KR100323440B1 - 복합반사율증진표면층을가진알루미늄반사기 - Google Patents
복합반사율증진표면층을가진알루미늄반사기 Download PDFInfo
- Publication number
- KR100323440B1 KR100323440B1 KR1019960037773A KR19960037773A KR100323440B1 KR 100323440 B1 KR100323440 B1 KR 100323440B1 KR 1019960037773 A KR1019960037773 A KR 1019960037773A KR 19960037773 A KR19960037773 A KR 19960037773A KR 100323440 B1 KR100323440 B1 KR 100323440B1
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- South Korea
- Prior art keywords
- layer
- thickness
- reflector
- aluminum
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910052782 aluminium Inorganic materials 0.000 title claims abstract description 87
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims abstract description 87
- 239000002344 surface layer Substances 0.000 title claims abstract description 11
- 239000010410 layer Substances 0.000 claims abstract description 279
- 239000002131 composite material Substances 0.000 claims abstract description 35
- 230000003647 oxidation Effects 0.000 claims abstract description 19
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 19
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 18
- 230000004888 barrier function Effects 0.000 claims abstract description 16
- 230000003287 optical effect Effects 0.000 claims abstract description 14
- 238000005286 illumination Methods 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 55
- 230000008569 process Effects 0.000 claims description 39
- 239000003792 electrolyte Substances 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 25
- 230000002708 enhancing effect Effects 0.000 claims description 14
- 229910045601 alloy Inorganic materials 0.000 claims description 10
- 239000000956 alloy Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 238000005240 physical vapour deposition Methods 0.000 claims description 10
- 238000005868 electrolysis reaction Methods 0.000 claims description 8
- 238000002310 reflectometry Methods 0.000 claims description 7
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 6
- 150000001342 alkaline earth metals Chemical class 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 229910052725 zinc Inorganic materials 0.000 claims description 6
- 229910052715 tantalum Inorganic materials 0.000 claims description 5
- 229910052684 Cerium Inorganic materials 0.000 claims description 4
- 229910052735 hafnium Inorganic materials 0.000 claims description 4
- 150000002602 lanthanoids Chemical class 0.000 claims description 4
- 229910052723 transition metal Inorganic materials 0.000 claims description 4
- 150000003624 transition metals Chemical class 0.000 claims description 4
- 229910052783 alkali metal Inorganic materials 0.000 claims description 3
- 150000001340 alkali metals Chemical class 0.000 claims description 3
- 229910052747 lanthanoid Inorganic materials 0.000 claims description 3
- 239000003513 alkali Substances 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- 238000010276 construction Methods 0.000 claims 3
- 150000002739 metals Chemical class 0.000 claims 1
- 238000002048 anodisation reaction Methods 0.000 description 17
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 14
- 229910052749 magnesium Inorganic materials 0.000 description 12
- 239000011777 magnesium Substances 0.000 description 12
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 11
- 239000000126 substance Substances 0.000 description 9
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 8
- 229910052742 iron Inorganic materials 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- 239000002253 acid Substances 0.000 description 6
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 229910052748 manganese Inorganic materials 0.000 description 6
- 239000011572 manganese Substances 0.000 description 6
- 238000005096 rolling process Methods 0.000 description 6
- 230000001965 increasing effect Effects 0.000 description 5
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 5
- 239000011701 zinc Substances 0.000 description 5
- 229910000838 Al alloy Inorganic materials 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000007743 anodising Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000005242 forging Methods 0.000 description 4
- 239000011241 protective layer Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000000748 compression moulding Methods 0.000 description 3
- 239000002932 luster Substances 0.000 description 3
- 150000007522 mineralic acids Chemical class 0.000 description 3
