JP6784928B2 - 被覆切削工具 - Google Patents
被覆切削工具 Download PDFInfo
- Publication number
- JP6784928B2 JP6784928B2 JP2018165117A JP2018165117A JP6784928B2 JP 6784928 B2 JP6784928 B2 JP 6784928B2 JP 2018165117 A JP2018165117 A JP 2018165117A JP 2018165117 A JP2018165117 A JP 2018165117A JP 6784928 B2 JP6784928 B2 JP 6784928B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- cutting tool
- upper layer
- less
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005520 cutting process Methods 0.000 title claims description 118
- 239000010410 layer Substances 0.000 claims description 306
- 239000000463 material Substances 0.000 claims description 61
- 239000002245 particle Substances 0.000 claims description 54
- 239000011247 coating layer Substances 0.000 claims description 51
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 31
- 239000011248 coating agent Substances 0.000 claims description 30
- 238000000576 coating method Methods 0.000 claims description 30
- 150000001875 compounds Chemical class 0.000 claims description 22
- 239000000460 chlorine Substances 0.000 claims description 19
- 238000001887 electron backscatter diffraction Methods 0.000 claims description 18
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 11
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 8
- 229910052801 chlorine Inorganic materials 0.000 claims description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- 229910052796 boron Inorganic materials 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 239000011195 cermet Substances 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 229910052582 BN Inorganic materials 0.000 claims description 5
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 5
- 229910010282 TiON Inorganic materials 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 5
- 239000010936 titanium Substances 0.000 description 35
- 238000000034 method Methods 0.000 description 24
- 239000013078 crystal Substances 0.000 description 23
- 239000000203 mixture Substances 0.000 description 22
- 238000012360 testing method Methods 0.000 description 18
- 238000005229 chemical vapour deposition Methods 0.000 description 16
- 239000002994 raw material Substances 0.000 description 14
- 239000000523 sample Substances 0.000 description 12
- 230000000694 effects Effects 0.000 description 9
- 238000011156 evaluation Methods 0.000 description 8
- 238000005259 measurement Methods 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 6
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 5
- 238000003754 machining Methods 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 230000001629 suppression Effects 0.000 description 5
- 238000009826 distribution Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical group [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- 229910002091 carbon monoxide Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 239000011295 pitch Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 229910002090 carbon oxide Inorganic materials 0.000 description 2
