JPS5710629A - Plasma treatment of hollow body - Google Patents
Plasma treatment of hollow bodyInfo
- Publication number
- JPS5710629A JPS5710629A JP8548180A JP8548180A JPS5710629A JP S5710629 A JPS5710629 A JP S5710629A JP 8548180 A JP8548180 A JP 8548180A JP 8548180 A JP8548180 A JP 8548180A JP S5710629 A JPS5710629 A JP S5710629A
- Authority
- JP
- Japan
- Prior art keywords
- hollow body
- vacuum tank
- plasma treatment
- electrode
- high frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
Abstract
PURPOSE: To carry out the plasma treatment of the surface of a hollow body quickly, efficiently and uniformly, by setting the hollow body made of a material with low dielectric loss in a vacuum tank to be used as one electrode, followed by applying high frequency through the hollow body.
CONSTITUTION: The hollow body 2 made of a material with low dielectric loss, e.g., polyethylene, polystyrene, etc. is set in the vacuum tank 1 to be used as one electrode 9 made of a metal or consisting of an internal surface having a metal layer, and gases are exhausted from the exhaust vent 6 so that the vacuum tank 1 is evacuated to a reduced pressure 10-2 Torr. Argon is fed from the gas feed pipe 4, tetrafluoroethylene from the gas feed pipe 5, and high frequency electric field is applied from the electric source 8 through the adjusting device 7 to the electrodes 3 and 9 so that a film of poly tetrafluoroethylene is formed on the surface of the hollow body. Effective for overside articles.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8548180A JPS5710629A (en) | 1980-06-23 | 1980-06-23 | Plasma treatment of hollow body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8548180A JPS5710629A (en) | 1980-06-23 | 1980-06-23 | Plasma treatment of hollow body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5710629A true JPS5710629A (en) | 1982-01-20 |
Family
ID=13860096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8548180A Pending JPS5710629A (en) | 1980-06-23 | 1980-06-23 | Plasma treatment of hollow body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5710629A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0730266A2 (en) * | 1995-02-06 | 1996-09-04 | Hitachi, Ltd. | Apparatus for plasma-processing a disk substrate and method of manufacturing a magnetic disk |
| KR20030030672A (en) * | 2001-10-12 | 2003-04-18 | 우신크라이오백(주) | Method Of Plating Vacuum Plasma Inside Of Cylinder-type Object |
| WO2005113654A3 (en) * | 2004-05-14 | 2006-03-30 | Inergy Automotive Systems Res | Method for preparing a hollow element of a fuel system |
| JP2010054061A (en) * | 2008-08-26 | 2010-03-11 | Rinnai Corp | Grill burner |
| CZ305156B6 (en) * | 2013-12-19 | 2015-05-20 | Masarykova Univerzita | Plasma treatment of internal and/or external surface of a hollow, electrically non-conducting body and apparatus for making the same |
-
1980
- 1980-06-23 JP JP8548180A patent/JPS5710629A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0730266A2 (en) * | 1995-02-06 | 1996-09-04 | Hitachi, Ltd. | Apparatus for plasma-processing a disk substrate and method of manufacturing a magnetic disk |
| EP0730266A3 (en) * | 1995-02-06 | 1998-07-01 | Hitachi, Ltd. | Apparatus for plasma-processing a disk substrate and method of manufacturing a magnetic disk |
| KR20030030672A (en) * | 2001-10-12 | 2003-04-18 | 우신크라이오백(주) | Method Of Plating Vacuum Plasma Inside Of Cylinder-type Object |
| WO2005113654A3 (en) * | 2004-05-14 | 2006-03-30 | Inergy Automotive Systems Res | Method for preparing a hollow element of a fuel system |
| JP2010054061A (en) * | 2008-08-26 | 2010-03-11 | Rinnai Corp | Grill burner |
| CZ305156B6 (en) * | 2013-12-19 | 2015-05-20 | Masarykova Univerzita | Plasma treatment of internal and/or external surface of a hollow, electrically non-conducting body and apparatus for making the same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS57135442A (en) | Magnetic recording medium and its manufacture | |
| ES2096768T3 (en) | APPARATUS FOR FAST TREATMENTS WITH PLASMA AND METHOD. | |
| JPS5730325A (en) | Manufacture of amorphous silicon thin film | |
| JPS56105483A (en) | Dry etching device | |
| JPS5710629A (en) | Plasma treatment of hollow body | |
| JPS55101853A (en) | Method of fabricating comparison electrode with fet | |
| JPS5647572A (en) | Etching method of indium oxide film | |
| JPS6459919A (en) | Coating device | |
| JPS5483971A (en) | Crosslinked olefinic resin film having improved heat sealability | |
| JPS5298475A (en) | Plasma treating apparatus | |
| JPS56166377A (en) | Plasma treating method of hollow body | |
| JPS56156760A (en) | Method and apparatus for forming coat | |
| JPS5477573A (en) | Operating method of plasma treating apparatus | |
| JPS56121629A (en) | Film forming method | |
| JPS5527357A (en) | Treating device for tape and sheet | |
| JPS5689835A (en) | Vapor phase growth apparatus | |
| JPS5547381A (en) | Plasma etching method | |
| JPS5732637A (en) | Dry etching apparatus | |
| JPS5614408A (en) | Manufacture of solid electrolyte | |
| JPS5785972A (en) | Thin film former | |
| JPS5740932A (en) | Device for plasma processing | |
| GB1093815A (en) | Method of and apparatus for surface heating a body by chemical reaction | |
| JPS57211239A (en) | Formation of insulating film | |
| JPS5587439A (en) | Manufacture of semiconductor device | |
| JPS5667925A (en) | Plasma etching method |