- 150000007524 organic acids Chemical class 0.000 description 3
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 239000011975 tartaric acid Substances 0.000 description 3
- 235000002906 tartaric acid Nutrition 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 2
- 229910052692 Dysprosium Inorganic materials 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- 229910052765 Lutetium Inorganic materials 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- 229910052777 Praseodymium Inorganic materials 0.000 description 2
- 229910052769 Ytterbium Inorganic materials 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 150000003863 ammonium salts Chemical class 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 235000015165 citric acid Nutrition 0.000 description 2
- 238000010924 continuous production Methods 0.000 description 2
- 238000005237 degreasing agent Methods 0.000 description 2
- 239000003599 detergent Substances 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000005670 electromagnetic radiation Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- 238000012886 linear function Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052762 osmium Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 235000011007 phosphoric acid Nutrition 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 229910052702 rhenium Inorganic materials 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 239000012266 salt solution Substances 0.000 description 2
- 229910052706 scandium Inorganic materials 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 159000000000 sodium salts Chemical class 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052712 strontium Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229920000388 Polyphosphate Polymers 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- 239000000908 ammonium hydroxide Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 235000010338 boric acid Nutrition 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000641 cold extrusion Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- LSYIMYXKHWXNBV-UHFFFAOYSA-N lanthanum(3+) oxygen(2-) titanium(4+) Chemical compound [O-2].[La+3].[Ti+4] LSYIMYXKHWXNBV-UHFFFAOYSA-N 0.000 description 1
- 239000011133 lead Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- URROIMSKGFJNKC-UHFFFAOYSA-N oxygen(2-) praseodymium(3+) titanium(4+) Chemical compound [O-2].[Ti+4].[Pr+3] URROIMSKGFJNKC-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000001205 polyphosphate Substances 0.000 description 1
- 235000011176 polyphosphates Nutrition 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 229960001296 zinc oxide Drugs 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3615—Coatings of the type glass/metal/other inorganic layers, at least one layer being non-metallic
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3649—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3689—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one oxide layer being obtained by oxidation of a metallic layer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
- G02B5/0833—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only comprising inorganic materials only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
- G02B5/0858—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising a single metallic layer with one or more dielectric layers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/73—Anti-reflective coatings with specific characteristics
- C03C2217/734—Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Optical Elements Other Than Lenses (AREA)
- Laminated Bodies (AREA)
- Aerials With Secondary Devices (AREA)
Abstract
Description
Claims (12)
- 반사체에 면하는 알루미늄층, 반사될 광선을 향하며 굴절계수 n2를 가진 외부층인 HI-층, 및 n2보다 작은 굴절 계수 n1을 가진 중간 알루미늄 산화물층인 LI-층으로 된 샌드위치 구조를 가지며 반사체상의 반사표면층으로서 반사율을 증진시키는 층으로 역할을 하는 복합층을 가진 반사기에 있어서, LI-층이 알루미늄층의 양극 산화로 생성되며 20℃에서 유전상수 ε1이 6 내지 10.5인 투명하고 구멍이 없는 장벽층이고 LI-층의 광학적 층두께 dopt,1과 HI-층의 광학적 층 두께 dopt,2가 다음 관계식을 만족시킴을 특징으로 하는 반사기:여기서, d1는 LI-층의 두께, d2는 HI-층의 두께, λ는 반사기 표면에 도달하는 광선의 평균 파장을 nm단위로 나타내며 l1, l2는 홀수이다.
- 제 1 항에 있어서, LI-층의 두께 d1과 HI-층의 두께 d2가 30 내지 l9Onm이며 특정 지점에서 측정된 두께 d1및 d2가 복합층 전체에서 측정된 평균층두께 d1,av및 d2,av로 부터 편차가 ±5% 미만임을 특징으로 하는 반사기
- 제 1 항 또는 2항에 있어서, HI-층이 알카리금속, 알카리토금속 또는 전이금속, 란탄족 금속 또는 이들중 적어도 하나를 포함하는 합금의 산화물로 이루어짐을 특징으로 하는 반사기
- 제 3 항에 있어서, HI-층이 Ti-산화물, PrTi-산화물, LaTi-산화물, Ta-산화물, Hf-산화물, Nb-산화물, Zn-산화물 또는 Ce-산화물로 이루어짐을 특징으로 하는 반사기.
