JPS60163744U - Semiconductor integrated circuit device - Google Patents
Semiconductor integrated circuit deviceInfo
- Publication number
- JPS60163744U JPS60163744U JP5033484U JP5033484U JPS60163744U JP S60163744 U JPS60163744 U JP S60163744U JP 5033484 U JP5033484 U JP 5033484U JP 5033484 U JP5033484 U JP 5033484U JP S60163744 U JPS60163744 U JP S60163744U
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- semiconductor integrated
- circuit device
- gate electrode
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
、 第１図は本考案の一実施例によるチェック用素子
を示す平面図で、第２図は第１図のチェック用素子を有
する集積回路ペレットの平面図である。
１０・・・チェック用素子、２・・・配線部分、１゜１
′・・・端子部分、３・・・集積回路ペレット。, FIG. 1 is a plan view showing a checking element according to an embodiment of the present invention, and FIG. 2 is a plan view of an integrated circuit pellet having the checking element of FIG. 1. 10...Checking element, 2...Wiring part, 1゜1
'...Terminal part, 3...Integrated circuit pellet.
Claims (1)
幅の導体層をチェック用素子として有することを特徴と
する半導体集積回路装置。A semiconductor integrated circuit device comprising a conductor layer having a width equal to or less than the alignment margin of a gate electrode as a checking element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5033484U JPS60163744U (en) | 1984-04-06 | 1984-04-06 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5033484U JPS60163744U (en) | 1984-04-06 | 1984-04-06 | Semiconductor integrated circuit device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60163744U true JPS60163744U (en) | 1985-10-30 |
Family
ID=30568366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5033484U Pending JPS60163744U (en) | 1984-04-06 | 1984-04-06 | Semiconductor integrated circuit device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60163744U (en) |
-
1984
- 1984-04-06 JP JP5033484U patent/JPS60163744U/en active Pending
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