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JP6220693B2 - 塗布装置 - Google Patents

塗布装置 Download PDF

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Publication number
JP6220693B2
JP6220693B2 JP2014026182A JP2014026182A JP6220693B2 JP 6220693 B2 JP6220693 B2 JP 6220693B2 JP 2014026182 A JP2014026182 A JP 2014026182A JP 2014026182 A JP2014026182 A JP 2014026182A JP 6220693 B2 JP6220693 B2 JP 6220693B2
Authority
JP
Japan
Prior art keywords
pipe
coating
nozzle
pipeline section
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2014026182A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015150499A (ja
Inventor
隆介 伊藤
隆介 伊藤
高村　幸宏
幸宏 高村
秀一 相良
秀一 相良
宗明 大宅
宗明 大宅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
Original Assignee
Screen Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd filed Critical Screen Holdings Co Ltd
Priority to JP2014026182A priority Critical patent/JP6220693B2/ja
Priority to CN201510053016.3A priority patent/CN104841607B/zh
Priority to TW104103817A priority patent/TWI586440B/zh
Priority to KR1020150021606A priority patent/KR20150096333A/ko
Publication of JP2015150499A publication Critical patent/JP2015150499A/ja
Application granted granted Critical
Publication of JP6220693B2 publication Critical patent/JP6220693B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles

Landscapes

  • Coating Apparatus (AREA)
  • Spray Control Apparatus (AREA)
JP2014026182A 2014-02-14 2014-02-14 塗布装置 Expired - Fee Related JP6220693B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2014026182A JP6220693B2 (ja) 2014-02-14 2014-02-14 塗布装置
CN201510053016.3A CN104841607B (zh) 2014-02-14 2015-02-02 涂布装置
TW104103817A TWI586440B (zh) 2014-02-14 2015-02-05 塗佈裝置
KR1020150021606A KR20150096333A (ko) 2014-02-14 2015-02-12 도포 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014026182A JP6220693B2 (ja) 2014-02-14 2014-02-14 塗布装置

Publications (2)

Publication Number Publication Date
JP2015150499A JP2015150499A (ja) 2015-08-24
JP6220693B2 true JP6220693B2 (ja) 2017-10-25

Family

ID=53841811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014026182A Expired - Fee Related JP6220693B2 (ja) 2014-02-14 2014-02-14 塗布装置

Country Status (4)

Country Link
JP (1) JP6220693B2 (zh)
KR (1) KR20150096333A (zh)
CN (1) CN104841607B (zh)
TW (1) TWI586440B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116020692B (zh) * 2022-12-26 2024-08-23 西安奕斯伟材料科技股份有限公司 硅片钝化系统及硅片钝化系统的工作方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3742247B2 (ja) * 1999-05-07 2006-02-01 ローランドディー．ジー．株式会社 インクジェットプリンタ
JP4004216B2 (ja) * 2000-09-04 2007-11-07 東京応化工業株式会社 塗布装置
US6811613B2 (en) * 2001-11-26 2004-11-02 Tokyo Electron Limited Coating film forming apparatus
JP4321270B2 (ja) * 2004-01-14 2009-08-26 ブラザー工業株式会社 インクジェット記録装置
JP4737685B2 (ja) * 2006-12-25 2011-08-03 大日本スクリーン製造株式会社 塗布装置
JP2011072974A (ja) * 2009-10-02 2011-04-14 Dainippon Screen Mfg Co Ltd 塗布装置
JP5537223B2 (ja) * 2010-03-30 2014-07-02 大日本スクリーン製造株式会社 塗布装置
JP5764871B2 (ja) * 2010-04-20 2015-08-19 セイコーエプソン株式会社 流体噴射装置
JP5798411B2 (ja) * 2011-08-25 2015-10-21 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置
JP5844099B2 (ja) * 2011-09-12 2016-01-13 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置及び処理液付与方法

Also Published As

Publication number Publication date
TWI586440B (zh) 2017-06-11
TW201531338A (zh) 2015-08-16
CN104841607B (zh) 2017-09-22
KR20150096333A (ko) 2015-08-24
CN104841607A (zh) 2015-08-19
JP2015150499A (ja) 2015-08-24

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