JP4720498B2 - Liquid ejecting head and liquid ejecting apparatus - Google Patents

Description

  The present invention relates to a liquid ejecting head such as an ink jet recording head, and a liquid ejecting apparatus, and in particular, includes a flow path unit that forms a series of liquid flow paths from a common liquid chamber to a nozzle opening through a pressure chamber. The present invention relates to a liquid ejecting head capable of ejecting liquid as droplets from a nozzle opening by driving a pressure generating unit, and a liquid ejecting apparatus including the liquid ejecting head.

  Examples of liquid ejecting heads that discharge liquid droplets from nozzle openings by causing pressure fluctuations in the pressure chambers include, for example, ink jet recording heads used in image recording apparatuses such as printers, and manufacture of color filters such as liquid crystal displays. Material injection heads used in manufacturing, electrode material injection heads used for electrode formation of organic EL (Electro Luminescence) displays, FEDs (surface emitting displays), etc., and bioorganic matter injection heads used in the manufacture of biochips (biochemical elements) Etc.

  A recording head, which is a type of liquid ejecting head, has a series of ink flow paths from a common ink chamber (common liquid chamber / reservoir) to a nozzle through a pressure chamber, and operates pressure generating means such as a piezoelectric vibrator. Thus, a pressure fluctuation is generated in the liquid in the pressure chamber, and the ink in the pressure chamber can be ejected as an ink droplet from the nozzle using the pressure fluctuation. In this recording head, an actuator unit (vibrator unit) in which a piezoelectric vibrator group is joined to a fixed plate and a flow path unit in which the ink flow path is formed are fixed to a head case. There is.

  The flow path unit includes, for example, a metal plate-like nozzle plate in which a plurality of nozzle openings are opened in a row, a flow path forming substrate on which a flow path base portion serving as an ink flow path such as a pressure chamber is formed, A sealing plate (vibration plate) that seals the opening of the flow path base of the path forming substrate is provided, and these members are manufactured by integrating them in a laminated state. The sealing plate is made of a composite plate material in which a resin elastic film is laminated on a metal support plate such as stainless steel and the support plate is partially removed, and the surface on the elastic film side is a flow path forming substrate. It comes to be joined to. A portion of the sealing plate corresponding to the pressure chamber is provided with a diaphragm portion that changes the volume of the pressure chamber. This diaphragm part is manufactured by removing the supporting plate around the island part by etching or the like and leaving only the elastic film while leaving the part where the tip surface of the piezoelectric vibrator is joined as an island part. Yes. In addition, an ink introduction hole (liquid introduction hole) for introducing ink from the case flow path side of the head case into a common ink chamber that is a part of the ink flow path is provided in a portion corresponding to the common ink chamber in the sealing plate. However, it is established in a state where it penetrates the support plate and the elastic film.

  The head case is a member formed in a hollow block shape with, for example, a synthetic resin. The head case is formed with a storage chamber in which the actuator unit can be stored. The housing chamber is formed in a series from the bottom surface of the head case serving as the flow path unit joint surface to the upper surface opposite to the bottom surface. That is, the storage chamber is formed as a through opening that penetrates the height direction of the head case. Further, a case flow path is provided inside the head case so as to penetrate the height direction. The upper end of the case flow path communicates with the ink introduction path of the introduction needle unit including the ink introduction needle, and the lower end of the case flow path communicates with the ink flow path in the flow path unit through the ink introduction hole of the sealing plate. It is like that. Therefore, the ink introduced from the ink introduction needle is supplied to the ink channel side through the case channel and the ink introduction hole.

  A flow path unit is joined to the bottom surface of the head case having the above configuration. Specifically, the diaphragm portion of the sealing plate is disposed in the opening on the bottom side of the storage chamber, and the sealing plate is placed in a state where the case channel and the ink channel are in fluid-tight communication with each other through the ink introduction hole. The flow path unit is fixed to the head case by bonding to the bottom surface of the head case by bonding or the like. The actuator unit is inserted from the upper surface side opening of the accommodation chamber in a posture with the free end of the piezoelectric vibrator as the head, and the tip of the free end is in contact with the surface of the corresponding island portion. Is housed in. And while joining the front-end | tip of the free end part of a piezoelectric vibrator to an island part, the actuator unit is fixed in a storage chamber by adhere | attaching a fixing plate with the inner wall face of a storage chamber (refer patent document 1).