- 239000008119 colloidal silica Substances 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 238000013480 data collection Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000009970 fire resistant effect Effects 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical class [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- VRAIHTAYLFXSJJ-UHFFFAOYSA-N alumane Chemical compound [AlH3].[AlH3] VRAIHTAYLFXSJJ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- -1 carbonitrides Chemical class 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 102200082816 rs34868397 Human genes 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 239000013598 vector Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/148—Composition of the cutting inserts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0254—Physical treatment to alter the texture of the surface, e.g. scratching or polishing
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2222/00—Materials of tools or workpieces composed of metals, alloys or metal matrices
- B23B2222/16—Cermet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2222/00—Materials of tools or workpieces composed of metals, alloys or metal matrices
- B23B2222/28—Details of hard metal, i.e. cemented carbide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2222/00—Materials of tools or workpieces composed of metals, alloys or metal matrices
- B23B2222/88—Titanium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2224/00—Materials of tools or workpieces composed of a compound including a metal
- B23B2224/36—Titanium nitride
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2226/00—Materials of tools or workpieces not comprising a metal
- B23B2226/12—Boron nitride
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2226/00—Materials of tools or workpieces not comprising a metal
- B23B2226/18—Ceramic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/04—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner applied by chemical vapour deposition [CVD]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/08—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner applied by physical vapour deposition [PVD]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/10—Coatings
- B23B2228/105—Coatings with specified thickness
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/36—Multi-layered
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Drilling Tools (AREA)
Description
[1]
基材と、該基材の表面に形成された被覆層とを備える被覆切削工具であって、
前記被覆層は、前記基材側から前記被覆層の表面側に向かって順に積層された下部層、中間層及び上部層を含み、
前記下部層が、Tiと、C、N、O及びBからなる群より選ばれる少なくとも1種の元素とのTi化合物からなるTi化合物層を1層又は2層以上含有し、
前記中間層が、α型Al2O3を含有し、
前記上部層が、TiCNを含有し、
前記下部層の平均厚さが4.0μm以上10.0μm以下であり、
前記中間層の平均厚さが3.0μm以上10.0μm以下であり、
前記上部層の平均厚さが1.5μm以上6.5μm以下であり、
前記上部層の特定の領域における全粒界の合計長さ100%に対するΣ3粒界の長さの割合が20%以上60%以下であり、
前記上部層の(111)面の粒子の割合が、30面積%以上
である、被覆切削工具。
[2]
前記上部層の(111)面の粒子の割合が、55面積%以下である、[1]に記載の被覆切削工具。
[3]
前記上部層の塩素(Cl)の含有量が、0.1原子%以下である、[1]又は[2]に記載の被覆切削工具。
[4]
前記被覆層の平均厚さが、10.0μm以上25.0μm以下である、[1]〜[3]のいずれかに記載の被覆切削工具。
[5]
前記Ti化合物層は、TiN、TiC、TiCN、TiCNO、TiON及びTiB2からなる群より選ばれる少なくとも1種である、[1]〜[4]のいずれかに記載の被覆切削工具。
[6]
