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JPS62225182A - Oscillatory wave motor - Google Patents

Oscillatory wave motor

Info

Publication number
JPS62225182A
JPS62225182A JP61067588A JP6758886A JPS62225182A JP S62225182 A JPS62225182 A JP S62225182A JP 61067588 A JP61067588 A JP 61067588A JP 6758886 A JP6758886 A JP 6758886A JP S62225182 A JPS62225182 A JP S62225182A
Authority
JP
Japan
Prior art keywords
vibrating body
ring
contact
moving body
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61067588A
Other languages
Japanese (ja)
Other versions
JPH0740791B2 (en
Inventor
Ichiro Okumura
一郎 奥村
Hitoshi Mukojima
仁 向島
Sadayuki Ueha
貞行 上羽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP61067588A priority Critical patent/JPH0740791B2/en
Priority to US07/029,182 priority patent/US4734610A/en
Publication of JPS62225182A publication Critical patent/JPS62225182A/en
Publication of JPH0740791B2 publication Critical patent/JPH0740791B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details
    • H02N2/123Mechanical transmission means, e.g. for gearing
    • H02N2/126Mechanical transmission means, e.g. for gearing for conversion into linear motion
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163Motors with ring stator

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To dispense with a conversion mechanism in different constitution for converting the moving direction and to improve the efficiency by forming a screw at the contact portion of a vibrator and a moving body or a fixed body. CONSTITUTION:A vibratory ring lb is provided at an end of an electrome chanical transducer la. On the inside of the vibratory ring lb, a screw portion l0a composed of a recessed portion l0a is formed. Progressive vibratory waves are produced by impressing frequency voltage with phase difference to the electro mechanical transnsducerla arranged with phase difference. A screw portion l0b threaded with the screw portion 10a is formed to a moving body 3 which comes into contact with a vibrator l. The moving body 3 performs a spiral movement by the vibratory waves of the vibrator l.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は進行性振動波により移動体を駆動する振動波モ
ータ、特にその回転運動を直進運動に変換させる構造に
関する。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a vibration wave motor that drives a moving body using progressive vibration waves, and particularly to a structure that converts its rotational motion into linear motion.

〈従来技術〉 円環弾性体に生ずる進行性振動波を利用する移動体を回
転運動させる振動波モータは、例えば特開昭59−20
1684号公報等で開示されている様に、多種の構造が
提案されている。
<Prior art> A vibration wave motor for rotating a moving body using progressive vibration waves generated in an annular elastic body is disclosed in, for example, Japanese Patent Laid-Open No. 59-20
Various structures have been proposed, as disclosed in Japanese Patent No. 1684 and the like.

ところで、この種の振動波モータの回転運動を直進運動
に変換させるためには、回転運動を直進運動に変換する
機構、即ちネジ、ラックと歯車などが必要であった。例
えばカメラのレンズを光・F111方向に移動させる為
には、特開昭59−111117号公報に開示されたよ
うな移動体の回転運動を直進運動に変換する別構成のへ
リコイトを使った変換機構が必要となる。移動体から別
構成の変換機構を介して直進運動させる従来の如き装置
ではエネルギー損失が多く、その結果としてその損失量
だけモータ出力を増加させなりればならなかった。
By the way, in order to convert the rotational motion of this type of vibration wave motor into linear motion, a mechanism for converting the rotational motion into linear motion, that is, a screw, a rack, a gear, etc., is required. For example, in order to move a camera lens in the optical/F111 direction, a conversion using a helicoid of a different configuration that converts the rotational motion of a moving body into linear motion as disclosed in Japanese Patent Application Laid-Open No. 111117/1980 is used. A mechanism is required. Conventional devices in which a movable body is moved in a straight line through a separate conversion mechanism suffer a large amount of energy loss, and as a result, the motor output has to be increased by the amount of loss.