- 반사체에 면하는 알루미늄층, 반사될 광선을 향하며 굴절계수 n2를 가진 외부층인 HI-층, 및 n2보다 작은 굴절 계수 n1을 가진 중간 알루미늄 산화물층인 LI-층으로 된 샌드위치 구조를 가지며 반사체상의 반사표면층으로서 반사율을 증진시키는 층으로 역할을 하는 복합층을 가진 반사기에 있어서, LI-층이 알루미늄층의 양극 산화로 생성되며 20℃에서 유전상수 ε1이 6 내지 10.5인 투명하고 구멍이 없는 장벽층이고 LI-층의 광학적 층두께 dopt,1과 HI-층의 광학적 층 두께 dopt,2가 다음 관계식을 만족시키며 적외선 또는 기술적 조명분야에서의 램프 및 주광등으로 사용되는 반사기;여기서, d1는 LI-층의 두께, d2는 HI-층의 두께, λ는 반사기 표면에 도달하는 광선의 평균 파장을 nm단위로 나타내며 l1, l2는 홀수이다.
- 반사체에 면하는 알루미늄층, 반사될 광선을 향하며 굴절계수 n2를 가진 외부층인 HI-층, 및 n2보다 작은 굴절 계수 n1을 가진 중간 알루미늄 산화물층인 LI-층으로 된 샌드위치 구조를 가지며 반사체상의 반사표면층으로서 반사율을 증진시키는 층으로 역할을 하는 복합층을 가진 반사기에 있어서, LI-층이 알루미늄 층의 양극 산화로 생성되며 20℃에서 유전상수 ε1이 6 내지 10.5인 투명하고 구멍이 없는 장벽층이고 LI-층의 광학적 층두께 dopt,1과 HI-층의 광학적 층 두께 dopt,2가 다음 관계식을 만족시키며컴퓨터 스크린 모니터를 사용하는 작업장소에서 램프, 이차 조명 램프, 스캐닝램프 또는 조명 요소, 반사 천정 또는 광굴절 채널로서 사용되는 반사기;여기서, d1는 LI-층의 두께, d2는 HI-층의 두께, λ는 반사기 표면에 도달하는 광선의 평균 파장을 nm단위로 나타내며 l1, l2는 홀수이다.
- a) 산화 가능 외부층이 복합 표면층의 알루미늄 표면에 침착되며 침착된 층의 두께는 외부층 재료의 완전한 산화 이후에 두께 d2의 HI-층이 다음식을 만족시키게 형성되며;여기서, d2는 HI-층의 두께를 nm로 나타내며, n2는 HI-층의 굴절 계수이고, λ는 반사기 표면에 도달한 빛의 평균 파장을 nm로 나타내고, l2는 홀수이다.b) 알루미늄층의 적어도 일부가 외부층을 가진 반사체가 알루미늄 산화물을 재용해시키지 않는 전해질에 도입되어 양극이 되며, 외부층 재료로된 전체 두께가 HI-층으로 산화되고 LI-알루미늄 산화물 장벽층이 알루미늄층으로 부터 형성될때까지 전기분해에 의해 양극 산화되며, 상기 장벽층의 두께가 다음식을 만족시키며 반사체에 면하는 알루미늄층, 반사될 광선을 향하며 굴절계수 n2를 가진 외부층인 HI-층, 및 n2보다 작은 굴절계수 n1을 가진 중간 알루미늄 산화물층인 LI-층으로된 샌드위치 구조를 가지며 반사체상의 반사율을 증진시키는 층으로 역할을 하는 복합층을 가지며 LI가 저굴절계수 HI가 고굴절계수를 나타내는 반사기 제조 방법:여기서, d1은 굴절 계수 n1을 가진 LI-층의 두께를 nm로 나타내고 l1은 홀수이다.
- 제 7 항에 있어서, 외부층 재료가 PVD(물리 증착법)공정에 의해 침착됨을 특징으로 하는 방법.
- 제 7 항 또는 8 항에 있어서, 알카리, 알카리토금속 또는 전이감속, 또는 란탄족금속, 또는 이들의 합금이 외부층 재료로 적용됨을 특징으로 하는 방법.
- 제 7 항 또는 8 항에 있어서, Ti, PrTi, LaTi, Ta, Hf, Nb, Zn 또는 Ce이 외부층 재료로 적용됨을 특징으로 하는 방법.
