JP6514546B2 - 感光性樹脂組成物 - Google Patents
感光性樹脂組成物 Download PDFInfo
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- JP6514546B2 JP6514546B2 JP2015066815A JP2015066815A JP6514546B2 JP 6514546 B2 JP6514546 B2 JP 6514546B2 JP 2015066815 A JP2015066815 A JP 2015066815A JP 2015066815 A JP2015066815 A JP 2015066815A JP 6514546 B2 JP6514546 B2 JP 6514546B2
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- photosensitive resin
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- 239000011342 resin composition Substances 0.000 title claims description 80
- -1 phosphino group Chemical group 0.000 claims description 283
- 125000001424 substituent group Chemical group 0.000 claims description 251
- 125000004432 carbon atom Chemical group C* 0.000 claims description 147
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 103
- 125000000217 alkyl group Chemical group 0.000 claims description 82
- 125000000962 organic group Chemical group 0.000 claims description 66
- 150000001875 compounds Chemical class 0.000 claims description 61
- 239000003086 colorant Substances 0.000 claims description 42
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 33
- 229920005989 resin Polymers 0.000 claims description 29
- 239000011347 resin Substances 0.000 claims description 29
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 28
- 239000011248 coating agent Substances 0.000 claims description 20
- 238000000576 coating method Methods 0.000 claims description 20
- 239000000178 monomer Substances 0.000 claims description 18
- 125000000609 carbazolyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3NC12)* 0.000 claims description 16
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 16
- 125000005843 halogen group Chemical group 0.000 claims description 15
- 239000003999 initiator Substances 0.000 claims description 15
- 125000003118 aryl group Chemical group 0.000 claims description 14
- 125000000101 thioether group Chemical group 0.000 claims description 14
- 125000000018 nitroso group Chemical group N(=O)* 0.000 claims description 13
- 125000005328 phosphinyl group Chemical group [PH2](=O)* 0.000 claims description 13
- 125000000394 phosphonato group Chemical group [O-]P([O-])(*)=O 0.000 claims description 13
- 125000005372 silanol group Chemical group 0.000 claims description 13
- 125000003808 silyl group Chemical group [H][Si]([H])([H])[*] 0.000 claims description 13
- 125000001273 sulfonato group Chemical group [O-]S(*)(=O)=O 0.000 claims description 13
- 125000003396 thiol group Chemical group [H]S* 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 10
- 125000000213 sulfino group Chemical group [H]OS(*)=O 0.000 claims description 9
- 125000001476 phosphono group Chemical group [H]OP(*)(=O)O[H] 0.000 claims description 8
- 125000000020 sulfo group Chemical group O=S(=O)([*])O[H] 0.000 claims description 8
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 claims description 2
- WZZBNLYBHUDSHF-DHLKQENFSA-N 1-[(3s,4s)-4-[8-(2-chloro-4-pyrimidin-2-yloxyphenyl)-7-fluoro-2-methylimidazo[4,5-c]quinolin-1-yl]-3-fluoropiperidin-1-yl]-2-hydroxyethanone Chemical compound CC1=NC2=CN=C3C=C(F)C(C=4C(=CC(OC=5N=CC=CN=5)=CC=4)Cl)=CC3=C2N1[C@H]1CCN(C(=O)CO)C[C@@H]1F WZZBNLYBHUDSHF-DHLKQENFSA-N 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 47