〈発明の目的〉 本発明は従来の如き運動方向を変換する別構成の変+g
j1機構を除去し、エネルギー損失を減少すべく、円形
状の振動体に周方向進行性振動波を発生する振動波モー
タにおいて、該振動体上に螺旋形状のネジ部を構成させ
該ネジ部と螺合させる接触体を前記進行性振動波の進行
方向とは異なる方向、具体的には前記円形状の振動体の
中心軸方向へ振動体と接触体とを相対運動させることを
目的とする。
<Object of the Invention> The present invention provides a modification of a different configuration for changing the direction of motion as in the prior art.
In order to eliminate the j1 mechanism and reduce energy loss, in a vibration wave motor that generates circumferentially progressive vibration waves on a circular vibrating body, a spiral threaded portion is formed on the vibrating body and the threaded portion and The object is to cause the contact body to be screwed together to move relative to the vibrating body and the contact body in a direction different from the traveling direction of the progressive vibration wave, specifically, in the direction of the central axis of the circular vibrating body.

〈実施例〉 第1図は本発明の実施例でIaは電気−機械エネルギー
変換素子で、例えば圧電セラミックスであるIbは振動
体である振動リングで、アルミ合金、鉄−ニッケル合金
、ステンレス、しんらゆう、りん青銅などの金属、ある
いはアルミナ等のリング状のセラミックス月より構成さ
れ、撮動のリング1b内側には凹部10a1から成るネ
ジ部10aか形成されている。圧電セラミックスIaは
振動リングIbに接着等で固着され振動体1を形成して
いる。位相差をもって配置された圧電セラミックス1a
に位相差(例えば9o°)のある周波電圧を印加するこ
とにより、振動体l全体には公知の原理により進行性振
動波が発生する。
<Example> Figure 1 shows an example of the present invention, where Ia is an electro-mechanical energy conversion element, Ib is a vibrating body made of piezoelectric ceramics, for example, a vibration ring, and the vibration ring is made of aluminum alloy, iron-nickel alloy, stainless steel, or steel. The ring 1b is made of metal such as phosphor bronze, or a ring-shaped ceramic material such as alumina, and a threaded portion 10a consisting of a recess 10a1 is formed inside the photographing ring 1b. The piezoelectric ceramic Ia is fixed to the vibrating ring Ib by adhesive or the like to form a vibrating body 1. Piezoelectric ceramics 1a arranged with phase difference
By applying a frequency voltage with a phase difference (for example, 9°) to , progressive vibration waves are generated throughout the vibrating body l according to a known principle.

3は振動体lと接触する移動体で、これにも凸部】Ob
、から成るネジ部]Obが形成され、振動リングのネジ
部10aと螺合する振動体1は不図示の固定手段にて固
定されていて8動体3は圧電セラミックスにより励起さ
れた振動体lの振動波により相対的に回転運動をすると
同時にネジ部分で接触しているため螺旋運動となり、振
動体リングの中心1IIIb100の方向にも移動する
3 is a moving body that comes into contact with the vibrating body l, and this also has a convex portion ]Ob
, the vibrating body 1 is fixed by a fixing means (not shown), and the vibrating body 3 is a vibrating body l excited by piezoelectric ceramics. The vibrating waves cause a relative rotational movement, and at the same time, since they are in contact with each other at the threaded portions, a spiral movement occurs and also moves in the direction of the center 1IIIb100 of the vibrating body ring.

尚、振動体1の振動モードは、日本音管学会講演論文集
(359年10月)あるいは特願昭60−49057号
公報で開示されている円環の伸縮モード、あるいは特開
昭60−210175号公報で開示されている振動体1
の径方向に変位を生じさせる面内の曲げモード等が用い
られる。
The vibration mode of the vibrating body 1 is the ring expansion/contraction mode disclosed in the Proceedings of the Acoustic Instrument Society of Japan (October 359) or Japanese Patent Application No. 60-49057, or the mode disclosed in Japanese Patent Application Laid-Open No. 60-210175. Vibrating body 1 disclosed in the publication
An in-plane bending mode that causes displacement in the radial direction is used.