前記基材は、超硬合金、サーメット、セラミックス又は立方晶窒化硼素焼結体のいずれかである、[1]〜[5]のいずれかに記載の被覆切削工具。
本実施形態に用いる下部層は、Tiと、C、N、O及びBからなる群より選ばれる少なくとも1種の元素とのTi化合物からなるTi化合物層を1層又は2層以上含有する。本実施形態の被覆切削工具は、基材とα型酸化アルミニウム(α型Al2O3)を含有する中間層との間に、このような下部層を備えると、耐摩耗性及び密着性が向上する。
本実施形態に用いる中間層は、α型Al2O3を含有する。
本実施形態に用いる上部層は、TiCNを含有する。本実施形態の被覆切削工具は、上部層がTiCNを含有することにより、硬さが高くなるため、耐摩耗性が向上する。また、本実施形態の被覆切削工具は、TiCNを含有する上部層を、α型Al2O3を含有する中間層よりも外層に有する。本実施形態の被覆切削工具は、TiCNを含有する上部層を、α型Al2O3を含有する中間層よりも外層に有することにより、α型Al2O3層よりも先に上部層のTiCN層が被削材と接触することになる。これにより、本実施形態の被覆切削工具は、特に切削温度が上昇するまでのα型Al2O3層のクレータ摩耗を抑制できる。
なお、本実施形態において、塩素(Cl)の含有量は、後述の実施例に記載の方法により測定することができる。
例えば、Tiの窒化物層(以下、「TiN層」ともいう。)からなるTi化合物層は、原料組成をTiCl4:5.0〜10.0mol%、N2:20〜60mol%、H2:残部とし、温度を850〜950℃、圧力を300〜400hPaとする化学蒸着法で形成することができる。
基材の表面を洗浄した後、被覆層を化学蒸着法により形成した。まず、基材を外熱式化学蒸着装置に装入し、表1に示す原料ガス組成、温度及び圧力の条件の下、表2に組成を示す下部層を、第1層、第2層、第3層の順で、表2に示す平均厚さになるよう、基材の表面に形成した。次いで、CO2:0.5mol%、H2:99.5mol%のガス組成、1000℃の温度、及び60hPaの圧力の条件の下、1分間、下部層の表面に酸化処理を施した。次に、表1に示す原料ガス組成、温度及び圧力の条件の下、α型酸化アルミニウムからなる中間層を、表2に示す平均厚さになるよう、酸化処理を施した後の下部層の表面に形成した。最後、表3に示す原料ガス組成、温度及び圧力の条件の下、表2に示す組成の上部層を、表2に示す平均厚さになるよう、中間層の表面に形成した。こうして、発明品1〜11及び比較品1〜9の被覆切削工具を得た。
得られた試料の各層の平均厚さを下記のようにして求めた。すなわち、FE−SEMを用いて、被覆切削工具の刃先稜線部からすくい面の中心部に向かって50μmの位置の近傍における断面での3箇所の厚さを測定し、その相加平均値を平均厚さとして求めた。測定結果を表2に示す。
得られた試料の各層の組成は、被覆切削工具の刃先稜線部からすくい面の中心部に向かって50μmまでの位置の近傍の断面において、EDSを用いて測定した。測定結果を表2に示す。
得られた試料の上部層のΣ3粒界の長さを以下のとおり測定した。
被覆切削工具を基材の表面と平行な方向に上部層の断面が露出するまで研磨して観察面を得た。このとき、被覆層の厚さ方向において上部層の平均厚さの70%が残った位置で観察面を得た。また、得られた観察面を、コロイダルシリカを用いて研磨して鏡面観察面を得た。
得られた試料の上部層の(111)面の粒子の割合を以下のとおり算出した。
まず、得られた試料の上部層における、上部層の表面から、基材側に向かって0.5μmにあり、基材の表面と平行な断面をFE−SEMで観察し、FE−SEMに付属したEBSDを用いて、方位差が0度以上45度以下の範囲内にある各層の粒子断面の面積の合計を測定した。そして、方位差が0度以上45度以下の範囲内にある粒子の断面積を5度のピッチ毎に区分して、区分毎の粒子断面の面積を求めた。次に、方位差が0度以上10度未満の区分、10度以上20度未満の区分、20度以上30度未満の区分、及び30度以上45度以下の区分のそれぞれの区分の粒子断面の面積の合計を求めた。なお、0度以上45度以下の粒子断面の面積の合計は100面積%となる。これら各区分の内、方位差が0度以上10度未満の範囲内にある粒子の断面積を、方位差が0度以上45度以下の範囲内にある各層の粒子断面の面積の合計に対する比率として表したものを(111)面の粒子の割合とした。以上の測定結果を表4に示す。なお、EBSDによる測定は、以下のようにして行った。試料をFE−SEMにセットした。試料に70度の入射角度で、15kVの加速電圧及び1.0nA照射電流で電子線を照射した。測定範囲30μm×50μmにて、0.1μmのステップサイズというEBSDの設定で、各粒子の方位差及び断面積の測定を行った。測定範囲内における上部層の粒子断面の面積は、その面積に対応するピクセルの総和とした。すなわち、各層の粒子の、方位差に基づいた10度又は15度のピッチ毎の各区分おける粒子断面の面積の合計は、各区分に該当する粒子断面が占めるピクセルを集計し、面積に換算して求めた。
得られた試料の上部層の塩素(Cl)の含有量を以下のとおり測定した。
まず、被覆層の厚さを測定する時と同様の断面(鏡面観察面)を作製した。そして、上部層の断面を電子プローブ微小分析器(EPMA)により、測定した。上部層の厚さが50%の位置を3点以上測定し、その相加平均値をClの含有量とした。測定結果を表4に示す。
被削材:SCM440の丸棒、
切削速度:200m/分、
送り:0.30mm/rev、
切り込み:2.0mm、
クーラント:使用、
評価項目:試料が欠損又は最大逃げ面摩耗幅が0.3mmに至ったときを工具寿命とし、工具寿命までの加工時間を測定した。また、工具寿命に至った時における損傷状態をSEMで確認した。
被削材:S45Cの4本の溝入り丸棒、
切削速度:120m/分、
送り:0.30mm/rev、
切り込み:1.5mm、
クーラント:使用、
評価項目:試料が欠損又は最大逃げ面摩耗幅が0.3mmに至ったときを工具寿命とし、工具寿命までの衝撃回数を測定した。衝撃回数は、15000回までとした。
Claims (6)
- 基材と、該基材の表面に形成された被覆層とを備える被覆切削工具であって、
前記被覆層は、前記基材側から前記被覆層の表面側に向かって順に積層された下部層、中間層及び上部層を含み、
前記下部層が、Tiと、C、N、O及びBからなる群より選ばれる少なくとも1種の元素とのTi化合物からなるTi化合物層を1層又は2層以上含有し、
前記中間層が、α型Al2O3を含有し、
前記上部層が、TiCNを含有し、
前記下部層の平均厚さが4.0μm以上10.0μm以下であり、
前記中間層の平均厚さが3.0μm以上10.0μm以下であり、
前記上部層の平均厚さが1.5μm以上6.5μm以下であり、
前記被覆層の厚さ方向において前記上部層の平均厚さの50%以上90%以下が残った位置で、前記基材の表面と平行な方向に前記上部層の断面を露出させた観察面において、電子線後方散乱回折を備えた走査型電子顕微鏡によって観察する前記上部層の領域における全粒界の合計長さ100%に対するΣ3粒界の長さの割合が20%以上60%以下であり、
