JPH0325994A - Hybrid integrated circuit - Google Patents

Abstract

PURPOSE:To uniformly measure a resistance value without influence of a laser cutting direction by forming cutouts in parallel with a connecting face with a resistor in regions of electrodes connected to two opposite side faces of thin film and thick film resistors, and forming a slender coupler at the part of the cutout. CONSTITUTION:A cutout is formed in parallel with the connecting face of a resistor 2 in a region of an electrode 1, and a slender coupler 4 is formed of the electrode 1 at the cutout. (a)-(f) in the pattern of the electrode 1 indicate specific terminal positions at the time of measurement of a resistance value. Measured resistance values between a and d, a and e, a and f, similarly between b and d, b and 3, b and f, c and d, c and e, c and f are measured under the same conditions by inputting and outputting measured currents at the coupler 4 of the pattern of the electrode 1 to be uniform.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to hybrid integrated circuits, and more particularly to hybrid integrated circuits having two thin-film and thick-film resistors.

[Conventional technology]

Conventionally, in this type of thin film and thick film resistors, as shown in FIG. 8, the electrode body 1 was constructed from the entire end face of the resistor 2, and the wide electrode body width was used as the electrode body 1 for measurement.

Therefore, when measuring the resistance value of the resistor 2, the current is transmitted in the shortest direction between the measurement terminals, resulting in an error in the resistance value depending on the position of the measurement terminals.

[Problem to be solved by the invention]

In the shape of a thin film or thick film resistor, which is used as a measuring electrode with the width of the electrode body across both end faces of the resistor pattern described above,
There is a drawback that depending on the measurement position, an error occurs in the way the current flows between the measurement terminals, resulting in a measurement error in the resistance measurement value.

Furthermore, there is also a drawback that a resistance value measurement error occurs depending on the laser cutting direction depending on the measurement position during laser trimming.

SUMMARY OF THE INVENTION An object of the present invention is to provide a hybrid integrated circuit having thin film and thick film resistors that does not cause measurement errors in resistance values due to measurement positions of electrode bodies or laser cutting directions.

[Means to solve the problem]

The present invention provides a hybrid integrated circuit having a resistor and an electrode body connected to two opposite sides of the resistor.
A notch is provided in each region of the two electrode bodies in parallel to a connection surface with the resistor, and a thin connecting portion is formed in a portion of each of the notches.

〔Example〕

Next, embodiments of the present invention will be described with reference to the drawings.

1 to 4 are plan views showing thin film and thick film resistor patterns according to a first embodiment of the present invention.

In the first embodiment, as shown in FIGS. 1 to 4, a notch is provided in the region of the electrode body 1 parallel to the connection surface with the resistor 2, and the electrode body This is an example of a thin connecting part 4. A to f in the pattern of the electrode body 1 indicate the measurement terminal positions when measuring the resistance value, a to d,, a to f.
e, a-f, similarly, b-d, b-e,
b ~ f, c ~ d, c ~ e, c ~ f
The measured resistance value between the two electrodes is uniform because the flow of the measurement current is input and output from the thin connection part 4 of the electrode body 1 pattern, and the measurement is performed under the same conditions.

5 to 7 are plan views showing thin film and thick film resistor patterns according to a second embodiment of the present invention.

In the second embodiment, as shown in FIGS. 5 to 7, a notch is provided in the region of the electrode body in parallel with the resistor 2, and a thin connecting portion 14 is formed in the resistor 2. be.

The effects include a to d, a to e, a to f in the electrode body, as well as b to d, L+ to e, b to f,
There is an advantage that the measured resistance values between c and d, c and e, and c and f can be measured uniformly as in the first embodiment.

〔Effect of the invention〕

As explained above, in the present invention, in thin film and thick film resistor patterns, by forming a thin connecting part on the electrode body of the resistor to be measured to make the flow of measurement current in a fixed direction. This has the effect that uniform resistance value measurement can be easily performed without being affected by the measurement position within the electrode body or the cut state of the cut direction of laser trimming.

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[Brief explanation of drawings]

1 to 4 are plan views showing thin film and thick film resistor patterns according to the first embodiment of the present invention, and FIGS. 5 to 7 are plan views showing thin film and thick film resistor patterns according to the second embodiment of the present invention. FIG. 8 is a plan view showing an example of a conventional thin film and thick film resistor pattern. 1... Electrode body, 2... Resistor, 3... Laser cutting position, 11.14-... Thin connecting part, a, b, c,
d, e, f...terminal positions for resistance measurement.

Claims (1)

[Claims] In a hybrid integrated circuit having a resistor and an electrode body connected to two opposing sides of the resistor, in each region of the two electrode bodies, there is a wire parallel to the connection surface with the resistor. 1. A hybrid integrated circuit characterized in that a notch is provided and a thin connecting portion is formed in a part of each of the notches.