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JPS5352370A - Wafer susceptor - Google Patents

Wafer susceptor

Info

Publication number
JPS5352370A
JPS5352370A JP12721776A JP12721776A JPS5352370A JP S5352370 A JPS5352370 A JP S5352370A JP 12721776 A JP12721776 A JP 12721776A JP 12721776 A JP12721776 A JP 12721776A JP S5352370 A JPS5352370 A JP S5352370A
Authority
JP
Japan
Prior art keywords
wafer susceptor
wafer
susceptor
fixed position
air bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12721776A
Other languages
Japanese (ja)
Inventor
Tetsuya Mizutani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12721776A priority Critical patent/JPS5352370A/en
Publication of JPS5352370A publication Critical patent/JPS5352370A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: A wafer susceptor capable of positioning wafers in a fixed position is obtained without causing air bearing phenomena.
COPYRIGHT: (C)1978,JPO&Japio
JP12721776A 1976-10-25 1976-10-25 Wafer susceptor Pending JPS5352370A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12721776A JPS5352370A (en) 1976-10-25 1976-10-25 Wafer susceptor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12721776A JPS5352370A (en) 1976-10-25 1976-10-25 Wafer susceptor

Publications (1)

Publication Number Publication Date
JPS5352370A true JPS5352370A (en) 1978-05-12

Family

ID=14954618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12721776A Pending JPS5352370A (en) 1976-10-25 1976-10-25 Wafer susceptor

Country Status (1)

Country Link
JP (1) JPS5352370A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6066417A (en) * 1983-09-22 1985-04-16 Toshiba Corp Vapor growth device
JPS62178528U (en) * 1986-04-30 1987-11-12
JPS6357737U (en) * 1986-10-02 1988-04-18
JPS6489318A (en) * 1987-09-29 1989-04-03 Nec Corp Vapor growth susceptor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6066417A (en) * 1983-09-22 1985-04-16 Toshiba Corp Vapor growth device
JPS62178528U (en) * 1986-04-30 1987-11-12
JPS6357737U (en) * 1986-10-02 1988-04-18
JPS6489318A (en) * 1987-09-29 1989-04-03 Nec Corp Vapor growth susceptor

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