- 125000001931 aliphatic group Chemical group 0.000 description 41
- 125000000623 heterocyclic group Chemical group 0.000 description 41
- 125000001624 naphthyl group Chemical group 0.000 description 32
- 230000000052 comparative effect Effects 0.000 description 31
- 239000010408 film Substances 0.000 description 29
- 125000003545 alkoxy group Chemical group 0.000 description 26
- 125000002252 acyl group Chemical group 0.000 description 24
- 229910052799 carbon Inorganic materials 0.000 description 24
- 239000000049 pigment Substances 0.000 description 21
- 125000003277 amino group Chemical group 0.000 description 20
- 125000004423 acyloxy group Chemical group 0.000 description 19
- 125000004453 alkoxycarbonyl group Chemical group 0.000 description 19
- 125000004093 cyano group Chemical group *C#N 0.000 description 19
- 125000003236 benzoyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C(*)=O 0.000 description 18
- 125000000753 cycloalkyl group Chemical group 0.000 description 17
- 230000001771 impaired effect Effects 0.000 description 17
- 125000003884 phenylalkyl group Chemical group 0.000 description 17
- 150000001721 carbon Chemical group 0.000 description 16
- 125000001326 naphthylalkyl group Chemical group 0.000 description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 15
- 229910052736 halogen Inorganic materials 0.000 description 15
- 150000002367 halogens Chemical class 0.000 description 15
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 15
- 125000001038 naphthoyl group Chemical group C1(=CC=CC2=CC=CC=C12)C(=O)* 0.000 description 14
- 239000002904 solvent Substances 0.000 description 14
- 125000004122 cyclic group Chemical group 0.000 description 13
- 125000005322 morpholin-1-yl group Chemical group 0.000 description 13
- 125000004194 piperazin-1-yl group Chemical group [H]N1C([H])([H])C([H])([H])N(*)C([H])([H])C1([H])[H] 0.000 description 12
- 125000002723 alicyclic group Chemical group 0.000 description 11
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 11
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 10
- 125000000000 cycloalkoxy group Chemical group 0.000 description 10
- 239000002270 dispersing agent Substances 0.000 description 10
- 239000003822 epoxy resin Substances 0.000 description 10
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 10
- 229920000647 polyepoxide Polymers 0.000 description 10
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 8
- 125000005842 heteroatom Chemical group 0.000 description 8
- 150000002430 hydrocarbons Chemical group 0.000 description 8
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 8
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 125000006678 phenoxycarbonyl group Chemical group 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 6
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 6
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 6
- XSCHRSMBECNVNS-UHFFFAOYSA-N benzopyrazine Natural products N1=CC=NC2=CC=CC=C21 XSCHRSMBECNVNS-UHFFFAOYSA-N 0.000 description 6
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 6
- 125000004663 dialkyl amino group Chemical group 0.000 description 6
