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JP7354534B2 - Probe pins and inspection fixtures - Google Patents

Probe pins and inspection fixtures Download PDF

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Publication number
JP7354534B2
JP7354534B2 JP2018210797A JP2018210797A JP7354534B2 JP 7354534 B2 JP7354534 B2 JP 7354534B2 JP 2018210797 A JP2018210797 A JP 2018210797A JP 2018210797 A JP2018210797 A JP 2018210797A JP 7354534 B2 JP7354534 B2 JP 7354534B2
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Japan
Prior art keywords
probe pin
elastic
accommodating
contact
probe
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JP2020076666A (en
Inventor
直哉 笹野
宏真 寺西
貴浩 酒井
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Omron Corp
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Omron Corp
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Priority to JP2018210797A priority Critical patent/JP7354534B2/en
Priority to CN201980071406.XA priority patent/CN112955754B/en
Priority to KR1020217011321A priority patent/KR102600799B1/en
Priority to PCT/JP2019/041489 priority patent/WO2020095679A1/en
Priority to TW108139674A priority patent/TWI708441B/en
Publication of JP2020076666A publication Critical patent/JP2020076666A/en
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Publication of JP7354534B2 publication Critical patent/JP7354534B2/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733Geometry aspects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716Elastic
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02Contact members
    • H01R13/22Contacts for co-operating by abutting
    • H01R13/24Contacts for co-operating by abutting resilient; resiliently-mounted

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)

Description

本開示は、プローブピンおよび検査治具に関する。 The present disclosure relates to probe pins and inspection jigs.

電子部品モジュールでは、一般に、その製造工程において、導通検査および動作特性検査等が行われる。これらの検査は、プローブピンを用いて、電子部品モジュールに設置されている本体基板に接続するための端子と、検査装置の端子とを接続することにより行われる。 Electronic component modules are generally subjected to continuity tests, operating characteristic tests, and the like during their manufacturing process. These tests are performed by using probe pins to connect terminals for connection to the main body board installed in the electronic component module and terminals of the testing device.

このようなプローブピンとしては、特許文献1に記載されたものがある。このプローブピンは、電子部品の電極端子および被接続電子部品の電極端子に対してそれぞれ接触可能な一対のコンタクトと、一対のコンタクト間に介在して一対のコンタクトを接続する蛇行部とを備えている。前記プローブピンでは、一対のコンタクトを結んだ配列方向に沿って蛇行部が伸縮し、各コンタクトがこの配列方向に沿って往復移動するように構成されている。 As such a probe pin, there is one described in Patent Document 1. The probe pin includes a pair of contacts that can respectively contact electrode terminals of an electronic component and an electrode terminal of a connected electronic component, and a meandering portion interposed between the pair of contacts and connecting the pair of contacts. There is. The probe pin is configured such that the meandering portion expands and contracts along the arrangement direction in which the pair of contacts are connected, and each contact moves back and forth along this arrangement direction.

特開2002-134202号公報Japanese Patent Application Publication No. 2002-134202

ところで、近年の検査装置および検査対象物の多様化に伴って、検査装置および検査対象物の中には、電線の導体部を介してプローブピンに接続するように構成されたものがある。 By the way, with the diversification of inspection devices and objects to be inspected in recent years, some inspection devices and objects to be inspected are configured to be connected to a probe pin via a conductor portion of an electric wire.

前記プローブピンは、各コンタクトが電磁部品の電極端子および被接続電子部品の電極端子に対して配列方向で接触することで、電磁部品と被接続電子部品とが接続されるように構成されている。このため、例えば、電磁部品および被接続電子部品の一方または両方が、電線の導体部を介さなければプローブピンに接続することができないように構成されていた場合、前記プローブピンを用いると、電磁部品と被接続電子部品と接続することができない場合がある。 The probe pin is configured such that each contact contacts an electrode terminal of the electromagnetic component and an electrode terminal of the connected electronic component in the arrangement direction, thereby connecting the electromagnetic component and the connected electronic component. . For this reason, for example, if one or both of the electromagnetic component and the connected electronic component are configured so that they cannot be connected to the probe pin without using the conductor part of the electric wire, using the probe pin will cause the electromagnetic It may not be possible to connect the component to the connected electronic component.

本開示は、電線の導体部を接続可能なプローブピン、および、このプローブピンを備えた検査治具を提供することを目的とする。 An object of the present disclosure is to provide a probe pin to which a conductor portion of an electric wire can be connected, and an inspection jig equipped with the probe pin.

本開示の一例のプローブピンは、
第1方向に沿って弾性変形可能な弾性部と、
前記弾性部の前記第1方向の一端に設けられ、電線の導体部を接続可能な接続部と
を備える。
A probe pin according to an example of the present disclosure includes:
an elastic part that is elastically deformable along the first direction;
and a connecting portion provided at one end of the elastic portion in the first direction and to which a conductor portion of an electric wire can be connected.