JP 2000-33713 A (FIG. 1)

  Here, since the island portion of the diaphragm portion is electrically independent from the other portions of the support plate, normally, even if a drive signal is applied to the piezoelectric vibrator, a current flows from the island portion to the other portions. Will not flow. However, since the diaphragm portion is exposed from the bottom opening of the head case into the accommodation chamber, foreign matter such as processing dust may enter the accommodation chamber during the recording head assembly process and fall to the diaphragm portion. When the foreign matter has conductivity such as metal, there is a risk of short-circuiting between the diaphragm portion (that is, the island portion) and the other portion of the support plate. When such a short circuit occurs, the entire support plate has the same potential (positive potential) as that of the free end portion of the piezoelectric vibrator. On the other hand, the nozzle plate disposed on the opposite side of the support plate from the flow path forming substrate is adjusted to the ground potential to prevent charging. As a result, the inner peripheral surface of the ink introduction port, which is a portion in contact with the ink on the support plate, and the peripheral portion of the nozzle opening of the nozzle plate act like an electrode so that the ink between them is electrolyzed. There is a fear. As this electrolysis proceeds, ink-containing components such as pigments are deposited around the ink inlet, and this deposit may block the flow path and cause ejection failure.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a liquid ejecting head and a liquid ejecting apparatus capable of preventing liquid electrolysis caused by adhesion of conductive foreign matter. Is to provide.

In order to achieve the above object, a liquid jet head according to the present invention includes a nozzle forming substrate having a nozzle opening, a flow path forming member in which a flow path including a pressure chamber empty portion serving as a pressure chamber leading to the nozzle opening is formed , A sealing plate bonded to one surface of the flow path forming member, and a head case having a storage chamber for storing pressure generating means for generating pressure in the pressure chamber based on the supplied drive signal ,
The liquid is supplied from the case passage of the head case to the passage through the liquid introduction hole of the sealing plate,
A diaphragm portion corresponding to the pressure chamber of the sealing plate is disposed at the bottom side opening of the storage chamber, and the case flow path and the liquid flow path are liquid-tightly connected via the liquid introduction hole. a liquid body jet head that passed through,
The sealing plate has a conductive support substrate ,
In the support substrate, between the exposed portion including the diaphragm portion exposed in the bottom side opening of the storage chamber in a joined state with the head case, and the introduction hole opening portion in which the liquid introduction hole is opened. The present invention is characterized in that a dividing portion that is electrically insulated is provided.

  According to the above configuration, the dividing portion that electrically insulates between the exposed portion exposed in the bottom side opening of the storage chamber of the head case and the introduction hole opening portion that is a portion in contact with the liquid is provided. As a result, during the assembly process of the liquid ejecting head, a foreign substance having conductivity falls on the exposed part through the storage chamber, and by any chance, the diaphragm part and the surrounding support substrate are electrically short-circuited by this foreign substance. Even in this case, it is possible to prevent the liquid from being electrolyzed between the liquid introduction hole in the support substrate and the peripheral portion of the nozzle opening in the nozzle formation substrate. This makes it possible to prevent problems such as ejection failure due to the liquid-containing components being deposited by electrolysis.

In the above configuration, the dividing portion surrounds the introduction hole opening portion and the liquid introduction hole while leaving the introduction hole opening portion as a seal allowance for securing a liquid-tight state between the case flow channel and the liquid flow channel. in it is desirable that the periphery of the support substrate that is to adopt a configuration which is portion removed.

Further, a liquid ejecting apparatus of the invention includes the liquid ejecting head having the above-described configuration,
It is characterized in that a droplet is ejected from the liquid ejecting head and the droplet is landed on an ejection target.