第2図は円環の伸縮モードを励振させるための圧電セラ
ミックス1aの電極パターンと分極極性および周波電圧
を印加するだめの結線方法の実施例で、圧電セラミック
ス1aの表面は8等分に分割されたTL極が形成されて
いる。(+)および(−)は紙面垂直方向に分極処理さ
れた極性を示す。各電極は1つおきに結線され、それぞ
れのグループに9o°位相のずれた周波電圧を印加する
。4は公知の90°移相器を示す。第2図は円環伸縮の
2次モートを励振する方法を示しているか、電極の分割
数を変えることにより、他の次元のモートも励振てさ、
1次以上のモードであれは原理的には移動体を駆動する
ことができる。
Figure 2 shows an example of the electrode pattern and polarization of the piezoelectric ceramic 1a to excite the expansion/contraction mode of the ring, and the wiring method for applying a frequency voltage.The surface of the piezoelectric ceramic 1a is divided into eight equal parts. A TL pole is formed. (+) and (-) indicate polarity polarized in the direction perpendicular to the plane of the paper. The electrodes are connected every other electrode, and frequency voltages with a phase shift of 90° are applied to each group. 4 indicates a known 90° phase shifter. Figure 2 shows how to excite the second-order moat of ring expansion and contraction, or by changing the number of electrode divisions, we can also excite motes in other dimensions.
In principle, it is possible to drive a moving object in any mode higher than the first order.

第3図は円環の面内曲げモードを励振させるための圧電
セラミックス1aの′電極パターンと分極極性および周
波電圧を印加するための結線方法の第2の実/1色例で
、1aは圧′1“往セラミックス、4は公知の90°移
相器である。第3図は面内曲げの4次モートを励振する
方法を示しているが、伸縮モードの場合と同様1次以上
のモードであれば移動体を駆動可能である。
Figure 3 shows a second real/one-color example of the electrode pattern and polarization of the piezoelectric ceramic 1a for exciting the in-plane bending mode of the ring, and the wiring method for applying a frequency voltage. '1' is a ceramic material, and 4 is a known 90° phase shifter. Figure 3 shows a method for exciting the fourth-order mote of in-plane bending, but as with the stretching mode, modes higher than the first-order can be excited. If so, the moving body can be driven.

以上の実7jf!i例においては、例えば第1図におり
る振動リング1bの図面下側の面にのみリング状の圧電
セラミックスlaを配設し該リング状の圧’!t、h−
’Fb117)I−11−i1117kf:flu;、
4JF;、l’iう!百°看:、l−に−−))fil
E動リンクリング1b波を発生させていたが、かかる構
成の基では振動リング1bと圧電セラミックスIaとの
接合部周辺のみに、進行波が発生し易く振動リング1b
の全体で均一に進行波を伝達することが困難である。そ
こで第4図の実施例では、振動リングibの両側の面に
相対的にJ−波長、位相をずらした圧電セラミックスl
d、leを接合し、各圧電セラミックスld、leに移
相器90°位相のずれた周波電圧を印加することにより
振動リングIbに全体的に伸縮モードの進行波を発生さ
せる様にしたもので、この実施例の場合第1図および第
2図に比較し、出力を大きく且つ、効率よく駆動できる
ものである。
The above fruit 7jf! In Example i, for example, a ring-shaped piezoelectric ceramic la is disposed only on the lower surface of the vibration ring 1b in FIG. 1, and the ring-shaped pressure '! t,h-
'Fb117) I-11-i1117kf:flu;
4JF;, l'iu! 100°view:, l-ni--))fil
E-dynamic link ring 1b waves were generated, but with this configuration, traveling waves are likely to be generated only around the joint between the vibration ring 1b and the piezoelectric ceramic Ia, and the vibration ring 1b
It is difficult to transmit traveling waves uniformly throughout the area. Therefore, in the embodiment shown in FIG.
By joining d and le and applying a frequency voltage with a phase shift of 90 degrees to each piezoelectric ceramic ld and le, a traveling wave in an expansion/contraction mode is generated in the vibration ring Ib as a whole. In this embodiment, compared to FIGS. 1 and 2, the output can be increased and the drive can be performed more efficiently.

第5図は第3図と間柱、円環の面内曲げの4次モードを
励振する実施例で、母嘘母*溝謔第3図のものに比べ出
力を大きくとることが可能となる。
FIG. 5 shows an embodiment in which the fourth-order mode of in-plane bending of the studs and rings in FIG. 3 is excited, and it is possible to obtain a larger output than that in FIG.