また、本開示の一例の検査治具は、
前記プローブピンと、
前記接続部が外部に露出するように前記プローブピンが収容された収容部を有するハウジングと
を備える。
Further, an inspection jig according to an example of the present disclosure includes:
the probe pin;
and a housing having a housing portion in which the probe pin is housed so that the connection portion is exposed to the outside.

前記プローブピンによれば、第1方向に沿って弾性変形可能な弾性部と、この弾性部の第1方向の一端に設けられて電線の導体部を接続可能な接続部とを備えている。この接続部により、電線の導体部を接続可能なプローブピンを実現できる。 The probe pin includes an elastic part that can be elastically deformed along the first direction, and a connecting part that is provided at one end of the elastic part in the first direction and can be connected to the conductor part of the electric wire. With this connection part, a probe pin to which a conductor part of an electric wire can be connected can be realized.

前記検査治具によれば、前記プローブピンにより、検査装置および検査対象物の一方または両方が、電線の導体部を介さなければ接続することができないように構成されていたとしても、検査装置および検査対象物を接続可能な検査治具を実現できる。 According to the inspection jig, even if the probe pin is configured such that one or both of the inspection device and the object to be inspected cannot be connected to each other except through the conductor portion of the electric wire, the inspection device and An inspection jig to which an object to be inspected can be connected can be realized.

本開示の第1実施形態の検査治具を示す斜視図。FIG. 1 is a perspective view showing an inspection jig according to a first embodiment of the present disclosure. 図1のII-II線に沿った断面図。A sectional view taken along the II-II line in FIG. 1. 本開示の第1実施形態のプローブピンを示す斜視図。FIG. 1 is a perspective view showing a probe pin according to a first embodiment of the present disclosure. 図3のプローブピンの平面図。FIG. 4 is a plan view of the probe pin in FIG. 3; 図1の検査治具の第1の変形例を示す平面図。FIG. 2 is a plan view showing a first modification of the inspection jig shown in FIG. 1; 図1の検査治具の第2の変形例を示す平面図。FIG. 2 is a plan view showing a second modification of the inspection jig shown in FIG. 1; 本開示の第2実施形態の検査治具を示す斜視図。FIG. 7 is a perspective view showing an inspection jig according to a second embodiment of the present disclosure. 図7のVIII-VIII線に沿った断面図。A sectional view taken along the line VIII-VIII in FIG. 7. 本開示の第2実施形態のプローブピンを示す斜視図。FIG. 7 is a perspective view showing a probe pin according to a second embodiment of the present disclosure. 図9のプローブピンの平面図。10 is a plan view of the probe pin of FIG. 9. FIG.

以下、本開示の一例を添付図面に従って説明する。なお、以下の説明では、必要に応じて特定の方向あるいは位置を示す用語(例えば、「上」、「下」、「右」、「左」を含む用語)を用いるが、それらの用語の使用は図面を参照した本開示の理解を容易にするためであって、それらの用語の意味によって本開示の技術的範囲が限定されるものではない。また、以下の説明は、本質的に例示に過ぎず、本開示、その適用物、あるいは、その用途を制限することを意図するものではない。さらに、図面は模式的なものであり、各寸法の比率等は現実のものとは必ずしも合致していない。 An example of the present disclosure will be described below with reference to the accompanying drawings. In the following explanation, terms indicating specific directions or positions (for example, terms including "top," "bottom," "right," and "left") will be used as necessary. These terms are intended to facilitate understanding of the present disclosure with reference to the drawings, and the technical scope of the present disclosure is not limited by the meanings of these terms. Further, the following description is essentially only an example, and is not intended to limit the present disclosure, its applications, or its uses. Furthermore, the drawings are schematic, and the ratio of each dimension does not necessarily match the reality.

(第1実施形態)
本開示の第1実施形態のプローブピン10は、例えば、図1および図2に示すように、ハウジング100に収容された状態で使用され、ハウジング100と共に検査治具1を構成する。この検査治具1には、一例として、細長い薄板状の導電性のプローブピン10が複数収容されている。
(First embodiment)
The probe pin 10 according to the first embodiment of the present disclosure is used while being housed in a housing 100, for example, as shown in FIGS. 1 and 2, and together with the housing 100 constitutes an inspection jig 1. As an example, the inspection jig 1 accommodates a plurality of elongated thin plate-shaped conductive probe pins 10.

