KR100324333B1 - 적층형 패키지 및 그 제조 방법 - Google Patents
적층형 패키지 및 그 제조 방법 Download PDFInfo
- Publication number
- KR100324333B1 KR100324333B1 KR1020000000131A KR20000000131A KR100324333B1 KR 100324333 B1 KR100324333 B1 KR 100324333B1 KR 1020000000131 A KR1020000000131 A KR 1020000000131A KR 20000000131 A KR20000000131 A KR 20000000131A KR 100324333 B1 KR100324333 B1 KR 100324333B1
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- Prior art keywords
- lead
- chip
- strip
- heat sink
- molded resin
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- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000000465 moulding Methods 0.000 claims abstract description 21
- 239000004065 semiconductor Substances 0.000 claims abstract description 13
- 239000011347 resin Substances 0.000 claims description 30
- 229920005989 resin Polymers 0.000 claims description 30
- 229910000679 solder Inorganic materials 0.000 claims description 20
- 239000000853 adhesive Substances 0.000 claims description 11
- 230000001070 adhesive effect Effects 0.000 claims description 11
- 238000007789 sealing Methods 0.000 claims description 4
- 238000005520 cutting process Methods 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 12
- 230000017525 heat dissipation Effects 0.000 abstract description 4
- 230000007547 defect Effects 0.000 abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- KAFZOLYKKCWUBI-HPMAGDRPSA-N (2s)-2-[[(2s)-2-[[(2s)-1-[(2s)-3-amino-2-[[(2s)-2-[[(2s)-2-(3-cyclohexylpropanoylamino)-4-methylpentanoyl]amino]-5-methylhexanoyl]amino]propanoyl]pyrrolidine-2-carbonyl]amino]-5-(diaminomethylideneamino)pentanoyl]amino]butanediamide Chemical compound N([C@@H](CC(C)C)C(=O)N[C@@H](CCC(C)C)C(=O)N[C@@H](CN)C(=O)N1[C@@H](CCC1)C(=O)N[C@@H](CCCN=C(N)N)C(=O)N[C@@H](CC(N)=O)C(N)=O)C(=O)CCC1CCCCC1 KAFZOLYKKCWUBI-HPMAGDRPSA-N 0.000 description 1
- AEVBPXDFDKBGLT-YOUFYPILSA-N (2s,3s,4r,5r)-n-[2-[4-(diethoxyphosphorylmethyl)anilino]-2-oxoethyl]-5-(2,4-dioxopyrimidin-1-yl)-3,4-dihydroxyoxolane-2-carboxamide Chemical compound C1=CC(CP(=O)(OCC)OCC)=CC=C1NC(=O)CNC(=O)[C@@H]1[C@@H](O)[C@@H](O)[C@H](N2C(NC(=O)C=C2)=O)O1 AEVBPXDFDKBGLT-YOUFYPILSA-N 0.000 description 1
- IGVKWAAPMVVTFX-BUHFOSPRSA-N (e)-octadec-5-en-7,9-diynoic acid Chemical compound CCCCCCCCC#CC#C\C=C\CCCC(O)=O IGVKWAAPMVVTFX-BUHFOSPRSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
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- H01L23/495—Lead-frames or other flat leads
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- H01L25/10—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices having separate containers
- H01L25/105—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices having separate containers the devices being integrated devices of class H10
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Abstract
Description
Claims (5)
- 제 1 칩과;일면(一麵)에서 상기 제 1 칩에 절연성 접착 부재로 부착되고, 상기 제 1 칩과 전기적으로 연결되어 있는 복수의 제 1 리드(lead)와;상기 제 1 칩과 상기 제 1 리드를 밀봉하며, 상기 복수의 제 1 리드 각각의 소정 영역을 노출시키는 구멍(hole)을 포함하며, 상기 제 1 리드 각각의 면들 중에서 상기 구멍과 반대 방향에 위치하는 면들의 소정 영역을 노출시키는 제 1 성형 수지부(molding compound)와;상기 제 1 성형 수지부에 포함된 상기 구멍 내에 형성된 제 1 전도부와;상기 제 1 전도부와 전기적으로 연결되는 외부 단자와;제 2 칩과;일면에서 상기 제 2 칩에 상기 절연성 접착 부재로 부착되고, 상기 제 2 칩과 전기적으로 연결되어 있는 복수의 제 2 리드와;상기 제 2 칩과 제 2 리드를 밀봉하며, 상기 제 2 리드의 소정 영역을 노출시키는 제 2 성형 수지부와;상기 제 1 리드 중 상기 제 1 성형 수지부에 의해 노출된 면과 상기 제 2 리드 중 상기 제 2 성형 수지부에 의해 노출된 면을 전기적으로 연결하는 복수의 전도성 연결부와;상기 제 1 성형 수지부와 상기 제 2 성형 수지부 사이에 부착되어 형성되며, 상기복수의 전도성 연결부와 연결되는 히트 싱크(heat sink)를 포함하여 이루어지는 것을 특징으로 하는 반도체 패키지.
