction drum 62 for stabilizing the tension during laminating. Equipped. The peeling roller 63 is arrange | positioned in the vicinity of the suction drum 62, and the protective film 30 which peels at an acute peeling angle from the elongate photosensitive web 22 through this peeling roller 63 is carried out. The silver is wound around the protective film winding 64 except for the remaining portion 30b.

On the downstream side of the peeling mechanism 44, a tension control mechanism 66 capable of applying tension to the photosensitive web 22 having a long shape is disposed. The tension control mechanism 66 is capable of adjusting the tension of the photosensitive web 22 having a long length by causing the tension dancer 70 to oscillate and displace under the driving action of the cylinder 68. In addition, the tension control mechanism 66 may be used as needed and can be deleted.

The first heating mechanism 104 is provided with hot plates 110a and 110b that are configured in two stages. As shown in FIG. 4, the hot plates 110a and 110b have a substrate mounting surface 114 that is uniformly heated to a predetermined temperature (first heating temperature) by electric power supplied from the hot plate drive source 112. The glass substrate 24 is mounted on the board | substrate loading surface 114 in the state positioned by the board | substrate guides 116a-116d. Moreover, the board | substrate loading surface 114 is provided with the some hole part 118 for adsorb | sucking the glass substrate 24 to the board | substrate loading surface 114, and also canceling | releasing adsorption. The air supply source 128 and the vacuum pump 130 are connected to the hole 118 through the conduit 120. Valves 132a and 132b for switching the connection state of the air source 128 and the vacuum pump 130 between the conduit 120 and the air supply 128 and between the conduit 120 and the vacuum pump 130 are provided. Connected.

The substrate supply mechanism 108 holds the glass substrates 24 loaded on the hot plates 110a and 110b of the first heating mechanism 104 and pivots in the direction of arrow θ in FIG. It is comprised by the handling robot which supplies to the 2nd heating mechanism 106a.

The 2nd heating mechanism 106a, 106b conveys the glass substrate 24, and supplies the conveyance parts 134a and 134b which supply between the rubber rollers 80a and 80b of the attachment mechanism 46, and conveyance parts 134a and 134b. And an infrared heater 136a to 136d which are disposed above and below) and which heat the glass substrate 24 in a non-contact state. In addition, you may use a far-infrared heater, a nichrome wire heater, a hot air heater, etc. instead of the infrared heaters 136a-136d.

The attachment mechanism 46 is provided with the rubber rollers (compression roller) 80a, 80b arrange | positioned up and down and heated to predetermined temperature. The backup rollers 82a and 82b are in sliding contact with the rubber rollers 80a and 80b. One backup roller 82b is urged toward the rubber roller 80b by the pressure cylinder 84 constituting the roller clamp portion 83.

The glass substrate 24 is conveyed by the some board | substrate conveyance roller 90a-90d which comprises the conveyance path extended from the attachment mechanism 46 in the arrow Y direction. The long photosensitive web 22 between the glass substrates 24 is cut between the substrate conveying rollers 90b and 90c to separate the photosensitive laminate 24a having the photosensitive material layer attached to the glass substrate 24. The cutter mechanism 48 is arranged.

The stocker 94 which stocks in the state which laminated | stacked the some photosensitive laminated body 24a is arrange | positioned on the downstream side of the board | substrate conveyance roller 90d, and this stocker 94 is isolate | separated by the cutter mechanism 48 The obtained photosensitive laminated body 24a is conveyed and mounted by the robot 96. The peeling part 98 which isolate | separates the flexible base film 26 which remains in the photosensitive laminated body 24a adjacent to the stocker 94 with the remaining part 30b of the protective film 30 is arrange | positioned. The peeling part 98 is a flexible base from the adsorption board 102 which adsorbs-holds the glass substrate 24, and the photosensitive resin layer 28 attached to the glass substrate 24 hold | maintained by the adsorption board 102. It has the clamper 100 which peels the film 26. The photosensitive laminated body 24b from which the flexible base film 26 was peeled off by the clamper 100 is supplied to the following process, for example, an exposure process.