ハウジング100は、図1に示すように、一例として、略四角柱状を有している。このハウジング100の内部には、図2に示すように、後述するプローブピン10の接続部30がハウジング100の外部に露出した状態でプローブピン10を収容可能な収容部110が設けられている。各収容部110は、第1方向(すなわち、Y方向)に沿って延びていると共に、収容されたプローブピン10の板厚方向(すなわち、X方向)に間隔を空けて並んで配置されている。第1実施形態では、収容されたプローブピン10の板厚方向に並んで配置された4つの収容部110で構成された列が、4つの収容部110の列の配列方向に直交する方向(すなわち、Z方向)に間隔を空けて2つ設けられている。 As shown in FIG. 1, the housing 100 has, for example, a substantially square column shape. As shown in FIG. 2, inside the housing 100, there is provided an accommodating part 110 that can accommodate the probe pin 10 with a connection part 30 of the probe pin 10 (described later) exposed to the outside of the housing 100. Each accommodating part 110 extends along the first direction (i.e., the Y direction), and is arranged side by side at intervals in the thickness direction of the accommodated probe pin 10 (i.e., the X direction). . In the first embodiment, a row composed of four accommodating parts 110 arranged in the thickness direction of the housed probe pin 10 is arranged in a direction perpendicular to the arrangement direction of the row of four accommodating parts 110 (i.e. , Z direction) with an interval between them.

各収容部110の第1方向の両端部には、それぞれ第1開口部111および第2開口部112が設けられている。第1開口部111は、ハウジング100のY方向に相対する一対の面の一方である第1面101に開口している。この第1開口部111を介して、プローブピン10の接続部30がハウジング100の外部に露出している。 A first opening 111 and a second opening 112 are provided at both ends of each accommodating portion 110 in the first direction, respectively. The first opening 111 opens in the first surface 101, which is one of a pair of surfaces of the housing 100 facing each other in the Y direction. The connecting portion 30 of the probe pin 10 is exposed to the outside of the housing 100 through the first opening 111 .

また、ハウジング100の内部には、Y方向における第1面101の反対側の第2面102からY方向に沿って延びる端子穴120が設けられている。この端子穴120の底面121には、第2開口部112が開口している。この第2開口部112を介して、後述するプローブピン10の接触部40が、端子穴120の内部に向かって突出して、例えば、端子穴120に挿入された検査装置の接続端子300(図4参照)に接触可能に配置されている。 Further, inside the housing 100, a terminal hole 120 is provided that extends along the Y direction from the second surface 102 opposite to the first surface 101 in the Y direction. A second opening 112 is opened in the bottom surface 121 of this terminal hole 120 . Through this second opening 112, a contact portion 40 of the probe pin 10, which will be described later, protrudes toward the inside of the terminal hole 120. (see).

各プローブピン10は、図3に示すように、板状で、Y方向(第1方向の一例)に沿って弾性変形可能な弾性部20と、この弾性部20のY方向の両端にそれぞれ設けられた接続部30および接触部40とを備えている。各プローブピンは、例えば、電鋳法で形成され、弾性部20、接続部30および接触部40が、Y方向に沿って直列的に配置されかつ一体に構成されている。 As shown in FIG. 3, each probe pin 10 is plate-shaped and includes an elastic part 20 that can be elastically deformed along the Y direction (an example of a first direction), and is provided at both ends of the elastic part 20 in the Y direction. A connecting portion 30 and a contact portion 40 are provided. Each probe pin is formed, for example, by electroforming, and has an elastic part 20, a connecting part 30, and a contact part 40 arranged in series along the Y direction and integrally configured.

弾性部20は、図4に示すように、相互に隙間を空けて配置された複数の帯状弾性片(第1実施形態では、4つの帯状弾性片)21、22、23、24を有している。各帯状弾性片21、22、23、24は、図に示すように、細長い帯状で、接続部30および接触部40にそれぞれ接続された2つの直線部201、202と、2つの直線部201、202に接続された1つの湾曲部203とを有している。各帯状弾性片21、22、23、24は、一例として、略同一の断面形状を有している。
As shown in FIG. 4, the elastic section 20 includes a plurality of elastic band pieces (four elastic band pieces in the first embodiment) 21, 22, 23, and 24 arranged with gaps between them. There is. As shown in FIG . 4 , each band-shaped elastic piece 21, 22, 23, 24 has an elongated band shape, and includes two straight parts 201, 202 connected to the connecting part 30 and the contact part 40, respectively, and two straight parts 201. , 202. For example, each of the band-shaped elastic pieces 21, 22, 23, and 24 has substantially the same cross-sectional shape.

接続部30は、図4に示すように、電線の導体部200を接続可能に構成されている。詳しくは、接続部30は、Y方向に延びる本体部31と、この本体部31のY方向の他端から第1方向(すなわち、Y方向)に沿って延びて相互に離れる方向(すなわち、Z方向)に弾性変形可能な一対の弾性挟持片32、33とを有している。本体部31は、Y方向の一端が弾性部20に接続されている。各弾性挟持片32、33は、第1方向に直交する第2方向(すなわち、Z方向)に相互に隙間34を空けて配置されている。この隙間34に電線の導体部200を挿入することで、電線の導体部200が各弾性挟持片32、33によって挟持される。すなわち、接続部30は、電線の導体部200を挟持可能な一対の弾性挟持片32、33を有している。 As shown in FIG. 4, the connecting portion 30 is configured to be able to connect a conductor portion 200 of an electric wire. Specifically, the connecting portion 30 includes a main body portion 31 extending in the Y direction, and a direction extending from the other end of the main body portion 31 in the Y direction along the first direction (i.e., the Y direction) and away from each other (i.e., the Z direction). It has a pair of elastic clamping pieces 32 and 33 that can be elastically deformed in the direction). The main body portion 31 is connected to the elastic portion 20 at one end in the Y direction. The elastic clamping pieces 32 and 33 are arranged with a gap 34 between them in a second direction (namely, the Z direction) perpendicular to the first direction. By inserting the conductor portion 200 of the electric wire into this gap 34, the conductor portion 200 of the electric wire is held between the elastic holding pieces 32 and 33. That is, the connecting part 30 has a pair of elastic clamping pieces 32 and 33 that can clamp the conductor part 200 of the electric wire.

また、接続部30は、接続部30をその板厚方向に貫通する略C字状の貫通孔36を有している。隙間34の本体部31側の端部341は、板厚方向(すなわち、X方向)から見て、略円形状を有している。この隙間34の本体部31側の端部341まわりに、貫通孔36が配置されている。この貫通孔36により、各弾性挟持片32、33のZ方向にける弾性変形を容易にしている。 Further, the connecting portion 30 has a substantially C-shaped through hole 36 that passes through the connecting portion 30 in the thickness direction thereof. An end portion 341 of the gap 34 on the main body portion 31 side has a substantially circular shape when viewed from the plate thickness direction (namely, the X direction). A through hole 36 is arranged around an end 341 of this gap 34 on the main body 31 side. This through hole 36 facilitates elastic deformation of each elastic clamping piece 32, 33 in the Z direction.

接触部40は、図4に示すように、Y方向に延びると共にY方向の一端が弾性部20に接続された本体部41と、この本体部41のY方向の他端からY方向に延びて相互に離れる方向(すなわち、Z方向)に撓み可能な一対の脚部42,43と、検査対象物の凸接点に接触可能に一対の脚部42,43の先端に配置された一対の接点部421,431とを有している。各脚部42,43の相互に対向する対向面には、ストッパ44がそれぞれ設けられている。各ストッパ44は、各脚部42,43の対向面から互いに接近する方向に突出している。このストッパ44により、例えば、検査装置の接続端子300の過剰挿入を防止することができる。 As shown in FIG. 4, the contact portion 40 includes a main body portion 41 extending in the Y direction and connected to the elastic portion 20 at one end in the Y direction, and a main body portion 41 extending in the Y direction from the other end of the main body portion 41 in the Y direction. A pair of legs 42, 43 that can be bent in a direction away from each other (that is, in the Z direction), and a pair of contact parts arranged at the tips of the pair of legs 42, 43 so as to be able to contact the convex contact of the object to be inspected. 421, 431. A stopper 44 is provided on each of the opposing surfaces of the legs 42 and 43 that face each other. Each stopper 44 protrudes from the opposing surface of each leg 42, 43 in a direction toward each other. This stopper 44 can prevent, for example, excessive insertion of the connection terminal 300 of the inspection device.

また、接続部30および接触部40には、それぞれ支持部50が設けられている。各支持部50は、本体部31、41からZ方向に延びており、図2に示すように、プローブピン10がハウジング100の収容部110に収容されたときに、収容部110の内周面に当接するように配置されている。すなわち、各支持部50によって、プローブピン10が収容部110に保持される。 Further, the connecting portion 30 and the contact portion 40 are each provided with a supporting portion 50 . Each support part 50 extends in the Z direction from the main body parts 31 and 41, and as shown in FIG. 2, when the probe pin 10 is accommodated in the accommodation part 110 of the housing 100, It is arranged so that it comes into contact with. That is, the probe pin 10 is held in the accommodating part 110 by each support part 50.

第1実施形態のプローブピン10によれば、Y方向に沿って弾性変形可能な弾性部20と、この弾性部20のY方向の一端に設けられて電線の導体部200を接続可能な接続部30とを備えている。この接続部30により、電線の導体部200を接続可能なプローブピン10を実現できる。 According to the probe pin 10 of the first embodiment, the elastic part 20 is elastically deformable along the Y direction, and the connecting part is provided at one end of the elastic part 20 in the Y direction to which the conductor part 200 of the electric wire can be connected. It is equipped with 30. This connecting portion 30 makes it possible to realize the probe pin 10 to which the conductor portion 200 of the electric wire can be connected.

第1実施形態では、接続部30は、Y方向に沿って延びると共に、相互に離れる方向に弾性変形して電線の導体部200を挟持可能な一対の弾性挟持片32、33を有している。一対の弾性挟持片32、33により、電線の導体部200を挟持することができるので、電線の導体部200を圧着により接続可能なプローブピン10を実現できる。 In the first embodiment, the connecting portion 30 extends along the Y direction, and has a pair of elastic clamping pieces 32 and 33 that can be elastically deformed in a direction away from each other and can clamp the conductor portion 200 of the electric wire. . Since the pair of elastic clamping pieces 32 and 33 can clamp the conductor portion 200 of the electric wire, it is possible to realize the probe pin 10 to which the conductor portion 200 of the electric wire can be connected by crimping.

