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JPS6467956A - Manufacture of semiconductor storage device - Google Patents

Manufacture of semiconductor storage device

Info

Publication number
JPS6467956A
JPS6467956A JP62224045A JP22404587A JPS6467956A JP S6467956 A JPS6467956 A JP S6467956A JP 62224045 A JP62224045 A JP 62224045A JP 22404587 A JP22404587 A JP 22404587A JP S6467956 A JPS6467956 A JP S6467956A
Authority
JP
Japan
Prior art keywords
film
capacitor
substrate
silicon
operates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62224045A
Other languages
English (en)
Other versions
JP2530175B2 (ja
Inventor
Shunji Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62224045A priority Critical patent/JP2530175B2/ja
Publication of JPS6467956A publication Critical patent/JPS6467956A/ja
Application granted granted Critical
Publication of JP2530175B2 publication Critical patent/JP2530175B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/33—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor extending under the transistor

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP62224045A 1987-09-09 1987-09-09 半導体記憶装置の製造方法 Expired - Fee Related JP2530175B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62224045A JP2530175B2 (ja) 1987-09-09 1987-09-09 半導体記憶装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62224045A JP2530175B2 (ja) 1987-09-09 1987-09-09 半導体記憶装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6467956A true JPS6467956A (en) 1989-03-14
JP2530175B2 JP2530175B2 (ja) 1996-09-04

Family

ID=16807732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62224045A Expired - Fee Related JP2530175B2 (ja) 1987-09-09 1987-09-09 半導体記憶装置の製造方法

Country Status (1)

Country Link
JP (1) JP2530175B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991018418A1 (en) * 1990-05-23 1991-11-28 Oki Electric Industry Co., Ltd. Semiconductor memory device and method of manufacturing the same
EP0606758A1 (en) * 1992-12-30 1994-07-20 Samsung Electronics Co., Ltd. SOI transistor DRAM device and method of producing the same
US5410169A (en) * 1990-02-26 1995-04-25 Kabushiki Kaisha Toshiba Dynamic random access memory having bit lines buried in semiconductor substrate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5410169A (en) * 1990-02-26 1995-04-25 Kabushiki Kaisha Toshiba Dynamic random access memory having bit lines buried in semiconductor substrate
WO1991018418A1 (en) * 1990-05-23 1991-11-28 Oki Electric Industry Co., Ltd. Semiconductor memory device and method of manufacturing the same
EP0606758A1 (en) * 1992-12-30 1994-07-20 Samsung Electronics Co., Ltd. SOI transistor DRAM device and method of producing the same

Also Published As

Publication number Publication date
JP2530175B2 (ja) 1996-09-04

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees