JP5369265B2 - Linear motor and linear moving stage device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a linear motor which is large in thrust and high in a flexibility of design with respect to the size of equipment, and a linear movement stage device. <P>SOLUTION: The linear motor 1 includes two magnet rows 3, and two coil rows 5. The two magnet rows 3 have a plurality of magnets 11 disposed in drive directions, respectively, so that magnetization directions intersect with each other in the drive directions (X-axis directions) and orientations of magnetic poles are alternately inverted from each other, and are oppositely arranged in the magnetization directions (Y-axis directions) so that the magnetic poles of the same kind oppose each other. The two coil rows 5 have a plurality of coils 13 arranged in the drive directions, respectively, with openings 13c oriented toward the magnet rows 3 between the two magnet rows 3, are oppositely arranged in the magnetization directions, and fixed to each other. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a linear motor and a linear moving stage device.

  A linear motor having a magnet array composed of a plurality of magnets arranged in the driving direction, a coil array composed of a plurality of coils arranged in the driving direction, and a linear moving stage device using the linear motor are known ( For example, Patent Document 1).

  The linear motor described in Patent Document 1 has only one magnet row and only one coil row. The plurality of magnets included in the magnet array are magnetized in the direction facing the coil array (magnetization direction orthogonal to the drive direction), and are arranged so that the directions of the magnetic poles are alternately reversed in the drive direction. The plurality of coils included in the coil array are arranged with the opposing direction to the magnet array as the axial direction.

  In the prior art column of Patent Document 1, a linear motor having two magnet arrays and two coil arrays is also described. The two magnet arrays are arranged so as to face each other in the magnetization direction orthogonal to the driving direction, and so that different magnetic poles face each other. The two coil arrays are arranged between the two magnet arrays so that the opposing direction of the two magnet arrays is an axial direction and overlaps with each other in the opposing direction of the two magnet arrays.

  The linear motor described in Patent Document 2 has two magnet rows and one coil row. The two magnet arrays are arranged so as to face each other in the magnetization direction orthogonal to the driving direction, and the same kind of magnetic poles face each other. The coil array is arranged with the drive direction as the axial direction.

JP 2006-74975 A JP 2005-176464 A

  Since the linear motor described in Patent Document 1 has only one magnet row and only one coil row, the thrust is low. Increasing the number of coils in the driving direction of the coils in order to increase the thrust increases the coil array in the driving direction. The stroke of the linear motor is defined by the difference between the length of the magnet array in the drive direction and the length of the coil array in the drive direction. Therefore, when a predetermined stroke is obtained, if the coil row becomes longer in the driving direction, the magnet row must also be made longer in the driving direction. As described above, in the linear motor described in Patent Document 1, if the thrust is to be increased, the entire linear motor must be lengthened in the driving direction.

  Since the linear motor described in the column of the prior art in Patent Document 1 uses a magnetic force from one magnet row to the other magnet row, the thrust decreases as the distance between the two magnet rows increases. That is, if a predetermined thrust is to be obtained, the degree of freedom in design related to the distance between two magnet arrays is limited. As a result, inconveniences arise, for example, that it is necessary to reduce the thickness of the coil head that is disposed between the two coil arrays and holds the two coil arrays.

  In the linear motor described in Patent Document 2, when the distance between the two magnet arrays is increased, the coil diameter is decreased in the opposing direction of the two magnet arrays in order to maintain the thrust between the coils and the magnets. Must be bigger. As a result, coil material costs and electrical resistance increase. That is, increasing the distance between the two magnet arrays is restricted from a practical viewpoint such as cost.

  As described above, in the conventional linear motor, when the thrust is increased, the degree of freedom in design is reduced with respect to the size of the linear motor.

  An object of the present invention is to provide a linear motor and a linear moving stage device that have a large thrust and a high degree of design freedom regarding the size of the device.

  The linear motor according to the first aspect of the present invention includes a plurality of magnets arranged in the drive direction so that the magnetization direction is orthogonal to the drive direction and the direction of the magnetic poles is alternately reversed. A plurality of coils arranged opposite to each other in the magnetization direction so that the same type of magnetic poles are opposed to each other, and a plurality of coils arranged in the drive direction with the opening facing the magnet row between the two magnet rows And two coil arrays arranged opposite to each other in the magnetization direction and fixed to each other.

  Preferably, the linear motor further includes a coil head that is provided between the two coil arrays and to which the two coil arrays are fixed, and the coil head is capable of flowing a cooling medium. A road is formed.

  Suitably, the said flow path is open | released outside the coil head through the discharge port facing the said some coil.

  Preferably, the drive direction of the plurality of magnets is larger than the drive direction of the plurality of magnets in the width direction perpendicular to the magnetization direction, with respect to the size in the width direction of the openings of the plurality of coils. The difference is more than the size of one magnet in the direction.

  Preferably, each of the plurality of magnets is configured such that a plurality of divided magnets having a size in the width direction smaller than a size in the width direction of openings of the plurality of coils are arranged in the width direction. .

  Preferably, the openings of the plurality of coils have a size in a width direction orthogonal to the driving direction and the magnetization direction with respect to a size in the width direction of the plurality of magnets. The difference is more than the size of one magnet in the driving direction.

  A linear movement stage apparatus according to a second aspect of the present invention includes a base, a stage that can move in a predetermined driving direction with respect to the base, and a linear motor that drives the stage with respect to the base. The linear motor includes two magnet arrays fixed to one of the base and the stage, and two coil arrays fixed to the other of the base and the stage, and the 2 Each of the magnet arrays has a plurality of magnets arranged in the drive direction so that the magnetization direction is orthogonal to the drive direction and the direction of the magnetic poles is alternately reversed, and the same kind of magnetic poles are opposed to each other. The two coil arrays have a plurality of coils arranged in the drive direction with the openings facing the magnet arrays between the two magnet arrays. Each has, disposed opposite in the magnetization direction.

