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JPS5397781A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5397781A
JPS5397781A JP1275777A JP1275777A JPS5397781A JP S5397781 A JPS5397781 A JP S5397781A JP 1275777 A JP1275777 A JP 1275777A JP 1275777 A JP1275777 A JP 1275777A JP S5397781 A JPS5397781 A JP S5397781A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
gate
eletrodes
junctions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1275777A
Other languages
Japanese (ja)
Other versions
JPS611911B2 (en
Inventor
Yoji Yamanaka
Toshio Wada
Tsunehiro Taguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1275777A priority Critical patent/JPS5397781A/en
Publication of JPS5397781A publication Critical patent/JPS5397781A/en
Publication of JPS611911B2 publication Critical patent/JPS611911B2/ja
Granted legal-status Critical Current

Links

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  • Weting (AREA)

Abstract

PURPOSE: To make shallow pn junctions and gate electrodes of high accuracy by covering source and drain regions with Si3 N4, and diffusing an impurity at a high concentration to poly-Si gate eletrodes.
COPYRIGHT: (C)1978,JPO&Japio
JP1275777A 1977-02-07 1977-02-07 Production of semiconductor device Granted JPS5397781A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1275777A JPS5397781A (en) 1977-02-07 1977-02-07 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1275777A JPS5397781A (en) 1977-02-07 1977-02-07 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5397781A true JPS5397781A (en) 1978-08-26
JPS611911B2 JPS611911B2 (en) 1986-01-21

Family

ID=11814271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1275777A Granted JPS5397781A (en) 1977-02-07 1977-02-07 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5397781A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0265274A (en) * 1988-08-31 1990-03-05 Sony Corp Thin film transistor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0265274A (en) * 1988-08-31 1990-03-05 Sony Corp Thin film transistor

Also Published As

Publication number Publication date
JPS611911B2 (en) 1986-01-21

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