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JP7620385B2 - Probe pins, inspection jigs and inspection units - Google Patents

Probe pins, inspection jigs and inspection units Download PDF

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Publication number
JP7620385B2
JP7620385B2 JP2019084572A JP2019084572A JP7620385B2 JP 7620385 B2 JP7620385 B2 JP 7620385B2 JP 2019084572 A JP2019084572 A JP 2019084572A JP 2019084572 A JP2019084572 A JP 2019084572A JP 7620385 B2 JP7620385 B2 JP 7620385B2
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contact portion
probe pin
contact
elastic
inspection
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JP2020180889A (en
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直哉 笹野
宏真 寺西
貴浩 酒井
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Omron Corp
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Omron Corp
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Priority to TW109105578A priority patent/TWI735164B/en
Priority to CN202010150221.2A priority patent/CN111856090B/en
Priority to KR1020200029381A priority patent/KR102253399B1/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0425—Test clips, e.g. for IC's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Connecting Device With Holders (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Description

本開示は、プローブピン、検査治具および検査ユニットに関する。 This disclosure relates to a probe pin, an inspection jig, and an inspection unit.

カメラあるいは液晶パネル等の電子部品モジュールでは、一般に、その製造工程において、導通検査および動作特性検査等が行われる。これらの検査は、プローブピンを用いて、電子部品モジュールに設置されている本体基板に接続するための端子と、検査装置の端子とを接続することにより行われる。 Electronic component modules such as cameras or liquid crystal panels are generally subjected to continuity tests and performance characteristic tests during the manufacturing process. These tests are carried out by using probe pins to connect the terminals for connecting to the main board installed on the electronic component module to the terminals of the testing device.

このようなプローブピンとしては、特許文献１に記載されたものがある。このプローブピンは、電子部品の電極端子および被接続電子部品の電極端子に対してそれぞれ接触可能な一対のコンタクトと、一対のコンタクト間に介在して一対のコンタクトを接続する蛇行部とを備えている。 One such probe pin is described in Patent Document 1. This probe pin has a pair of contacts that can contact the electrode terminal of the electronic component and the electrode terminal of the connected electronic component, respectively, and a serpentine portion that is interposed between the pair of contacts and connects the pair of contacts.

特開２００２－１３４２０２号公報JP 2002-134202 A

前記プローブピンでは、各コンタクトが、電極端子に対して１点で接触するように構成されているため、例えば、各コンタクトの先端に不導体の異物が付着した場合、この異物により、前記プローブピンと電極端子との間で導通不良が発生し、接触信頼性が低下する場合がある。 The probe pin is configured so that each contact makes contact with the electrode terminal at one point. For example, if a non-conductive foreign object adheres to the tip of each contact, this foreign object may cause poor electrical continuity between the probe pin and the electrode terminal, reducing contact reliability.

本開示は、接触信頼性の高いプローブピン、このプローブピンを備えた検査治具、および、この検査治具を備えた検査ユニットを提供することを目的とする。 The present disclosure aims to provide a probe pin with high contact reliability, an inspection tool equipped with this probe pin, and an inspection unit equipped with this inspection tool.

本開示の一例のプローブピンは、
第１方向に沿って弾性変形可能な弾性部と、
前記弾性部の前記第１方向の一端に設けられた第１接触部と、
前記弾性部の前記第１方向の他端に設けられた第２接触部と
を備え、
前記弾性部が、
前記第１方向に交差する第２方向に延びると共に前記第１方向に間隔を空けて配置された複数の横帯部と、隣接する前記横帯部に接続された少なくとも１つの湾曲帯部とを有し、
前記第１接触部および前記第２接触部の各々が、
前記弾性部の前記第２方向の中心を通りかつ前記第１方向に沿って延びる第１中心線に対して同じ側に配置され、
前記第１方向および前記第２方向に交差する第３方向に対向する一対の板面と、前記一対の板面に交差する側面とを有し、
少なくとも前記第１接触部の前記側面が、前記第２方向から見て、前記第３方向の中心を通りかつ前記第１方向に延びる第２中心線に対して非対称な形状を有している。 An example probe pin of the present disclosure includes:
An elastic portion that is elastically deformable along a first direction;
a first contact portion provided at one end of the elastic portion in the first direction;
a second contact portion provided at the other end of the elastic portion in the first direction,
The elastic portion is
a plurality of horizontal band portions extending in a second direction intersecting the first direction and spaced apart in the first direction; and at least one curved band portion connected to an adjacent one of the horizontal band portions,
Each of the first contact portion and the second contact portion is
the elastic portions are disposed on the same side of a first center line that passes through a center in the second direction of the elastic portion and extends along the first direction;
A pair of plate surfaces facing each other in a third direction intersecting the first direction and the second direction, and side surfaces intersecting the pair of plate surfaces,
At least the side surface of the first contact portion has an asymmetric shape with respect to a second center line that passes through a center in the third direction and extends in the first direction, when viewed from the second direction.

また、本開示の一例の検査治具は、
前記プローブピンと、
前記プローブピンが内部に収容されたハウジングと
を備える。 Moreover, an example inspection jig of the present disclosure includes:
The probe pin;
and a housing in which the probe pin is housed.

また、本開示の一例の検査ユニットは、
前記検査治具を少なくとも１つ備える。 Moreover, the inspection unit according to an example of the present disclosure includes:
At least one of the inspection jigs is provided.