  According to the above configuration, since the liquid ejecting head capable of preventing ejection failure due to the electrolysis of the liquid is mounted, it is possible to provide a highly reliable liquid ejecting apparatus.

  The best mode for carrying out the present invention will be described below with reference to the accompanying drawings. In the embodiments described below, various limitations are made as preferred specific examples of the present invention. However, the scope of the present invention is not limited to the following description unless otherwise specified. However, the present invention is not limited to these embodiments. In the following, an ink jet printer (hereinafter abbreviated as a printer) shown in FIG. 1 will be exemplified as the liquid ejecting apparatus of the invention.

  The printer 1 includes a recording head 2 that is a kind of liquid ejecting head and a carriage 4 that is detachably mounted with an ink cartridge 3 that is a kind of a liquid storage member, and is disposed below the recording head 2, and is a recording sheet. A platen 5 on which 6 (a kind of discharge target) is conveyed, a carriage moving mechanism 7 for moving the carriage 4 in the paper width direction of the recording paper 6, and a paper feeding mechanism 8 for conveying the recording paper 6 in the paper feeding direction. In general, it is structured. Here, the paper width direction is the main scanning direction (head scanning direction), and the paper feeding direction is the sub-scanning direction (that is, the direction orthogonal to the head scanning direction). The ink cartridge 3 is not limited to the cartridge that is mounted on the carriage 4 as in the present embodiment, but is a cartridge that is mounted on the housing side of the printer 1 and is supplied to the recording head 2 via the ink supply tube. It can also be adopted.

  The carriage 4 is attached while being supported by a guide rod 9 installed in the main scanning direction, and is configured to move in the main scanning direction along the guide rod 9 by the operation of the carriage moving mechanism 7. ing. The position of the carriage 4 in the main scanning direction is detected by the linear encoder 10, and a detection signal is transmitted as position information to a control unit (not shown). Thus, the control unit can control the recording operation (discharge operation) and the like by the recording head 2 while recognizing the scanning position of the recording head 2 based on the position information from the linear encoder 10.

  Further, a home position serving as a scanning start point of the recording head 2 is set within the moving range of the recording head 2 and outside the platen 5. A capping mechanism 11 is provided at this home position. The capping mechanism 11 seals the nozzle forming surface of the recording head 2 with a cap member 11 ′ to prevent evaporation of the ink solvent from the nozzle opening 37 (see FIG. 2 and the like). The capping mechanism 11 is also used for a cleaning operation for applying a negative pressure to the sealed nozzle surface and forcibly sucking and discharging ink from the nozzle openings 37.

  FIG. 2 is a cross-sectional view of a main part for explaining the configuration of the recording head 2. The illustrated recording head 2 includes an introduction needle unit 14 for standing an ink introduction needle 13, a vibrator unit 16 having a plurality of piezoelectric vibrators 15, and a flow path unit in which an ink flow path (a kind of liquid flow path) is formed. 17, a head case 18 to which the vibrator unit 16 and the flow path unit 17 are fixed, a wiring board 28 for supplying a drive signal to the piezoelectric vibrator 15, and the like.

  The ink introduction needle 13 (a kind of liquid introduction needle) is a hollow needle-shaped member molded of synthetic resin, and the internal space of the ink in a liquid storage member such as an ink cartridge or a sub tank (not shown) (in the present invention) This is a needle channel 20 into which a kind of liquid is introduced. An introduction hole 21 communicating with the needle channel 20 is formed at the tip of the ink introduction needle 13, and when the ink introduction needle 13 is inserted into the liquid storage member, the liquid is stored through the introduction hole 21. The ink in the member is introduced into the needle channel 20.

  The introduction needle unit 14 is molded of synthetic resin in the same manner as the ink introduction needle 13, and an ink introduction path 22 corresponding to the ink introduction needle 13 is formed therein. The upstream end portion of the ink introduction path 22 has a funnel-like diameter expanded toward the introduction needle mounting side, and a filter 23 that filters out foreign matters in the ink is disposed in the opening portion. The ink introduction needle 13 is fixed on the introduction needle unit 14 by welding or the like in a state where the position of the downstream opening of the needle flow path 20 is superposed on the upstream opening of the ink introduction path 22. As a result, the ink introduction path 22 of the introduction needle unit 14 and the needle flow path 20 of the ink introduction needle 13 communicate with each other through the filter 23 in a liquid-tight state.

