KR102431348B1 - 표시 장치 - Google Patents
표시 장치 Download PDFInfo
- Publication number
- KR102431348B1 KR102431348B1 KR1020160064135A KR20160064135A KR102431348B1 KR 102431348 B1 KR102431348 B1 KR 102431348B1 KR 1020160064135 A KR1020160064135 A KR 1020160064135A KR 20160064135 A KR20160064135 A KR 20160064135A KR 102431348 B1 KR102431348 B1 KR 102431348B1
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- KR
- South Korea
- Prior art keywords
- data line
- electrode
- extension
- pixel electrode
- line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000003990 capacitor Substances 0.000 claims abstract description 72
- 238000000034 method Methods 0.000 claims description 32
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- 239000000463 material Substances 0.000 description 11
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- 239000011229 interlayer Substances 0.000 description 9
- 238000002161 passivation Methods 0.000 description 8
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 229910052750 molybdenum Inorganic materials 0.000 description 6
- 239000011733 molybdenum Substances 0.000 description 6
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- 229910052751 metal Inorganic materials 0.000 description 5
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- 229910001182 Mo alloy Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
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- 229910000838 Al alloy Inorganic materials 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
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- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
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- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 239000003870 refractory metal Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
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- 230000006866 deterioration Effects 0.000 description 1
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- 239000012535 impurity Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- HRHKULZDDYWVBE-UHFFFAOYSA-N indium;oxozinc;tin Chemical compound [In].[Sn].[Zn]=O HRHKULZDDYWVBE-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 239000011368 organic material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
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- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/136286—Wiring, e.g. gate line, drain line
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/441—Interconnections, e.g. scanning lines
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/481—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs integrated with passive devices, e.g. auxiliary capacitors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133345—Insulating layers
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G—PHYSICS
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Geometry (AREA)
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Abstract
Description
도 2는 도 1의 I-I`의 선을 따라 자른 단면도이다.
도 3은 도 1의 II-II`의 선을 따라 자른 단면도이다.
도 4는 도 1에서 출광 영역에 위치한 화소 전극만을 따로 나타낸 도면이다.
도 5는 도 1의 화소 전극에 연결된 제 1 연장부, 제 2 연장부, 제 3 연장부 및 이들 주변을 확대하여 나타낸 도면이다.
도 6a는 도 5에서의 화소 전극, 연결 전극, 제 1 연장부, 제 2 연장부 및 제 3 연장부가 마스크 오정렬에 의해 좌측으로 쉬프트되었을 때의 결과를 나타낸 도면이다.
도 6b는 도 5에서의 화소 전극, 연결 전극, 제 1 연장부, 제 2 연장부 및 제 3 연장부가 마스크 오정렬에 의해 우측으로 쉬프트되었을 때의 결과를 나타낸 도면이다.
도 7은 본 발명의 다른 실시예에 따른 표시 장치의 평면도이다.
도 8은 본 발명의 또 다른 실시예에 따른 표시 장치의 평면도이다.
도 9는 본 발명의 또 다른 실시예에 따른 표시 장치의 평면도이다.
DL1: 제 1 데이터 라인 DL2: 제 2 데이터 라인
GE: 게이트 전극 SE: 소스 전극
DE: 드레인 전극 111: 화소 영역
111a: 출광 영역 111b: 차광 영역
PE: 화소 전극 321: 반도체층
154: 차단 전극 950: 콘택홀
980: 홀 631: 면 전극
632: 가지 전극 701: 제 1 연장부
702: 제 2 연장부 703: 제 3 연장부
144: 연결 전극 609: 슬릿
Claims (21)
- 제 1 게이트 라인;
상기 제 1 게이트 라인과 교차하는 제 1 및 제 2 데이터 라인;
상기 제 2 데이터 라인에 인접한 화소 전극;
상기 제 1 게이트 라인, 상기 제 1 데이터 라인 및 상기 화소 전극에 연결된 스위칭 소자; 및
상기 화소 전극에서 연장되며, 상기 제 2 데이터 라인과 교차하는 제 1 연장부를 포함하는 표시 장치. - 제 1 항에 있어서,
상기 제 1 연장부에서 연장되며, 상기 제 2 데이터 라인으로부터 이격되어 위치한 제 2 연장부를 더 포함하는 표시 장치. - 제 2 항에 있어서,
상기 제 2 데이터 라인의 한 변은 상기 제 2 연장부와 마주보는 표시 장치. - 제 3 항에 있어서,
상기 제 2 데이터 라인의 다른 변은 상기 화소 전극과 마주보는 표시 장치. - 제 2 항에 있어서,
상기 화소 전극과 상기 스위칭 소자를 연결하는 연결 전극; 및
상기 연결 전극에서 연장되며, 상기 제 1 데이터 라인과 중첩하는 제 3 연장부를 더 포함하는 표시 장치. - 제 5 항에 있어서,
상기 제 3 연장부는 상기 제 1 데이터 라인보다 더 큰 폭을 갖는 표시 장치. - 제 5 항에 있어서,
상기 화소 전극과 상기 제 2 데이터 라인 사이에 위치한 제 1 커패시터의 용량과 상기 제 2 데이터 라인과 상기 제 2 연장부 사이에 위치한 제 2 커패시터의 용량의 합은 상기 제 1 데이터 라인과 상기 제 3 연장부 사이에 위치한 제 3 커패시터의 용량과 실질적으로 동일한 표시 장치. - 제 5 항에 있어서,
상기 화소 전극, 상기 연결 전극, 상기 제 1 연장부, 상기 제 2 연장부 및 상기 제 3 연장부는 일체로 이루어진 표시 장치. - 제 2 항에 있어서,
상기 제 2 데이터 라인과 상기 제 1 연장부의 교차 부분에서, 상기 제 2 데이터 라인 및 상기 제 1 연장부 중 적어도 하나는 그것의 다른 부분보다 더 작은 폭을 갖는 표시 장치. - 제 2 항에 있어서,
상기 화소 전극과 상기 제 2 데이터 라인 사이의 거리는 상기 제 2 데이터 라인과 상기 제 2 연장부 사이의 거리와 동일한 표시 장치. - 제 2 항에 있어서,
상기 화소 전극과 상기 제 2 데이터 라인 사이의 거리는 상기 제 2 데이터 라인과 상기 제 2 연장부 사이의 거리와 다른 표시 장치. - 제 11 항에 있어서,
상기 화소 전극과 상기 제 2 데이터 라인 사이의 거리는 상기 제 2 데이터 라인과 상기 제 2 연장부 사이의 거리보다 더 큰 표시 장치. - 제 11 항에 있어서,
상기 화소 전극과 상기 제 2 데이터 라인 사이의 거리는 상기 제 2 데이터 라인과 상기 제 2 연장부 사이의 거리보다 더 작은 표시 장치. - 제 1 항에 있어서,
상기 화소 전극과 상기 스위칭 소자를 연결하는 연결 전극; 및
상기 연결 전극과 중첩하는 제 2 게이트 라인을 더 포함하는 표시 장치. - 제 14 항에 있어서,
한 프레임 기간 중 상기 제 2 게이트 라인은 상기 제 1 게이트 라인보다 더 먼저 구동되는 표시 장치. - 제 14 항에 있어서,
상기 화소 전극은 상기 제 1 게이트 라인, 상기 제 2 게이트 라인, 상기 제 1 데이터 라인 및 상기 제 2 데이터 라인에 의해 둘러싸여 정의된 영역에 위치하는 표시 장치. - 제 1 항에 있어서,
상기 화소 전극은 면 전극 및 상기 면 전극으로부터 연장된 가지 전극을 포함하며;
상기 제 1 연장부는 상기 면 전극 및 가지 전극 중 어느 하나로부터 연장된 표시 장치. - 제 1 항에 있어서,
상기 화소 전극의 변들 중 상기 제 1 게이트 라인을 마주보는 변은 상기 제 2 데이터 라인을 마주보는 변보다 더 긴 길이를 갖는 표시 장치. - 제 1 항에 있어서,
상기 화소 전극과 중첩하는 공통 전극을 더 포함하는 표시 장치. - 제 19 항에 있어서,
상기 공통 전극은 상기 화소 전극에 대응하게 위치한 홀을 갖는 표시 장치. - 제 20 항에 있어서,
상기 홀은 십자 형상을 갖는 표시 장치.
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