Moreover, in the manufacturing apparatus 20 comprised as mentioned above, the web delivery mechanism 32, the processing mechanism 36, the label adhesion mechanism 40, the reservoir mechanism 42, the peeling mechanism 44, and the tension control mechanism 66 ) And the imaging section 47 are arranged above the attachment mechanism 46, but on the contrary, from the web delivery mechanism 32 to the imaging section 47 below the attachment mechanism 46. It may be arranged, and the upper and lower sides of the long shape photosensitive web 22 may be reversed, and the structure which attaches the photosensitive resin layer 28 to the lower side of the glass substrate 24 may be sufficient, and the long shape photosensitive web 22 may be sufficient as it. ) May be configured in a straight line.

The interior of the manufacturing apparatus 20 is divided into a first clean room 124a and a second clean room 124b through the partition wall 122. From the web delivery mechanism 32 to the tension control mechanism 66 is accommodated in the first clean room 124a, and the mechanism after the imaging section 47 is accommodated in the second clean room 124b. The first clean room 124a and the second clean room 124b communicate with each other through the through part 126.

Next, operation | movement of the manufacturing apparatus 20 comprised as mentioned above is demonstrated in connection with the manufacturing method which concerns on this invention.

First, the long photosensitive web 22 is sent out from the photosensitive web roll 23 attached to the web delivery mechanism 32. The long photosensitive web 22 is conveyed to the processing mechanism 36.

In the processing mechanism 36, the round blades 52a and 52b move in the width direction of the elongate photosensitive web 22, so that the elongated photosensitive web 22 can be photosensitive from the protective film 30. It cuts into the strata 28 to the flexible base film 26, and forms the half cut portions 34a and 34b spaced apart by the width M of the remaining portion 30b of the protective film 30 (see Fig. 2). ). Thereby, in the long photosensitive web 22, the front peeling part 30a and the rear peeling part 30a are formed with the remaining part 30b in between (refer FIG. 2).

Further, the width M of the remaining portion 30b is a glass substrate supplied between the rubber rollers 80a and 80b of the attachment mechanism 46 on the premise that the elongated photosensitive web 22 does not extend. It sets based on the distance between (24). In addition, the one set of half cut portions 34a and 34b formed in the width M may be formed in the photosensitive web 22 having a long shape at intervals between the reference lengths of the photosensitive resin layer 28 attached to the glass substrate 24. Is formed.

Next, the elongate photosensitive web 22 is conveyed to the label adhesive mechanism 40, and the predetermined attachment site | part of the protective film 30 is arrange | positioned on the base 56. As shown in FIG. In the lapel bonding mechanism 40, a predetermined number of adhesive labels 38 are adsorbed and held by the adsorption pads 54b to 54g, and each adhesive label 38 extends beyond the remaining portion 30b of the protective film 30 to the front. Is integrally bonded to the peeling portion 30a and the peeling portion 30a at the rear (see FIG. 3).

For example, the elongate photosensitive web 22 to which the seven adhesive labels 38 are adhered is peeled off after preventing the tension variation on the feeding side through the reservoir mechanism 42 as shown in FIG. 1. It is conveyed to 44 continuously. In the peeling mechanism 44, the flexible base film 26 of the long-length photosensitive web 22 is adsorbed and held on the suction drum 62, and the protective film 30 leaves the remaining portion 30b. It peels from the photosensitive web 22 of elongate shape. This protective film 30 is peeled through the peeling roller 63 and wound around the protective film winding 64 (refer FIG. 1).

Under the action of the peeling mechanism 44, after the protective film 30 is peeled off from the flexible base film 26 leaving the remaining portion 30b, the long-length photosensitive web 22 has a tension control mechanism 66. Tension adjustment is performed by this, and then the imaging part 47 image | photographs the image of the elongate photosensitive web 22 containing the half cut parts 34a and 34b at a predetermined | prescribed imaging timing.