  A linear moving stage device according to a third aspect of the present invention includes a base, a stage movable in a first direction and a second direction orthogonal to the first direction with respect to the base, and the stage with respect to the base. A first linear motor that drives the first direction as a driving direction, and a second linear motor that drives the stage relative to the base as the driving direction, and the first linear motor. And each of the second linear motors has two magnet rows fixed to one of the base and the stage, and two coil rows fixed to the other of the base and the stage. The two magnet arrays each include a plurality of magnets arranged in the drive direction so that the magnetization direction is orthogonal to the drive direction and the direction of the magnetic poles is alternately reversed. A plurality of the two coil arrays arranged in the drive direction with the opening facing the magnet array between the two magnet arrays. Each of the plurality of coils is disposed opposite to each other in the magnetization direction, and the size of the plurality of magnets of the first linear motor is the second direction of the plurality of coils of the first linear motor. The size in the second direction of the plurality of magnets of the first linear motor is the size in the second direction with respect to the size in two directions or the openings of the plurality of coils of the first linear motor. On the other hand, the difference is greater than the stroke in the second direction of the second linear motor.

  Preferably, a stroke of the first linear motor in the first direction is smaller than a stroke of the second linear motor in the second direction, and the second linear motor includes the two magnet arrays and the two coils. A plurality of combinations of rows are provided in the first direction.

  ADVANTAGE OF THE INVENTION According to this invention, a linear motor and a linear movement stage apparatus with a large thrust and a high design freedom regarding the magnitude | size of an apparatus can be provided.

The top view of the linear motor which concerns on the 1st Embodiment of this invention. The side view of the linear motor of FIG. Sectional drawing in the III-III line of FIG. The top view which shows typically the stage apparatus which concerns on the 2nd Embodiment of this invention. The side view which shows typically the stage apparatus of FIG. The top view of the X-axis linear motor of the stage apparatus of FIG. The side view of the X-axis linear motor of FIG. The front view of the X-axis linear motor of FIG. The top view of the Y-axis linear motor of the stage apparatus of FIG. The side view of the Y-axis linear motor of FIG. The front view of the Y-axis linear motor of FIG. The typical top view which shows the principal part of the linear motor which concerns on the modification of this invention. The typical side view which shows the principal part of the linear motor of FIG.

(First embodiment)
FIG. 1 is a plan view of a linear motor 1 according to the first embodiment of the present invention. FIG. 2 is a side view of the linear motor 1. 3 is a cross-sectional view taken along line III-III in FIG. Note that the terms “plan view” and “side view” relating to the linear motor 1 are used for convenience in the description of the present embodiment, and any direction of the linear motor 1 may be the direction of gravity.

  The linear motor 1 has a driving direction in the X-axis direction. The linear motor 1 holds two magnet rows 3 extending in the X-axis direction, two coil rows 5 extending in the X-axis direction, two yokes 7 holding the two magnet rows 3, and two coil rows 5. And a coil head 9 to be used.

  The magnet row 3 constitutes a field, and the coil row 5 constitutes an armature. The magnet row 3 and the yoke 7 constitute one of a stator and a mover, and the coil row 5 and the coil head 9 constitute the other of the stator and the mover. In the following description, it is assumed that the magnet array 3 and the yoke 7 constitute the stator 21, and the coil array 5 and the coil head 9 constitute the mover 23.

  The magnet row 3 has a plurality of magnets 11 arranged in the X-axis direction (drive direction). As shown in FIG. 2, the plurality of magnets 11 are arranged so that the magnetization direction is orthogonal to the drive direction (the magnetization direction is the Z-axis direction). The plurality of magnets 11 are arranged so that the directions of the magnetic poles are alternately reversed in the driving direction. The two magnet rows 3 are arranged so as to face each other in the magnetization direction of the plurality of magnets 11. The plurality of magnets 11 in one magnet row 3 and the plurality of magnets 11 in the other magnet row 3 are opposed to the same type of magnetic poles.

  The magnet 11 is, for example, a plate shape (thin rectangular parallelepiped shape) in which the Y-axis direction (width direction perpendicular to the driving direction and the magnetization direction) is the long direction, the X-axis direction is the short direction, and the Z-axis direction is the thickness direction. Is formed. In other words, the magnet 11 is formed so that the size in the Y-axis direction> the size in the X-axis direction> the size in the Z-axis direction.

  The two coil rows 5 are arranged between the two magnet rows 3. The coil array 5 has a plurality of coils 13 arranged in the X-axis direction. The plurality of coils 13 are arranged with the opening 13 c facing the magnet array 3. The distance between the coil 13 and the magnet 11 is, for example, within 8 mm. In each coil row 5, the plurality of coils 13 are arranged so as not to overlap each other. The two coil arrays 5 have the same number of coils 13 at positions where they overlap each other in plan view (as viewed in the Z-axis direction).

  The number of arrays of the plurality of coils 13 is set to be smaller than the number of arrays of the plurality of magnets 11. Further, the length of the coil array 5 in the X-axis direction is smaller than the length of the magnet array 3 in the X-axis direction. As an example, the ratio of the number of coils 13 and the number of magnets 11 arranged in a predetermined length in the X-axis direction is 3: 2.

  The coil 13 is formed in, for example, a substantially rectangular shape or an oval shape, and includes two parallel portions 13a extending in the Y-axis direction and two connecting portions 13b that connect the two parallel portions 13a. Have. The parallel portion 13a is a portion that contributes to thrust generation, and overlaps the magnet array 3 in plan view. On the other hand, the connecting portion 13b does not overlap the magnet row 3 in plan view. The diameter of the opening 13c in the width direction (Y-axis direction) (the length of the parallel portion 13a) is substantially equal to the size of the magnet 11 in the width direction.

  For example, the coil 13 is formed such that the Y-axis direction is the longitudinal direction, the X-axis direction is the short direction, and the Z-axis direction is the thickness direction. In other words, the coil 13 is formed so that the size in the Y-axis direction> the size in the X-axis direction> the size in the Z-axis direction.

  The yoke 7 is formed of a magnetic material such as iron, for example, and is formed in a flat plate shape. The two yokes 7 are arranged to face each other, and the magnet array 3 is fixed to each of the facing surfaces. The two yokes 7 are fixed to each other by a connecting member (not shown) at the manufacturer of the linear motor 1 or the user of the linear motor 1.

  The coil head 9 is formed in a flat plate shape, for example. The coil head 9 is disposed between the two magnet rows 3 so as to be orthogonal to the opposing direction of the two magnet rows 3. And the coil row | line | column 5 is fixed to both surfaces of the coil head 9, respectively. The coil head 9 may be set to an appropriate thickness, but is thicker than the coil 13, for example.

  The coil head 9 is formed of a conductive nonmagnetic material (nonmagnetic metal) such as aluminum. Since such a material has good heat conduction, the heat dissipation of the linear motor 1 can be improved. As a result, a large thrust can be obtained by flowing a large amount of current. The coil 13 is fixed to the coil head 9 via, for example, an insulating material 15. The insulating material 15 is, for example, a resin that also serves as an adhesive that bonds the coil 13 and the coil head 9 together.

  A flow path 17 for flowing air as a cooling medium is formed inside the coil head 9. For example, the flow path 17 branches from the main flow path 17a at a position where it overlaps with the parallel part 13a of the coil 13 in a plan view and extends in the X-axis direction at the center of the coil array 5 in the Y-axis direction. And a branch channel 17b extending to the center. One end of the main channel 17a is opened to the outside of the coil head 9 at an appropriate position. The other end of the main channel 17a is sealed. The branch flow path 17b is opened to the outside of the coil head 9 through the discharge port 17c facing the parallel portion 13a.

  The operation of the linear motor 1 having the above configuration will be described.

  The magnet 11 generates a magnetic force in the Z-axis direction at the position of the coil 13 facing the magnet 11. Since the two magnet arrays 3 have the same kind of magnetic poles opposed to each other, the magnetic flux after coming out of the one magnet 11 and passing through the coil 13 facing the one magnet is opposed to the one magnet 11. It goes to the magnet 11 adjacent to the one magnet 11 without going to the magnet 11 to be performed. In other words, the magnetic flux density at the position of the coil 13 is not greatly affected by the distance between the two magnet arrays 3.

  Electric power is supplied to each coil array 5. Therefore, in the parallel portion 13a of the coil 13, a current in the Y-axis direction flows in a magnetic field oriented in the Z-axis direction formed by the magnet 11, and the force in the X-axis direction is in accordance with Fleming's left-hand rule. Occurs.

  Electric power is supplied to the two coil arrays 5 so that the directions of current in the overlapping coils 13 (directions in the rotation direction of the coils 13) are opposite to each other. That is, electric power is supplied to the two coil arrays 5 so that the current directions in the parallel portion 13a are opposite to each other in the Y-axis direction. On the other hand, as described above, the two magnet arrays are arranged with the same kind of magnetic poles facing each other. Accordingly, the two coil arrays 5 generate forces in the same direction in the X-axis direction.

  In addition, the method of allowing the current to flow in the reverse direction in the two coil arrays 5 may be realized by setting the winding direction of the coil 13 in the reverse direction between the two coil arrays 5. It may be realized by changing the connection method (reversing the terminal to which the voltage is applied).

  As shown in FIG. 2, three-phase AC power is supplied to each coil array 5. That is, the plurality of coils 13 are supplied with U-phase, V-phase, or W-phase AC power in the arrangement order. Therefore, the plurality of coils 13 move in the X-axis direction in synchronization with the phase of the AC power.

  Note that the difference between the length of the magnet array 3 in the X-axis direction and the length of the coil array 5 in the X-axis direction is that The length is movable. In other words, the above difference is a stroke in which the thrust is not reduced (or the thrust is hardly reduced). Hereinafter, a simple stroke means a stroke that does not reduce this thrust.

  Air sent from a pump (not shown) flows into the open end of the main flow path 17a through a hose connected to the open end. The air that has flowed in is blown onto the coil 13 from the discharge port 17c via the branch flow path 17b. Thereby, the coil 13 is cooled.

  According to the above embodiment, the linear motor 1 has the two magnet rows 3 and the two coil rows 5. The two magnet arrays 3 each have a plurality of magnets 11 arranged in the drive direction so that the magnetization direction is orthogonal to the drive direction (X-axis direction) and the direction of the magnetic poles is alternately reversed. The magnetic poles of the same type are opposed to each other in the magnetization direction (Y-axis direction). The two coil arrays 5 each have a plurality of coils 13 arranged in the drive direction with the opening 13c facing the magnet array 3 between the two magnet arrays 3, and are arranged opposite to each other in the magnetization direction and fixed to each other. ing.

  Therefore, the linear motor 1 can obtain twice the thrust when the length in the driving direction is the same as that of the linear motor having only one magnet row and only one coil row. . When the thrust is the same, the length of the mover 23 can be halved. Further, the linear motor 1 is less affected by the distance between the two magnet rows on the thrust than the linear motor having two magnet rows facing different magnetic poles. Furthermore, even if the distance between the two magnet rows is increased, the linear motor 1 needs to have a larger coil 13 like a linear motor having a coil row whose driving direction is the axial direction between the two magnet rows. Absent. As described above, the linear motor 1 has a large thrust and a high degree of design freedom regarding the size.