上述の実施例では、振動体に酸ネジを形成させているが
、逆に第6図に示すごとく振動体に雄ネジを形成させ、
該振動体を移動体とし、固定体20を雌ネジと振動体に
進行波を発生させ、固定体20との摩擦より振動体1が
自ら軸方向へ移動する様に構成することも可能である。
In the above embodiment, the vibrating body is formed with an external thread, but conversely, as shown in FIG. 6, the vibrating body is formed with a male thread,
It is also possible to configure the vibrating body to be a moving body, the fixed body 20 to generate a traveling wave between the female screw and the vibrating body, and the vibrating body 1 to move in the axial direction by itself due to friction with the fixed body 20. .

さらに第7図は別の実施例で、リング状の振動体の内外
両側にネジを構成した断面図である。
Furthermore, FIG. 7 is a cross-sectional view of another embodiment in which screws are provided on both the inner and outer sides of a ring-shaped vibrating body.

20は固定子であり、ボルト5にて固定され、振20と
螺合し、さらに振動%lの内周側にもネジ部10dを形
成し、該ネジ部10dと螺合する移動体6とにより構成
されている。ここで10eは固定子20のネジ部で1O
fは振動体の内面のネジ部である。該構成の基で圧電セ
ラミックス1aに周波電圧を印加することにより進行波
がリング状振動体1に発生し、固定子20に対して振動
体1か回転Ir1lI1100に沿って移動し、さらに
振動体1の内周側に設けられた移動体6が振動体1の振
動によって振動体1の移動方向と同一方向に移動するこ
とになる。今、仮に振動体1のネジ山10c、10dの
間隔が外周側と内周側で等しいとすると結果的に移動体
6は振動体1の移動速度の2倍の速度で回転軸に沿って
上方向に移動する。
A stator 20 is fixed with bolts 5, is screwed together with the vibration 20, and further has a threaded portion 10d formed on the inner circumferential side of the vibration %l, and a movable body 6 that is screwed with the threaded portion 10d. It is made up of. Here, 10e is the threaded part of the stator 20, which is 10
f is a threaded portion on the inner surface of the vibrating body. Based on this configuration, by applying a frequency voltage to the piezoelectric ceramic 1a, a traveling wave is generated in the ring-shaped vibrating body 1, and the vibrating body 1 moves along the rotation Ir1lI1100 with respect to the stator 20, and further the vibrating body 1 The movable body 6 provided on the inner peripheral side of the vibrating body 1 moves in the same direction as the moving direction of the vibrating body 1 due to the vibration of the vibrating body 1. Now, if the distance between the screw threads 10c and 10d of the vibrating body 1 is equal on the outer circumferential side and the inner circumferential side, the movable body 6 will move upward along the rotation axis at twice the moving speed of the vibrating body 1. move in the direction.

但し、振動体に伸縮モードを励振する場合は内外のネジ
は同方向ネジとし、又面内曲げモートを励振する場合は
逆ネジとする必要がある。
However, when exciting an expansion/contraction mode in the vibrating body, the internal and external screws must be screwed in the same direction, and when exciting an in-plane bending mode, they must be screwed in opposite directions.

第8図は振動体1と接触する移動体3の接触圧を安定さ
せるための構成の断面図である。5は皿バネで、ネジ部
の山の間隔か、不均一の場合、移動体3と振動体1との
接触圧が均一とならず安定した駆動力を得られないため
、該皿バネ5にて常時均一な接触圧を得られるよう作用
するものである。又は左右の移動体の相対位置を固定す
るビン尚、本実施例においてはネジ部の断面はほぼ三角
形であるが、要は移動体と振動体とが夫々凹部良 凸部を有し、夫々が嵌合する形状であれば外いものであ
る。
FIG. 8 is a sectional view of a structure for stabilizing the contact pressure of the movable body 3 in contact with the vibrating body 1. 5 is a disc spring, and if the spacing between the ridges of the threaded portion is uneven, the contact pressure between the movable body 3 and the vibrating body 1 will not be uniform, making it impossible to obtain a stable driving force. This function works so that uniform contact pressure can be obtained at all times. Alternatively, a bottle for fixing the relative position of the left and right moving bodies.In this embodiment, the cross section of the threaded portion is approximately triangular, but the point is that the moving body and the vibrating body each have a concave part and a convex part. If it has a shape that fits, it is a good fit.

〈効  果〉 円環状の振動モータにおいて振動体と移動体あるいは固
定体の接触部にネジを形成することにより、 (1)回転運動から直線運動への変換機構が不要となる
<Effects> By forming a screw at the contact portion between the vibrating body and the moving body or fixed body in the annular vibration motor, (1) a conversion mechanism from rotational motion to linear motion is not required;

(2)従って、変換機構に伴うエネルギー損失がなく、
高効率の直進アクチュエータとなるものである。
(2) Therefore, there is no energy loss associated with the conversion mechanism,
This is a highly efficient linear actuator.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明にかかる振動波子−タの振動体および移
動体の斜視図、 第2図は伸縮モードを励振する実施例の圧電性セラミッ
クスの電極パターン、分極極性および結線図、 第3図は面内曲げモードを励振する実施例の圧電性セラ
ミックスの電極パターン、分極極性および結線図、 第4図および第5図は振動体両端に圧電性セラミックス
を接合した振動体の構成を説明する図、第6図は振動体
ビ雄ネジを形成した実施例を示す断面図、 第7図は振動体の内外両側にネジを形成した実施例を示
す断面図、 第8図は接触圧を安定化する実施例を示す断面図である
。 図において、lは振動体、3.6は移動体である。
Fig. 1 is a perspective view of a vibrating body and a moving body of a vibrator according to the present invention; Fig. 2 is an electrode pattern, polarization polarity, and connection diagram of a piezoelectric ceramic according to an embodiment that excites a stretching mode; Fig. 3; Figures 4 and 5 are diagrams illustrating the electrode pattern, polarization polarity, and connection diagram of the piezoelectric ceramic of the embodiment that excites the in-plane bending mode, and Figures 4 and 5 are diagrams explaining the configuration of the vibrating body in which piezoelectric ceramics are bonded to both ends of the vibrating body. , Fig. 6 is a cross-sectional view showing an embodiment in which male threads are formed on the vibrating body, Fig. 7 is a cross-sectional view showing an embodiment in which screws are formed on both the inside and outside of the vibrating body, and Fig. 8 is a cross-sectional view showing an embodiment in which screws are formed on both the inside and outside of the vibrating body, and Fig. 8 stabilizes the contact pressure. FIG. In the figure, 1 is a vibrating body, and 3.6 is a moving body.

Claims (1)

【特許請求の範囲】  電気−機械エネルギー変換素子に周波電圧を印加する
ことにより円形状の振動体の周方向に進行性振動波を発
生させ、該振動体と接触する接触体とで相対運動させる
振動波モータにおいて、 前記振動体に凸部または凹部を形成し、該凸部または凹
部にて螺旋形状を構成し、前記接触体に前記凸部または
凹部と嵌合する嵌合部を形成し、前記周方向とは異なる
方向へ前記振動体と接触体とを相対運動させることを特
徴とする振動波モータ。
[Claims] By applying a frequency voltage to an electro-mechanical energy conversion element, a progressive vibration wave is generated in the circumferential direction of a circular vibrating body, and the vibrating body and a contact body in contact are caused to move relative to each other. In the vibration wave motor, a convex portion or a concave portion is formed on the vibrating body, the convex portion or the concave portion forms a spiral shape, and a fitting portion that fits into the convex portion or the concave portion is formed on the contact body; A vibration wave motor characterized in that the vibrating body and the contact body are caused to move relative to each other in a direction different from the circumferential direction.
JP61067588A 1986-03-25 1986-03-25 Vibration wave motor Expired - Lifetime JPH0740791B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP61067588A JPH0740791B2 (en) 1986-03-25 1986-03-25 Vibration wave motor
US07/029,182 US4734610A (en) 1986-03-25 1987-03-23 Vibration wave motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61067588A JPH0740791B2 (en) 1986-03-25 1986-03-25 Vibration wave motor

