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JPS5718737A - Apparatus for continuous plasma treatment - Google Patents

Apparatus for continuous plasma treatment

Info

Publication number
JPS5718737A
JPS5718737A JP8492380A JP8492380A JPS5718737A JP S5718737 A JPS5718737 A JP S5718737A JP 8492380 A JP8492380 A JP 8492380A JP 8492380 A JP8492380 A JP 8492380A JP S5718737 A JPS5718737 A JP S5718737A
Authority
JP
Japan
Prior art keywords
plasma treatment
treatment tank
vacuum
cathode
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8492380A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0341496B2 (da
Inventor
Kiyoshi Imada
Susumu Ueno
Hirokazu Nomura
Hiroaki Kobayashi
Kenji Hatada
Kazuhiko Abe
Yoshitada Hata
Masaya Tokai
Kenichi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Toray Industries Inc
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd, Toray Industries Inc filed Critical Shin Etsu Chemical Co Ltd
Priority to JP8492380A priority Critical patent/JPS5718737A/ja
Priority to GB8118765A priority patent/GB2080611B/en
Priority to NO812087A priority patent/NO155990C/no
Priority to DK270081A priority patent/DK270081A/da
Priority to NL8102964A priority patent/NL8102964A/nl
Priority to BE0/205154A priority patent/BE889306A/fr
Priority to DE19813124280 priority patent/DE3124280A1/de
Priority to FR8112155A priority patent/FR2485319A1/fr
Priority to SU813306857A priority patent/SU1039438A3/ru
Priority to KR1019810002254A priority patent/KR840000727B1/ko
Priority to AU72046/81A priority patent/AU547901B2/en
Priority to IT22492/81A priority patent/IT1136887B/it
Publication of JPS5718737A publication Critical patent/JPS5718737A/ja
Publication of JPH0341496B2 publication Critical patent/JPH0341496B2/ja
Granted legal-status Critical Current

Links

Classifications

    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M10/00—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/02—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements ultrasonic or sonic; Corona discharge
    • D06M10/025—Corona discharge or low temperature plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/002—Sealings comprising at least two sealings in succession
    • F16J15/006—Sealings comprising at least two sealings in succession with division of the pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/168—Sealings between relatively-moving surfaces which permits material to be continuously conveyed
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H01J37/185—Means for transferring objects between different enclosures of different pressure or atmosphere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • B29C2059/147—Low pressure plasma; Glow discharge plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2001/00—Use of cellulose, modified cellulose or cellulose derivatives, e.g. viscose, as moulding material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2001/00—Use of cellulose, modified cellulose or cellulose derivatives, e.g. viscose, as moulding material
    • B29K2001/08—Cellulose derivatives
    • B29K2001/12—Cellulose acetate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2007/00—Use of natural rubber as moulding material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2027/00—Use of polyvinylhalogenides or derivatives thereof as moulding material
    • B29K2027/06—PVC, i.e. polyvinylchloride
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2313/00—Use of textile products or fabrics as reinforcement
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M2101/00—Chemical constitution of the fibres, threads, yarns, fabrics or fibrous goods made from such materials, to be treated
    • D06M2101/16—Synthetic fibres, other than mineral fibres
    • D06M2101/18—Synthetic fibres consisting of macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
    • D06M2101/22—Polymers or copolymers of halogenated mono-olefins
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M2200/00—Functionality of the treatment composition and/or properties imparted to the textile material
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M2200/00—Functionality of the treatment composition and/or properties imparted to the textile material
    • D06M2200/35—Abrasion, pilling or fibrillation resistance

Landscapes

  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Textile Engineering (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Chemical Vapour Deposition (AREA)
JP8492380A 1980-06-21 1980-06-21 Apparatus for continuous plasma treatment Granted JPS5718737A (en)

Priority Applications (12)