- 239000006185 dispersion Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 238000011156 evaluation Methods 0.000 description 6
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 5
- YLQBMQCUIZJEEH-UHFFFAOYSA-N Furan Chemical compound C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 5
- 239000002253 acid Substances 0.000 description 5
- 125000004429 atom Chemical group 0.000 description 5
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 5
- 125000006517 heterocyclyl carbonyl group Chemical group 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 5
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 5
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 5
- FCEHBMOGCRZNNI-UHFFFAOYSA-N 1-benzothiophene Chemical compound C1=CC=C2SC=CC2=C1 FCEHBMOGCRZNNI-UHFFFAOYSA-N 0.000 description 4
- YBYIRNPNPLQARY-UHFFFAOYSA-N 1H-indene Chemical compound C1=CC=C2CC=CC2=C1 YBYIRNPNPLQARY-UHFFFAOYSA-N 0.000 description 4
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 4
- KDCGOANMDULRCW-UHFFFAOYSA-N 7H-purine Chemical compound N1=CNC2=NC=NC2=C1 KDCGOANMDULRCW-UHFFFAOYSA-N 0.000 description 4
- UJOBWOGCFQCDNV-UHFFFAOYSA-N 9H-carbazole Chemical compound C1=CC=C2C3=CC=CC=C3NC2=C1 UJOBWOGCFQCDNV-UHFFFAOYSA-N 0.000 description 4
- 239000004925 Acrylic resin Substances 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 4
- SIKJAQJRHWYJAI-UHFFFAOYSA-N Indole Chemical compound C1=CC=C2NC=CC2=C1 SIKJAQJRHWYJAI-UHFFFAOYSA-N 0.000 description 4
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 4
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 4
- KYQCOXFCLRTKLS-UHFFFAOYSA-N Pyrazine Chemical compound C1=CN=CC=N1 KYQCOXFCLRTKLS-UHFFFAOYSA-N 0.000 description 4
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 4
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 4
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 4
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical compound C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 4
- 239000003513 alkali Substances 0.000 description 4
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 4
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical compound C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 description 4
- 125000001231 benzoyloxy group Chemical group C(C1=CC=CC=C1)(=O)O* 0.000 description 4
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 230000018109 developmental process Effects 0.000 description 4
- 125000003700 epoxy group Chemical group 0.000 description 4
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 4
- AWJUIBRHMBBTKR-UHFFFAOYSA-N isoquinoline Chemical compound C1=NC=CC2=CC=CC=C21 AWJUIBRHMBBTKR-UHFFFAOYSA-N 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical compound C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 4
- 229910052717 sulfur Inorganic materials 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 3
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 229920000178 Acrylic resin Polymers 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Natural products CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 150000008065 acid anhydrides Chemical class 0.000 description 3
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 3
- 125000003342 alkenyl group Chemical group 0.000 description 3
- 125000004183 alkoxy alkyl group Chemical group 0.000 description 3
- 125000005907 alkyl ester group Chemical group 0.000 description 3
- 125000003710 aryl alkyl group Chemical group 0.000 description 3
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 3
- HNEGQIOMVPPMNR-IHWYPQMZSA-N citraconic acid Chemical compound OC(=O)C(/C)=C\C(O)=O HNEGQIOMVPPMNR-IHWYPQMZSA-N 0.000 description 3
- 229940018557 citraconic acid Drugs 0.000 description 3
- 125000000392 cycloalkenyl group Chemical group 0.000 description 3
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 150000002148 esters Chemical class 0.000 description 3
- 239000001530 fumaric acid Substances 0.000 description 3
- 235000011187 glycerol Nutrition 0.000 description 3
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 3
- 125000002883 imidazolyl group Chemical group 0.000 description 3
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 3
- 125000005186 naphthyloxy group Chemical group C1(=CC=CC2=CC=CC=C12)O* 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 3
- 125000003356 phenylsulfanyl group Chemical group [*]SC1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 3
- 229920000728 polyester Polymers 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000004814 polyurethane Substances 0.000 description 3
- 229920002635 polyurethane Polymers 0.000 description 3
- 230000009257 reactivity Effects 0.000 description 3
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 3
- 238000000411 transmission spectrum Methods 0.000 description 3
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 3
- 125000004191 (C1-C6) alkoxy group Chemical group 0.000 description 2
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- BCMCBBGGLRIHSE-UHFFFAOYSA-N 1,3-benzoxazole Chemical compound C1=CC=C2OC=NC2=C1 BCMCBBGGLRIHSE-UHFFFAOYSA-N 0.000 description 2
- CNJRPYFBORAQAU-UHFFFAOYSA-N 1-ethoxy-2-(2-methoxyethoxy)ethane Chemical compound CCOCCOCCOC CNJRPYFBORAQAU-UHFFFAOYSA-N 0.000 description 2
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 2
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- HYZJCKYKOHLVJF-UHFFFAOYSA-N 1H-benzimidazole Chemical compound C1=CC=C2NC=NC2=C1 HYZJCKYKOHLVJF-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 2
- OCKQMFDZQUFKRD-UHFFFAOYSA-N 2-[(3-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC(COCC2OC2)=C1 OCKQMFDZQUFKRD-UHFFFAOYSA-N 0.000 description 2
- ZADXFVHUPXKZBJ-UHFFFAOYSA-N 2-[(4-ethenylphenyl)methoxymethyl]oxirane Chemical compound C1=CC(C=C)=CC=C1COCC1OC1 ZADXFVHUPXKZBJ-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- DZZAHLOABNWIFA-UHFFFAOYSA-N 2-butoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCCCC)C(=O)C1=CC=CC=C1 DZZAHLOABNWIFA-UHFFFAOYSA-N 0.000 description 2
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 2
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 2
- VHMICKWLTGFITH-UHFFFAOYSA-N 2H-isoindole Chemical compound C1=CC=CC2=CNC=C21 VHMICKWLTGFITH-UHFFFAOYSA-N 0.000 description 2
- OFNISBHGPNMTMS-UHFFFAOYSA-N 3-methylideneoxolane-2,5-dione Chemical compound C=C1CC(=O)OC1=O OFNISBHGPNMTMS-UHFFFAOYSA-N 0.000 description 2
- 125000006201 3-phenylpropyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- FFOPEPMHKILNIT-UHFFFAOYSA-N Isopropyl butyrate Chemical compound CCCC(=O)OC(C)C FFOPEPMHKILNIT-UHFFFAOYSA-N 0.000 description 2
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical class OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 2
- ZCQWOFVYLHDMMC-UHFFFAOYSA-N Oxazole Chemical compound C1=COC=N1 ZCQWOFVYLHDMMC-UHFFFAOYSA-N 0.000 description 2
- PCNDJXKNXGMECE-UHFFFAOYSA-N Phenazine Natural products C1=CC=CC2=NC3=CC=CC=C3N=C21 PCNDJXKNXGMECE-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 description 2
- WTKZEGDFNFYCGP-UHFFFAOYSA-N Pyrazole Chemical compound C=1C=NNC=1 WTKZEGDFNFYCGP-UHFFFAOYSA-N 0.000 description 2
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Description
しかしながら、特許文献1に記載の感光性樹脂組成物では、必ずしも輝度が良好であるカラーフィルターを形成できない問題がある。
(E)着色剤の色相が青色又は緑色である、感光性樹脂組成物である。
第一の態様に係る感光性樹脂組成物を基板上に塗布して塗膜を形成する工程と、
塗膜を位置選択的に露光する工程と、
露光された塗膜を現像する工程と、を含むパターンの形成方法である。
本発明の感光性樹脂組成物は、(A)アルカリ可溶性樹脂、(B)光重合性モノマー、(C)光重合開始剤、(D)式(1)で表される化合物、及び(E)着色剤を含有する。まず、これらの構成成分について説明する。
(A)アルカリ可溶性樹脂としては、特に限定されず、従来公知のアルカリ可溶性樹脂を用いることができる。この(A)アルカリ可溶性樹脂は、エチレン性不飽和基を有するものであってもよく、エチレン性不飽和基を有さないものであってもよい。
なお、本明細書において(A)アルカリ可溶性樹脂とは、樹脂濃度20質量%の樹脂溶液(溶媒:プロピレングリコールモノメチルエーテルアセテート)により、膜厚1μmの樹脂膜をガラス基板上に形成し、2.38質量%のテトラメチルアンモニウムヒドロキシド(TMAH)水溶液に1分間浸漬した際に、膜厚0.01μm以上溶解するものをいう。
また、上記式(a−1)中、mは、0〜20の整数を示す。
なお、本明細書において、「(メタ)アクリル酸」は、アクリル酸とメタクリル酸との両方を意味する。同様に、「(メタ)アクリレート」は、アクリレートとメタクリレートとの両方を意味する。
本発明の感光性樹脂組成物は、(B)光重合性モノマーを含有する。(B)光重合性モノマーとしては、単官能モノマーと多官能モノマーとがある。
(C)光重合開始剤としては、特に限定されず、従来公知の光重合開始剤を用いることができる。
アルキル基が炭素原子上に有してもよい好適な置換基の例としては、炭素原子数1〜20のアルコキシ基、炭素原子数3〜10のシクロアルキル基、炭素原子数3〜10のシクロアルコキシ基、炭素原子数2〜20の飽和脂肪族アシル基、炭素原子数2〜20のアルコキシカルボニル基、炭素原子数2〜20の飽和脂肪族アシルオキシ基、置換基を有してもよいフェニル基、置換基を有してもよいフェノキシ基、置換基を有してもよいフェニルチオ基、置換基を有してもよいベンゾイル基、置換基を有してもよいフェノキシカルボニル基、置換基を有してもよいベンゾイルオキシ基、置換基を有してもよい炭素原子数7〜20のフェニルアルキル基、置換基を有してもよいナフチル基、置換基を有してもよいナフトキシ基、置換基を有してもよいナフトイル基、置換基を有してもよいナフトキシカルボニル基、置換基を有してもよいナフトイルオキシ基、置換基を有してもよい炭素原子数11〜20のナフチルアルキル基、置換基を有してもよいヘテロシクリル基、置換基を有してもよいヘテロシクリルカルボニル基、アミノ基、1又は2の有機基で置換されたアミノ基、モルホリン−1−イル基、及びピペラジン−1−イル基、ハロゲン、ニトロ基、及びシアノ基等が挙げられる。
フェニル基が炭素原子上に有してもよい好適な置換基の例としては、アルキル基が炭素原子上に有してもよい好適な置換基として上記で例示した基に加えて、炭素原子数1〜20のアルキル基が挙げられる。
感光性樹脂組成物は、(D)下記式(1)で表される化合物を含有する。感光性樹脂組成物において、後述する青色又は緑色の色相の(E)着色剤と、(D)式(1)で表される化合物とを併用することによって、感光性樹脂組成物を用いて形成されるカラーフィルターの輝度が向上する。
で表される化合物が挙げられる。
で表される化合物が好ましい。
感光性樹脂組成物は、色相が青色又は緑色である(E)着色剤を含む。(D)式(1)で表される化合物と、色相が青色又は緑色である(E)着色剤とを組み合わせて感光性樹脂組成物に配合することによって、感光性樹脂組成物を用いて形成されるカラーフィルターを備える表示素子の輝度が向上する。
具体易的には、C.I.ピグメントブルー1(以下、「C.I.ピグメントブルー」は同様であり、番号のみを記載する。)、2、15、15:3、15:4、16、22、60、64、66;C.I.ピグメントグリーン7、C.I.ピグメントグリーン37である。
また、(E)着色剤としては、染料を用いてもよい。染料としてはソルベントブルー35等が挙げられる。フタロシアニン化合物と染料とを併用することにより本発明の効果をより良好なものとすることが出来る。
C.I.ピグメントオレンジ1(以下、「C.I.ピグメントオレンジ」は同様であり、番号のみを記載する。)、5、13、14、16、17、24、34、36、38、40、43、46、49、51、55、59、61、63、64、71、73;
C.I.ピグメントバイオレット1(以下、「C.I.ピグメントバイオレット」は同様であり、番号のみを記載する。)、19、23、29、30、32、36、37、38、39、40、50;
C.I.ピグメントレッド1(以下、「C.I.ピグメントレッド」は同様であり、番号のみを記載する。)、2、3、4、5、6、7、8、9、10、11、12、14、15、16、17、18、19、21、22、23、30、31、32、37、38、40、41、42、48:1、48:2、48:3、48:4、49:1、49:2、50:1、52:1、53:1、57、57:1、57:2、58:2、58:4、60:1、63:1、63:2、64:1、81:1、83、88、90:1、97、101、102、104、105、106、108、112、113、114、122、123、144、146、149、150、151、155、166、168、170、171、172、174、175、176、177、178、179、180、185、187、188、190、192、193、194、202、206、207、208、209、215、216、217、220、223、224、226、227、228、240、242、243、245、254、255、264、265;
C.I.ピグメントブラウン23、C.I.ピグメントブラウン25、C.I.ピグメントブラウン26、C.I.ピグメントブラウン28;
C.I.ピグメントブラック1、C.I.ピグメントブラック7。
感光性樹脂組成物は、(S)溶媒を含有することができる。溶媒としては、上記(D)式(1)で表される化合物及び(E)着色剤や、後述する他の成分を分散又は溶解し、且つこれらの成分と反応せず、適度の揮発性を有するものであればよい。
感光性樹脂組成物は、以上説明した成分に加えて、必要に応じて、種々の添加剤を含んでいてもよい。
添加剤としては、例えば、ガラス、アルミナ等の充填剤;ポリビニルアルコール、ポリ(フロオロアルキルアクリレート)類等の高分子化合物;フッ素系界面活性剤、シリコン系界面活性剤等の界面活性剤;ビニルトリメトキシシラン、ビニルトリエトキシシラン、ビニルトリス(2−メトキシエトキシ)シラン、N−(2−アミノエチル)−3−アミノプロピルメチルジメトキシシラン、N−(2−アミノエチル)−3−アミノプロピルトリメトキシシラン、3−アミノプロピルトリエトキシシラン、3−グリシドキシプロピルトリメトキシシラン、3−グリシドキシプロピルメチルジメトキシシラン、2−(3,4−エポキシシクロヘキシル)エチルトリメトキシシラン、3−クロロプロピルメチルジメトキシシラン、3−クロロプロピルトリメトキシシラン、3−メタクリロイロキシプロピルトリメトキシシラン、3−メルカプトプロピルトリメトキシシラン等の密着促進剤;2,2−チオビス(4−メチル−6−t−ブチルフェノール)、2,6−ジ−t−ブチルフェノール等の酸化防止剤;2−(3−t−ブチル−5−メチル−2−ヒドロキシフェニル)−5−クロロベンゾトリアゾール、アルコキシベンゾフェノン類等の紫外線吸収剤;ポリアクリル酸ナトリウム等の凝集防止剤;マロン酸、アジピン酸、イタコン酸、シトラコン酸、フマル酸、メサコン酸、2−アミノエタノール、3−アミノ−1−プロパノール、5−アミノ−1−ペンタノール、3−アミノ−1,2−プロパンジオール、2−アミノ−1,3−プロパンジオール、4−アミノ−1,2−ブタンジオール等の残渣改善剤等を挙げることができる。
感光性樹脂組成物は、適宜の方法により調製することができる。具体的には、それぞれ所望する量の以上説明した所定の成分を、均一に混合して、感光性樹脂組成物が得られる。感光性樹脂組成物の調製時には、(E)着色剤が感光性樹脂組成物中に均一に分散するように、例えばビーズミル、ロールミル等を用いて、(E)着色剤を粉砕しつつ、感光性樹脂の原料を均一に混合してもよい。
本発明に係るパターン形成方法は、前述の感光性樹脂組成物を基板上に塗布して塗膜を形成する工程と、形成された塗膜をパターンの形状に合わせて位置選択的に露光する工程と、露光された塗膜を現像する工程と、を含む。
<(A)成分>
実施例及び比較例において、(A)アルカリ可溶性樹脂として、下式のアクリル樹脂を用いた。下式のアクリル樹脂の質量平均分子量は8000である。下式中各構成単位の右下の数字は、アクリル系樹脂を構成する全構成単位における、各構成単位のモル比率である。
実施例及び比較例において、(B)光重合性モノマーとして、ジペンタエリスリトールヘキサアクリレートを用いた。
実施例において、(D)式(1)で表される化合物として、下式D−1の化合物を用いた。比較例において、(D)式(1)で表される化合物に類似する化合物である(D’)成分として、下式D’−1の化合物を用いた。
実施例1〜4、及び比較例1及び6では、(A)アルカリ可溶性樹脂100質量部と、(B)光重合性モノマー60質量部と、(C)光重合開始剤14.8質量部と、表1に記載の種類の(D)成分又は(D’)成分3.2質量部と、表1に記載の種類の(E)着色剤を含む分散液(着色剤濃度12質量%、分散剤濃度4.2質量%、溶媒:プロピレングリコールモノメチルエーテルアセテート)81.8質量部とを均一に混合した後、溶剤で固形分濃度15質量%に希釈して、感光性樹脂組成物を得た。希釈用の溶剤としては、プロピレングリコールモノメチルエーテルアセテート(PM)/3−メトキシブチルアセテート(MA)/シクロヘキサノン(AN)の混合溶剤を用いた。混合溶剤の組成は、質量比としてPM/MA/AN=75/10/15であった。
厚み0.7mmのガラス基板上に、スピンコーターを用いて感光性樹脂組成物を塗布した。その後、80℃のホットプレートで2分間、塗膜を加熱した。超高圧水銀灯を用いて1000mJ/cm2の紫外線を塗膜に照射することによって膜厚2.0μmの硬化した着色膜を得た。得られた着色膜について、カラーアナライザー(大塚電子(株)製MCPD2000)を用い、C光源、2度視野にて、CIE表色系における色度座標値(x、y)を測定した。測定結果より、表1に記載の色度座標値xにおける輝度(刺激値Y)を求めた。
各実施例及び比較例について、以下の通り着色膜の輝度比を求め、(D)成分又は(D’)成分を含む感光性樹脂組成物を用いて形成された塗膜の輝度について評価した。輝度比が100%超である場合を○と判定し、輝度比が100%以下である場合を×と判定した。
なお、比較例2〜5、及び比較例7については、輝度比を算出する基準であるため、輝度評価を行っていない。
(輝度比算出式)
実施例1:実施例1の輝度/比較例2の輝度×100
比較例1:比較例1の輝度/比較例2の輝度×100
実施例2:実施例2の輝度/比較例3の輝度×100
実施例3:実施例3の輝度/比較例4の輝度×100
実施例4:実施例4の輝度/比較例5の輝度×100
比較例6:比較例6の輝度/比較例7の輝度×100
露光後の硬化した着色膜を230℃で140分間ベークすることの他は、ベークされた着色膜の輝度を、輝度比によって輝度評価1と同様に評価した。
露光後の硬化した着色膜を250℃で140分間ベークすることの他は、ベークされた着色膜の輝度を、輝度比によって輝度評価1と同様に評価した。
Claims (7)
- (A)アルカリ可溶性樹脂、(B)光重合性モノマー、(C)光重合開始剤、(D)下記式(1)で表される化合物、及び(E)着色剤を含有する、表示素子のカラーフィルターにおける青色又は緑色の着色膜の形成用の感光性樹脂組成物であって、
前記(E)着色剤の色相が青色又は緑色である、感光性樹脂組成物。
- 前記(E)着色剤がフタロシアニン化合物を含有する、請求項1又は2に記載の感光性樹脂組成物。
- 前記(E)着色剤がフタロシアニン化合物を30質量%以上含有する、請求項3に記載の感光性樹脂組成物。
- 請求項1〜4のいずれか1項に記載の感光性樹脂組成物を基板上に塗布して塗膜を形成する工程と、
前記塗膜を位置選択的に露光する工程と、
露光された前記塗膜を現像する工程と、を含むパターンの形成方法。 - 請求項1〜4のいずれか1項に記載の感光性樹脂組成物を用いて形成された着色層を備えるカラーフィルター。
- 請求項6に記載のカラーフィルターを具備する表示素子。
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