JP6721913B2 - Method for manufacturing fluid control device, fluid control device, and protective equipment for joint - Google Patents

Description

The present invention relates to a method for manufacturing a fluid control device, a fluid control device, and a joint protector used therein.

Gas is supplied to a process chamber in a system for manufacturing a thin film such as a semiconductor film, an insulating film, and a conductive film. The gas supply system is configured by connecting various fluid control devices such as an on-off valve through pipes. Joints are used to connect fluid control devices to each other or to connect fluid control devices to piping.

FIG. 10: is a figure which shows a part of conventional fluid control apparatus. The fluid control device 1 is configured by welding the base end portions of the joint sleeve 3 to both side surfaces of the body 2 on which the drive unit (not shown) is mounted, with the joint sleeve 3 inserted into the through hole 4A of the nut 4. Has been done. A bearing 5 is provided between the nut 4 and the back surface of the seal portion 3A at the tip of the joint sleeve 3 to facilitate rotation of the nut 4. When shipping the fluid control device 1, in order to restrict the movement of the nut 4, particularly to prevent the nut 4 from moving to the body 2 side and protruding the seal portion 3A, a cut is made in the resin cylindrical member 6A. 6B is inserted to form the stopper 6, and the stopper 6 is attached to the joint sleeve 3. In this way, the seal portion 3A is protected from being accidentally projected and damaged during the movement.

By the way, in a push type dispenser, as a means for limiting the movement of a vertically moving piston linked with a nozzle head or adjusting the moving range, for example, elastic attachment of a stopper is considered ( Patent Documents 1 to 3).

JP, 2002-273277, A JP 2004-203456 A JP, 2012-153409, A

In the fluid control device described above, the stopper for restricting the movement of the nut is made by making a cut in a resin cylindrical member, so that the restoring force of the cylindrical member tends to maintain the cylindrical shape. Therefore, the stopper is attached elastically in close contact with the joint sleeve, and since the cylindrical member is thin and difficult to grip, it takes time to remove the stopper. Further, when the fluid control device is assembled in a clean room with a high degree of cleanliness, the worker wears gloves and works, and therefore it is difficult for the worker to attach and detach such a stopper. In particular, due to the cut in the cylindrical member, the cut portion of the cylindrical end portion is likely to be sharp, and the difficulty of attaching and detaching the stopper increases.

Therefore, in view of the above problems, it is an object of the present invention to provide a method of manufacturing a fluid control device, which reduces the number of times of attaching and detaching a member such as a stopper from a joint sleeve when manufacturing the fluid control device. .. An object of the present invention is to provide a joint protection tool used in the manufacturing method, and also to provide a fluid control device to which the joint protection tool is attached. Another object of the present invention is to provide a joint protector that can be easily attached to and detached from the joint sleeve.

In order to achieve the above-mentioned object and other related objects, the present invention provides
By inserting the joint sleeve into the through hole of the nut and welding the joint sleeve to the body for the fluid control device body, the nut is moved by moving the nut in the direction away from the body along the axis of the joint sleeve. Where the seal portion of the joint sleeve is accommodated and the seal portion projects from the nut by the movement of the nut in a direction approaching the body along the axis of the joint sleeve,
The joint sleeve is provided with a main body portion having an inner peripheral surface having a diameter larger than an outer diameter of the joint sleeve so as to have a gap with the outer peripheral surface around the axis, and the main body portion is provided with a slit for mounting on the joint sleeve. By attaching a joint protection device to the joint sleeve, the joint sleeve is welded in a state where the seal portion is protected by preventing the nut from moving and preventing the seal portion from protruding from the nut. This is realized by a method for manufacturing a fluid control device, which cleans the formed body.

The present invention is a joint sleeve welded to a body in a state of being inserted into a through hole of a nut, wherein the nut moves in a direction away from the body along an axis of the joint sleeve, whereby the nut is the joint. Removable with respect to the joint sleeve in a state where the seal portion projects from the nut by accommodating the seal portion of the sleeve and moving the nut along the axis of the joint sleeve toward the body. A joint protection device is provided. The joint protector includes a main body portion having an inner peripheral surface having a diameter larger than the outer diameter of the joint sleeve so as to have a gap with the outer peripheral surface around the shaft of the joint sleeve, and the main body portion is detachable from the joint sleeve. Equipped with a slit for When the joint protector is attached to the joint sleeve, the movement of the nut is suppressed, and the seal portion of the joint sleeve is prevented from protruding from the nut to protect the seal portion.

A knob is provided on the opposite side of the slit with the center of the main body interposed.
The knob portion is preferably provided so as to project, and the projecting length is set so as not to project from the body when the joint protective device is mounted on the joint sleeve. The diameter of the inner peripheral surface of the body is preferably 1.1 to 1.3 times the outer diameter of the joint sleeve.
Preferably, the main body portion is formed of a tubular portion having the inner peripheral surface, and a pair of guide portions for mounting on the joint sleeve is provided at an end portion of the tubular portion forming the slit. .. The guide portion is set thicker than the wall thickness of the tubular portion. The guide portion has a surface facing the slit, and the flat surfaces of the pair of guide portions are spread at an angle of 70 to 100 degrees. The width of the slit is set to 0.5 to 0.6 times the outer diameter of the joint sleeve.

In the joint protector, preferably, the main body portion is cut out from the slit side at an intermediate portion in the moving direction of the nut, and has the slit separately on both sides in the moving direction of the nut. ing. Engaging portions for connection may be provided on opposite side surfaces of a plurality of pieces divided in the moving direction of the nut, and the engaging portions may be engaged to connect the plurality of pieces. ..

The fluid control device of the present invention is configured such that the joint sleeve is inserted into the through hole of the nut, the joint sleeve is connected to the body, and the drive unit is mounted on the body, and the nut is the shaft of the joint sleeve. The nut accommodates the seal portion of the joint sleeve by moving in a direction away from the body along the seal portion, and the nut moves in a direction along the axis of the joint sleeve toward the body. Of the fluid control device main body, and the joint protector which is mounted on the joint sleeve.

According to the present invention, since the joint protection device is mounted with a gap around the axis of the joint sleeve, it is possible to wash the joint protection device while the joint protection device is mounted on the joint sleeve. It becomes easy to remove dirt from the inner peripheral surface of the main body. Further, by mounting the joint protector on the joint sleeve, movement of the nut is suppressed, and the seal portion of the joint sleeve is protected from protruding from the nut to protect the joint sleeve. In particular, when the inner peripheral surface of the main body of the joint protector has a gap with the outer peripheral surface around the axis of the joint sleeve and the outer peripheral surface of the main body has a knob, the knob This makes it easy to put on and take off the joint sleeve. Therefore, it can be easily attached to and detached from the joint sleeve, and the seal portion of the joint sleeve can be protected.

It is a perspective view showing a fluid control device concerning an embodiment of the present invention. It is a perspective view showing a protector for joints concerning a 1st embodiment of the present invention. It is sectional drawing of the protective gear for joints shown in FIG. It is a perspective view which shows the protector for joints which concerns on 2nd Embodiment of this invention. FIG. 5 is a side view of the joint protector shown in FIG. 4. The joint protective equipment which concerns on 3rd Embodiment of this invention is shown, (a) and (b) is a perspective view which shows each piece which comprises a joint protective equipment, (c) is a perspective view of a joint protective equipment. is there. FIG. 7 is a side view of the joint protector shown in FIG. 6. It is a flow figure about the method of manufacturing the fluid control equipment concerning the embodiment of the present invention. It is a figure showing the state where the joint protective equipment concerning the embodiment of the present invention is attached to the joint sleeve. It is a figure which shows a part of conventional fluid control apparatus.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[Main body of fluid control device to which protective equipment for fittings is attached]
FIG. 1 is a perspective view showing a fluid control device 10 according to an embodiment of the present invention. The fluid control device 10 is configured by mounting a joint protection device 20 on a fluid control device body 11. The fluid control device body 11 includes a body 12 having a flow passage therein, a joint sleeve 13 welded to a side surface of the body 12 and connected to a base end portion thereof, and a nut 14 attached to the joint sleeve 13. .. The body 12 serves as a pedestal of a drive unit such as a fluid operation actuator for opening and closing a valve body for controlling fluid inside, for example.

The joint sleeve 13 has a flow passage formed therein in the axial direction, has a seal portion 13A at the tip, and has a seal portion 13A at the base end side (end side welded to the body 12). ), the diameter gradually decreases and becomes, for example, large diameter, medium diameter, and small diameter. The nut 14 protects the seal portion 13A from scratches and the like by accommodating the seal portion 13A of the joint sleeve 13. When the nut 14 is fastened to a mating coupling (not shown), the tip of the coupling and the seal portion 13A of the joint sleeve 13 pinch a gasket (not shown), so that a part of the fluid supply system is closed. Make up the department. In order to facilitate the construction of the fluid supply system, the bearing 15 is attached to the back portion of the seal portion 13A of the joint sleeve 13 at a portion (also referred to as a flange portion) where the outer diameter gradually decreases. May be made easier to rotate. The nut 14 is formed into a tubular shape having a through hole whose both ends are open, and the end portion of the nut 14 on the body 12 side is a through hole having a small diameter so as to engage with a flange portion projecting around the axis of the joint sleeve 13, Hereinafter, this is referred to as a bag-shaped nut.

The base end portion of the joint sleeve 13 is welded to the body 12 in a state where the joint sleeve 13 is inserted into the through hole 14A of the nut 14, and the small-diameter through hole 14A of the nut 14 is formed in the middle portion of the joint sleeve 13 and the body 12. Since the nut 14 is larger than the small diameter portion on the base end side, the nut 14 is movable in the axial direction of the joint sleeve 13. That is, the nut 14 accommodates the seal portion 13</b>A of the joint sleeve 13 by the movement of the nut 14 in the direction away from the body 12 along the axis of the joint sleeve 13. In addition, the seal portion 13A is exposed and protrudes from the nut 14 by the movement of the nut 14 along the axis of the joint sleeve 13 toward the body 12. Here, the body 12 in the main body of the fluid control device is also referred to as a body for the main body of the fluid control device.

[Protective equipment for joints]
The joint protector 20 according to the first embodiment of the present invention is, as shown in FIG. 1, a joint sleeve welded to the body 12 in a state where the joint sleeve 13 is inserted into the through hole 14A of the bag-shaped nut 14. It is attached to 13. FIG. 2 is a perspective view showing the joint protector 20 according to the first embodiment of the present invention, and FIG. 3 is a sectional view thereof.

The joint protector 20 includes a main body portion 22 having an inner peripheral surface 21 having a diameter larger than the outer diameter of the joint sleeve 13 so as to have a gap with the outer peripheral surface 13B around the axis of the joint sleeve 13, and the main body portion 22 is a joint. A slit 24 for attaching and detaching the sleeve 13 is provided. In the form shown in FIG. 1, the knob portion 23 is formed so as to project from the outer peripheral surface of the body portion 22, and is provided so as to project on the opposite side (opposite side) to the slit 24 with respect to the center of the body portion 22. ing.

By mounting the joint protector 20 on the joint sleeve 13, the nut 14 is restrained from moving in the axial direction of the joint sleeve 13. That is, the distance between the back surface 14B of the nut 14 and the seal portion 13A of the joint sleeve 13 is regulated within a certain range, and the distance between the back surface 14B of the nut 14 and the side surface 12B of the body 12 is regulated within a certain range. Therefore, the seal portion 13A of the joint sleeve 13 is protected from protruding from the nut 14 and the seal portion 13A is protected.

Next, a specific form of the joint protector 20 will be further described with reference to FIGS. 2 and 3. The main body portion 22 of the joint protection device 20 is configured by a tubular portion 25 having an inner peripheral surface 21, and the end portion 25A of the tubular portion 25 forming the slit 24 is attached to the joint sleeve 13. Is provided with a guide portion 25B. The guide portion 25B has a thickness greater than the thickness of the portion of the tubular portion 25 other than the end portion 25A. The pair of guide portions 25B is expanded outward from the slit 24, and the guide portion 25B is formed in a flat shape in that direction. Therefore, the flat surface of the guide portion 25B functions as a guide when the guide sleeve 25B is attached to the joint sleeve 13 and is easily inserted. The thickness of the portion forming the plane is thicker than the thickness of the portion of the tubular portion 25 other than the end portion 25A. In addition, the guide portion 25B is rounded on the opposite side to the facing direction, so that the workability is improved.

The knob 23 of the joint protector 20 is provided so as to protrude on the opposite side of the slit 24 with the center of the main body 22 interposed therebetween. The knob 23 has a round shape such as a substantially spherical shape and a substantially elliptical shape. The cross section of the picking portion 23 may be a polygon such as a triangle or a square, but it is preferable that there is no acute angle so that particles do not accumulate. The protruding length of the knob 23 from the outer peripheral surface of the main body 22 (H shown in FIG. 9), that is, the joint protector 20 and the joint sleeve 13 when the joint protector 20 is attached to the joint sleeve 13. The length H from the contact portion to the tip of the knob 23 is set so as not to protrude from the body 12 shown in FIG. 9 when the joint protector 20 is attached to the joint sleeve 13. For example, it is set so as not to project downward from the bottom surface 12C of the body 12. This is to prevent the picking portion 23 from interfering with the workbench when the body 12 in which the joint protector 20 is attached to the joint sleeve 13 is placed on the workbench or the like, thereby deteriorating workability.

As shown in the cross-sectional view of FIG. 3, the main body portion 22 of the joint protection device 20 has an inner peripheral surface 21 having a diameter (large diameter) D longer than the outer diameter d of the joint sleeve 13. When the cross section of the inner peripheral surface 21 is not a circular shape but an elliptical shape, it is approximated by a circular shape having an area equivalent to the area surrounded by the inner peripheral surface 21, and the diameter of the approximated circle is the joint sleeve. The diameter may be larger than the outer diameter d of 13. When the inner peripheral surface 21 of the main body portion 22 comes into close contact with the joint sleeve 13, the outer surface and the inner peripheral surface of the joint sleeve 13 will not be damaged even if the joint sleeve 13 is washed after welding the joint sleeve 13 to the body 12 in the working steps described later. A residue may remain between the surface 21 and the surface. On the contrary, if the inner peripheral surface 21 is too large, the inner sleeve 21 may be separated from the joint sleeve 13. Therefore, the equivalent cross-sectional diameter D of the hollow cross-section of the main body portion 22 is about 1.1 to 1.3 times the outer diameter d of the joint sleeve 13, particularly preferably 1.2±0.05 times the outer diameter d. It is good to have The cross section of the inner peripheral surface 21 is not limited to a circular shape or an elliptical shape, and may be, for example, a rectangular shape as long as it can be attached to and detached from the joint sleeve 13.

As the material of the joint protection tool 20, Teflon (registered trademark) may be used like a conventional stopper, but an inexpensive resin such as polypropylene having chemical resistance and heat resistance can be used.

As shown in the cross-sectional view of FIG. 3, the main body portion 22 of the joint protection device 20 includes a slit 24 for attaching to and detaching from the joint sleeve 13. If the slit 24 is wide, it becomes easy to separate from the joint sleeve 13, while if the slit 24 is narrow, it becomes difficult to mount it on the joint sleeve 13. When the material of the joint protector 20 is the above-mentioned material, the dimension W of the slit 24 is preferably 0.5 to 0.6 times the outer diameter d of the joint sleeve 13.

As shown in the cross-sectional view of FIG. 3, the main body portion 22 of the joint protection device 20 includes a guide portion 25B so as to form the slit 24. The guide portion 25B is thicker than the substantially C-shaped ring portion 22A of the main body portion 22 excluding the guide portion 25B, that is, the tubular portion 25. This is because the guide portion 25B facilitates attachment to the joint sleeve 13. The pair of guide portions 25B (a pair of guide portions) presents a flat surface on the slit side, and the pair of flat surfaces form 70 degrees to 100 degrees. This is because if the angle formed by the planes of the guide portions 25B is too large or too small, the fitting of the joint sleeve 13 will not be easy.

FIG. 4 is a perspective view showing a joint protector 20 according to the second embodiment of the present invention, and FIG. 5 is a side view of the joint protector 20 shown in FIG. Portions that are the same as or correspond to those of the joint protector 20 shown in FIGS. 2 and 3 are denoted by the same reference numerals. In the joint protector 20 according to the second embodiment, a groove 26 is provided by cutting out from the slit 24 side in the axially intermediate portion of the main body portion 22, and the slit 24 and the guide portion 25B are separated on both axial sides. There is. Here, the axial direction of the main body portion 22 is the same as the axial direction of the joint sleeve 13. In the joint protector 20 according to the second embodiment, unlike the first embodiment, the ratio of the inner peripheral surface 21 of the main body portion 22 covering the outer peripheral surface 13B of the joint sleeve 13, that is, the area ratio becomes small, and the joint sleeve The outer peripheral surface 13B of 13 can be easily exposed, and cleaning efficiency can be improved.

Next, a joint protector according to the third embodiment of the present invention will be described. The length of the joint sleeve 13 to which the joint protector 20 is attached is set in the axial direction according to the specifications of the fluid supply line and the like. Therefore, in the joint protector 20 that is mounted on the joint sleeve that is relatively long in the axial direction, one or more portions of the body portion 22, the knob portion 23, and the guide portion 25B are divided into pieces in the axial direction. Thus, by providing the engaging portions on the opposite side surfaces of the pieces, the opposite side surfaces of the plurality of pieces can be engaged with each other and integrated. The engaging portion may be formed by, for example, forming concave portions and convex portions on opposite side surfaces of one and the other of the pieces, and fitting the concave portions and the convex portions together so as to join them to each other. The concavo-convex portion may be not only the concavo-convex shape, but also a pin and a pin insertion hole. The length in the axial direction can be appropriately set, and the parts can be shared.

FIG. 6 shows a joint protector according to a third embodiment of the present invention, (a) and (b) are perspective views showing respective pieces constituting the joint protector, and (c) is a joint protector. FIG. 7 is a perspective view, and FIG. 7 is a side view of the joint protector shown in FIG. 6. 6(a) and 6(b) are shown so that the surfaces of the pieces facing each other are in front of the paper surface. For example, as shown in FIGS. 6 and 7, the joint protector 30 according to the third embodiment of the present invention is configured by assembling a plurality of pieces 27A and 27B. The main body portion 22, the knob portion 23, and the guide portion 25B are divided into a plurality of pieces 27A, 27B corresponding to the axial direction of the joint sleeve 13 of the mounting destination, and the joint protector 30 includes a plurality of pieces 27A. , 27B are assembled. A plurality of pieces 27A and 27B are integrated by providing either the assembling convex portion 29A or the concave portion 29B on the facing surface 28 of each piece 27A, 27B and fitting the convex portion 29A into the concave portion 29B. It Also in the third embodiment, it is preferable to provide a groove as in the second embodiment to facilitate cleaning of the outer peripheral surface 13B of the joint sleeve 13.

[Fluid control equipment]
As shown in FIG. 1, in the fluid control device 10 according to the present embodiment, the joint sleeve 13 is inserted into the through hole 14</b>A of the bag-shaped nut 14, the joint sleeve 13 is welded to the body 12, and the body 12 has a drive unit. As an example, a fluid control device body 11 configured by mounting a fluid operation actuator 16 and a joint protector 20 mounted on a joint sleeve 13 of the fluid control device body 11 are configured as The protective equipment 20 is detachable from the joint sleeve 13 by an operator.

Since the joint protector 20 is attached to the joint sleeve 13, the nut 14 is prevented from moving in the axial direction of the joint sleeve 13, and the nut 14 does not move to the body 12 side more than necessary. The seal portion 13A of the sleeve 13 does not protrude from the nut 14. Therefore, the seal portion 13A of the joint sleeve 13 is protected from impact or scratch. The fluid control device 10 may be air or a manual on-off valve.

[Fluid control device manufacturing method]
A method of manufacturing the fluid control device according to the embodiment of the present invention will be described. FIG. 8 is a flow chart showing a method for manufacturing a fluid control device according to the embodiment of the present invention.

First, at the welding location, the joint sleeve 13 is welded and connected so as to correspond to the flow path in the body 12 (STEP 1). At this time, the joint sleeve 13 is inserted into the through hole 14A of the bag-shaped nut 14. In this state, the nut 14 moves in the direction away from the body 12 along the axis of the joint sleeve 13 so that the nut 14 accommodates the seal portion 13A of the joint sleeve 13 and the body 12 extends along the axis of the joint sleeve 13. When the nut 14 moves in the direction approaching, the seal portion 13A is exposed and protrudes from the nut 14.

Next, the joint protectors 20 and 30 according to the respective embodiments of the present invention are attached to the joint sleeve 13 of a work-in-process product in which the joint sleeve 13 is welded to the body 12. At the time of mounting, the operator picks the grip portion 23, inserts it through the slit 24 while using the guide portion 25B, and mounts the joint protectors 20 and 30 on the joint sleeve 13. In this state, the movement of the nut 14 is suppressed, and the seal portion 13A does not protrude from the nut 14, so the seal portion 13A is protected. Then, the plurality of bodies 12 to which the joint sleeves 13 are welded are transported to the cleaning place.

After that, at the cleaning place, one or a plurality of such work-in-progress products are housed in a cleaning net, if necessary, and then cleaned by ultrasonic waves or the like (STEP 2). As shown in FIG. 9, the weight of the knob portion 23 causes the knob portion 23 of the joint protection device 20, 30 to face vertically downward. Since the work-in-process product is immersed in the cleaning liquid in such a state, the guide portion 25B of the main body portion 22 and its vicinity easily remain in contact with the joint sleeve 13. However, the contact portion between the inner peripheral surface 21 of the joint protector 20, 30 and the joint sleeve 13 can be reduced as much as possible, and the entire outer peripheral surface 13B of the joint sleeve 13 can be cleaned by rocking during cleaning. Thereby, the residue attached to the joint sleeve 13 can be removed. Further, in the case of cleaning while flowing the cleaning liquid, force is applied to the knob 23 by the flow of the cleaning liquid while the knob 23 is caught by the joint sleeve 13, and the knob 23 rotates around the joint sleeve 13. .. Therefore, the welded portion of the joint sleeve 13 and the body 12 and the periphery thereof, the outer peripheral surface of the joint sleeve 13 and the like can be cleaned more efficiently.

FIG. 9 is a view showing a state in which the joint protectors 20 and 30 are attached to the joint sleeve 13. The outer peripheral surface 13B of the joint sleeve 13 and the inner peripheral surface 21 of the joint protectors 20, 30 are in contact with each other only at a small portion as indicated by reference numeral 40. That is, a crescent-shaped gap is formed between the outer peripheral surface 13B of the joint sleeve 13 and the inner peripheral surfaces 21 of the joint protectors 20, 30. Therefore, this gap facilitates operations such as cleaning and drying.

Conventionally, a stopper was detached from a joint sleeve of a work-in-process product transported to a cleaning place for cleaning, and when the cleaning was completed, the stopper was attached to the joint sleeve for transportation to the inspection place. In the embodiment of the present invention, since the joint protectors 20 and 30 are cleaned while being attached to the joint sleeve 13, work efficiency is improved. Since the joint protectors 20 and 30 themselves are also washed at the time of washing, the cleanliness of the fluid control device is also improved.

When the cleaning is completed, the body with the joint sleeve in process is transported to the inspection place. Then, at the inspection place, the operator picks the knob 23 of the joint protector 20, 30 to separate it from the joint sleeve 13 and remove it, and inspects it according to the specifications such as whether there is any scratch or stain (STEP 3). The joint protectors 20 and 30 are attached to the joint sleeve 13 of the work-in-process that has passed the inspection in the same procedure as described above.

Next, the body with the joint sleeve in process is transported to a cleaning place in a super clean room with high cleanliness. Therefore, as in STEP 2, the worker cleans the body with the joint sleeve in the process (STEP 4), and then, after a predetermined process, is transported to the assembly place. At the assembly place, an assembly work is performed such as attaching the fluid operation actuator 16 determined by the specifications to the body 12 (STEP 5).

The in-process hood with joint sleeve is then transported to the inspection location in the super clean room. Therefore, the worker removes the joint protectors 20, 30 and causes a gas for leak inspection to flow in the flow paths of the joint sleeve 13 and the body 12 to perform a leak inspection and perform a final inspection (STEP 6). When performing the final inspection, the operator picks the knob 23 of the joint protective equipment 20, 30 and removes it from the joint sleeve 13, and the final inspection is performed according to the inspection items. The joint protectors 20 and 30 are attached to the joint sleeve 13 of the work-in-process that has passed the final inspection in the same procedure as described above.

Then, the joint protectors 20 and 30 are attached to the joint sleeve 13 of the work-in-process product that has passed the final inspection in the same procedure as described above, and the joint protector 20 and 30 are transported to the packaging work place in the super clean room.

Finally, at the packaging location, the work-in-process product is housed in a vacuum pack and vacuum-packaged (STEP 7).

As described above, in the manufacturing method according to the embodiment of the present invention, it is not necessary to remove the joint protectors 20 and 30 from the joint sleeve 13 before cleaning and to attach the joint protector to the joint sleeve 13 after cleaning, and thus work efficiency is improved. .. By using the joint protector 20 or 30 according to the embodiment of the present invention, it is possible to perform various operations such as cleaning, carrying in and out while the joint sleeve 13 is mounted, and detaching from the joint sleeve 13. Therefore, the work efficiency is further improved.

The procedure of the method for manufacturing the fluid control device can be appropriately changed. For example, after welding the joint sleeve 13 to the body 12, it is inspected whether or not the standard is satisfied, and then the joint protector 20 is installed. It may be attached to the joint sleeve 13 and washed.

The embodiments of the present invention are not limited to the illustrated aspects and the matters described above, and may be appropriately modified within the scope of the present invention. For example, by coloring the joint protectors 20 and 30 according to the length of the joint sleeve 13 and the presence/absence of a bearing, it is possible to eliminate mistakes in the parts for work.

10: Fluid control device 11: Fluid control device body 12: Body 13: Joint sleeve 13A: Seal part
13B: Outer peripheral surface 14: Nut 14A: Through hole 14B: Back surface 15: Bearing 16: Actuator 20 for fluid operation 20, 30: Protective equipment for joint 21: Inner peripheral surface 22: Main body portion 22A: Ring portion 23: Picking portion 24: Slit 25: tubular portion 25A: end portion 25B of tubular portion: guide portion 26: grooves 27A and 27B: piece 28: facing surface 29A: convex portion 29B: concave portion

Claims (12)

By inserting the joint sleeve into the through hole of the nut and welding the joint sleeve to the body for the fluid control device body, the nut is moved by moving the nut in a direction away from the body along the axis of the joint sleeve. Is for accommodating the seal portion of the joint sleeve and moving the nut in a direction approaching the body along the axis of the joint sleeve so that the seal portion projects from the nut.
The joint sleeve is provided with a main body having an inner peripheral surface having a diameter larger than the outer diameter of the joint sleeve so as to have a gap with the outer peripheral surface around the axis of the joint sleeve, and the main body has a slit for mounting on the joint sleeve. By attaching a joint protector to the joint sleeve, the joint sleeve is welded in a state in which the seal portion is protected by preventing movement of the nut and preventing the seal portion from protruding from the nut. A method for manufacturing a fluid control device, which cleans the formed body. A joint sleeve welded to a body in a state of being inserted through a through hole of a nut, wherein the nut moves along a shaft of the joint sleeve in a direction away from the body, whereby the nut seals the joint sleeve. And a fitting protector for the fitting which is detachable from the fitting sleeve in a state where the seal portion projects from the nut by moving the nut in a direction approaching the body along the axis of the fitting sleeve. And
The joint protector includes a main body having an inner peripheral surface having a diameter larger than the outer diameter of the joint sleeve so as to have a gap with the outer peripheral surface around the axis of the joint sleeve, and the main body is attached to and detached from the joint sleeve. Equipped with a slit for
The joint protector is attached to the joint sleeve to suppress movement of the nut and protect the seal portion by preventing the seal portion of the joint sleeve from protruding from the nut. Ingredient The joint protector according to claim 2, further comprising a knob on the opposite side of the slit with the center of the main body interposed therebetween. The knob portion is provided so as to project from the main body portion, and the protruding length thereof is set to a length that does not protrude from the body when the joint protector is attached to the joint sleeve. Protective equipment for joints described in. The fitting protector according to claim 2, wherein a diameter of an inner peripheral surface of the main body portion is 1.1 to 1.3 times an outer diameter of the fitting sleeve. The main body portion is composed of a tubular portion having the inner peripheral surface,
The joint protector according to claim 2, wherein a pair of guide portions for mounting on the joint sleeve is provided at an end portion of the tubular portion that forms the slit. The joint protector according to claim 6, wherein the guide portion is set thicker than the wall thickness of the tubular portion. The joint protector according to claim 7, wherein the guide portion has a flat surface that faces the slit, and the flat surfaces of the pair of the guide portions expand at an angle of 70 degrees to 100 degrees. .. The joint protector according to claim 2, wherein the width of the slit is set to 0.5 to 0.6 times the outer diameter of the joint sleeve. The joint protection according to claim 2, wherein the main body portion has a slit formed on both sides in the moving direction of the nut by cutting out an intermediate portion in the moving direction of the nut from the slit side. Ingredient The engaging portion for connection is provided on the opposing side surfaces of the plurality of pieces divided in the moving direction of the nut, and the plurality of pieces are coupled by engaging the engaging portion. Protective equipment for joints described. The joint sleeve is inserted into the through hole of the nut, the joint sleeve is connected to the body, and the body is provided with a drive unit. The nut moves along the axis of the joint sleeve in a direction away from the body. The nut accommodates the seal portion of the joint sleeve by doing, and the nut moves along the axis of the joint sleeve toward the body to cause the seal portion to project, and a fluid control device body,
The joint protector according to any one of claims 2 to 11, which is mounted on the joint sleeve.
A fluid control device equipped with.

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