前記プローブピンによれば、第１接触部および第２接触部の各々が、弾性部の第２方向の中心を通りかつ第１方向に沿って延びる第１中心線に対して同じ側に配置されている。また、少なくとも第１接触部の側面が、第２方向から見て、第３方向の中心を通りかつ第１方向に延びる第２中心線に対して非対称な形状を有している。このような構成により、例えば、検査対象物または検査装置の接続端子を第１接触部に接触させた状態で、第１方向沿いを第２接触部に向かって移動させると、第１接触部は、検査対象物または検査装置の接続端子に接触したまま、第１方向および第２方向を含む第１の平面上で第２接触部に対して回転しつつ、第１方向および第３方向を含む第１の平面に交差する第２の平面上でも第２接触部に対して回転する。すなわち、検査対象物または検査装置の接続端子に対して、異なる２つの方向のワイピング動作を同時に発生させることができる。その結果、例えば、第１接触部の接続端子に接触する部分に不導体の異物が付着したとしても、この異物を容易に除去することができるので、接触信頼性の高いプローブピンを実現できる。 According to the probe pin, each of the first contact portion and the second contact portion is arranged on the same side of the first center line that passes through the center of the elastic portion in the second direction and extends along the first direction. In addition, at least the side surface of the first contact portion has an asymmetric shape with respect to the second center line that passes through the center of the third direction and extends in the first direction when viewed from the second direction. With this configuration, for example, when the connection terminal of the test object or the test device is moved toward the second contact portion along the first direction while being in contact with the first contact portion, the first contact portion rotates relative to the second contact portion on a first plane including the first direction and the second direction while remaining in contact with the test object or the test device connection terminal, and also rotates relative to the second contact portion on a second plane that intersects with the first plane including the first direction and the third direction. That is, wiping operations in two different directions can be generated simultaneously for the test object or the test device connection terminal. As a result, even if a non-conductive foreign object adheres to the part of the first contact portion that contacts the connection terminal, the foreign object can be easily removed, resulting in a probe pin with high contact reliability.

前記検査治具によれば、前記プローブピンにより、接触信頼性の高い検査治具を実現できる。 According to the inspection jig, the probe pin can realize an inspection jig with high contact reliability.

前記検査ユニットによれば、前記検査治具により、接触信頼性の高い検査ユニットを実現できる。 According to the inspection unit, the inspection tool can realize an inspection unit with high contact reliability.

本開示の一実施形態のプローブピンを示す斜視図。FIG. 2 is a perspective view showing a probe pin according to an embodiment of the present disclosure. 図１のプローブピンを備えた検査治具の断面図。FIG. 2 is a cross-sectional view of an inspection jig equipped with the probe pin of FIG. 1 . 図１のプローブピンの第１接触部を示す拡大側面図。FIG. 2 is an enlarged side view showing a first contact portion of the probe pin of FIG. 1 . 図１のプローブピンの第１の変形例を示す拡大側面図。FIG. 2 is an enlarged side view showing a first modified example of the probe pin of FIG. 1 . 図１のプローブピンの第２の変形例を示す拡大側面図。FIG. 2 is an enlarged side view showing a second modified example of the probe pin of FIG. 1 . 図１のプローブピンの第３の変形例を示す拡大側面図。FIG. 4 is an enlarged side view showing a third modified example of the probe pin of FIG. 1 .

以下、本開示の一例を添付図面に従って説明する。なお、以下の説明では、必要に応じて特定の方向あるいは位置を示す用語（例えば、「上」、「下」、「右」、「左」を含む用語）を用いるが、それらの用語の使用は図面を参照した本開示の理解を容易にするためであって、それらの用語の意味によって本開示の技術的範囲が限定されるものではない。また、以下の説明は、本質的に例示に過ぎず、本開示、その適用物、あるいは、その用途を制限することを意図するものではない。さらに、図面は模式的なものであり、各寸法の比率等は現実のものとは必ずしも合致していない。 An example of the present disclosure will be described below with reference to the attached drawings. In the following description, terms indicating specific directions or positions (e.g., terms including "up," "down," "right," and "left") will be used as necessary, but the use of these terms is intended to facilitate understanding of the present disclosure with reference to the drawings, and the meanings of these terms do not limit the technical scope of the present disclosure. In addition, the following description is essentially merely illustrative, and is not intended to limit the present disclosure, its applications, or its uses. Furthermore, the drawings are schematic, and the ratios of the dimensions do not necessarily correspond to reality.

本開示の一実施形態のプローブピンは、一例として、図１に示すように、細長い薄板状で導電性を有している。このプローブピン１０は、図２に示すように、絶縁性のハウジング１００に収容された状態で使用され、ハウジング１００と共に検査治具２を構成する。検査治具２には、一例として、複数のプローブピン１０が収容されている。 As an example, a probe pin according to an embodiment of the present disclosure is a thin, elongated, conductive plate as shown in FIG. 1. As shown in FIG. 2, the probe pin 10 is used in a state housed in an insulating housing 100, and constitutes an inspection jig 2 together with the housing 100. As an example, the inspection jig 2 houses a plurality of probe pins 10.

また、検査治具２は、検査ユニット１の一部を構成することができる。例えば、図２に示すように、一対の検査治具２で検査ユニット１を構成した場合、各検査治具２は、後述するプローブピン１０の各接点部が、プローブピン１０が延びている第１方向Ｘに交差（例えば、直交）する第２方向Ｙに隣接するように配置される。 The inspection tool 2 can also constitute a part of the inspection unit 1. For example, as shown in FIG. 2, when the inspection unit 1 is constituted by a pair of inspection tools 2, each inspection tool 2 is arranged so that each contact portion of the probe pin 10 described later is adjacent to a second direction Y that intersects (e.g., perpendicular to) the first direction X in which the probe pin 10 extends.