- 제 1 항에 있어서, 상기 제 2 성형 수지부 내에, 상기 각각의 제 2 리드의 면들 중에서 상기 제 2 성형 수지부에 의해 노출된 면과 반대 방향에 위치하는 면들의 소정 영역을 노출시키는 구멍이 형성되어 있고, 상기 제 2 성형 수지부에 형성된 상기 구멍 내에 제 2 전도부가 위치하는 것을 특징으로 하는 반도체 패키지.
- 제 2 항의 반도체 패키지에 추가하여,상기 제 2 전도부를 통하여 상기 제 1 칩 및 제 2 칩과 전기적으로 연결되는 한 개 이상의 칩을 포함하는 것을 특징으로 하는 반도체 패키지.
- 복수의 제 1 리드를 포함하는 제 1 스트립(strip)을 준비하는 단계와;상기 제 1 리드에 제 1 칩을 절연성 접착 부재를 이용하여 부착하는 단계와;상기 제 1 칩과 상기 제 1 리드를 전기적으로 연결시키는 단계와;제 1 몰드와 복수의 돌출부가 형성되어 있는 제 2 몰드를 이용하여 상기 제 1 칩과 상기 제 1 스트립을 몰딩하여, 상기 제 1 리드 중 소정 영역을 제외한 나머지 부분을 밀봉하는 단계와;상기 제 2 몰드의 돌출부에 의하여 형성된 구멍에 제 1 전도부를 형성하는 단계와;복수의 제 2 리드를 포함하는 제 2 스트립을 준비하는 단계와;상기 제 2 리드에 제 2 칩을 절연성 접착 부재를 이용하여 부착하는 단계와;상기 제 2 칩과 상기 제 2 리드를 전기적으로 연결시키는 단계와;제 1 몰드와 복수의 돌출부가 형성되어 있는 제 2 몰드를 이용하여 상기 제 2 칩과 상기 제 2 스트립을 몰딩하여, 상기 제 2 리드 중 소정 영역을 제외한 나머지 부분을 밀봉하는 단계와;상기 하부 몰드의 돌출부에 의하여 형성된 구멍에 제 2 전도부를 형성하는 단계와;상기 제 1 리드와 상기 제 2 리드 중 밀봉되지 않은 부분을 대향시키는 단계와;소정 간격으로 이격 형성된 솔더 볼을 포함하는 히트 싱크 스트립을 상기 제 1 리드와 제 2 리드 사이에 위치시키는 단계와;상기 제 1 리드, 제 2 리드 및 상기 솔더 볼을 수직 상태에서 일렬로 배열하는 단계와;상기 히트 싱크 스트립을 상기 제 1 리드와 제 2 리드에 부착하는 단계와;상기 제 1 전도부의 일단에 외부 단자를 부착시키는 단계와;상기 제 1 스트립과 상기 제 2 스트립과 히트 싱크 스트립을 절단하는 단계를 포함하여 이루어지는 것을 특징으로 하는 반도체 패키지 제조 방법.
- 제 4 항에 있어서,상기 히트 싱크 스트립은 복수의 구멍이 배열되어 있는 스트립을 준비하는 단계와;상기 히트 싱크 스트립 내의 구멍에 솔더 볼을 삽입하는 단계로 제조되는 것을 특징으로 하는 반도체 패키지 제조 방법.
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KR1020000000131A KR100324333B1 (ko) | 2000-01-04 | 2000-01-04 | 적층형 패키지 및 그 제조 방법 |
US09/752,727 US6646334B2 (en) | 2000-01-04 | 2001-01-03 | Stacked semiconductor package and fabricating method thereof |
US10/447,221 US6753207B2 (en) | 2000-01-04 | 2003-05-29 | Stacked semiconductor package and fabricating method thereof |
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Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100592785B1 (ko) * | 2000-01-06 | 2006-06-26 | 삼성전자주식회사 | 칩 스케일 패키지를 적층한 적층 패키지 |
JP4251421B2 (ja) * | 2000-01-13 | 2009-04-08 | 新光電気工業株式会社 | 半導体装置の製造方法 |
US20020127771A1 (en) * | 2001-03-12 | 2002-09-12 | Salman Akram | Multiple die package |
SG95637A1 (en) * | 2001-03-15 | 2003-04-23 | Micron Technology Inc | Semiconductor/printed circuit board assembly, and computer system |
US6441483B1 (en) * | 2001-03-30 | 2002-08-27 | Micron Technology, Inc. | Die stacking scheme |
KR100447869B1 (ko) * | 2001-12-27 | 2004-09-08 | 삼성전자주식회사 | 다핀 적층 반도체 칩 패키지 및 이에 사용되는 리드 프레임 |
KR100460063B1 (ko) * | 2002-05-03 | 2004-12-04 | 주식회사 하이닉스반도체 | 센터 패드 칩 적층 볼 그리드 어레이 패키지 및 그 제조방법 |
JP2004055860A (ja) | 2002-07-22 | 2004-02-19 | Renesas Technology Corp | 半導体装置の製造方法 |
US7132311B2 (en) * | 2002-07-26 | 2006-11-07 | Intel Corporation | Encapsulation of a stack of semiconductor dice |
SG120879A1 (en) * | 2002-08-08 | 2006-04-26 | Micron Technology Inc | Packaged microelectronic components |
JP2004103665A (ja) * | 2002-09-05 | 2004-04-02 | Toshiba Corp | 電子デバイスモジュール |
JP2004128155A (ja) * | 2002-10-01 | 2004-04-22 | Renesas Technology Corp | 半導体パッケージ |
SG114585A1 (en) * | 2002-11-22 | 2005-09-28 | Micron Technology Inc | Packaged microelectronic component assemblies |
US7208825B2 (en) * | 2003-01-22 | 2007-04-24 | Siliconware Precision Industries Co., Ltd. | Stacked semiconductor packages |
SG137651A1 (en) * | 2003-03-14 | 2007-12-28 | Micron Technology Inc | Microelectronic devices and methods for packaging microelectronic devices |
US7145226B2 (en) | 2003-06-30 | 2006-12-05 | Intel Corporation | Scalable microelectronic package using conductive risers |
KR100575590B1 (ko) * | 2003-12-17 | 2006-05-03 | 삼성전자주식회사 | 열방출형 적층 패키지 및 그들이 실장된 모듈 |
KR100585227B1 (ko) * | 2004-03-12 | 2006-06-01 | 삼성전자주식회사 | 열 방출 특성이 개선된 반도체 적층 패키지 및 이를이용한 메모리 모듈 |
US7217597B2 (en) | 2004-06-22 | 2007-05-15 | Micron Technology, Inc. | Die stacking scheme |
US7202105B2 (en) * | 2004-06-28 | 2007-04-10 | Semiconductor Components Industries, L.L.C. | Multi-chip semiconductor connector assembly method |
JP2006041438A (ja) * | 2004-07-30 | 2006-02-09 | Shinko Electric Ind Co Ltd | 半導体チップ内蔵基板及びその製造方法 |
JP2006165175A (ja) * | 2004-12-06 | 2006-06-22 | Alps Electric Co Ltd | 回路部品モジュールおよび電子回路装置並びに回路部品モジュールの製造方法 |
US7183638B2 (en) * | 2004-12-30 | 2007-02-27 | Intel Corporation | Embedded heat spreader |
US7242091B2 (en) * | 2005-03-02 | 2007-07-10 | Stats Chippac Ltd. | Stacked semiconductor packages and method therefor |
US7429785B2 (en) | 2005-10-19 | 2008-09-30 | Littelfuse, Inc. | Stacked integrated circuit chip assembly |
US7511371B2 (en) * | 2005-11-01 | 2009-03-31 | Sandisk Corporation | Multiple die integrated circuit package |
US7352058B2 (en) * | 2005-11-01 | 2008-04-01 | Sandisk Corporation | Methods for a multiple die integrated circuit package |
US7323968B2 (en) * | 2005-12-09 | 2008-01-29 | Sony Corporation | Cross-phase adapter for powerline communications (PLC) network |
US7910385B2 (en) | 2006-05-12 | 2011-03-22 | Micron Technology, Inc. | Method of fabricating microelectronic devices |