  The linear motor 1 further includes a coil head 9 which is provided between the two coil arrays 5 and to which the two coil arrays 5 are fixed, and air as a cooling medium can flow through the coil head 9. A flow path 17 is formed. Therefore, the temperature rise of the coil 13 is suppressed. Such a flow path 17 is realized by making it possible to form the coil head 9 thick because the distance between the two magnet arrays 3 has little influence on the magnetic flux density in the coil 13.

  The flow path 17 is open to the outside of the coil head via the discharge ports 17 c facing the plurality of coils 13. Therefore, the coil 13 can be efficiently cooled by directly contacting the coil 13 with air as a cooling medium.

(Second Embodiment)
FIG. 4 is a plan view schematically showing a stage apparatus 51 according to the second embodiment of the present invention. FIG. 5 is a side view schematically showing the stage device 51.

  The stage apparatus 51 is configured as an apparatus used for various manufacturing apparatuses such as machine tools. The stage device 51 includes a base 53 and a stage 55 that can move with respect to the base 53 in the X-axis direction and the Y-axis direction. The stage device 51 includes an X-axis linear motor 101X that drives the stage 55 in the X-axis direction with respect to the base 53, and a Y-axis linear motor 101Y that drives the stage 55 in the Y-axis direction with respect to the base 53. doing.

  In the following, it is simply referred to as “linear motor 101”, and the two may not be distinguished. Further, for the configuration related to the X-axis linear motor 101X, an additional symbol X is added to the reference numeral, and for the configuration related to the Y-axis linear motor 101Y, the additional reference symbol Y is added to the reference symbol, but X and Y may be omitted as appropriate. is there.

  The stage 55 is slidably mounted on the base 53. The stage 55 is guided by, for example, a guide mechanism (not shown) so that only movement in the X-axis direction and the Y-axis direction is allowed. Note that the stage 55 and the base 53 may be configured such that the Z-axis direction is a direction other than the vertical direction. For example, a workpiece is placed on the stage 55.

  As in the first embodiment, the linear motor 101 includes two magnet rows 103 arranged with the same type of magnetic poles facing each other, and two coils arranged with the opening 113c of the coil 113 facing the magnet row 103. And a column 105.

  In the X-axis linear motor 101X, the magnet 111X and the coil 113X are arranged along the X-axis direction so that the X-axis direction becomes the driving direction. In the Y-axis linear motor 101Y, the magnet 111Y and the coil 113Y are arranged along the Y-axis direction so that the Y-axis direction becomes the driving direction.

  In each linear motor 101, the magnet array 103 is fixed to the base 53, and the coil array 105 is fixed to the stage 55. Accordingly, the stage 55 is driven in the X-axis direction with respect to the base 53 by the thrust in the X-axis direction of the X-axis linear motor 101X. Further, the stage 55 is driven in the Y-axis direction with respect to the base 53 by the thrust in the Y-axis direction of the Y-axis linear motor 101Y.

  The magnet array 103X of the X-axis linear motor 101X and the magnet array 103Y of the Y-axis linear motor 101Y are fixed to each other via the base 53. The coil array 105X of the X-axis linear motor 101X and the coil array 105Y of the Y-axis linear motor 101Y are fixed to each other via the stage 55. Accordingly, in one linear motor 101, the coil array 105 is driven in a direction different from the drive direction with respect to the magnet array 103 (more specifically, the width direction orthogonal to the drive direction) by driving the other linear motor 101. Also move. That is, in the X-axis linear motor 101X, the coil array 105X moves in the Y-axis direction with respect to the magnet array 103X by driving the Y-axis linear motor 101Y. In the Y-axis linear motor 101Y, the coil array 105Y moves in the X-axis direction with respect to the magnet array 103Y by driving the X-axis linear motor 101X.

  FIG. 6 is a plan view of the X-axis linear motor 101X. FIG. 7 is a side view of the X-axis linear motor 101X, that is, a view seen from the side in the driving direction (X-axis direction). FIG. 8 is a front view of the X-axis linear motor 101X, that is, a view seen from the driving direction.

  The number of the plurality of magnets 111X and the plurality of coils 113X and the size of the magnet array 103X and the coil array 105X in the driving direction (X-axis direction) are substantially the same as those in the first embodiment. That is, the number of the coils 113X is smaller than that of the magnets 111X. The length of the coil array 105X in the X-axis direction is smaller than the length of the magnet array 103X in the X-axis direction, and the difference is a stroke in the driving direction of the X-axis linear motor 101X. However, the ratio of the number of coils 113X and the number of magnets 111X in a predetermined length is exemplified as 3: 4, which is different from 3: 2 in the first embodiment.

  The relationship between the sizes of the magnet 111X and the coil 113X in the width direction (Y-axis direction) is different from that of the first embodiment. That is, in the first embodiment, the diameter of the opening 13c of the coil 13 is equal to that of the magnet 11 in the width direction, whereas in the present embodiment, the magnet 111X is replaced with the opening 113c of the coil 113X in the width direction. It is larger than the diameter. The difference is substantially equal to, for example, the stroke in the drive direction (Y-axis direction) of the Y-axis linear motor 101Y.

  Therefore, even if the coil array 105X moves in the Y-axis direction with respect to the magnet array 103X by driving the Y-axis linear motor 101Y, the coil array 105X faces the magnet array 103X, and the thrust is maintained. . The magnet 111X and the coil 113X are formed in a thin rectangular parallelepiped shape, for example, as in the first embodiment, the size in the Y-axis direction> the size in the X-axis direction> the size in the Z-axis direction.

