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JPS5459191A - Method and apparatus for detection of minute leakage - Google Patents

Method and apparatus for detection of minute leakage

Info

Publication number
JPS5459191A
JPS5459191A JP12455577A JP12455577A JPS5459191A JP S5459191 A JPS5459191 A JP S5459191A JP 12455577 A JP12455577 A JP 12455577A JP 12455577 A JP12455577 A JP 12455577A JP S5459191 A JPS5459191 A JP S5459191A
Authority
JP
Japan
Prior art keywords
gas
leakage
detection
detector
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12455577A
Other languages
Japanese (ja)
Inventor
Hiroshi Yamaji
Takashi Noguchi
Fumio Ando
Hiroshi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12455577A priority Critical patent/JPS5459191A/en
Publication of JPS5459191A publication Critical patent/JPS5459191A/en
Pending legal-status Critical Current

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  • Examining Or Testing Airtightness (AREA)

Abstract

PURPOSE: To make possible continuous and accurate detection of the presence or not of minute leakage by exhausting the inside gas of the objects being tested, detecting and storing the gas with a leakage detector, passing the objects in the gas then again detecting and storing the inside gas and comparing and operating both detection values.
CONSTITUTION: The object being tested 1 is conveyed by an overhead conveyor in the arrow 10 direction. Before it enters the tunnel inside of a He gas chamber 4, it is evacuated of the gas in a vacuum pump 6 and coupler mechanism 11a. The test object 1 is connected to a He detector 7 via the mechanism 11a to be measured of its inside gas. The detection value is stored in a memory artithemtic unit 9 via A/C converter 8. After the test object 1 is passed through the He gas 5 in the chamber 4, it is again measured with the detector 7 through the mechanism 11c and the detection value is stored in the unit 9. The first measurement value having been dtected before and the second measurement value after the passage through the gas are compared and operated with the unit 9 and the presence or not of leakage is judged, whereby the presence or not of leakage may be accurately detected while a plurality of test objects are being continuously flowed
COPYRIGHT: (C)1979,JPO&Japio
JP12455577A 1977-10-19 1977-10-19 Method and apparatus for detection of minute leakage Pending JPS5459191A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12455577A JPS5459191A (en) 1977-10-19 1977-10-19 Method and apparatus for detection of minute leakage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12455577A JPS5459191A (en) 1977-10-19 1977-10-19 Method and apparatus for detection of minute leakage

Publications (1)

Publication Number Publication Date
JPS5459191A true JPS5459191A (en) 1979-05-12

Family

ID=14888371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12455577A Pending JPS5459191A (en) 1977-10-19 1977-10-19 Method and apparatus for detection of minute leakage

Country Status (1)

Country Link
JP (1) JPS5459191A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57137835A (en) * 1981-02-20 1982-08-25 Hitachi Ltd Leakage detector
US5388446A (en) * 1993-10-18 1995-02-14 The United States Of America As Represented By The United States Department Of Energy Method and apparatus for container leakage testing
WO1995027193A1 (en) * 1994-04-04 1995-10-12 Otsuka Pharmaceutical Factory, Inc. Pinhole detector
US5861547A (en) * 1996-08-13 1999-01-19 Daiwa Can Company Apparatus for and method of testing leakage of hollow member

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57137835A (en) * 1981-02-20 1982-08-25 Hitachi Ltd Leakage detector
US5388446A (en) * 1993-10-18 1995-02-14 The United States Of America As Represented By The United States Department Of Energy Method and apparatus for container leakage testing
WO1995027193A1 (en) * 1994-04-04 1995-10-12 Otsuka Pharmaceutical Factory, Inc. Pinhole detector
US5633454A (en) * 1994-04-04 1997-05-27 Otsuka Pharmaceutical Factory, Inc. Pinhole inspecting apparatus
AU688483B2 (en) * 1994-04-04 1998-03-12 Otsuka Pharmaceutical Factory, Inc. Pinhole detector
US5861547A (en) * 1996-08-13 1999-01-19 Daiwa Can Company Apparatus for and method of testing leakage of hollow member

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