US20080182434A1 (en) * | 2007-01-25 | 2008-07-31 | Analog Devices, Inc. | Low Cost Stacked Package |
US8304923B2 (en) * | 2007-03-29 | 2012-11-06 | ADL Engineering Inc. | Chip packaging structure |
US8106491B2 (en) * | 2007-05-16 | 2012-01-31 | Micron Technology, Inc. | Methods of forming stacked semiconductor devices with a leadframe and associated assemblies |
KR100881400B1 (ko) * | 2007-09-10 | 2009-02-02 | 주식회사 하이닉스반도체 | 반도체 패키지 및 이의 제조 방법 |
US7858440B2 (en) * | 2007-09-21 | 2010-12-28 | Infineon Technologies Ag | Stacked semiconductor chips |
WO2009118925A1 (ja) * | 2008-03-27 | 2009-10-01 | イビデン株式会社 | 電子部品内蔵配線板及びその製造方法 |
US8963323B2 (en) * | 2008-06-20 | 2015-02-24 | Alcatel Lucent | Heat-transfer structure |
US8723299B2 (en) * | 2010-06-01 | 2014-05-13 | Infineon Technologies Ag | Method and system for forming a thin semiconductor device |
KR101388857B1 (ko) * | 2012-06-29 | 2014-04-23 | 삼성전기주식회사 | 반도체 패키지 및 반도체 패키지 제조 방법 |
US8629567B2 (en) | 2011-12-15 | 2014-01-14 | Stats Chippac Ltd. | Integrated circuit packaging system with contacts and method of manufacture thereof |
US9219029B2 (en) * | 2011-12-15 | 2015-12-22 | Stats Chippac Ltd. | Integrated circuit packaging system with terminals and method of manufacture thereof |
US8623711B2 (en) | 2011-12-15 | 2014-01-07 | Stats Chippac Ltd. | Integrated circuit packaging system with package-on-package and method of manufacture thereof |
US8860202B2 (en) * | 2012-08-29 | 2014-10-14 | Macronix International Co., Ltd. | Chip stack structure and manufacturing method thereof |
CN103779290B (zh) * | 2012-10-26 | 2016-12-21 | 碁鼎科技秦皇岛有限公司 | 连接基板及层叠封装结构 |
EP2854170B1 (en) | 2013-09-27 | 2022-01-26 | Alcatel Lucent | A structure for a heat transfer interface and method of manufacturing the same |
KR102186203B1 (ko) | 2014-01-23 | 2020-12-04 | 삼성전자주식회사 | 패키지 온 패키지 장치 및 이의 제조 방법 |
TWI585924B (zh) * | 2015-11-09 | 2017-06-01 | 力晶科技股份有限公司 | 隨機動態記憶體晶片封裝結構 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5200809A (en) * | 1991-09-27 | 1993-04-06 | Vlsi Technology, Inc. | Exposed die-attach heatsink package |
JPH06268101A (ja) * | 1993-03-17 | 1994-09-22 | Hitachi Ltd | 半導体装置及びその製造方法、電子装置、リ−ドフレ−ム並びに実装基板 |
US5498576A (en) * | 1994-07-22 | 1996-03-12 | Texas Instruments Incorporated | Method and apparatus for affixing spheres to a foil matrix |
US5886408A (en) * | 1994-09-08 | 1999-03-23 | Fujitsu Limited | Multi-chip semiconductor device |
US5909058A (en) * | 1996-09-25 | 1999-06-01 | Kabushiki Kaisha Toshiba | Semiconductor package and semiconductor mounting part |
KR100214561B1 (ko) * | 1997-03-14 | 1999-08-02 | 구본준 | 버틈 리드 패키지 |
KR100266693B1 (ko) * | 1998-05-30 | 2000-09-15 | 김영환 | 적층가능한 비지에이 반도체 칩 패키지 및 그 제조방법 |
US6451624B1 (en) * | 1998-06-05 | 2002-09-17 | Micron Technology, Inc. | Stackable semiconductor package having conductive layer and insulating layers and method of fabrication |
US6020629A (en) * | 1998-06-05 | 2000-02-01 | Micron Technology, Inc. | Stacked semiconductor package and method of fabrication |
US6097609A (en) * | 1998-12-30 | 2000-08-01 | Intel Corporation | Direct BGA socket |
-
2000
- 2000-01-04 KR KR1020000000131A patent/KR100324333B1/ko not_active Expired - Fee Related
-
2001
- 2001-01-03 US US09/752,727 patent/US6646334B2/en not_active Expired - Lifetime
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US6753207B2 (en) | 2004-06-22 |
US20030203540A1 (en) | 2003-10-30 |
US20010006258A1 (en) | 2001-07-05 |
US6646334B2 (en) | 2003-11-11 |
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