  As shown in FIGS. 6 and 8, the magnet 111 </ b> X is configured by arranging a plurality of divided magnets 119 </ b> X in the width direction (Y-axis direction). The plurality of divided magnets 119X have, for example, a plate shape (thin shape) in which the width direction (Y-axis direction) is the longitudinal direction, the drive direction (X-axis direction) is the short direction, and the magnetization direction (Z-axis direction) is the thickness direction. A rectangular parallelepiped). In other words, the divided magnet 119X is formed so that the size in the Y-axis direction> the size in the X-axis direction> the size in the Z-axis direction.

  The plurality of divided magnets 119X may be directly fixed to each other with a resin or the like, or may be indirectly fixed to each other by being fixed to the yoke 107X. The plurality of divided magnets 119X may be in contact with each other or may be separated from each other.

  The basic configuration of the yoke 107X is the same as that of the yoke 7 of the first embodiment. In other words, the yoke 107X is formed of a magnetic material, and is disposed opposite to the magnet array 103X, and the magnet array 103X is fixed. As shown in FIG. 8, the two yokes 107X are fixed to each other by a plate-like yoke connecting member 125X extending along the driving direction (X-axis direction) on the side of the yoke 107X. Further, one of the yokes 107X is fixed to the base 53 via a support member 57 as shown in FIG.

  The support member 57 may be a part of the stage apparatus 51, a part of a manufacturing apparatus such as a machine tool including the stage apparatus 51, or a facility such as a factory floor. Part. Further, the support member 57 may be integrated with at least one of the yoke 107 and the base 53.

  The basic configuration of the coil head 109X is the same as that of the coil head 9 of the first embodiment. That is, it is provided between the two coil arrays 105X, and the two coil arrays 105X are fixed. As shown in FIGS. 6 and 8, the coil head 109X is formed with a flow path 117X for flowing air as a cooling medium, as in the first embodiment. In addition, illustration of the discharge port facing the branch flow path and the coil 113X is omitted. As shown in FIG. 8, the opening end of the main channel of the channel 117X is opened at the end of the coil head 109X in the driving direction (X-axis direction).

  The end of the coil head 109X in the driving direction (X-axis direction) serves as a mounting portion for a stage connecting member 59X (FIGS. 4 and 5) that connects the coil head 109X and the stage 55. For example, as shown in FIG. 8, a hole 127X is formed at the end, and a shaft-shaped stage connecting member 59X is inserted into the hole 127X.

  The coil head 109X has a groove 129X extending in the driving direction (X-axis direction) on the surface to which the coil array 105X is fixed. A cable 131X for supplying power to the coil array 105X is disposed in the groove portion 129X. The cable 131X extends from the end of the coil head 109X to which the stage connecting member 59X is attached.

  FIG. 9 is a plan view of the Y-axis linear motor 101Y. FIG. 10 is a side view of the Y-axis linear motor 101Y, that is, a view seen from the side in the drive direction (Y-axis direction). FIG. 11 is a front view of the Y-axis linear motor 101Y, that is, a view seen from the driving direction.

  The Y-axis linear motor 101Y has a plurality (more specifically, two) of motor assemblies 106Y composed of a combination of a magnet array 103Y and a coil array 105Y. The two motor assemblies 106Y are arranged in the width direction (X-axis direction). The two motor assemblies 106Y have the same configuration.

  In each motor assembly 106Y, the number in the driving direction (Y-axis direction) of the plurality of magnets 111Y and the plurality of coils 113Y, and the size in the driving direction of the magnet row 103Y and the coil row 105Y are the same as those in the first embodiment and X This is substantially the same as the shaft linear motor 101X. That is, the number of coils 113Y is smaller than that of magnets 111Y in the Y-axis direction. The length of the coil array 105Y in the Y-axis direction is smaller than the length of the magnet array 103Y in the Y-axis direction, and the difference is a stroke in the drive direction of the Y-axis linear motor 101Y. The ratio of the number of coils 113Y and the number of magnets 111Y in a predetermined length is exemplified as 3: 4, which is the same as the ratio in the X-axis linear motor 101X.

  In each motor assembly 106Y, the relationship in size between the magnet 111Y and the coil 113Y in the width direction (X-axis direction) is the same as in the first embodiment. That is, in the width direction, the diameter of the opening 113c of the coil 113Y (the length of the parallel portion 113a) is equivalent to that of the magnet 111Y. The magnet 111Y and the coil 113Y are, for example, the size in the width direction (X-axis direction)> the size in the driving direction (Y-axis direction)> Z-axis, as in the first embodiment and the X-axis linear motor 101X. It is formed in a thin rectangular parallelepiped shape having a size in the direction.

  In each motor assembly 106Y, the magnet 111Y is configured by arranging a plurality of divided magnets 119Y in the width direction (Y-axis direction), as shown in FIGS. The plurality of divided magnets 119Y have, for example, a plate shape (thin shape) in which the width direction (X-axis direction) is the longitudinal direction, the drive direction (Y-axis direction) is the short direction, and the magnetization direction (Z-axis direction) is the thickness direction. A rectangular parallelepiped). In other words, the split magnet 119Y is formed so that the size in the X-axis direction> the size in the Y-axis direction> the size in the Z-axis direction.

  The plurality of divided magnets 119Y may be directly fixed to each other with a resin or the like, or may be indirectly fixed to each other by being fixed to the yoke 107Y. The plurality of divided magnets 119Y may be in contact with each other or may be separated from each other.

