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JPS5264878A - Etching of semiconductor wiring - Google Patents

Etching of semiconductor wiring

Info

Publication number
JPS5264878A
JPS5264878A JP14072275A JP14072275A JPS5264878A JP S5264878 A JPS5264878 A JP S5264878A JP 14072275 A JP14072275 A JP 14072275A JP 14072275 A JP14072275 A JP 14072275A JP S5264878 A JPS5264878 A JP S5264878A
Authority
JP
Japan
Prior art keywords
etching
semiconductor wiring
wiring
tyoe
hydroxylalkyl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14072275A
Other languages
Japanese (ja)
Other versions
JPS5653211B2 (en
Inventor
Hisashi Muraoka
Masafumi Asano
Taizo Ohashi
Yuzo Shimazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14072275A priority Critical patent/JPS5264878A/en
Priority to GB35164/76A priority patent/GB1573206A/en
Priority to GB190479A priority patent/GB1573208A/en
Priority to NLAANVRAGE7609602,A priority patent/NL185116C/en
Priority to DE2639004A priority patent/DE2639004C2/en
Publication of JPS5264878A publication Critical patent/JPS5264878A/en
Priority to US05/927,139 priority patent/US4239661A/en
Priority to US06/213,317 priority patent/US4339340A/en
Publication of JPS5653211B2 publication Critical patent/JPS5653211B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To effectively perform degreasing and removal of inorganic contaminations by etching the wiring substance formed by coating a negative tyoe photosensitive resin and exposed by exposure and developing in desired portions, with an aqueous trialkyl (hydroxylalkyl) ammonium hydroxide solution.
COPYRIGHT: (C)1977,JPO&Japio
JP14072275A 1975-11-26 1975-11-26 Etching of semiconductor wiring Granted JPS5264878A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP14072275A JPS5264878A (en) 1975-11-26 1975-11-26 Etching of semiconductor wiring
GB35164/76A GB1573206A (en) 1975-11-26 1976-08-24 Method of trating surfaces of intermediate products obtained in the manufacture of semiconductor devices
GB190479A GB1573208A (en) 1975-11-26 1976-08-24 Surface treating agent adapted for intermediate products of a semiconductor device
NLAANVRAGE7609602,A NL185116C (en) 1975-11-26 1976-08-30 METHOD FOR TREATING SURFACES OF INTERMEDIATES IN THE MANUFACTURE OF SEMICONDUCTORS
DE2639004A DE2639004C2 (en) 1975-11-26 1976-08-30 Aqueous solution for the surface treatment of intermediate products in the manufacture of semiconductor components
US05/927,139 US4239661A (en) 1975-11-26 1978-07-21 Surface-treating agent adapted for intermediate products of a semiconductor device
US06/213,317 US4339340A (en) 1975-11-26 1980-12-05 Surface-treating agent adapted for intermediate products of a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14072275A JPS5264878A (en) 1975-11-26 1975-11-26 Etching of semiconductor wiring

Publications (2)

Publication Number Publication Date
JPS5264878A true JPS5264878A (en) 1977-05-28
JPS5653211B2 JPS5653211B2 (en) 1981-12-17

Family

ID=15275174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14072275A Granted JPS5264878A (en) 1975-11-26 1975-11-26 Etching of semiconductor wiring

Country Status (1)

Country Link
JP (1) JPS5264878A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55166929A (en) * 1979-06-15 1980-12-26 Fujitsu Ltd Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55166929A (en) * 1979-06-15 1980-12-26 Fujitsu Ltd Manufacture of semiconductor device
JPS6227537B2 (en) * 1979-06-15 1987-06-15 Fujitsu Ltd

Also Published As

Publication number Publication date
JPS5653211B2 (en) 1981-12-17

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