また、検査治具1によれば、プローブピン10により、検査装置および検査対象物の一方または両方が、電線の導体部200を介さなければ接続することができないように構成されていたとしても、検査装置および検査対象物を接続可能な検査治具1を実現できる。 Further, according to the inspection jig 1, even if the probe pin 10 is configured such that one or both of the inspection device and the inspection target cannot be connected to each other without using the conductor portion 200 of the electric wire, It is possible to realize an inspection jig 1 to which an inspection device and an object to be inspected can be connected.

なお、ハウジング100の各収容部110に収容されるプローブピン10は、1つに限らず、複数であってもよい。例えば、図5に示すように、各収容部110には、複数のプローブピン10(図5では、3つのプローブピン10)が相互に接触した状態で板厚方向に積層され、1つの電線の導体部200が接続されるプローブピン積層体2を収容することができる。このように、プローブピン積層体2を用いることで、例えば、1つのプローブピン10が収容保持された検査治具1と比較して、大きな電流を流すことができる検査治具1を得ることができる。 Note that the number of probe pins 10 accommodated in each accommodating portion 110 of the housing 100 is not limited to one, and may be plural. For example, as shown in FIG. 5, in each housing part 110, a plurality of probe pins 10 (three probe pins 10 in FIG. 5) are stacked in the board thickness direction while being in contact with each other, and one electric wire The probe pin stack 2 to which the conductor portion 200 is connected can be accommodated. In this way, by using the probe pin stack 2, it is possible to obtain an inspection jig 1 that can flow a larger current than, for example, an inspection jig 1 that accommodates and holds one probe pin 10. can.

また、図6に示すように、各収容部110は、例えば、収容されたプローブピン10の板厚方向(すなわち、X方向)に間隔を空けて並んで配置されていると共に、Z方向に接続部30が交互にずれた千鳥状に配置することができる。このように、各収容部110は、収容されるプローブピン10の形状および大きさ、あるいは、検査装置および検査対象物の接続端子の配置などに応じて、その形状、大きさおよび配置を変更することができる。 Further, as shown in FIG. 6, the housing parts 110 are arranged in a row at intervals in the thickness direction (i.e., the X direction) of the housed probe pins 10, and are connected in the Z direction. The sections 30 can be arranged in a staggered manner. In this way, each accommodating section 110 changes its shape, size, and arrangement depending on the shape and size of the probe pin 10 to be accommodated, or the arrangement of the connection terminals of the inspection device and the object to be inspected. be able to.

検査治具1は、少なくとも1つのプローブピン10と、このプローブピン10を内部に収容するハウジング100とを備えていればよい。 The inspection jig 1 only needs to include at least one probe pin 10 and a housing 100 that accommodates the probe pin 10 therein.

(第2実施形態)
本開示の第2実施形態のプローブピン10は、図7~図10に示すように、接続部30が、半田付けにより電線の導体部200を接続可能な半田付け部35を有するように構成されている点で、第1実施形態とは異なっている。第2実施形態では、第1実施形態と同一部分に同一参照番号を付して説明を省略し、第1実施形態と異なる点について説明する。
(Second embodiment)
As shown in FIGS. 7 to 10, the probe pin 10 according to the second embodiment of the present disclosure is configured such that the connecting portion 30 has a soldering portion 35 to which a conductor portion 200 of an electric wire can be connected by soldering. This embodiment is different from the first embodiment in that the second embodiment is different from the first embodiment. In the second embodiment, the same reference numerals are given to the same parts as in the first embodiment, explanations thereof are omitted, and points different from the first embodiment will be explained.

図7および図8に示すように、第2実施形態では、検査治具1は、第1方向(すなわち、Y方向)沿いの断面が略L字状のハウジング100を備えている。このハウジング100には、15個の収容部110が収容されたプローブピン10の板厚方向に間隔を空けて一列に並んで配置されている。 As shown in FIGS. 7 and 8, in the second embodiment, the inspection jig 1 includes a housing 100 having a substantially L-shaped cross section along the first direction (namely, the Y direction). In this housing 100, 15 accommodating parts 110 are arranged in a row at intervals in the thickness direction of the probe pin 10 in which the accommodating parts 110 are housed.