The long-length photosensitive web 22 which passed the imaging | photography part 47 is conveyed to the attachment mechanism 46, and the transfer process (laminating) of the photosensitive resin layer 28 with respect to the glass substrate 24 is performed. In this case, the positions of the half cut portions 34a and 34b in the attachment mechanism 46 are adjusted based on the images of the half cut portions 34a and 34b picked up by the imaging unit 47.

In the attachment mechanism 46, the rubber rollers 80a and 80b are initially set apart from each other, and the half cut portion of the photosensitive web 22 having a long shape at a predetermined position between the rubber rollers 80a and 80b ( In the state where 34a) is positioned, the conveyance of the elongate photosensitive web 22 is stopped once. In this state, the glass substrate 24 heated from the 2nd heating mechanism 106b to predetermined temperature is carried in between the rubber rollers 80a and 80b by the conveyance part 134b, and is sent to the glass substrate 24. The attachment process of the photosensitive web 22 of the shape with respect to the long length is started.

Here, the heat processing of the glass substrate 24 by the 1st heating mechanism 104, the board | substrate supply mechanism 108, and the 2nd heating mechanism 106a, 106b is demonstrated.

First, the substrate supply mechanism 108 acquires the glass substrate 24 before heating from the conveyor etc. which are not shown, and the board | substrate loading surface 114 of the hotplate 110a, 110b which comprises the 1st heating mechanism 104 is carried out. To (Fig. 4). In this case, the glass substrate 24 is positioned by the substrate guides 116a to 116d disposed on the substrate mounting surface 114. After the glass substrate 24 is loaded on the substrate loading surface 114, the valve 132b is opened to start suction of air by the vacuum pump 130 through the conduit 120 and the hole 118. As a result, positioning of the whole surface of the glass substrate 24 in the state which contacted the board | substrate loading surface 114 of hotplate 110a, 110b is carried out.

On the other hand, the hot plates 110a and 110b have a first heating temperature (hereinafter, HP temperature) in which the substrate loading surface 114 is higher than the heating temperature in the attachment mechanism 46 by the electric power supplied from the hot plate drive source 112. It is heated up to). In this case, since the entire surface of the glass substrate 24 is in close contact with the substrate loading surface 114, the entire surface is uniformly and quickly heated to the HP temperature.

After the glass substrate 24 is heated to HP temperature, the valve 132b is closed while the valve 132a is opened to supply air to the hole 118 through the conduit 120 from the air source 128. As a result, the adsorption state of the glass substrate 24 is released. And the board | substrate supply mechanism 108 takes out the heated glass substrate 24 from the 1st heating mechanism 104, and supplies it to the conveyance part 134a of the 2nd heating mechanism 106a by turning in the arrow (theta) direction. .

The second heating mechanism 106a is conveyed while the glass substrate 24 is heated and held at a second heating temperature that is lower than the HP temperature and close to the heating temperature by the rubber roller 80a by the non-contact infrared heaters 136a and 136b. It conveys to the 2nd heating mechanism 106b by the part 134a. Similar to the 2nd heating mechanism 106a, the 2nd heating mechanism 106b is carried out by the conveyance part 134b, holding and maintaining the glass substrate 24 at 2nd heating temperature with the infrared heater 136c, 136d. It conveys to the attachment mechanism 46.

FIG. 5 shows that the substrate supply mechanism 108 pulls out the glass substrate 24 heated from the first heating mechanism 104, rotates 180 degrees, and reverses the front and rear of the glass substrate 24 so that the second heating mechanism 106a is rotated. When supplying to, the relationship between the temperature of the glass substrate 24 and the heating time in the measurement points X1 and X3 shown in FIG. 9 is shown. In addition, HP shall indicate that the glass substrate 24 exists in each position of the 1st heating mechanism 104, R / B is the board | substrate supply mechanism 108, and iR is the 2nd heating mechanism 106a, 106b.