前記上部層の(111)面の粒子の割合が、30面積%以上である、被覆切削工具。 - 前記上部層の(111)面の粒子の割合が、55面積%以下である、請求項1に記載の被覆切削工具。
- 前記上部層の塩素(Cl)の含有量が、0.1原子%以下である、請求項1又は2に記載の被覆切削工具。
- 前記被覆層の平均厚さが、10.0μm以上25.0μm以下である、請求項1〜3のいずれか1項に記載の被覆切削工具。
- 前記Ti化合物層は、TiN、TiC、TiCN、TiCNO、TiON及びTiB2からなる群より選ばれる少なくとも1種である、請求項1〜4のいずれか1項に記載の被覆切削工具。
- 前記基材は、超硬合金、サーメット、セラミックス又は立方晶窒化硼素焼結体のいずれかである、請求項1〜5のいずれか1項に記載の被覆切削工具。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018165117A JP6784928B2 (ja) | 2018-09-04 | 2018-09-04 | 被覆切削工具 |
US16/554,067 US11007579B2 (en) | 2018-09-04 | 2019-08-28 | Coated cutting tool |
EP19195136.7A EP3620552A1 (en) | 2018-09-04 | 2019-09-03 | Coated cutting tool |
CN201910829424.1A CN110871279B (zh) | 2018-09-04 | 2019-09-03 | 被覆切削工具 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018165117A JP6784928B2 (ja) | 2018-09-04 | 2018-09-04 | 被覆切削工具 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020037150A JP2020037150A (ja) | 2020-03-12 |
JP6784928B2 true JP6784928B2 (ja) | 2020-11-18 |
Family
ID=67847653
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018165117A Active JP6784928B2 (ja) | 2018-09-04 | 2018-09-04 | 被覆切削工具 |
Country Status (4)
Country | Link |
---|---|
US (1) | US11007579B2 (ja) |
EP (1) | EP3620552A1 (ja) |
JP (1) | JP6784928B2 (ja) |
CN (1) | CN110871279B (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3607110B1 (en) * | 2017-04-07 | 2023-11-01 | Sandvik Intellectual Property AB | Coated cutting tool |
JP7167966B2 (ja) * | 2020-07-08 | 2022-11-09 | 株式会社タンガロイ | 被覆切削工具 |
JP7167965B2 (ja) * | 2020-07-08 | 2022-11-09 | 株式会社タンガロイ | 被覆切削工具 |
JP7302617B2 (ja) * | 2021-02-26 | 2023-07-04 | 株式会社タンガロイ | 被覆切削工具 |
WO2022244241A1 (ja) | 2021-05-21 | 2022-11-24 | 住友電工ハードメタル株式会社 | 切削工具 |
CN115697600B (zh) * | 2021-05-21 | 2025-05-09 | 住友电工硬质合金株式会社 | 切削工具 |
WO2022244243A1 (ja) | 2021-05-21 | 2022-11-24 | 住友電工ハードメタル株式会社 | 切削工具 |
US12202051B2 (en) | 2023-06-22 | 2025-01-21 | Sumitomo Electric Hardmetal Corp. | Cutting tool |
KR20250068741A (ko) | 2023-06-22 | 2025-05-16 | 스미또모 덴꼬오 하드메탈 가부시끼가이샤 | 절삭 공구 |
CN117921043B (zh) * | 2024-03-22 | 2024-06-11 | 赣州澳克泰工具技术有限公司 | 一种cvd涂层刀具及其制备方法 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2590139B2 (ja) | 1987-10-14 | 1997-03-12 | 住友電気工業株式会社 | 被覆切削工具 |
JPH04103754A (ja) | 1990-08-22 | 1992-04-06 | Nippon Steel Corp | セラミック被覆材料とその製造方法 |
US5915162A (en) | 1993-05-31 | 1999-06-22 | Sumitomo Electric Industries, Ltd. | Coated cutting tool and a process for the production of the same |
JPH0890310A (ja) | 1994-09-19 | 1996-04-09 | Mitsubishi Materials Corp | 表面被覆切削工具 |
JP3833288B2 (ja) | 1994-10-04 | 2006-10-11 | 住友電工ハードメタル株式会社 | 被覆硬質合金 |
WO1996010658A1 (fr) | 1994-10-04 | 1996-04-11 | Sumitomo Electric Industries, Ltd. | Alliage dur revetu |
SE526604C2 (sv) | 2002-03-22 | 2005-10-18 | Seco Tools Ab | Belagt skärverktyg för svarvning i stål |
JP4453270B2 (ja) * | 2003-04-21 | 2010-04-21 | 住友電気工業株式会社 | プリント基板加工用小径ドリル |
JP4518258B2 (ja) * | 2004-08-11 | 2010-08-04 | 三菱マテリアル株式会社 | 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具 |
JP4854359B2 (ja) | 2006-03-29 | 2012-01-18 | 京セラ株式会社 | 表面被覆切削工具 |
JP5099586B2 (ja) * | 2007-08-31 | 2012-12-19 | 三菱マテリアル株式会社 | 硬質被覆層がすぐれた耐欠損性を発揮する表面被覆切削工具 |
JP2010207977A (ja) * | 2009-03-11 | 2010-09-24 | Mitsubishi Materials Corp | 表面被覆切削工具 |
JP2012192480A (ja) * | 2011-03-16 | 2012-10-11 | Mitsubishi Materials Corp | 硬質被覆層が優れた耐異常損傷性を発揮する表面被覆切削工具 |
JP2012196726A (ja) | 2011-03-18 | 2012-10-18 | Kyocera Corp | 切削工具 |
JP6024981B2 (ja) * | 2012-03-09 | 2016-11-16 | 三菱マテリアル株式会社 | 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具 |
JP2013208698A (ja) * | 2012-03-30 | 2013-10-10 | Mitsubishi Materials Corp | 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具 |
JP6272356B2 (ja) * | 2013-12-26 | 2018-01-31 | 京セラ株式会社 | 切削工具 |
JP6191873B2 (ja) * | 2014-03-20 | 2017-09-06 | 三菱マテリアル株式会社 | すぐれた耐チッピング性を有する表面被覆切削工具 |
JP6657594B2 (ja) * | 2014-05-16 | 2020-03-04 | 三菱マテリアル株式会社 | 表面被覆切削工具 |
EP3000913B1 (en) | 2014-09-26 | 2020-07-29 | Walter Ag | Coated cutting tool insert with MT-CVD TiCN on TiAI(C,N) |
JP6738556B2 (ja) * | 2015-06-26 | 2020-08-12 | 三菱マテリアル株式会社 | 表面被覆切削工具 |
JP6044861B1 (ja) * | 2016-04-08 | 2016-12-14 | 住友電工ハードメタル株式会社 | 表面被覆切削工具およびその製造方法 |
JP6973699B2 (ja) * | 2016-04-14 | 2021-12-01 | 住友電工ハードメタル株式会社 | 表面被覆切削工具およびその製造方法 |
JP6045010B1 (ja) * | 2016-04-14 | 2016-12-14 | 住友電工ハードメタル株式会社 | 表面被覆切削工具およびその製造方法 |
JP7101178B2 (ja) | 2017-01-26 | 2022-07-14 | ヴァルター アーゲー | コーティング付き切削工具 |
JP6999383B2 (ja) | 2017-11-29 | 2022-01-18 | 株式会社タンガロイ | 被覆切削工具 |
JP7055761B2 (ja) * | 2019-02-15 | 2022-04-18 | 株式会社タンガロイ | 被覆切削工具 |
-
2018
- 2018-09-04 JP JP2018165117A patent/JP6784928B2/ja active Active
-
2019
- 2019-08-28 US US16/554,067 patent/US11007579B2/en active Active
- 2019-09-03 CN CN201910829424.1A patent/CN110871279B/zh active Active
- 2019-09-03 EP EP19195136.7A patent/EP3620552A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2020037150A (ja) | 2020-03-12 |
US20200070253A1 (en) | 2020-03-05 |
CN110871279A (zh) | 2020-03-10 |
EP3620552A1 (en) | 2020-03-11 |
CN110871279B (zh) | 2021-06-08 |
US11007579B2 (en) | 2021-05-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6784928B2 (ja) | 被覆切削工具 | |
JP6999383B2 (ja) | 被覆切削工具 | |
JP7060528B2 (ja) | 被覆切削工具 | |
JP7055761B2 (ja) | 被覆切削工具 | |
JP6727553B2 (ja) | 被覆切削工具 | |
JP6876278B2 (ja) | 被覆切削工具 | |
JP6708261B2 (ja) | 被覆切削工具 | |
JP6977746B2 (ja) | 被覆切削工具 | |
US11253927B2 (en) | Coated cutting tool | |
CN113909572B (zh) | 被覆切削工具 | |
CN113909573B (zh) | 被覆切削工具 | |
JP7302617B2 (ja) | 被覆切削工具 | |
JP7141601B2 (ja) | 被覆切削工具 | |
JP4811787B2 (ja) | 硬質被覆層の改質κ型酸化アルミニウム層が優れた粒界面強度を有する表面被覆サーメット製切削工具 | |
JP7137143B2 (ja) | 被覆切削工具 | |
JP7274107B2 (ja) | 被覆切削工具 | |
JP2006297517A (ja) | 高硬度鋼の高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190419 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200616 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200805 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200923 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20201006 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6784928 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |