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JPS6212454B2 - - Google Patents

Info

Publication number
JPS6212454B2
JPS6212454B2 JP55102893A JP10289380A JPS6212454B2 JP S6212454 B2 JPS6212454 B2 JP S6212454B2 JP 55102893 A JP55102893 A JP 55102893A JP 10289380 A JP10289380 A JP 10289380A JP S6212454 B2 JPS6212454 B2 JP S6212454B2
Authority
JP
Japan
Prior art keywords
pyroelectric
insulating film
forming
wave detection
lower electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55102893A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5728223A (en
Inventor
Katsuhiro Mikami
Chikao Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Radio Co Ltd
Original Assignee
Japan Radio Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Radio Co Ltd filed Critical Japan Radio Co Ltd
Priority to JP10289380A priority Critical patent/JPS5728223A/ja
Publication of JPS5728223A publication Critical patent/JPS5728223A/ja
Publication of JPS6212454B2 publication Critical patent/JPS6212454B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
    • H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point

Landscapes

  • Radiation Pyrometers (AREA)
JP10289380A 1980-07-26 1980-07-26 Pyroelectric type radiation wave detector and manufacture thereof Granted JPS5728223A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10289380A JPS5728223A (en) 1980-07-26 1980-07-26 Pyroelectric type radiation wave detector and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10289380A JPS5728223A (en) 1980-07-26 1980-07-26 Pyroelectric type radiation wave detector and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS5728223A JPS5728223A (en) 1982-02-15
JPS6212454B2 true JPS6212454B2 (fr) 1987-03-18

Family

ID=14339533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10289380A Granted JPS5728223A (en) 1980-07-26 1980-07-26 Pyroelectric type radiation wave detector and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS5728223A (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5913926A (ja) * 1982-07-15 1984-01-24 Matsushita Electric Ind Co Ltd 焦電素子
JPS5980923A (ja) * 1982-10-30 1984-05-10 株式会社島津製作所 焦電素子の製造法
JPS60119426A (ja) * 1983-12-01 1985-06-26 Murata Mfg Co Ltd 薄膜型焦電センサアレイ
JPS6136967A (ja) * 1984-07-30 1986-02-21 Matsushita Electric Ind Co Ltd 赤外線リニアアレイ素子およびその製造方法
JPS61187320A (ja) * 1985-02-15 1986-08-21 住友電気工業株式会社 強誘電体薄膜センサ−
JPH0765936B2 (ja) * 1986-05-16 1995-07-19 アンリツ株式会社 輻射波検出素子とその製法
JPH0194227A (ja) * 1987-10-05 1989-04-12 Hamamatsu Photonics Kk 焦電検出装置とその製造方法
JPH0682073B2 (ja) * 1988-08-30 1994-10-19 株式会社村田製作所 焦電型赤外線センサ
EP0630058A3 (fr) * 1993-05-19 1995-03-15 Siemens Ag Procédé de fabrication d'un arrangement de pyrodétecteurs par gravure électrochimique d'un substrat de silicium.
JP3196823B2 (ja) 1997-06-11 2001-08-06 日本電気株式会社 半導体装置
JP4269859B2 (ja) 2003-09-10 2009-05-27 株式会社島津製作所 放射線検出器
KR100666693B1 (ko) * 2004-11-23 2007-01-11 삼성전자주식회사 모놀리식 듀플렉서
JP5286906B2 (ja) * 2007-06-08 2013-09-11 大日本印刷株式会社 圧電ミラーデバイスとこれを用いた光学機器および圧電ミラーデバイスの製造方法
WO2009143354A2 (fr) * 2008-05-23 2009-11-26 Fujifilm Corporation Utilisation d’un film isolé dans un dispositif mems

Also Published As

Publication number Publication date
JPS5728223A (en) 1982-02-15

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