各プローブピン10の弾性部20は、図10に示すように、相互に隙間を空けて配置された複数の帯状弾性片(この実施形態では、2つの帯状弾性片)25、26で構成されている。各帯状弾性片25、26は、Z方向に延びる複数の直線帯部28(第2実施形態では、10個の直線帯部28)と、直線帯部28に接続された複数の湾曲帯部27(第2実施形態では、9個の湾曲帯部27)とが、Z向に沿って交互に接続された蛇行形状を有し、Y方向の両端の直線帯部28が、接続部30の本体部31および接触部40の本体部41にそれぞれ接続されている。
As shown in FIG. 10, the elastic part 20 of each probe pin 10 is composed of a plurality of band-shaped elastic pieces (in this embodiment, two band-shaped elastic pieces) 25 and 26 arranged with a gap between them. There is. Each of the band-shaped elastic pieces 25 and 26 includes a plurality of straight band parts 28 (in the second embodiment, ten straight band parts 28 ) extending in the Z direction, and a plurality of curved band parts 27 connected to the straight band parts 28 . (In the second embodiment, the nine curved band parts 27 ) have a meandering shape in which they are alternately connected along the Z direction , and the straight band parts 28 at both ends of the connection part 30 in the Y direction have a meandering shape. The main body part 31 and the main body part 41 of the contact part 40 are connected to each other.

各プローブピン10の接続部30は、図10に示すように、Y方向に延びると共にY方向の一端が弾性部20に接続された本体部31と、この本体部31のY方向の他端に接続された半田付け部35とを有している。この半田付け部35は、プローブピン10の板厚方向(すなわち、X方向)から見て、略四角環状を有している。第2実施形態では、図に示すように、各プローブピン10の接続部30は、半田付け部35が、収容部110の第1開口部111を介してハウジング100の外部に突出している。
As shown in FIG. 10, the connecting portion 30 of each probe pin 10 is connected to a main body portion 31 extending in the Y direction and having one end in the Y direction connected to the elastic portion 20, and the other end of the main body portion 31 in the Y direction. It has a connected soldering part 35. The soldering portion 35 has a substantially square annular shape when viewed from the thickness direction of the probe pin 10 (ie, the X direction). In the second embodiment, as shown in FIG. 8 , the soldering portion 35 of the connecting portion 30 of each probe pin 10 projects to the outside of the housing 100 through the first opening 111 of the housing portion 110.

各プローブピン10の接触部40は、図10に示すように、Y方向に延びると共にY方向の一端が弾性部20に接続された本体部41と、この本体部41のY方向の他端からY方向に突出する一対の接点部421,431とを有している。 As shown in FIG. 10, the contact portion 40 of each probe pin 10 is connected to a main body portion 41 that extends in the Y direction and has one end in the Y direction connected to the elastic portion 20, and the other end of the main body portion 41 in the Y direction. It has a pair of contact portions 421 and 431 that protrude in the Y direction.

第2実施形態のプローブピン10によれば、接続部30が、半田付けにより電線の導体部200を接続可能な半田付け部35を有している。この半田付け部35により、電線の導体部200を半田付けにより接続可能なプローブピン10を実現できる。 According to the probe pin 10 of the second embodiment, the connecting portion 30 has the soldering portion 35 to which the conductor portion 200 of the electric wire can be connected by soldering. This soldering portion 35 makes it possible to realize the probe pin 10 to which the conductor portion 200 of the electric wire can be connected by soldering.

なお、半田付け部35は、第2実施形態に限らず、半田付けにより電線の導体部200を接続可能であれば、任意の構成を採用できる。 Note that the soldering portion 35 is not limited to the second embodiment, and may have any configuration as long as the conductor portion 200 of the electric wire can be connected by soldering.

接続部30は、第1実施形態および第2実施形態に限らず、電線の導体部200を接続可能な他の構成を採用することもできる。 The connecting portion 30 is not limited to the first embodiment and the second embodiment, and may have other configurations to which the conductor portion 200 of the electric wire can be connected.

以上、図面を参照して本開示における種々の実施形態を詳細に説明したが、最後に、本開示の種々の態様について説明する。なお、以下の説明では、一例として、参照符号も添えて記載する。 Various embodiments of the present disclosure have been described above in detail with reference to the drawings, and finally, various aspects of the present disclosure will be described. Note that in the following description, reference numerals are also included as an example.

本開示の第1態様のプローブピン10は、
第1方向に沿って弾性変形可能な弾性部20と、
前記弾性部20の前記第1方向の一端に設けられ、電線の導体部200を接続可能な接続部30と
を備える。
The probe pin 10 of the first aspect of the present disclosure includes:
an elastic part 20 that is elastically deformable along a first direction;
A connecting part 30 is provided at one end of the elastic part 20 in the first direction and to which a conductor part 200 of an electric wire can be connected.

第1態様のプローブピン10によれば、接続部30により、電線の導体部200を接続可能なプローブピン10を実現できる。 According to the probe pin 10 of the first aspect, the connecting portion 30 makes it possible to realize the probe pin 10 to which the conductor portion 200 of the electric wire can be connected.

本開示の第2態様のプローブピン10は、
前記接続部30が、前記第1方向に沿って延びると共に、相互に離れる方向に弾性変形して前記導体部200を挟持可能な一対の弾性挟持片32、33を有している。
The probe pin 10 of the second aspect of the present disclosure includes:
The connecting portion 30 extends along the first direction and includes a pair of elastic clamping pieces 32 and 33 that can be elastically deformed in directions separating from each other and can clamp the conductor portion 200.