Application Number Priority Date Filing Date Title
JP8492380A JPS5718737A (en) 1980-06-21 1980-06-21 Apparatus for continuous plasma treatment
GB8118765A GB2080611B (en) 1980-06-21 1981-06-18 An apparatus for continuous treatment of a continuous-length material with low temperature plasma
NO812087A NO155990C (no) 1980-06-21 1981-06-19 Anordning for kontinuerlig behandling av et filmmateriale med lav temperatur-plasma.
DK270081A DK270081A (da) 1980-06-21 1981-06-19 Apparat til behandling af en film af formstofmateriale med lavtemperaturplasma
NL8102964A NL8102964A (nl) 1980-06-21 1981-06-19 Inrichting voor het continu behandelen van langwerpig filmmateriaal met lage temperatuurplasma.
BE0/205154A BE889306A (fr) 1980-06-21 1981-06-19 Appareil de traitement continu d'une matiere en longueur continue par un plasma a basse temperature
DE19813124280 DE3124280A1 (de) 1980-06-21 1981-06-19 Vorrichtung zur kontinuierlichen behandlung eines bahnmaterials in einem kalten plasma
FR8112155A FR2485319A1 (fr) 1980-06-21 1981-06-19 Installation pour le traitement en continu d'un materiel de longueur indefinie avec un plasma de basse temperature
SU813306857A SU1039438A3 (ru) 1980-06-21 1981-06-19 Устройство дл непрерывной обработки пленочного материала
KR1019810002254A KR840000727B1 (ko) 1980-06-21 1981-06-20 연속 길이의 물질을 저온 플라스마와 함께 연속 처리하는 장치
AU72046/81A AU547901B2 (en) 1980-06-21 1981-06-22 Treating with low temp. plasma
IT22492/81A IT1136887B (it) 1980-06-21 1981-06-22 Apparecchiatura per il trattamento in continuo di un materiale di lunghezza continua con plasma a bassa temperatura

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8492380A JPS5718737A (en) 1980-06-21 1980-06-21 Apparatus for continuous plasma treatment

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP12386090A Division JPH03267138A (ja) 1990-05-14 1990-05-14 真空処理装置

Publications (2)

Publication Number Publication Date
JPS5718737A true JPS5718737A (en) 1982-01-30
JPH0341496B2 JPH0341496B2 (da) 1991-06-24

Family

ID=13844216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8492380A Granted JPS5718737A (en) 1980-06-21 1980-06-21 Apparatus for continuous plasma treatment

Country Status (12)

Country Link
JP (1) JPS5718737A (da)
KR (1) KR840000727B1 (da)
AU (1) AU547901B2 (da)
BE (1) BE889306A (da)
DE (1) DE3124280A1 (da)
DK (1) DK270081A (da)
FR (1) FR2485319A1 (da)
GB (1) GB2080611B (da)
IT (1) IT1136887B (da)
NL (1) NL8102964A (da)
NO (1) NO155990C (da)
SU (1) SU1039438A3 (da)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773026A (en) * 1980-10-27 1982-05-07 Shin Etsu Chem Co Ltd Apparatus for continuous plasma treatment
JPS57195750A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Vacuum treatment apparatus
JPS57195742A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Vacuum treatment apparatus
JPS58210844A (ja) * 1982-06-01 1983-12-08 Sando Iron Works Co Ltd 低温プラズマ雰囲気中の被処理物温度制御方法及びその装置
JPS6019073A (ja) * 1983-07-11 1985-01-31 Nippon Kokan Kk <Nkk> 改質プレコ−ト鋼板の製造法
JPS6040235A (ja) * 1983-08-15 1985-03-02 Idemitsu Petrochem Co Ltd 熱可塑性樹脂の連続プラズマ処理方法およびその処理装置
JP2009082796A (ja) * 2007-09-28 2009-04-23 Tokyo Institute Of Technology プラズマ処理装置及びプラズマ処理方法

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58120860A (ja) * 1982-01-06 1983-07-18 株式会社山東鉄工所 シ−ト状物質の低温プラズマ処理装置
US4511419A (en) * 1982-04-23 1985-04-16 Firma Erwin Kampf Gmbh & Co. Method and device for laminating foils
JPS5953541A (ja) * 1982-09-20 1984-03-28 Shin Etsu Chem Co Ltd 有機高分子成形品の表面改質方法
EP0130444B1 (en) * 1983-06-17 1987-09-23 Hitachi, Ltd. Continuous vacuum treating apparatus
JPS62274080A (ja) * 1986-05-21 1987-11-28 Hitachi Ltd プラズマ処理方法
IT1223074B (it) * 1986-11-19 1990-09-12 Martin Processing Co Inc Parabrezza di sicurezza e metodo per fabbricarlo
KR910005158B1 (ko) * 1987-06-05 1991-07-23 가부시기가이샤 히다찌세이사꾸쇼 진공연속 처리장치
AU644177B2 (en) * 1990-05-10 1993-12-02 Eastman Kodak Company Apparatus for-plasma treatment of continuous material
WO1991017561A1 (en) * 1990-05-10 1991-11-14 Eastman Kodak Company Apparatus for-plasma treatment of continuous material
DE29600991U1 (de) * 1996-01-20 1997-05-22 Strämke, Siegfried, Dr.-Ing., 52538 Selfkant Plasmareaktor
US6287687B1 (en) 1998-05-08 2001-09-11 Asten, Inc. Structures and components thereof having a desired surface characteristic together with methods and apparatuses for producing the same
WO1999058755A1 (en) * 1998-05-08 1999-11-18 Asten, Inc. Structures and components thereof having a desired surface characteristic together with methods and apparatuses for producing the same
AU3892899A (en) * 1998-05-08 1999-11-29 Asten, Inc. Structures and components thereof having a desired surface characteristic together with methods and apparatuses for producing the same
AU2003234058A1 (en) * 2003-05-13 2004-12-03 Stazione Sperimentale Carta Cartoni E Paste Per Carte Method for plasma treating paper and cardboards
AT504466B1 (de) * 2006-10-25 2009-05-15 Eiselt Primoz Verfahren und vorrichtung zur entfettung von gegenständen oder materialien mittels oxidativer radikale
CN108655115A (zh) * 2018-06-01 2018-10-16 江阴瑞兴科技有限公司 一种连续进出料式等离子清洗设备
CN110139457B (zh) * 2018-11-06 2024-05-24 南京苏曼等离子科技有限公司 亚真空低温等离子体在线连续材料处理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50161475A (da) * 1974-06-20 1975-12-27
JPS5385741A (en) * 1977-01-07 1978-07-28 Nippon Steel Corp Continuous evaporation plating method of steel band