各ハウジング１００は、図２に示すように、その内部に複数の収容部１０１（図２には、１つのみ示す）を有している。各収容部１０１は、スリット状を有し、それぞれ１つのプローブピン１０を電気的に独立して収容可能かつ保持可能に構成されている。また、各収容部１０１は、第１方向Ｘおよび第２方向Ｙに交差（例えば、直交）する第３方向Ｚ（図３に示す）に沿って一列に並んでかつ等間隔に配置されている。 As shown in FIG. 2, each housing 100 has a plurality of storage sections 101 (only one is shown in FIG. 2) therein. Each storage section 101 has a slit shape and is configured to be able to store and hold one probe pin 10 electrically independently. In addition, each storage section 101 is arranged in a row at equal intervals along a third direction Z (shown in FIG. 3) that intersects (e.g., perpendicular to) the first direction X and the second direction Y.

各プローブピン１０は、図１および図２に示すように、第１方向Ｘに沿って弾性変形可能な弾性部２０と、この弾性部２０の第１方向Ｘの両端にそれぞれ設けられた第１接触部３０および第２接触部４０とを備えている。各プローブピン１０は、一例として、電鋳法で形成され、弾性部２０、第１接触部３０および第２接触部４０が、第１方向Ｘに沿って直列的に配置されかつ一体に構成されている。 As shown in Figs. 1 and 2, each probe pin 10 has an elastic portion 20 that is elastically deformable along the first direction X, and a first contact portion 30 and a second contact portion 40 that are provided at both ends of the elastic portion 20 in the first direction X. As an example, each probe pin 10 is formed by electroforming, and the elastic portion 20, the first contact portion 30, and the second contact portion 40 are arranged in series along the first direction X and are integrally configured.

弾性部２０は、図２に示すように、一例として、相互に隙間２３を空けて配置された複数の帯状弾性片（この実施形態では、２つの帯状弾性片）２１、２２で構成されている。各帯状弾性片２１、２２は、第２方向Ｙにそれぞれ延びると共に第１方向Ｘに間隔を空けて配置された複数の横帯部２４（この実施形態では、７つの横帯部２４）と、両端が隣接する横帯部２４に接続された少なくとも１つの湾曲帯部２５（この実施形態では、６つの湾曲帯部２５）とが、第１方向Ｘに沿って交互に接続された蛇行形状を有している。各帯状弾性片２１、２２における第１方向Ｘの両端の横帯部２４が、第１接触部３０および第２接触部４０にそれぞれ接続されている。 2, the elastic portion 20 is, for example, composed of a plurality of elastic strips 21, 22 (two elastic strips in this embodiment) arranged with a gap 23 between them. Each of the elastic strips 21, 22 has a serpentine shape in which a plurality of horizontal strips 24 (seven horizontal strips 24 in this embodiment) extending in the second direction Y and arranged at intervals in the first direction X and at least one curved strip 25 (six curved strips 25 in this embodiment) connected at both ends to adjacent horizontal strips 24 are alternately connected along the first direction X. The horizontal strips 24 at both ends in the first direction X of each of the elastic strips 21, 22 are connected to the first contact portion 30 and the second contact portion 40, respectively.

第１方向Ｘにおいて第２接触部４０から遠い方の帯状弾性片２１における第１接触部３０に接続されている横帯部２４には、接触面２４１が設けられている。この接触面２４１は、プローブピン１０をハウジング１００の収容部１０１に収容したときに、収容部１０１を構成するハウジング１００の内面に対して接触するように構成されている。第１接触部３０に接続されている横帯部２４には、各帯状弾性片２１、２２を接続するリブ２４２が設けられ、各帯状弾性片２１、２２間の接触を回避している。 A contact surface 241 is provided on the horizontal band 24 connected to the first contact portion 30 of the band-shaped elastic piece 21 farther from the second contact portion 40 in the first direction X. This contact surface 241 is configured to come into contact with the inner surface of the housing 100 that constitutes the accommodation portion 101 when the probe pin 10 is accommodated in the accommodation portion 101 of the housing 100. A rib 242 that connects the band-shaped elastic pieces 21, 22 is provided on the horizontal band 24 connected to the first contact portion 30, and prevents contact between the band-shaped elastic pieces 21, 22.

第１接触部３０および第２接触部４０の各々は、図２に示すように、弾性部２０の第２方向Ｙの第１中心線ＣＬ１に対して同じ側に配置されている。なお、この実施形態では、図２に示すように、第１接触部３０に接続されている横帯部２４と、この横帯部２４に接続されている湾曲帯部２５とを合わせた部分の第２方向Ｙにおける最大距離Ｌの中心を通り、かつ、第１方向Ｘに延びる直線を弾性部２０の第２方向Ｙの第１中心線ＣＬ１としている。 As shown in FIG. 2, the first contact portion 30 and the second contact portion 40 are disposed on the same side of the first center line CL1 in the second direction Y of the elastic portion 20. In this embodiment, as shown in FIG. 2, the first center line CL1 in the second direction Y of the elastic portion 20 is a straight line that passes through the center of the maximum distance L in the second direction Y of the combined portion of the horizontal band portion 24 connected to the first contact portion 30 and the curved band portion 25 connected to this horizontal band portion 24 and extends in the first direction X.

第１接触部３０は、一例として、第１方向Ｘに延びる略矩形板状を有し、弾性部２０の第２方向Ｙの端に配置されている。第１接触部３０の第１方向Ｘにおける弾性部２０に遠い方の端部は、第２方向Ｙにおいて弾性部２０の第１中心線ＣＬ１から最も離れた位置に頂点を有する略直角三角形状で、その頂点が接触対象物（例えば、検査対象物または検査装置）の接続端子１１０に接触可能な接点部３１を構成している。第１接触部３０の第１方向Ｘにおける弾性部２０に近い方の端部には、貫通孔３２が設けられている。この貫通孔３２は、各帯状弾性片２１、２２間の隙間２３に接続されている。 The first contact portion 30, as an example, has a generally rectangular plate shape extending in the first direction X, and is disposed at the end of the elastic portion 20 in the second direction Y. The end of the first contact portion 30 farthest from the elastic portion 20 in the first direction X is generally in the shape of a right-angled triangle having an apex at a position farthest from the first center line CL1 of the elastic portion 20 in the second direction Y, and the apex constitutes a contact portion 31 that can contact a connection terminal 110 of a contact object (e.g., an object to be inspected or an inspection device). A through hole 32 is provided at the end of the first contact portion 30 closer to the elastic portion 20 in the first direction X. This through hole 32 is connected to the gap 23 between each of the band-shaped elastic pieces 21, 22.

図３に示すように、第１接触部３０の第３方向Ｚに対向する一対の板面３３、３４に交差する側面３５は、第２方向Ｙから見て、第３方向Ｚの中心を通りかつ第１方向Ｘに延びる第２中心線ＣＬ２に対して非対称な形状を有している。詳しくは、第１接触部３０の側面３５は、第３方向Ｚにおいて一方の板面３３から他方の板面３４に向かうに従って、第１方向Ｘにおいて弾性部２０から離れるように直線的に傾斜している。なお、図３は、第１接触部３０を図２の矢印Ａ方向から見た側面図である。 As shown in FIG. 3, the side surface 35 of the first contact portion 30 that intersects with a pair of plate surfaces 33, 34 facing the third direction Z has an asymmetric shape with respect to a second center line CL2 that passes through the center of the third direction Z and extends in the first direction X when viewed from the second direction Y. In more detail, the side surface 35 of the first contact portion 30 is linearly inclined in the first direction X away from the elastic portion 20 as it moves from one plate surface 33 to the other plate surface 34 in the third direction Z. Note that FIG. 3 is a side view of the first contact portion 30 as viewed from the direction of arrow A in FIG. 2.

第２接触部４０は、一例として、第２方向Ｙに延びる本体部４１と、本体部４１の第２方向Ｙの一端に設けられた接続部４２と、本体部４１の第２方向Ｙの他端に設けられた接点部４３とを有している。本体部４１は、プローブピン１０をハウジング１００の収容部１０１に収容したときに、収容部１０１を構成するハウジング１００の内面に対して接触する接触面４１１を有している。接続部４２は、本体部４１から第１方向Ｘでかつ第１接触部３０に向かって延びて、弾性部２０の横帯部２４が接続されている。接点部４３は、本体部４１から第１方向Ｘでかつ第１接触部３０から離れる方向に延びて、接触対象物の接続端子１１０に対して接触可能に構成されている。 The second contact portion 40, for example, has a main body portion 41 extending in the second direction Y, a connection portion 42 provided at one end of the main body portion 41 in the second direction Y, and a contact portion 43 provided at the other end of the main body portion 41 in the second direction Y. The main body portion 41 has a contact surface 411 that contacts the inner surface of the housing 100 constituting the housing portion 101 when the probe pin 10 is housed in the housing portion 101 of the housing 100. The connection portion 42 extends from the main body portion 41 in the first direction X toward the first contact portion 30, and is connected to the horizontal band portion 24 of the elastic portion 20. The contact portion 43 extends from the main body portion 41 in the first direction X and in a direction away from the first contact portion 30, and is configured to be able to contact the connection terminal 110 of the contact object.

なお、図示していないが、第２接触部４０の側面も、第１接触部３０の側面と同様に、第３方向Ｚにおいて一方の板面から他方の板面に向かうに従って、第１方向Ｘにおいて弾性部２０から離れるように直線的に傾斜している。 Although not shown, the side of the second contact portion 40, like the side of the first contact portion 30, is also linearly inclined away from the elastic portion 20 in the first direction X as it moves from one plate surface to the other plate surface in the third direction Z.

次に、接触対象物の接続端子１１０を第１接触部３０の接点部３１に接触させた状態で、第１方向Ｘ沿いを第２接触部４０に向かって（すなわち、図２および図３の矢印Ｂ方向に）移動させたときのプローブピン１０の動作を説明する。 Next, we will explain the operation of the probe pin 10 when the connection terminal 110 of the contact object is moved along the first direction X toward the second contact portion 40 (i.e., in the direction of arrow B in Figures 2 and 3) while in contact with the contact portion 31 of the first contact portion 30.

接続端子１１０を第１接触部３０の接点部３１に接触させた状態で矢印Ｂ方向に移動させていくと、弾性部２０が第１接触部３０を介して圧縮される。このとき、第１接触部３０および第２接触部４０の各々は、弾性部２０の第１中心線ＣＬ１に対して同じ側に配置されている（すなわち、弾性部２０の第１中心線ＣＬ１上には配置されていない）ため、接触対象物の接続端子１１０に接触したまま、第１方向Ｘおよび第２方向Ｙを含む第１の平面（すなわち、図２に示すＸＹ平面）上で第２接触部４０に対して図２の矢印Ｃ方向に回転する。また、第１接触部３０の側面３５は、直線的に傾斜しているため、第１方向Ｘおよび第３方向Ｚを含む第１の平面に交差する第２の平面（すなわち、図３に示すＸＺ平面）上でも第２接触部４０に対して図３の矢印Ｄ方向に回転する。すなわち、接触対象物の接続端子１１０に対して、異なる２つの方向のワイピング動作が同時に発生する。 When the connection terminal 110 is moved in the direction of arrow B while in contact with the contact portion 31 of the first contact portion 30, the elastic portion 20 is compressed via the first contact portion 30. At this time, the first contact portion 30 and the second contact portion 40 are arranged on the same side of the first center line CL1 of the elastic portion 20 (i.e., they are not arranged on the first center line CL1 of the elastic portion 20), so that they rotate in the direction of arrow C in FIG. 2 relative to the second contact portion 40 on a first plane (i.e., the XY plane shown in FIG. 2) including the first direction X and the second direction Y while in contact with the connection terminal 110 of the contact object. In addition, since the side surface 35 of the first contact portion 30 is linearly inclined, it also rotates in the direction of arrow D in FIG. 3 relative to the second contact portion 40 on a second plane (i.e., the XZ plane shown in FIG. 3) intersecting the first plane including the first direction X and the third direction Z. That is, wiping actions occur simultaneously in two different directions on the connection terminal 110 of the contact object.

このように、プローブピン１０では、第１接触部３０および第２接触部４０の各々が、弾性部の第２方向の中心を通りかつ第１方向に沿って延びる第１中心線ＣＬ１に対して同じ側に配置されている。また、少なくとも第１接触部３０の側面３５が、第２方向Ｙから見て、第３方向Ｚの中心を通りかつ第１方向Ｘに延びる第２中心線ＣＬ２に対して非対称な形状を有している。このような構成により、接触対象物の接続端子１１０に対して、異なる２つの方向のワイピング動作を同時に発生させることができる。その結果、例えば、第１接触部３０の接続端子１１０に接触する部分（すなわち、接点部３１）に不導体の異物が付着したとしても、この異物を容易に除去することができるので、接触信頼性の高いプローブピン１０を実現できる。 In this way, in the probe pin 10, the first contact portion 30 and the second contact portion 40 are arranged on the same side of the first center line CL1 that passes through the center of the elastic portion in the second direction and extends along the first direction. In addition, at least the side surface 35 of the first contact portion 30 has an asymmetric shape with respect to the second center line CL2 that passes through the center of the third direction Z and extends in the first direction X when viewed from the second direction Y. With this configuration, wiping operations in two different directions can be simultaneously generated for the connection terminal 110 of the contact object. As a result, for example, even if a non-conductive foreign object adheres to the part of the first contact portion 30 that contacts the connection terminal 110 (i.e., the contact portion 31), the foreign object can be easily removed, thereby realizing a probe pin 10 with high contact reliability.

また、第１接触部３０および第２接触部４０の各々が、弾性部２０の第２方向Ｙの端に配置されている。このような構成により、例えば、第１接触部３０が、第１の平面上での第１接触部３０の第２接触部４０に対する回転量を増加させて、ワイピング性能を高めることができる。 Furthermore, each of the first contact portion 30 and the second contact portion 40 is disposed at an end of the elastic portion 20 in the second direction Y. With this configuration, for example, the first contact portion 30 can increase the amount of rotation of the first contact portion 30 relative to the second contact portion 40 on the first plane, thereby improving wiping performance.

このようなプローブピン１０により、接触信頼性の高い検査治具２を実現できる。また、このようなプローブピン１０を備えた検査治具２により、接触信頼性の高い検査ユニット１を実現できる。 By using such a probe pin 10, an inspection jig 2 with high contact reliability can be realized. Furthermore, by using an inspection jig 2 equipped with such a probe pin 10, an inspection unit 1 with high contact reliability can be realized.

なお、第１接触部３０の側面３５は、第２方向Ｙから見て、第３方向Ｚの中心を通りかつ第１方向Ｘに延びる第２中心線ＣＬ２に対して非対称な形状を有していればよく、直線的に傾斜している場合に限らない。例えば、第１接触部３０の側面３５は、図４に示すように、第２方向Ｙ（すなわち、図４の紙面貫通方向）から見て、三角形状を有していてもよい。この場合、三角形状の頂点３５１は、第３方向Ｚにおいて第２中心線ＣＬ２から離れた位置（図４では、第２中心線ＣＬ２よりも板面３４に近い位置）に配置される。 Note that the side surface 35 of the first contact portion 30 does not necessarily have to be linearly inclined as long as it has an asymmetric shape with respect to the second center line CL2 that passes through the center of the third direction Z and extends in the first direction X when viewed from the second direction Y. For example, the side surface 35 of the first contact portion 30 may have a triangular shape when viewed from the second direction Y (i.e., the direction penetrating the paper surface of FIG. 4) as shown in FIG. 4. In this case, the apex 351 of the triangle is located at a position away from the second center line CL2 in the third direction Z (in FIG. 4, it is located closer to the plate surface 34 than the second center line CL2).

また、例えば、第１接触部３０の側面３５は、図５に示すように、第２方向Ｙ（すなわち、図５の紙面貫通方向）から見て、凹湾曲形状を有していてもよい。 Also, for example, the side surface 35 of the first contact portion 30 may have a concave curved shape when viewed from the second direction Y (i.e., the direction penetrating the paper surface of FIG. 5), as shown in FIG. 5.

また、例えば、図５および図６に示すように、第２方向Ｙから見て、一対の板面３３、３４の各々と側面３５とで形成される角部３６が、面取りされていてもよい。 Also, for example, as shown in Figures 5 and 6, when viewed from the second direction Y, the corners 36 formed by each of the pair of plate surfaces 33, 34 and the side surface 35 may be chamfered.

このように、第１接触部３０の側面３５の形状は、プローブピン１０の設計などに応じて、変更することができる。すなわち、設計の自由度の高いプローブピン１０を実現できる。 In this way, the shape of the side surface 35 of the first contact portion 30 can be changed depending on the design of the probe pin 10. In other words, a probe pin 10 with high design freedom can be realized.

少なくとも第１接触部３０の側面３５が、第２方向Ｙから見て、第２中心線ＣＬ２に対して非対称な形状を有していればよい。すなわち、第２接触部４０の側面は、第２方向Ｙから見て、第２中心線ＣＬ２に対して対称な形状を有していてもよい。 At least the side surface 35 of the first contact portion 30 may have an asymmetric shape with respect to the second center line CL2 when viewed from the second direction Y. In other words, the side surface of the second contact portion 40 may have a symmetric shape with respect to the second center line CL2 when viewed from the second direction Y.

第１接触部３０および第２接触部４０の各々は、弾性部２０の第１中心線ＣＬ１に対して同じ側に配置されていればよい。すなわち、第１接触部３０および第２接触部４０の各々は、弾性部２０の第２方向Ｙの端に配置されている場合に限らず、例えば、弾性部２０の中心線ＣＬ１と第２方向Ｙの端との中間に配置されていてもよい。 The first contact portion 30 and the second contact portion 40 may be disposed on the same side of the first center line CL1 of the elastic portion 20. In other words, the first contact portion 30 and the second contact portion 40 may not necessarily be disposed at the end of the elastic portion 20 in the second direction Y, but may be disposed, for example, midway between the center line CL1 of the elastic portion 20 and the end of the elastic portion 20 in the second direction Y.

弾性部２０は、複数の帯状弾性片２１、２２で構成されている場合に限らず、１つの帯状弾性片で構成してもよい。 The elastic portion 20 is not limited to being composed of multiple elastic strips 21, 22, but may be composed of a single elastic strip.

第１接触部３０の接点部および第２接触部４０の接点部の各々は、１つに限らず、複数設けられていてもよい。すなわち、第１接触部３０の接点部および第２接触部４０の接点部の各々は、接触対象物の接続端子１１０に対して、１点に限らず、２点以上で接触可能に構成することができる。 The number of contact parts of the first contact part 30 and the second contact part 40 may not be limited to one, but may be multiple. In other words, the number of contact parts of the first contact part 30 and the second contact part 40 may be configured to be capable of contacting the connection terminal 110 of the contact object at two or more points, but not limited to one point.

以上、図面を参照して本開示における種々の実施形態を詳細に説明したが、最後に、本開示の種々の態様について説明する。なお、以下の説明では、一例として、参照符号も添えて記載する。 Various embodiments of the present disclosure have been described above in detail with reference to the drawings. Finally, various aspects of the present disclosure will be described. In the following description, reference symbols will also be used as examples.

本開示の第１態様のプローブピン１０は、
第１方向Ｘに沿って弾性変形可能な弾性部２０と、
前記弾性部２０の前記第１方向Ｘの一端に設けられた第１接触部３０と、
前記弾性部２０の前記第１方向Ｘの他端に設けられた第２接触部４０と
を備え、
前記弾性部２０は、
前記第１方向Ｘに交差する第２方向Ｙに延びると共に前記第１方向Ｘに間隔を空けて配置された複数の横帯部２４と、隣接する前記横帯部２４に接続された少なくとも１つの湾曲帯部２５とを有し、
前記第１接触部３０および前記第２接触部４０の各々が、
前記弾性部２０の前記第２方向Ｙの中心を通りかつ前記第１方向Ｘに沿って延びる第１中心線ＣＬ１に対して同じ側に配置され、
前記第１方向Ｘおよび前記第２方向Ｙに交差する第３方向Ｚに対向する一対の板面３３、３４と、前記一対の板面３３、３４に交差する側面３５とを有し、
少なくとも前記第１接触部３０の前記側面３５が、前記第２方向Ｙから見て、前記第３方向Ｚの中心を通りかつ前記第１方向Ｘに延びる第２中心線ＣＬ２に対して非対称な形状を有している。 The probe pin 10 according to the first aspect of the present disclosure includes:
An elastic portion 20 that is elastically deformable along a first direction X;
a first contact portion 30 provided at one end of the elastic portion 20 in the first direction X;
a second contact portion 40 provided at the other end of the elastic portion 20 in the first direction X,
The elastic portion 20 is
The belt has a plurality of horizontal band portions 24 extending in a second direction Y intersecting the first direction X and arranged at intervals in the first direction X, and at least one curved band portion 25 connected to adjacent horizontal band portions 24,
Each of the first contact portion 30 and the second contact portion 40 is
The elastic portions 20 are disposed on the same side of a first center line CL1 that passes through a center of the elastic portion 20 in the second direction Y and extends along the first direction X,
a pair of plate surfaces 33, 34 facing each other in a third direction Z intersecting the first direction X and the second direction Y; and a side surface 35 intersecting the pair of plate surfaces 33, 34;
At least the side surface 35 of the first contact portion 30 has an asymmetric shape with respect to a second center line CL2 that passes through the center in the third direction Z and extends in the first direction X, when viewed from the second direction Y.

第１態様のプローブピン１０によれば、接触対象物の接続端子１１０に対して、異なる２つの方向のワイピング動作を同時に発生させることができる。その結果、例えば、第１接触部３０の接続端子１１０に接触する部分（すなわち、接点部３１）に不導体の異物が付着したとしても、この異物を容易に除去することができるので、接触信頼性の高いプローブピン１０を実現できる。 According to the first aspect of the probe pin 10, wiping operations can be simultaneously performed in two different directions on the connection terminal 110 of the contact object. As a result, even if a non-conductive foreign object adheres to the portion of the first contact portion 30 that contacts the connection terminal 110 (i.e., the contact portion 31), the foreign object can be easily removed, thereby realizing a probe pin 10 with high contact reliability.

本開示の第２態様のプローブピン１０は、
前記第１接触部３０および前記第２接触部４０の各々が、前記弾性部２０の前記第２方向Ｙの端に配置されている。 The probe pin 10 according to the second aspect of the present disclosure is
The first contact portion 30 and the second contact portion 40 are each disposed at an end of the elastic portion 20 in the second direction Y.

第２態様のプローブピン１０によれば、例えば、第１接触部３０が、第１の平面上での第１接触部３０の第２接触部４０に対する回転量を増加させて、ワイピング性能を高めることができる。 According to the second aspect of the probe pin 10, for example, the first contact portion 30 can increase the amount of rotation of the first contact portion 30 relative to the second contact portion 40 on the first plane, thereby improving wiping performance.

本開示の第３態様のプローブピン１０は、
前記側面３５が、前記第２方向Ｙから見て、三角形状を有している。 The probe pin 10 according to the third aspect of the present disclosure is
The side surface 35 has a triangular shape when viewed from the second direction Y.

第３態様のプローブピン１０によれば、設計の自由度の高いプローブピン１０を実現できる。 The probe pin 10 of the third aspect allows for a probe pin 10 with high design freedom.

本開示の第４態様のプローブピン１０は、
前記第２方向Ｙから見て、前記一対の板面３３、３４の各々と前記側面３５とで形成される角部３６が、面取りされている。 The probe pin 10 according to the fourth aspect of the present disclosure is
When viewed from the second direction Y, corners 36 formed by each of the pair of plate surfaces 33, 34 and the side surface 35 are chamfered.

第４態様のプローブピン１０によれば、設計の自由度の高いプローブピン１０を実現できる。 The fourth aspect of the probe pin 10 allows for a probe pin 10 with a high degree of design freedom.

本開示の第５態様のプローブピン１０は、
前記側面３５が、前記第２方向Ｙから見て、凹湾曲形状を有している。 The probe pin 10 according to the fifth aspect of the present disclosure is
The side surface 35 has a concave curved shape when viewed from the second direction Y.

第５態様のプローブピン１０によれば、設計の自由度の高いプローブピン１０を実現できる。 The fifth aspect of the probe pin 10 allows for a probe pin 10 with a high degree of design freedom.

本開示の第６態様の検査治具２は、
前記プローブピン１０と、
前記プローブピン１０が内部に収容されたハウジング１００と
を備える。 The inspection jig 2 according to the sixth aspect of the present disclosure is
The probe pin 10;
The probe pin 10 is accommodated in a housing 100 .

第６態様の検査治具２によれば、前記プローブピン１０により、接触信頼性の高い検査治具２を実現できる。 According to the sixth aspect of the inspection jig 2, the probe pin 10 can realize an inspection jig 2 with high contact reliability.

本開示の第７態様の検査ユニット１は、
前記検査治具２を少なくとも１つ備える。 The inspection unit 1 according to the seventh aspect of the present disclosure includes:
At least one inspection jig 2 is provided.

第７態様の検査ユニット１によれば、前記検査治具２により、接触信頼性の高い検査ユニット１を実現できる。 According to the seventh aspect of the inspection unit 1, the inspection jig 2 can realize an inspection unit 1 with high contact reliability.

なお、前記様々な実施形態または変形例のうちの任意の実施形態または変形例を適宜組み合わせることにより、それぞれの有する効果を奏するようにすることができる。また、実施形態同士の組み合わせまたは実施例同士の組み合わせまたは実施形態と実施例との組み合わせが可能であると共に、異なる実施形態または実施例の中の特徴同士の組み合わせも可能である。 In addition, by appropriately combining any of the various embodiments or modifications described above, it is possible to achieve the effects of each. In addition, it is possible to combine embodiments with each other, or to combine examples with each other, and it is also possible to combine features of different embodiments or examples.

本開示のプローブピンは、例えば、カメラデバイス、ＵＳＢデバイス、ＨＤＭＩデバイス、あるいは、ＱＦＮデバイスおよびＳＯＮデバイスなどの半導体の検査に用いる検査治具に適用できる。 The probe pins disclosed herein can be applied to inspection jigs used to inspect semiconductors such as camera devices, USB devices, HDMI devices, or QFN devices and SON devices.

本開示の検査治具は、例えば、カメラデバイス、ＵＳＢデバイス、ＨＤＭＩデバイス、あるいは、ＱＦＮデバイスおよびＳＯＮデバイスなどの半導体の検査に用いる検査ユニットに適用できる。 The inspection tool disclosed herein can be applied to inspection units used to inspect, for example, camera devices, USB devices, HDMI devices, or semiconductors such as QFN devices and SON devices.

本開示の検査ユニットは、例えば、例えば、カメラデバイス、ＵＳＢデバイス、ＨＤＭＩデバイス、あるいは、ＱＦＮデバイスおよびＳＯＮデバイスなどの半導体の検査に用いる検査装置に適用できる。 The inspection unit of the present disclosure can be applied to, for example, inspection equipment used to inspect semiconductors such as camera devices, USB devices, HDMI devices, or QFN devices and SON devices.

１ 検査ユニット
２ 検査治具
１０ プローブピン
２０ 弾性部
２１、２２ 帯状弾性片
２３ 隙間
２４ 横帯部
２４１ 接触面
２４２ リブ
２５ 湾曲帯部
３０ 第１接触部
３１ 接点部
３２ 貫通孔
３３、３４ 板面
３５ 側面
３５１ 頂点
４０ 第２接触部
４１ 本体部
４１１ 接触面
４２ 接続部
４３ 接点部
１００ ハウジング
１０１ 収容部
１１０ 接続端子 REFERENCE SIGNS LIST 1 Inspection unit 2 Inspection jig 10 Probe pin 20 Elastic portion 21, 22 Belt-shaped elastic piece 23 Gap 24 Horizontal belt portion 241 Contact surface 242 Rib 25 Curved belt portion 30 First contact portion 31 Contact portion 32 Through hole 33, 34 Plate surface 35 Side surface 351 Vertex 40 Second contact portion 41 Main body portion 411 Contact surface 42 Connection portion 43 Contact portion 100 Housing 101 Storage portion 110 Connection terminal

Claims (7)

第１方向に沿って弾性変形可能な弾性部と、
前記弾性部の前記第１方向の一端に設けられた第１接触部と、
前記弾性部の前記第１方向の他端に設けられた第２接触部と
を備え、
前記第１接触部は、
前記第１接触部の前記第１方向の両端のうち前記弾性部から遠い方の端部に位置する第１接点部を有し、
前記第２接触部は、
前記第２接触部の前記第１方向の両端のうち前記弾性部から遠い方の端部に位置する第２接点部を有し、
前記弾性部は、
前記第１方向に交差する第２方向に延びると共に前記第１方向に間隔を空けて配置された複数の横帯部と、隣接する前記横帯部に接続された少なくとも１つの湾曲帯部とを有し、
前記第１接点部と、前記第２接点部と、前記第１接触部および前記弾性部の接続部分と、前記第２接触部および前記弾性部の接続部分とが、前記弾性部の前記第２方向の中心を通りかつ前記第１方向に沿って延びる第１中心線に対して同じ側に配置され、
前記第１接触部および前記第２接触部の各々が、前記第１方向および前記第２方向に交差する第３方向に対向する一対の板面と、前記一対の板面に交差する側面とを有し、
少なくとも前記第１接触部の前記側面が、前記第２方向から見て、前記第３方向の中心を通りかつ前記第１方向に延びる第２中心線に対して非対称な形状を有している、プローブピン。 An elastic portion that is elastically deformable along a first direction;
a first contact portion provided at one end of the elastic portion in the first direction;
a second contact portion provided at the other end of the elastic portion in the first direction,
The first contact portion is
a first contact portion located at an end of the first contact portion farther from the elastic portion in the first direction;
The second contact portion is
a second contact portion located at an end of the second contact portion in the first direction that is farther from the elastic portion;
The elastic portion is
a plurality of horizontal band portions extending in a second direction intersecting the first direction and spaced apart in the first direction; and at least one curved band portion connected to an adjacent one of the horizontal band portions,
the first contact portion, the second contact portion, a connection portion of the first contact portion and the elastic portion, and a connection portion of the second contact portion and the elastic portion are disposed on the same side of a first center line that passes through a center of the elastic portion in the second direction and extends along the first direction,
each of the first contact portion and the second contact portion has a pair of plate surfaces facing each other in a third direction intersecting the first direction and the second direction, and a side surface intersecting the pair of plate surfaces;
A probe pin, wherein at least the side surface of the first contact portion has an asymmetric shape, when viewed from the second direction, with respect to a second center line that passes through the center in the third direction and extends in the first direction. 前記第１接触部および前記第２接触部の各々が、前記弾性部の前記第２方向の端に配置されている、請求項１のプローブピン。 The probe pin of claim 1, wherein each of the first contact portion and the second contact portion is disposed at an end of the elastic portion in the second direction. 前記第１接触部の前記側面の前記第１方向において前記第２接触部から離れた端部が、前記第２方向から見て、三角形状を有し、
前記第２接触部の前記側面の前記第１方向において前記第１接触部から離れた端部が、前記第２方向から見て、三角形状を有している、請求項１または２のプローブピン。 an end portion of the side surface of the first contact portion away from the second contact portion in the first direction has a triangular shape when viewed from the second direction;
3. The probe pin according to claim 1, wherein an end of the side surface of the second contact portion, which is remote from the first contact portion in the first direction , has a triangular shape when viewed from the second direction. 前記第２方向から見て、前記一対の板面の各々と前記側面とで形成される角部が、面取りされている、請求項１または２のプローブピン。 The probe pin of claim 1 or 2, wherein the corners formed by each of the pair of plate surfaces and the side surface when viewed from the second direction are chamfered. 前記第１接触部の前記側面の前記第１方向において前記第２接触部から離れた端部が、前記第２方向から見て、凹湾曲形状を有している、請求項１または２のプローブピン。 3. The probe pin according to claim 1, wherein an end of the side surface of the first contact portion , which is remote from the second contact portion in the first direction, has a concave curved shape when viewed from the second direction. 請求項１から５のいずれか１つのプローブピンと、
前記プローブピンが内部に収容されたハウジングと
を備える、検査治具。 A probe pin according to any one of claims 1 to 5;
and a housing in which the probe pin is housed. 請求項６の検査治具を少なくとも１つ備える、検査ユニット。 An inspection unit comprising at least one inspection jig according to claim 6.
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