  The size and shape of the magnet 111Y, the coil 113Y, and the split magnet 119Y may be different from the size and shape of the magnet 111X, the coil 113X, and the split magnet 119Y of the X-axis linear motor 101X. It may be the same.

  In the following description, it is assumed that the magnets 111X and 111Y have the same size in the driving direction (X-axis direction in the magnet 111X and Y-axis direction in the magnet 111Y). The magnet 111Y is larger in the width direction (Y-axis direction in the magnet 111X and X-axis direction in the magnet 111Y) than the magnet 111X. The coil 113X and the coil 113Y are assumed to have the same size and shape. The divided magnet 119X and the divided magnet 119Y are assumed to have the same size and shape.

  The stroke in the drive direction (Y-axis direction) of the Y-axis linear motor 101Y is set larger than the stroke in the drive direction (X-axis direction) of the X-axis linear motor 101X. For example, the stroke of the X-axis linear motor 101X is two times the size of the drive direction (X-axis direction) of the magnet 111X, while the stroke of the Y-axis linear motor 101Y is the drive direction of the magnet 111Y (Y 9 pieces of the size in the axial direction).

  Further, the stroke of the X-axis linear motor 101X is smaller than the length of the parallel portion 113a of the coil 113Y of the Y-axis linear motor 101Y. Therefore, in the Y-axis linear motor 101Y, even if the X-axis linear motor 101X is driven and the coil array 105Y moves in the width direction (X-axis direction), the coil array 105Y is completely moved outside the magnet array 103Y. The thrust in the Y-axis direction can be exhibited.

  On the other hand, the stroke of the Y-axis linear motor 101Y is larger than the length of the parallel portion 113a of the coil 113X of the X-axis linear motor 101X. Accordingly, in the X-axis linear motor 101X, if the size in the width direction of the magnet 111X is approximately the same as the length of the parallel portion 113a, as in the first embodiment, the driving of the Y-axis linear motor 101Y is performed. As a result, the coil array 105X may completely go out of the magnet array (103X), and no thrust in the X-axis direction may occur.

  However, as described above, in the present embodiment, since the size of the magnet row 103X in the width direction (Y-axis direction) is larger than the length of the parallel portion 113a, the overlap between the coil row 105X and the magnet row 103X is maintained. And thrust is demonstrated.

  Other configurations of the Y-axis linear motor 101Y, such as the yoke 107Y, the coil head 109Y, the yoke connecting member 125Y, and the cable 131Y, are generally the same as the other configurations of the X-axis linear motor 101X.

  However, the yoke 107Y, the coil head 109Y, the yoke coupling member 125Y, and the cable 131Y are provided in common to the two motor assemblies 106Y.

  The Y-axis linear motor 101Y is different from the X-axis linear motor 101X with respect to the arrangement position and orientation of the yoke coupling member 125Y and the like. This is because the X-axis linear motor 101X takes out power from the end in the driving direction (X-axis direction) by the stage connecting member 59X, whereas the Y-axis linear motor 101Y has a stage connecting member 59Y (see FIG. 4). This is because power is extracted from the side of the driving direction (Y-axis direction) by FIG.

  Specifically, the yoke connecting member 125Y is provided at an end in the driving direction (Y-axis direction). The yoke connecting member 125Y can function as a stopper that restricts the coil array 105Y from moving out of the magnet array 103Y in the driving direction. Further, the opening end of the main flow path of the flow path 117Y and the hole 127Y for attaching the yoke connecting member 125Y provided in the coil head 9 are open on the side in the driving direction. The groove portion 129Y (notch portion) extends in the width direction (Y direction). The cable 131Y disposed in the groove portion 129Y extends out of the coil head 9 from the side in the driving direction. Two flow paths 117Y are provided corresponding to the two motor assemblies 106Y. However, the flow path 117Y may be one.

  According to the above embodiment, the stage apparatus 51 includes the base 53, the stage 55 that can move with respect to the base 53 in a predetermined driving direction (X-axis direction or Y-axis direction), and the stage 55 with respect to the base 53. The linear motor 101 is driven. The linear motor 101 has the same configuration as the linear motor 1 of the first embodiment. Therefore, also in the second embodiment, the same effect as that of the first embodiment, that is, the effect of increasing the degree of design freedom with respect to the size while increasing the thrust is achieved.

  The stage device 51 includes, as linear motors for driving the stage 55, an X-axis linear motor 101X whose driving direction is the X-axis direction and a Y-axis linear motor 101Y whose driving direction is the Y-axis direction. In each linear motor 101, the magnet array 103 is fixed to the base 53 and the coil array 105 is fixed to the stage 55. Therefore, as described above, one linear motor 101 is moved in the width direction orthogonal to the driving direction by driving another linear motor 101. Such a configuration is likely to be practically allowed because the stroke in the driving direction of each linear motor 101 is shortened by the two magnet rows 103 and the two coil rows 105.

  The size of the plurality of magnets 111X in the X-axis linear motor 101X in the Y-axis direction is larger than the size in the Y-axis direction of the openings 113c of the plurality of coils 113X in the X-axis linear motor 101X. Larger than the stroke difference in the axial direction. Therefore, as described above, even if the coil array 105X is moved in the Y-axis direction with respect to the magnet array 103X by driving the Y-axis linear motor 101Y, the coil array 105X and the magnet array 103X can be maintained in an overlapping state. . As a result, a reduction in thrust can be suppressed.

  Each of the plurality of magnets 111X includes a plurality of divided magnets 119X that are smaller in the width direction (Y-axis direction) than the width direction of the plurality of coils 113Y. Therefore, the size in the width direction of the plurality of magnets 111X can be changed only by changing the number of arrangement of the divided magnets 119X. As a result, the Y-axis linear motor 101Y having various strokes can be easily combined with the X-axis linear motor 101X.

