JPS5543872A - Insulating gate field effect transistor - Google Patents
Insulating gate field effect transistorInfo
- Publication number
- JPS5543872A JPS5543872A JP11697878A JP11697878A JPS5543872A JP S5543872 A JPS5543872 A JP S5543872A JP 11697878 A JP11697878 A JP 11697878A JP 11697878 A JP11697878 A JP 11697878A JP S5543872 A JPS5543872 A JP S5543872A
- Authority
- JP
- Japan
- Prior art keywords
- base
- oxide film
- drain
- channel region
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005669 field effect Effects 0.000 title 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
Landscapes
- Bipolar Transistors (AREA)
Abstract
PURPOSE:To reduce stray capacitance, by reducing reverse current leakage in the base and the channel region, avoiding contact between source and drain regions, and increasing the dielectric strength of the source region, the drain region and the base. CONSTITUTION:Thick oxide film 11, as insulating film, is formed on the surface of low-resistance P-type Si base 1, and opening A is provided by exposing a part of it. Next, by growing an epitaxial layer over the entire surface of base 1, high-resistance N-type single crystal Si layer 4, which becomes channel region, is formed on opening A, and high-resistance N-type polycrystalline Si layer 12 is formed on the surface of oxide film 11. Then, oxide film 11' is formed on the entire surface; and a window for diffusing drain and source is opened on the surface of channel region 4, which sandwiches channel region 4. Then oxide film is formed on the entire region again, oxide film on specified parts on regions 4, 2 and 3 is removed, and gate oxidation is operated. After this, reverse bias electrode 13 is formed on the back of base 1, together with gate, drain and source electrodes 8, 6 and 7.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11697878A JPS5543872A (en) | 1978-09-22 | 1978-09-22 | Insulating gate field effect transistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11697878A JPS5543872A (en) | 1978-09-22 | 1978-09-22 | Insulating gate field effect transistor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5543872A true JPS5543872A (en) | 1980-03-27 |
Family
ID=14700455
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11697878A Pending JPS5543872A (en) | 1978-09-22 | 1978-09-22 | Insulating gate field effect transistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5543872A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0042552A2 (en) * | 1980-06-16 | 1981-12-30 | Kabushiki Kaisha Toshiba | MOS type semiconductor device |
US5027177A (en) * | 1989-07-24 | 1991-06-25 | Hughes Aircraft Company | Floating base lateral bipolar phototransistor with field effect gate voltage control |
US5294821A (en) * | 1990-10-09 | 1994-03-15 | Seiko Epson Corporation | Thin-film SOI semiconductor device having heavily doped diffusion regions beneath the channels of transistors |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48101887A (en) * | 1972-04-01 | 1973-12-21 |
-
1978
- 1978-09-22 JP JP11697878A patent/JPS5543872A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48101887A (en) * | 1972-04-01 | 1973-12-21 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0042552A2 (en) * | 1980-06-16 | 1981-12-30 | Kabushiki Kaisha Toshiba | MOS type semiconductor device |
US4571609A (en) * | 1980-06-16 | 1986-02-18 | Tokyo Shibaura Denki Kabushiki Kaisha | Stacked MOS device with means to prevent substrate floating |
US5027177A (en) * | 1989-07-24 | 1991-06-25 | Hughes Aircraft Company | Floating base lateral bipolar phototransistor with field effect gate voltage control |
US5294821A (en) * | 1990-10-09 | 1994-03-15 | Seiko Epson Corporation | Thin-film SOI semiconductor device having heavily doped diffusion regions beneath the channels of transistors |
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