The glass substrate 24 is uniformly and rapidly heated to the HP temperature by the hot plates 110a and 110b of the first heating mechanism 104 and then the second heating mechanism 106a by the substrate supply mechanism 108. The temperature gradually decreases until it is supplied to. Next, the glass substrate 24 supplied to the 2nd heating mechanism 106a is conveyed by the conveyance part 134a, and the heating of the measuring point X3 side is started before the measuring point X1 side. Therefore, the measurement point X3 side approaches the target temperature which is 2nd heating temperature with a small temperature fall. On the other hand, since the time required until the measurement point X1 side is carried in to the 2nd heating mechanism 106a is longer than the measurement point X3 side, temperature falls to target temperature or less, and thereafter, 2nd heating As it is carried in to the mechanism 106a and heated, it gradually approaches the target temperature.

In this case, although the temperature difference (DELTA) T1 remains between the measurement points X1 and X3 at the time when the glass substrate 24 is supplied from the 2nd heating mechanism 106a, 106b to the attachment mechanism 46, a glass substrate ( Since 24) is previously heated to the HP temperature by the first heating mechanism 104, the time required until the temperature difference ΔT1 falls within the allowable range by the second heating mechanisms 106a and 106b is short. Therefore, without making the glass substrate 24 stay in the 2nd heating mechanism 106a, 106b for a long time, or constructing the 2nd heating mechanism 106a, 106b along the conveyance direction of the glass substrate 24 for a long time. Without this, the glass substrate 24 can be adjusted to the vicinity of a desired target temperature, and can be supplied to the attachment mechanism 46 quickly.

In addition, as shown in FIG. 6, HP temperature T1 of the measurement point X1 side carried in delay is higher than HP temperature T3 of the measurement point X3 side carried in to the 2nd heating mechanism 106a first. By setting the temperature distribution of the hot plates 110a and 110b as much as possible, it is possible to avoid that the temperature on the measuring point X1 side drops excessively during the supply operation of the glass substrate 24 by the substrate supply mechanism 108. As a result, the temperature difference ΔT2 between the measurement points X1 and X3 at the time when the glass substrate 24 is supplied to the attachment mechanism 46 is made smaller than the temperature difference ΔT1 or the second heating mechanism 106a, The time required for heating in 106b) can be shortened, or the conveyance path lengths of the second heating mechanisms 106a and 106b can be shortened. In this case, one of the second heating mechanisms 106a and 106b may be omitted.

The glass substrate 24 temperature-adjusted as mentioned above is carried in between the rubber rollers 80a and 80b which comprise the attachment mechanism 46, and the photosensitive web 22 of the elongate shape with respect to the glass substrate 24 is carried out. Is applied.

Therefore, when the front end of the glass substrate 24 is carried in between the rubber rollers 80a and 80b, the backup roller 82b and the rubber roller 80b will rise under the action of the pressure cylinder 84, and the rubber rollers 80a, The glass substrate 24 and the elongate photosensitive web 22 are sandwiched by predetermined press pressure between 80b). In addition, the rubber rollers 80a and 80b are heated to a predetermined lamination temperature.

Next, the rubber rollers 80a and 80b rotate, and the glass substrate 24 and the long photosensitive web 22 are conveyed in the arrow Y direction. In this case, the glass substrate 24 supplied to the attachment mechanism 46 is heated at substantially uniform temperature within the range of the temperature difference allowable on the 2nd heating mechanism 106b side. Accordingly, bubbles are not mixed between the photosensitive resin layer 28 and the glass substrate 24, and wrinkles do not occur in the photosensitive resin layer 28, and the photosensitive resin layer 28 is heated and melted in a good state. The glass substrate 24 is transferred (laminated).

In addition, as lamination conditions, the speed is 1.0 m / min-10.0 m / min, the temperature of the rubber rollers 80a, 80b is 80 degreeC-150 degreeC, and the rubber hardness of the said rubber rollers 80a, 80b is 40 degrees-90 degrees. The press pressure (linear pressure) of the rubber rollers 80a and 80b is 50 N / cm to 400 N / cm.

When laminating one sheet of the long-length photosensitive web 22 with respect to the glass substrate 24 is complete | finished, rotation of the rubber rollers 80a and 80b is stopped, and the long photosensitive web 22 is carried out. The tip of the laminated glass substrate 24 is clamped by the substrate conveying roller 90a. At this time, the half cut portion 34b is disposed at a predetermined position between the rubber rollers 80a and 80b.

Then, the rubber roller 80b is evacuated in the direction away from the rubber roller 80a, the clamping is released, and the rotation of the substrate transfer roller 90a is started again at a low speed, and the long photosensitive web 22 is formed. ) Is laminated on the glass substrate 24 is conveyed by the distance corresponding to the width M of the remaining portion 30b of the protective film 30 in the arrow Y direction, the next half cut portion 34a is After conveying to the predetermined position below the rubber roller 80a, rotation of the rubber rollers 80a and 80b is stopped. In addition, the process of conveying the long photosensitive web 22 only between half-cut parts 34a and 34b is called "inter-board feed" below.

On the other hand, the next glass substrate 24 is conveyed toward an attachment position from the 2nd heating mechanism 106b in said state. By repeating the above operations, the photosensitive laminate is continuously produced.

In that case, the photosensitive laminated body is each covered by the remaining part 30b of the protective film 30 shown in FIG. Therefore, when the photosensitive resin layer 28 is transferred to the glass substrate 24, the rubber rollers 80a and 80b are not contaminated by the said photosensitive resin layer 28. FIG.

The glass substrate 24 to which the photosensitive resin layer 28 is attached by the attachment mechanism 46 is once stopped in the state after the long photosensitive web 22 of the shape was transferred from the attachment mechanism 46 to the board | substrate. When there is, the long photosensitive web 22 between the glass substrates 24 is cut by the cutter mechanism 48 disposed between the substrate conveying rollers 90b and 90c to the photosensitive laminate 24a. do. In addition, the protective film 30 of the remaining part 30b remains before and after this photosensitive laminated body 24a.

The separated photosensitive laminate 24a is once laminated to the stocker 94 by the robot 96. Subsequently, after the photosensitive laminated body 24a laminated | stacked on the stocker 94 is conveyed and mounted in the peeling part 98, the glass substrate 24 is adsorbed-held by the adsorption board 102, and the flexible base film of the edge part is carried out. (26) is gripped by the clamper 100 and peeled from the photosensitive laminated body 24a, and the photosensitive laminated body 24b which only the photosensitive resin layer 28 adhered to the glass substrate 24 is manufactured.

7 is a schematic configuration diagram of a manufacturing apparatus 200 according to another embodiment. In addition, the same code | symbol is attached | subjected to the component same as the manufacturing apparatus 20 shown in FIG. 1, and the description is abbreviate | omitted.

In the manufacturing apparatus 200, the peeling part is conveyed to the cooling part 202 and cooled, without the segmentation of the glass substrate 24 with the long photosensitive web 22 attached by the attachment mechanism 46. 204 is supplied. In the peeling part 204, since the photosensitive web 22 of long shape between the glass substrates 24 is pushed upward by the pusher 206, peeling of the protective film 30 becomes easy, The protective film 30 is peeled off from the photosensitive resin layer 28 and wound up by the winding roller 208. Thereby, between glass substrates 24 is isolate | separated, and the photosensitive laminated body 24b is manufactured.

In the above-described embodiment, the so-called photosensitive laminate 24b is manufactured by attaching the long photosensitive web 22 supplied from one photosensitive web roll 23 to the glass substrate 24. Although it is comprised so that it may be, for example, two photosensitive web rolls or three or more photosensitive web rolls, so-called two attachments, 3 which supply the elongate photosensitive web 22 and attach it to the glass substrate 24, 3 You may comprise so that photosensitive laminated body 24b, such as a dog, may be manufactured.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic block diagram of the manufacturing apparatus of the photosensitive laminated body which concerns on this embodiment.

2 is a cross-sectional view of an elongated shape photosensitive web used in the manufacturing apparatus according to the present embodiment.

It is explanatory drawing of the state in which the adhesive label was adhere | attached on the photosensitive web of elongate shape.

4 is a configuration diagram of the first heating mechanism.

FIG. 5 is a relationship between temperature and time of the glass substrate between the first heating mechanism, the substrate supply mechanism, and the second heating mechanism. FIG.

FIG. 6 is a relationship diagram of temperature and time of the glass substrate between the first heating mechanism, the substrate supply mechanism, and the second heating mechanism when a predetermined temperature distribution is set in the first heating mechanism.

7 is a schematic configuration diagram of a manufacturing apparatus according to another embodiment.

8 is a configuration diagram of a manufacturing apparatus according to the prior art.

It is explanatory drawing of the temperature measuring point of the board | substrate heated by the board | substrate heating part in the manufacturing apparatus shown in FIG.

FIG. 10 is a relationship diagram between temperature and time at each temperature measurement point shown in FIG. 9.

Claims (8)

The long photosensitive web 22 formed by forming the photosensitive material layer 28 on the support 26 is sent out together with the substrate 24 between the heated pair of pressing rollers 80a and 80b. In the manufacturing apparatus of the photosensitive laminated body which manufactures the photosensitive laminated body 24a by attaching the said photosensitive material layer 28 to the said board | substrate 24: The substrate heating part 104,106a, 106b which is arrange | positioned at the front end of the said pair of compression rollers 80a, 80b, and adjusts the said board | substrate 24 to predetermined heating temperature, and supplies it between the said compression rollers 80a, 80b. ); The substrate heating unit 104, 106a, 106b, A first heating mechanism 104 for heating the substrate 24 to a first heating temperature by bringing first heating means 110a and 110b into contact with the entire surface of the substrate 24; The substrate 24 heated to the first heating temperature is heated and maintained at a second heating temperature in a non-contact state by second heating means 136a to 136d, and the pressing rollers are conveyed by the conveying means 134a and 134b. Second heating mechanisms 106a and 106b conveyed between 80a and 80b, and A substrate supply mechanism (108) for supplying the substrate (24) from the first heating mechanism (104) to the second heating mechanism (106a, 106b). The apparatus for manufacturing a photosensitive laminate according to claim 1, wherein the first heating means (110a, 110b) is made of a hot plate. The apparatus for manufacturing a photosensitive laminate according to claim 1, wherein the second heating means (136a to 136d) is an infrared heater. The said 1st heating temperature is set higher than the said 2nd heating temperature, The manufacturing apparatus of the photosensitive laminated body of Claim 1 characterized by the above-mentioned. 2. The apparatus for producing a photosensitive laminate according to claim 1, wherein the second heating temperature is set near the heating temperature of the pair of pressing rollers (80a, 80b). The long photosensitive web 22 formed by forming the photosensitive material layer 28 on the support 26 is sent out together with the substrate 24 between the heated pair of pressing rollers 80a and 80b. In the manufacturing method of the photosensitive laminated body which manufactures the photosensitive laminated body 24a by attaching the said photosensitive material layer 28 to the said board | substrate 24: Heating the substrate (24) to a first heating temperature by bringing first heating means (110a, 110b) into contact with the entire surface of the substrate (24); Holding and heating the substrate (24) heated to the first heating temperature at a second heating temperature in a non-contact state by second heating means (136a to 136d); And And having said step of conveying the said board | substrate 24 heated and held at the said 2nd heating temperature between the said crimping rollers (80a, 80b). The manufacturing method of the photosensitive laminated body of Claim 6 whose said 1st heating temperature is set higher than the said 2nd heating temperature. 7. The method of manufacturing a photosensitive laminate according to claim 6, wherein the second heating temperature is set near the heating temperature of the pair of pressing rollers (80a, 80b).

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