  Further, the stroke of the X-axis linear motor 101X in the X-axis direction is smaller than the stroke of the Y-axis linear motor 101Y in the Y-axis direction, and the Y-axis linear motor 101Y has a plurality of motor assemblies 106Y in the X-axis direction. . Therefore, in the X-axis linear motor 101X that moves greatly in the width direction (Y-axis direction) by driving the Y-axis linear motor 101Y, as described above, the magnet array 103X is formed to be large in the width direction. Is suppressed. On the other hand, in the Y-axis linear motor 101Y in which the movement in the width direction (X-axis direction) due to the driving of the X-axis linear motor 101X is small, a large thrust is generated by the plurality of motor assemblies 106Y even if a slight reduction in thrust occurs. Can be maintained. As a result, as a whole, efficient thrust is ensured according to the ratio of the movement amount in the X-axis direction and the movement amount in the Y-axis direction.

  In the second embodiment, the stage device 51 is an example of the linear moving stage device of the present invention, the X-axis direction is an example of the first direction of the present invention, and the Y-axis direction is the second direction of the present invention. The X-axis linear motor 101X is an example of the first linear motor of the present invention, and the Y-axis linear motor 101Y is an example of the second linear motor of the present invention.

  The present invention is not limited to the above embodiment, and may be implemented in various aspects.

  The shapes of the magnet and the split magnet are not limited to a rectangular parallelepiped shape in which the length in the width direction> the length in the driving direction> the length in the magnetization direction>. It may be a rectangular parallelepiped having other dimensional ratios, or may be another shape such as a cylindrical shape.

  In each coil row, the plurality of coils are not limited to those arranged so as not to overlap each other. For example, the plurality of coils may be arranged so as to overlap each other such that a portion (parallel portion 13a) extending in the width direction is positioned in the opening (13c) of the adjacent coil. Moreover, the axial direction does not need to correspond to the magnetization direction in the plurality of coils, and the axial direction may be inclined with respect to the magnetization direction.

  The ratio of the number of coils and the number of magnets in a predetermined length in the driving direction is not limited to that exemplified in the embodiment. For example, the ratio of the number of coils to the number of magnets may be 3: 1.

  The coil head and the yoke may be omitted. That is, a plurality of magnets or a plurality of coils may be fixed to each other to constitute a mover or a stator.

  The shape of the coil head is not limited to a flat plate shape, and may be another shape such as a frame shape. Moreover, when the coil head has a flat plate shape, a recess into which a plurality of coils are fitted may be formed.

  The material of the coil head is not limited to a conductive nonmagnetic material such as aluminum. For example, the material of the coil head may be a non-conductive non-magnetic material such as glass epoxy cloth. In this case, there are effects that generation of eddy current is suppressed, the weight of the coil head is reduced, and measures for insulation between the coil head and the coil are not required. The material of the coil head may be a magnetic material such as iron.

  The flow path through which the cooling medium flows may not be open to the outside of the coil head via the discharge port facing the coil. The cooling medium may flow through a flow path adjacent to the coil to remove heat from the coil. Further, the cooling medium is not limited to air. For example, the cooling medium may be a liquid such as water, or another gas such as nitrogen. However, if it is gas, it is easy to let a cooling medium touch a coil directly.

  When two linear motors are combined with different directions as drive directions to drive a drive target such as a stage, the drive directions of the two linear motors are not limited to orthogonal ones. The two driving directions may be inclined with respect to each other. Further, the strokes of the two linear motors may be the same or different as in the second embodiment.

  When the size of the plurality of magnets (111X) in the width direction (X-axis direction) is set larger than the size of the plurality of coils (113X) in the width direction (X-axis direction) in one linear motor (101X) The difference is not limited to a size equal to or larger than the stroke of the other linear motor (101Y) combined with the one linear motor. It may be smaller than the stroke of another linear motor. For example, the difference may be the size of one piece in the drive direction (Y-axis direction) of the magnet (111Y) of another linear motor (101Y).

  Further, the strokes of other linear motors to be combined may not be determined. For example, in one linear motor (101X), the size of the plurality of magnets (111X) in the width direction (Y-axis direction) is the same as the width direction (Y-axis direction) of the openings (113c) of the plurality of coils (113X). When the difference is greater than the size of one magnet in the driving direction (X-axis direction) of the plurality of magnets (111X) with respect to the size, at least the same as the one linear motor (101X) By combining the linear motor as another linear motor, the effect of the present invention is achieved.

  In the second embodiment, in the X-axis linear motor 101X, in the width direction (Y-axis direction), the magnet 111X is made larger than the coil 113X, thereby reducing the thrust when the coil 113X moves in the Y-axis direction. Suppressed. However, a reduction in thrust when the coil moves in the width direction may be suppressed by making the coil larger than the magnet in the width direction.

  FIG. 12 is a schematic plan view showing a main part of the linear motor 201 according to such a modification. FIG. 13 is a schematic side view showing the main part of the linear motor 201.

  The linear motor 201 is, for example, combined with a linear motor (not shown) whose driving direction is the X-axis direction and whose driving direction is the Y-axis direction, like the X-axis linear motor 101X of the second embodiment. It is what

  The linear motor 201 includes a magnet array 203 configured by arranging a plurality of magnets 211 in the X-axis direction, and a coil array 205 configured by arranging a plurality of coils 213 in the X-axis direction. In the width direction (Y-axis direction), the parallel portion 213a (opening 213c) of the coil 213 is larger than the magnet 211. Therefore, even if the coil 213 moves in the width direction with respect to the magnet 211 within the range of the difference, the thrust is not reduced. About the magnitude | size of said difference, you may set similarly to the difference in the case where a magnet is larger than a coil in the width direction.