Publications (2)

Publication Number Publication Date
JPS62225182A true JPS62225182A (en) 1987-10-03
JPH0740791B2 JPH0740791B2 (en) 1995-05-01

Family

ID=13349221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61067588A Expired - Lifetime JPH0740791B2 (en) 1986-03-25 1986-03-25 Vibration wave motor

Country Status (1)

Country Link
JP (1) JPH0740791B2 (en)

Cited By (10)

* Cited by examiner, † Cited by third party
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JP2005312095A (en) * 2004-04-16 2005-11-04 Taiyo Yuden Co Ltd Drive device
JP2007505599A (en) * 2003-09-08 2007-03-08 ニュー スケール テクノロジーズ インク Ultrasonic motor for lead screw
JP2008510445A (en) * 2004-08-13 2008-04-03 ニュー スケール テクノロジーズ インコーポレーティッド Mechanism including ultrasonic lead screw motor
JP2008544315A (en) * 2005-06-14 2008-12-04 ニュー スケール テクノロジーズ インコーポレーティッド Mechanism including ultrasonic lead screw motor
JP2008312309A (en) * 2007-06-13 2008-12-25 Alps Electric Co Ltd Vibration type actuator
JP2009516491A (en) * 2005-11-18 2009-04-16 清華大学 Screw drive polyhedral ultrasonic motor
CN103133488A (en) * 2013-03-12 2013-06-05 哈尔滨工业大学 Sandwich type free beam torsional vibration operating mode unlockable nut
WO2013129573A1 (en) * 2012-02-28 2013-09-06 株式会社ニコン Vibration actuator and lens barrel
JP2014158373A (en) * 2013-02-15 2014-08-28 Namiki Precision Jewel Co Ltd Vibration actuator
CN107191563A (en) * 2017-07-25 2017-09-22 顺德职业技术学院 Brand-new ultrasonic wave screw thread pair

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* Cited by examiner, † Cited by third party
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JP2007505599A (en) * 2003-09-08 2007-03-08 ニュー スケール テクノロジーズ インク Ultrasonic motor for lead screw
JP4841432B2 (en) * 2003-09-08 2011-12-21 ニュー スケール テクノロジーズ インク Ultrasonic motor for lead screw
JP4554976B2 (en) * 2004-04-16 2010-09-29 太陽誘電株式会社 Drive device
JP2005312095A (en) * 2004-04-16 2005-11-04 Taiyo Yuden Co Ltd Drive device
JP4896020B2 (en) * 2004-08-13 2012-03-14 ニュー スケール テクノロジーズ インコーポレーティッド Mechanism including ultrasonic lead screw motor
JP2008510445A (en) * 2004-08-13 2008-04-03 ニュー スケール テクノロジーズ インコーポレーティッド Mechanism including ultrasonic lead screw motor
JP2008544315A (en) * 2005-06-14 2008-12-04 ニュー スケール テクノロジーズ インコーポレーティッド Mechanism including ultrasonic lead screw motor
JP2009516491A (en) * 2005-11-18 2009-04-16 清華大学 Screw drive polyhedral ultrasonic motor
JP4873269B2 (en) * 2005-11-18 2012-02-08 清華大学 Screw drive polyhedral ultrasonic motor
JP2008312309A (en) * 2007-06-13 2008-12-25 Alps Electric Co Ltd Vibration type actuator
WO2013129573A1 (en) * 2012-02-28 2013-09-06 株式会社ニコン Vibration actuator and lens barrel
JP2014158373A (en) * 2013-02-15 2014-08-28 Namiki Precision Jewel Co Ltd Vibration actuator
CN103133488A (en) * 2013-03-12 2013-06-05 哈尔滨工业大学 Sandwich type free beam torsional vibration operating mode unlockable nut
CN107191563A (en) * 2017-07-25 2017-09-22 顺德职业技术学院 Brand-new ultrasonic wave screw thread pair

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