第2態様のプローブピン10によれば、一対の弾性挟持片32、33により、電線の導体部200を挟持することができるので、電線の導体部200を圧着により接続可能なプローブピン10を実現できる。 According to the probe pin 10 of the second aspect, the pair of elastic clamping pieces 32 and 33 can clamp the conductor part 200 of the electric wire, thereby realizing the probe pin 10 that can connect the conductor part 200 of the electric wire by crimping. can.

本開示の第3態様のプローブピン10は、
前記接続部30が、半田付けにより前記導体部200を接続可能な半田付け部35を有している。
The probe pin 10 of the third aspect of the present disclosure includes:
The connecting portion 30 has a soldering portion 35 to which the conductor portion 200 can be connected by soldering.

第3態様のプローブピン10によれば、半田付け部35により、電線の導体部200を半田付けにより接続可能なプローブピン10を実現できる。 According to the probe pin 10 of the third aspect, the soldering portion 35 makes it possible to realize the probe pin 10 to which the conductor portion 200 of the electric wire can be connected by soldering.

本開示の第4態様の検査治具1は、
前記態様のプローブピン10と、
前記接続部30が外部に露出するように前記プローブピン10が収容された収容部110を有するハウジング100と
を備える。
The inspection jig 1 of the fourth aspect of the present disclosure includes:
Probe pin 10 of the above embodiment,
The housing 100 includes a housing part 110 in which the probe pin 10 is housed so that the connection part 30 is exposed to the outside.

第4態様の検査治具1によれば、プローブピン10により、検査装置および検査対象物の一方または両方が、電線の導体部200を介さなければ接続することができないように構成されていたとしても、検査装置および検査対象物を接続可能な検査治具1を実現できる。 According to the inspection jig 1 of the fourth aspect, the probe pin 10 is configured such that one or both of the inspection device and the object to be inspected cannot be connected to each other except through the conductor portion 200 of the electric wire. Also, it is possible to realize an inspection jig 1 to which an inspection device and an object to be inspected can be connected.

本開示の第5態様の検査治具1は、
前記プローブピン10が、複数の前記プローブピン10が相互に接触した状態で板厚方向に積層され、1つの前記電線の前記導体部200が接続されるプローブピン積層体2であり、
前記収容部110が、前記プローブピン積層体2を収容可能である。
The inspection jig 1 according to the fifth aspect of the present disclosure includes:
The probe pin 10 is a probe pin laminate 2 in which a plurality of the probe pins 10 are stacked in the thickness direction in a state in which they are in contact with each other, and the conductor portion 200 of one of the electric wires is connected,
The accommodating portion 110 can accommodate the probe pin stack 2.

第5態様の検査治具1によれば、プローブピン積層体2により、例えば、1つのプローブピン10が収容保持された検査治具1と比較して、大きな電流を流すことができる検査治具1を得ることができる。 According to the inspection jig 1 of the fifth aspect, the probe pin stack 2 allows a larger current to flow, for example, compared to the inspection jig 1 in which one probe pin 10 is accommodated and held. 1 can be obtained.

本開示の第6態様の検査治具1は、
前記プローブピン10が、複数の前記プローブピン10であり、
前記収容部110が、各々に前記プローブピン10を少なくとも1つ収容可能な複数の前記収容部110であり、
前記収容部110の各々が、収容された前記プローブピン10の板厚方向に間隔を空けて並んで配置されていると共に、前記第1方向から見て、前記板厚方向に交差する第2方向に前記接続部30が交互にずれた千鳥状に配置されている。
The inspection jig 1 according to the sixth aspect of the present disclosure includes:
The probe pin 10 is a plurality of probe pins 10,
The accommodating portion 110 is a plurality of accommodating portions 110 each capable of accommodating at least one probe pin 10,
Each of the accommodating parts 110 is arranged in a line with an interval in the thickness direction of the housed probe pin 10, and a second direction intersecting the thickness direction when viewed from the first direction. The connecting portions 30 are arranged in a staggered manner.

なお、前記様々な実施形態または変形例のうちの任意の実施形態または変形例を適宜組み合わせることにより、それぞれの有する効果を奏するようにすることができる。また、実施形態同士の組み合わせまたは実施例同士の組み合わせまたは実施形態と実施例との組み合わせが可能であると共に、異なる実施形態または実施例の中の特徴同士の組み合わせも可能である。 Note that by appropriately combining any of the various embodiments or modifications described above, the effects of each can be achieved. In addition, combinations of embodiments, combinations of examples, or combinations of embodiments and examples are possible, and combinations of features in different embodiments or examples are also possible.

本開示のプローブピンは、例えば、カメラデバイス、USBデバイス、あるいは、QFNデバイスおよびSONデバイスなどの半導体の検査に用いる検査治具に適用できる。 The probe pin of the present disclosure can be applied to, for example, a camera device, a USB device, or an inspection jig used for inspecting semiconductors such as QFN devices and SON devices.