- 제 7 항에 있어서, 전기 분해에 의한 산화 동안 복합층의 반사율 특성이 연속으로 측정되며 다음 관계식에 따른 초기전압 UA로 부터 출발하는 양극산화 전압이 측정된 반사율이 바라는 최대값에 이를때까지 연속으로 또는 일련의 단계로 증가됨을 특징으로 하는 방법;
- 제 7 항에 있어서, 반사율 증진 복합충의 제조가 스트립 형태의 공정을 사용하여 연속으로 수행됨을 특징으로 하는 방법.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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CH02574/95A CH690080A5 (de) | 1995-09-12 | 1995-09-12 | Aluminium-Reflektor mit reflexionserhöhendem Schichtverbund. |
CH2574/95 | 1995-09-12 |
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KR970016271A KR970016271A (ko) | 1997-04-28 |
KR100323440B1 true KR100323440B1 (ko) | 2002-06-20 |
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KR1019960037773A Expired - Fee Related KR100323440B1 (ko) | 1995-09-12 | 1996-09-02 | 복합반사율증진표면층을가진알루미늄반사기 |
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US (1) | US5760981A (ko) |
EP (1) | EP0762152B1 (ko) |
JP (1) | JP3273124B2 (ko) |
KR (1) | KR100323440B1 (ko) |
AT (1) | ATE231623T1 (ko) |
CA (1) | CA2184325C (ko) |
CH (1) | CH690080A5 (ko) |
DE (1) | DE59610069D1 (ko) |
ES (1) | ES2188737T3 (ko) |
NO (1) | NO963794L (ko) |
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EP0816875A1 (de) * | 1996-06-28 | 1998-01-07 | Alusuisse Technology & Management AG | Reflektor mit reflexionserhöhendem Schichtverbund |
US6124912A (en) * | 1997-06-09 | 2000-09-26 | National Semiconductor Corporation | Reflectance enhancing thin film stack in which pairs of dielectric layers are on a reflector and liquid crystal is on the dielectric layers |
EP0892288B2 (de) * | 1997-07-17 | 2009-01-21 | Alcan Technology & Management AG | Verwendung eines Walzproduktes aus Metall mit lichtaufweitender Oberflächenstruktur |
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US7261957B2 (en) * | 2000-03-31 | 2007-08-28 | Carl Zeiss Smt Ag | Multilayer system with protecting layer system and production method |
EP1154289A1 (de) * | 2000-05-09 | 2001-11-14 | Alcan Technology & Management AG | Reflektor |
GB2371562A (en) * | 2001-01-26 | 2002-07-31 | Gen Electric Co Plc | Coated reflector for a lamp |
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IT1401689B1 (it) * | 2010-09-10 | 2013-08-02 | Pellini Spa | Vetrocamera con veneziana interna a lamelle di migliorata riflettività e diffusività su un più ampio intervallo spettrale della radiazione solare incidente |
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US9061358B2 (en) * | 2012-05-29 | 2015-06-23 | Apple Inc. | Methods for cutting smooth reflective surfaces |
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- 1996-08-21 US US08/701,313 patent/US5760981A/en not_active Expired - Lifetime
- 1996-08-23 DE DE59610069T patent/DE59610069D1/de not_active Expired - Lifetime
- 1996-08-23 EP EP96810559A patent/EP0762152B1/de not_active Expired - Lifetime
- 1996-08-23 ES ES96810559T patent/ES2188737T3/es not_active Expired - Lifetime
- 1996-08-23 AT AT96810559T patent/ATE231623T1/de not_active IP Right Cessation
- 1996-08-28 CA CA002184325A patent/CA2184325C/en not_active Expired - Fee Related
- 1996-09-02 KR KR1019960037773A patent/KR100323440B1/ko not_active Expired - Fee Related
- 1996-09-10 NO NO963794A patent/NO963794L/no not_active Application Discontinuation
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Also Published As
Publication number | Publication date |
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NO963794D0 (no) | 1996-09-10 |
JPH09281313A (ja) | 1997-10-31 |
KR970016271A (ko) | 1997-04-28 |
CH690080A5 (de) | 2000-04-14 |
NO963794L (no) | 1997-03-13 |
EP0762152A1 (de) | 1997-03-12 |
ATE231623T1 (de) | 2003-02-15 |
CA2184325C (en) | 2002-08-20 |
CA2184325A1 (en) | 1997-03-13 |
DE59610069D1 (de) | 2003-02-27 |
EP0762152B1 (de) | 2003-01-22 |
JP3273124B2 (ja) | 2002-04-08 |
US5760981A (en) | 1998-06-02 |
ES2188737T3 (es) | 2003-07-01 |
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