DESCRIPTION OF SYMBOLS 1 ... Linear motor, 3 ... Magnet row, 5 ... Coil row, 11 ... Magnet, 13 ... Coil

Claims (7)

Each of the magnetization directions has a plurality of magnets arranged in the driving direction so that the magnetization direction is orthogonal to the driving direction and the direction of the magnetic poles is alternately reversed, and the same kind of magnetic poles are opposed to each other. Two magnet rows opposed to each other in
Between the two magnet arrays, two coil arrays each having a plurality of coils arranged in the drive direction with an opening directed to the magnet array, arranged to face each other in the magnetization direction and fixed to each other;
A coil head provided between the two coil arrays, the two coil arrays being fixed by an adhesive;
I have a,
The coil head is formed with a flow path through which a cooling medium can flow.
The flow path is
A main flow path extending across the plurality of coils in the driving direction and having one end opened to the outside of the coil head;
A plurality of branch flow paths branched from the main flow path and extending in the magnetization direction;
A plurality of outlets located at the ends of the plurality of branch flow paths, facing the plurality of coils, and opened to the outside of the coil head;
The cross-sectional area of each of the plurality of branch flow paths is smaller than the cross-sectional area of the main flow path,
A linear motor in which an opening area of each of the plurality of discharge ports is larger than a cross-sectional area of each of the plurality of branch channels . The magnet 1 in the drive direction of the plurality of magnets is larger in the width direction perpendicular to the drive direction and the magnetization direction of the plurality of magnets than the size in the width direction of the openings of the plurality of coils. The linear motor according to claim 1 , wherein the linear motor is large by a difference of at least the size of the piece. Each of the plurality of magnets, to claim 2, the size in the width direction of the plurality of small plurality of divided magnets than the size in the width direction of the opening of the coil is formed is arranged in the width direction The linear motor described. The openings of the plurality of coils are magnets in the driving direction of the plurality of magnets, the size in the width direction orthogonal to the driving direction and the magnetization direction being larger than the size in the width direction of the plurality of magnets. The linear motor according to claim 1 , wherein the linear motor is large by a difference of one size or more. Base and
A stage movable in a predetermined driving direction with respect to the base;
A linear motor that drives the stage relative to the base;
Have
The linear motor is
Two magnet rows fixed to one of the base and the stage;
Two coil rows fixed to the other of the base and the stage;
A coil head provided between the two coil arrays, the two coil arrays being fixed by an adhesive;
Have
Each of the two magnet arrays has a plurality of magnets arranged in the driving direction so that the magnetization direction is orthogonal to the driving direction and the direction of the magnetic poles is alternately reversed, and the same kind of magnetic poles Facing each other in the magnetization direction so as to face each other,
The two coil arrays each have a plurality of coils arranged in the drive direction with an opening facing the magnet array between the two magnet arrays, and are arranged opposite to each other in the magnetization direction ,
The coil head is formed with a flow path through which a cooling medium can flow.
The flow path is
A main flow path extending across the plurality of coils in the driving direction and having one end opened to the outside of the coil head;
A plurality of branch flow paths branched from the main flow path and extending in the magnetization direction;
A plurality of outlets located at the ends of the plurality of branch flow paths, facing the plurality of coils, and opened to the outside of the coil head;
The cross-sectional area of each of the plurality of branch flow paths is smaller than the cross-sectional area of the main flow path,
The linear moving stage device in which an opening area of each of the plurality of discharge ports is larger than a cross-sectional area of each of the plurality of branch channels . Base and
A stage movable in a first direction and a second direction orthogonal to the first direction with respect to the base;
A first linear motor that drives the stage relative to the base with the first direction as a driving direction;
A second linear motor that drives the stage relative to the base with the second direction as a driving direction;
Have
Each of the first linear motor and the second linear motor is
Two magnet rows fixed to one of the base and the stage;
Two coil rows fixed to the other of the base and the stage;
A coil head provided between the two coil arrays, the two coil arrays being fixed by an adhesive;
Have
Each of the two magnet arrays has a plurality of magnets arranged in the driving direction so that the magnetization direction is orthogonal to the driving direction and the direction of the magnetic poles is alternately reversed, and the same kind of magnetic poles Facing each other in the magnetization direction so as to face each other,
The two coil arrays each have a plurality of coils arranged in the drive direction with an opening facing the magnet array between the two magnet arrays, and are arranged opposite to each other in the magnetization direction,
The size of the plurality of magnets of the first linear motor in the second direction is greater than the size of the openings of the plurality of coils of the first linear motor in the second direction or the first linear motor. The second direction of the second linear motor is such that the size of the openings of the plurality of coils of the motor in the second direction is larger than the size of the plurality of magnets of the first linear motor in the second direction. or more difference stroke is rather large in,
The coil head is formed with a flow path through which a cooling medium can flow.
The flow path is
A main flow path extending across the plurality of coils in the driving direction and having one end opened to the outside of the coil head;
A plurality of branch flow paths branched from the main flow path and extending in the magnetization direction;
A plurality of outlets located at the ends of the plurality of branch flow paths, facing the plurality of coils, and opened to the outside of the coil head;
The cross-sectional area of each of the plurality of branch flow paths is smaller than the cross-sectional area of the main flow path,
The linear moving stage device in which an opening area of each of the plurality of discharge ports is larger than a cross-sectional area of each of the plurality of branch channels . A stroke in the first direction of the first linear motor is smaller than a stroke in the second direction of the second linear motor;
The linear moving stage device according to claim 6 , wherein the second linear motor has a plurality of combinations of the two magnet rows and the two coil rows in the first direction.

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