本開示の検査治具は、例えば、カメラデバイス、USBデバイス、あるいは、QFNデバイスおよびSONデバイスなどの半導体の検査に用いる検査装置に適用できる。 The inspection jig of the present disclosure can be applied to, for example, an inspection apparatus used for inspection of semiconductors such as camera devices, USB devices, or QFN devices and SON devices.

1 検査治具
2 プローブピン積層体
10 プローブピン
20 弾性部
201、202 直線部
203 湾曲部
21、22、23、24 帯状弾性片
25、26 帯状弾性片
27 湾曲帯部
28 直線帯部
30 接続部
31 本体部
32、33 弾性挟持片
34 隙間
341 端部
35 半田付け部
36 貫通孔
40 接触部
41 本体部
42、43 脚部
44 ストッパ
50 支持部
100 ハウジング
101 第1面
102 第2面
110 収容部
111 第1開口部
112 第2開口部
120 端子穴
200 導体部
300 接続端子
1 Inspection jig 2 Probe pin laminate 10 Probe pin 20 Elastic parts 201, 202 Straight part 203 Curved parts 21, 22, 23, 24 Band-shaped elastic pieces 25, 26 Band-shaped elastic pieces 27 Curved band part 28 Straight band part 30 Connection part 31 Main body parts 32, 33 Elastic clamping piece 34 Gap 341 End part 35 Soldering part 36 Through hole 40 Contact part 41 Main body part 42, 43 Leg part 44 Stopper 50 Support part 100 Housing 101 First surface 102 Second surface 110 Accommodation part 111 First opening 112 Second opening 120 Terminal hole 200 Conductor portion 300 Connection terminal

Claims (4)

第1方向に沿って弾性変形可能な弾性部と、
前記弾性部の前記第1方向の一端に設けられ、電線の導体部を接続可能な接続部と、
前記弾性部の前記第1方向の他端に設けられた接触部と
を備え、
前記弾性部が、相互に隙間を空けて配置された複数の弾性片を有し、
前記接触部が、凸接点に接触可能な一対の接点部を有し、
前記接続部が、
前記第1方向に沿ってそれぞれ延びて前記第1方向に直交する第2方向に相互に隙間を空けて配置されていると共に、相互に離れる方向に弾性変形して前記導体部を挟持可能に構成され、前記隙間の前記弾性部の近くに位置する略円形状の端部まわりに略C字状の貫通穴が設けられている、一対の弾性挟持片を有する、板状のプローブピン。
an elastic part that is elastically deformable along the first direction;
a connecting portion provided at one end of the elastic portion in the first direction and capable of connecting a conductor portion of an electric wire;
a contact portion provided at the other end of the elastic portion in the first direction;
The elastic part has a plurality of elastic pieces arranged with gaps between them,
The contact portion has a pair of contact portions that can contact the convex contact,
The connection part is
The conductor parts extend along the first direction and are arranged with a gap between them in a second direction perpendicular to the first direction, and are configured to be elastically deformed in a direction away from each other to sandwich the conductor part. A plate-shaped probe pin having a pair of elastic clamping pieces, each having a substantially C-shaped through hole around a substantially circular end located near the elastic portion of the gap.
請求項1のプローブピンと、
前記接続部が外部に露出するように前記プローブピンが収容された収容部を有するハウジングと
を備える、検査治具。
The probe pin of claim 1 ;
An inspection jig comprising: a housing having a housing portion in which the probe pin is housed so that the connection portion is exposed to the outside.
前記プローブピンが、複数の前記プローブピンが相互に接触した状態で板厚方向に積層され、1つの前記電線の前記導体部が接続されるプローブピン積層体であり、
前記収容部が、前記プローブピン積層体を収容可能である、請求項の検査治具。
The probe pin is a probe pin laminate in which a plurality of the probe pins are stacked in the thickness direction in a state in which they are in contact with each other, and the conductor portion of one of the electric wires is connected,
The inspection jig according to claim 2 , wherein the accommodating portion is capable of accommodating the probe pin stack.
前記プローブピンが、複数の前記プローブピンであり、
前記収容部が、各々に前記プローブピンを少なくとも1つ収容可能な複数の前記収容部であり、
前記収容部の各々が、収容された前記プローブピンの板厚方向に間隔を空けて並んで配置されていると共に、前記第1方向から見て、前記板厚方向に交差する第2方向に前記接続部が交互にずれた千鳥状に配置されている、請求項またはの検査治具。
The probe pin is a plurality of probe pins,
The accommodating portion is a plurality of accommodating portions each capable of accommodating at least one probe pin,
Each of the accommodating portions is arranged in a line with an interval in the thickness direction of the housed probe pin, and when viewed from the first direction, the accommodating portion is arranged in a row in a second direction intersecting the thickness direction of the probe pin. 4. The inspection jig according to claim 2 , wherein the connecting portions are arranged in a staggered manner.
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JP2020076666A (en) 2020-05-21
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