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JPS5375869A - Semiconductor wafer exposure apparatus - Google Patents

Semiconductor wafer exposure apparatus

Info

Publication number
JPS5375869A
JPS5375869A JP15239076A JP15239076A JPS5375869A JP S5375869 A JPS5375869 A JP S5375869A JP 15239076 A JP15239076 A JP 15239076A JP 15239076 A JP15239076 A JP 15239076A JP S5375869 A JPS5375869 A JP S5375869A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
exposure apparatus
wafer exposure
wafer
prevent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15239076A
Other languages
Japanese (ja)
Inventor
Minoru Okamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15239076A priority Critical patent/JPS5375869A/en
Publication of JPS5375869A publication Critical patent/JPS5375869A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To prevent the securing of a mask and a wafer after exposure and prevent the production of flaws by providing vacuum sucking holes respectively exclusive for wafer olding to both of a wafer holding part and a fixing seat for fixing this in a specified state.
COPYRIGHT: (C)1978,JPO&Japio
JP15239076A 1976-12-17 1976-12-17 Semiconductor wafer exposure apparatus Pending JPS5375869A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15239076A JPS5375869A (en) 1976-12-17 1976-12-17 Semiconductor wafer exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15239076A JPS5375869A (en) 1976-12-17 1976-12-17 Semiconductor wafer exposure apparatus

Publications (1)

Publication Number Publication Date
JPS5375869A true JPS5375869A (en) 1978-07-05

Family

ID=15539459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15239076A Pending JPS5375869A (en) 1976-12-17 1976-12-17 Semiconductor wafer exposure apparatus

Country Status (1)

Country Link
JP (1) JPS5375869A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57162432A (en) * 1981-03-31 1982-10-06 Toshiba Corp Mound crushing unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57162432A (en) * 1981-03-31 1982-10-06 Toshiba Corp Mound crushing unit

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