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JPS5549014A - Electrode for vibrating element - Google Patents

Electrode for vibrating element

Info

Publication number
JPS5549014A
JPS5549014A JP12294278A JP12294278A JPS5549014A JP S5549014 A JPS5549014 A JP S5549014A JP 12294278 A JP12294278 A JP 12294278A JP 12294278 A JP12294278 A JP 12294278A JP S5549014 A JPS5549014 A JP S5549014A
Authority
JP
Japan
Prior art keywords
film
substrate
molecular
crystal
grown
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12294278A
Other languages
Japanese (ja)
Inventor
Kunihiro Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP12294278A priority Critical patent/JPS5549014A/en
Publication of JPS5549014A publication Critical patent/JPS5549014A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To form a vibrator, mechanical filter and elastic surface-wave element which are excellent in Q value and aging characteristics, by forming an electrode film, great part of which is crystalline and the whole of which is nearly single crystal. CONSTITUTION:In a molecular-beam epitaxy method where an electrode film is obtained, the degree of vacuum inside of bell jar 16 is held between 10<-10> and 10<-11> Torr, ultrahigh vacuum. In this state, component elements 19 and 20 of a crystal film to be formed on substrate are contained in jet cells 17 and 18 which jetting molecular rays out and cells 17 and 18, and substrate 21 are held at adequate temperatures by setting, so that the crystal film of elements 19 and 20 can be grown on substrate 21. At this time, when the crystal film grown on substrate 21 consists of one kind of element, only one jet cell is required. In this way, the molecular- beam epitaxy methods makes use of thin-film growth under ultrahigh vacuum; the thin film is a clean film hardly containing impurities and a film grown under proper conditions is single crystal.
JP12294278A 1978-10-04 1978-10-04 Electrode for vibrating element Pending JPS5549014A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12294278A JPS5549014A (en) 1978-10-04 1978-10-04 Electrode for vibrating element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12294278A JPS5549014A (en) 1978-10-04 1978-10-04 Electrode for vibrating element

Publications (1)

Publication Number Publication Date
JPS5549014A true JPS5549014A (en) 1980-04-08

Family

ID=14848422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12294278A Pending JPS5549014A (en) 1978-10-04 1978-10-04 Electrode for vibrating element

Country Status (1)

Country Link
JP (1) JPS5549014A (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0314307A (en) * 1989-06-13 1991-01-23 Murata Mfg Co Ltd Surface acoustic wave oscillator
JPH0314308A (en) * 1989-06-13 1991-01-23 Murata Mfg Co Ltd Surface acoustic wave filter
JPH0314309A (en) * 1989-06-13 1991-01-23 Murata Mfg Co Ltd Surface acoustic wave device
JPH0314305A (en) * 1989-06-13 1991-01-23 Murata Mfg Co Ltd Manufacture of surface acoustic wave device
JPH0340510A (en) * 1989-07-06 1991-02-21 Murata Mfg Co Ltd Elastic surface wave device
JPH0348511A (en) * 1989-04-14 1991-03-01 Murata Mfg Co Ltd Surface acoustic wave device
US5162690A (en) * 1989-04-14 1992-11-10 Murata Manufacturing Co., Ltd. Surface acoustic wave device
US6316860B1 (en) 1997-09-22 2001-11-13 Tdk Corporation Surface acoustic wave device, and its fabrication process
US6903488B2 (en) 2001-09-21 2005-06-07 Tdk Corporation SAW device and manufacturing method
US7102461B2 (en) 2003-07-28 2006-09-05 Tdk Corporation Surface acoustic wave element, surface acoustic wave device, surface acoustic wave duplexer, and method of manufacturing surface acoustic wave element
US7352114B2 (en) 2003-07-17 2008-04-01 Tdk Corporation Surface acoustic wave element, surface acoustic wave device, surface acoustic wave duplexer, and method of manufacturing surface acoustic wave element

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0348511A (en) * 1989-04-14 1991-03-01 Murata Mfg Co Ltd Surface acoustic wave device
JP2545983B2 (en) * 1989-04-14 1996-10-23 株式会社村田製作所 Surface acoustic wave device
US5162690A (en) * 1989-04-14 1992-11-10 Murata Manufacturing Co., Ltd. Surface acoustic wave device
JPH0314305A (en) * 1989-06-13 1991-01-23 Murata Mfg Co Ltd Manufacture of surface acoustic wave device
JPH0314307A (en) * 1989-06-13 1991-01-23 Murata Mfg Co Ltd Surface acoustic wave oscillator
JPH0314309A (en) * 1989-06-13 1991-01-23 Murata Mfg Co Ltd Surface acoustic wave device
JPH0314308A (en) * 1989-06-13 1991-01-23 Murata Mfg Co Ltd Surface acoustic wave filter
JPH0340510A (en) * 1989-07-06 1991-02-21 Murata Mfg Co Ltd Elastic surface wave device
US6316860B1 (en) 1997-09-22 2001-11-13 Tdk Corporation Surface acoustic wave device, and its fabrication process
US6903488B2 (en) 2001-09-21 2005-06-07 Tdk Corporation SAW device and manufacturing method
US7467447B2 (en) 2001-09-21 2008-12-23 Tdk Corporation Method of manufacturing a SAW device
US7352114B2 (en) 2003-07-17 2008-04-01 Tdk Corporation Surface acoustic wave element, surface acoustic wave device, surface acoustic wave duplexer, and method of manufacturing surface acoustic wave element
US7102461B2 (en) 2003-07-28 2006-09-05 Tdk Corporation Surface acoustic wave element, surface acoustic wave device, surface acoustic wave duplexer, and method of manufacturing surface acoustic wave element

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