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1135112B (de) * 1956-04-10 1962-08-23 Hoerder Huettenunion Ag Glimmentladungsgefaess mit Wechselstrom-speisung fuer stromstarke Entladungen zur Behandlung von in das Gefaess eingebrachten Koerpern
DE2028862A1 (de) * 1970-06-11 1971-12-16 Steigerwald K Druckschleusensystem fur eine Kammer, in der ein vom Umgebungsdruck abweichender Druck herrscht
US3870610A (en) * 1972-03-09 1975-03-11 Grace W R & Co Cold plasma treatment of materials
FR2420401A1 (fr) * 1978-03-20 1979-10-19 Wentgate Engineers 1976 Ltd Dispositif d'alimentation en continu de pieces dans une enceinte etanche

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50161475A (da) * 1974-06-20 1975-12-27
JPS5385741A (en) * 1977-01-07 1978-07-28 Nippon Steel Corp Continuous evaporation plating method of steel band

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773026A (en) * 1980-10-27 1982-05-07 Shin Etsu Chem Co Ltd Apparatus for continuous plasma treatment
JPH0219138B2 (da) * 1980-10-27 1990-04-27 Shinetsu Kagaku Kogyo Kk
JPS57195750A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Vacuum treatment apparatus
JPS57195742A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Vacuum treatment apparatus
JPS58210844A (ja) * 1982-06-01 1983-12-08 Sando Iron Works Co Ltd 低温プラズマ雰囲気中の被処理物温度制御方法及びその装置
JPH0321213B2 (da) * 1982-06-01 1991-03-22 Sando Tetsukosho Kk
JPS6019073A (ja) * 1983-07-11 1985-01-31 Nippon Kokan Kk <Nkk> 改質プレコ−ト鋼板の製造法
JPS6144549B2 (da) * 1983-07-11 1986-10-03 Nippon Kokan Kk
JPS6040235A (ja) * 1983-08-15 1985-03-02 Idemitsu Petrochem Co Ltd 熱可塑性樹脂の連続プラズマ処理方法およびその処理装置
JPH045541B2 (da) * 1983-08-15 1992-01-31
JP2009082796A (ja) * 2007-09-28 2009-04-23 Tokyo Institute Of Technology プラズマ処理装置及びプラズマ処理方法

Also Published As

Publication number Publication date
DK270081A (da) 1981-12-22
JPH0341496B2 (da) 1991-06-24
NO155990C (no) 1987-07-01
FR2485319A1 (fr) 1981-12-24
NO812087L (no) 1981-12-22
GB2080611A (en) 1982-02-03
AU547901B2 (en) 1985-11-14
NO155990B (no) 1987-03-23
GB2080611B (en) 1984-06-20
BE889306A (fr) 1981-10-16
KR830006025A (ko) 1983-09-17
SU1039438A3 (ru) 1983-08-30
IT8122492A0 (it) 1981-06-22
IT1136887B (it) 1986-09-03
AU7204681A (en) 1982-01-07
DE3124280A1 (de) 1982-05-27
NL8102964A (nl) 1982-01-18
KR840000727B1 (ko) 1984-05-24
FR2485319B1 (da) 1985-01-04

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