  The vibrator unit 16 includes a piezoelectric vibrator 15 as pressure generating means, a fixing plate 27 to which the piezoelectric vibrator 15 is joined, a flexible cable 29 for supplying a drive signal from the wiring board 28 to the piezoelectric vibrator 15, and the like. Consists of The piezoelectric vibrator 15 in the present embodiment is a laminated piezoelectric vibrator that is formed by sandwiching a piezoelectric body between electrodes and cutting it into elongated comb teeth. The piezoelectric vibrator 15 is configured as a longitudinal vibration type piezoelectric vibrator that can expand and contract in the vertical direction. Each piezoelectric vibrator 15 is in a so-called cantilever state in which a fixed end portion is joined to a fixed plate 27 so that a free end portion protrudes outward from the leading edge of the fixed plate 27. And the front end surface of the free end part in each piezoelectric vibrator 15 is joined to the island part 49 of the diaphragm part 47 formed in the sealing board 35 so that it may mention later.

  An individual external electrode 30 and a common external electrode 31 are formed on the surface of the piezoelectric vibrator 15. The individual external electrode 30 is an electrode formed in series on the tip surface portion of the piezoelectric vibrator 15 and a wiring connection surface (surface to which the flexible cable 29 is connected), which is one side surface of the piezoelectric vibrator 15 in the stacking direction. In addition, it is electrically connected to individual internal electrodes (not shown) inside the piezoelectric vibrator 15. Further, the common external electrode 31 is an electrode formed in series on the base end surface portion of the piezoelectric vibrator 15 and the fixed plate mounting surface which is the other side surface of the piezoelectric vibrator 15 in the stacking direction. Are connected to a common internal electrode (not shown). Among these external electrodes, one individual external electrode 30 is electrically connected to the individual terminal of the flexible cable 29, and the other common external electrode 31 is electrically connected to the ground terminal of the flexible cable 29. When the drive signal from the flexible cable 29 is applied to the piezoelectric vibrator 15 through the individual external electrode 30, the piezoelectric body is deformed by the potential difference between the individual external electrode 30 (individual internal electrode) and the common external electrode 31 (common internal electrode). To do. Thereby, the piezoelectric vibrator 15 can be driven to extend and contract.

  As shown in FIG. 3, the flow path unit 17 includes a nozzle plate 33, a flow path forming substrate 34, and a sealing plate 35 (vibrating plate). The nozzle plate 33 is attached to one surface of the flow path forming substrate 34. In addition, the sealing plate 35 is configured by arranging and laminating the sealing plate 35 on the other surface of the flow path forming substrate 34 opposite to the nozzle plate 33 and integrating them by adhesion or the like. The nozzle plate 33 disposed at the bottom of the flow path unit 17 is a thin plate made of stainless steel in which a plurality of nozzle openings 37 are opened in a row. In this embodiment, for example, 180 nozzle openings 37 are formed in a row at a pitch corresponding to 180 dpi, and the nozzle rows are configured by these nozzle openings 37. The nozzle plate 33 is adjusted to the ground potential through a metal cover (not shown) for the purpose of preventing static electricity and noise generated from recording paper or the like.

  The flow path forming substrate 34 is made of, for example, a silicon wafer, and has a flow path base portion that forms a series of ink flow paths (a kind of liquid flow path) including a common ink chamber 38, an ink supply port 39, and a pressure chamber 40. It is the formed plate-shaped member. Specifically, the pressure chamber empty portion 41 that becomes the pressure chamber 40, the groove portion 42 that becomes the ink supply port 39, the empty portion 43 that becomes the common ink chamber 38, and the like are formed on the flow path forming substrate 34 by etching processing. Yes. The pressure chamber 40 is formed as a long and narrow chamber in a direction perpendicular to the direction in which the nozzle openings 37 are arranged (nozzle row direction), and the ink supply port 39 is provided between the pressure chamber 40 and the common ink chamber 38. It is formed as a narrowed portion (orifice) having a narrow channel width that communicates. The common ink chamber 38 is a chamber for temporarily storing ink introduced from the ink introduction needle 13 and supplied through the ink introduction path 22 and the case flow path 25. The ink stored in the common ink chamber 38 is distributed and supplied to the corresponding pressure chambers 40 through the ink supply ports 39.

  The sealing plate 35 is a dual structure composite in which an elastic film 46 made of an insulating flexible film such as PPS (polyphenylene sulfide) is laminated on a conductive support substrate 45 such as stainless steel. It is a plate material, and the surface on the elastic film 46 side is bonded to the flow path forming substrate 34, and the surface on the support substrate 45 side is bonded to the bottom surface of the head case 18. As shown in FIG. 4, the sealing plate 35 is formed with a diaphragm portion 47 for sealing one opening surface of the pressure chamber 40 (pressure chamber empty portion 41) and changing the volume of the pressure chamber 40. In addition, this is a member in which a compliance portion 48 for sealing one opening surface of the common ink chamber 38 (recess 43) is formed. The diaphragm portion 47 is formed by removing the surrounding support substrate 45 by etching while leaving a plurality of portions corresponding to the respective pressure chambers 40 as island portions 49 for joining the tip surfaces of the piezoelectric vibrators 15. Only the elastic film 46 is used. Similar to the planar shape of the pressure chamber 40, the island portion 49 is formed in an elongated block shape in a direction orthogonal to the direction in which the nozzle openings 37 are arranged.

  Further, the portion of the sealing plate 35 that functions as the compliance portion 48, that is, the portion corresponding to the common ink chamber 38, has the support substrate 45 removed substantially following the opening shape of the recess 43 of the flow path forming substrate 34, and the elastic body Only the film 46 is provided. When the compliance portion 48 is formed, an etching process is performed so that a part of the support substrate 45 in the sealing plate 35 remains as an apron portion 44 projecting in a substantially trapezoidal shape in plan view from the edge of the compliance portion 48 toward the center side. (Fig. 4).

  The apron section 44 is provided with an ink introduction hole 50 (corresponding to a liquid introduction hole in the present invention) in a state of penetrating the support substrate 45 and the elastic film 46. The ink introduction hole 50 communicates with a common ink chamber 38 that is a part of the ink flow path in a joined state with the flow path forming substrate 34, and communicates with the case flow path 25 in a joined state with the head case 18. . That is, the ink introduction hole 50 is a through hole for introducing the ink flowing down from the case flow path 25 side of the head case 18 to the common ink chamber 38 side. In this embodiment, the ink introduction hole 50 is formed as a circular hole. Has been. In addition, the peripheral portion of the ink introduction hole 50 in the present embodiment is an introduction hole opening portion 51. The introduction hole opening portion 51 is a portion that functions as a joining allowance (seal allowance) for ensuring liquid tightness with the case flow path 25 when joining with the head case 18. The support substrate 45 around the introduction hole opening portion 51 is removed in an annular shape that is slightly larger than the outer peripheral shape of the ink introduction hole 50. Details of this point will be described later.

  The head case 18 is a hollow block-shaped member made of synthetic resin, and the inside of the housing case 53 that can accommodate the vibrator unit 16 and the ink from the introduction needle unit 14 side are supplied to the flow channel unit 17 side. The case flow path 25 is formed. The accommodation chamber 53 of the head case 18 is formed in a series from the bottom surface of the head case 18 serving as the flow path unit attachment surface to the upper surface to which the introduction needle unit 14 and the wiring board 28 are attached. That is, the storage chamber 53 is formed as a through opening that passes through the height direction of the head case 18.

  First, the flow path unit 17 is joined to the head case 18. Specifically, the diaphragm portion 47 of the sealing plate 35 is disposed in the bottom opening of the storage chamber 53, and the case flow path 25 and the common ink chamber 38 (that is, the ink flow path) are connected to the ink in the sealing plate 35. The flow path unit 17 is attached to the head case 18 by adhering the surface on the support substrate 45 side of the sealing plate 35 to the bottom surface of the head case 18 with an adhesive or the like in a state of fluid-tight communication through the introduction hole 50. Join. As a result, the diaphragm portion 47 (island portion 49) faces the bottom opening of the storage chamber 53 of the head case 18. Next, the vibrator unit 16 is housed in the housing chamber 53 of the head case 18. In other words, the vibrator unit 16 is inserted from the upper surface side opening of the storage chamber 53 with the free end of the piezoelectric vibrator 15 at the head, and the tip of the free end is brought into contact with the surface of the corresponding island portion 49. In this state, it is stored in the storage chamber 53. Then, the tip of the free end portion of the piezoelectric vibrator 15 is joined to the island portion 49, and the fixing plate 27 is bonded to the inner wall surface of the accommodation chamber 53 to be fixed in the accommodation chamber 53.

  If the flow path unit 17 and the vibrator unit 16 are attached to the head case 18, the wiring board 28 is disposed on the upper surface of the head case 18, and wiring between the wiring board 28 and the flexible cable 29 is performed. Thereafter, the introduction needle unit 14 is attached to the upper surface of the head case 18 with the packing 24 interposed. As a result, the ink introduction path 22 of the introduction needle unit 14 communicates with the case flow path 25 of the head case in a fluid-tight manner via the packing 24. Therefore, the ink introduced from the introduction hole 21 of the ink introduction needle 13 passes through the ink introduction path 22 and the case flow path 25 from the ink introduction hole 50 to the ink flow path side of the flow path unit 17, that is, to the common ink chamber 38. Supplied.

  In the recording head 2 configured as described above, when a drive signal is supplied from the wiring board 28 to the piezoelectric vibrator 15 through the flexible cable 29, the piezoelectric vibrator 15 expands and contracts in the longitudinal direction of the element. 49 moves in a direction close to or away from the pressure chamber 40. As a result, the volume of the pressure chamber 40 changes, and the pressure in the ink in the pressure chamber 40 varies. Due to this pressure fluctuation, an ink droplet (a kind of droplet) is ejected from the nozzle opening 37.

  Here, with respect to the sealing plate 35, the island portion 49 which is a part of the conductive support substrate 45 is joined to the individual external electrode 30 formed on the distal end surface of the free end portion of the piezoelectric vibrator 15. Therefore, it has the same potential as the piezoelectric vibrator 15. On the other hand, the nozzle plate 33 disposed on the opposite side of the sealing plate 35 with the flow path forming substrate 34 interposed therebetween is adjusted to the ground potential as described above. Since the island portion 49 is electrically independent from the other portions of the support substrate 45, normally, even if a drive signal is applied to the piezoelectric vibrator 15, current flows from the island portion 49 to the other portions. There is no.

  However, as described above, since the diaphragm portion 47 is exposed in the bottom opening of the storage chamber 53 of the head case 18, as shown in FIG. May enter the storage chamber 53 of the head case 18 and fall onto the exposed portion 55 including the diaphragm portion 47 and its peripheral portion. And when this foreign material F has conductivity, such as a metal, and adheres between the island part 49 and the other part of the support substrate 45, there exists a possibility of electrically short-circuiting between both. is there. When such a short circuit occurs, almost the entire support substrate 45 has the same potential (positive potential) as the front end surface of the free end portion of the piezoelectric vibrator 15.

  As a result, conventionally, the inner peripheral surface of the ink introduction port, which is a portion in contact with the ink on the support substrate of the sealing plate, and the peripheral portion of the nozzle opening of the nozzle plate act as electrodes, and the ink between them is There was a case of electrolysis. As the electrolysis of the ink progresses, there are problems such as the inclusion of ink-containing components such as pigments around the ink inlet, and the deposits block the ink flow path and cause ejection failure. It was. In this case, since the electrolysis of the ink proceeds slowly, it is difficult to find it at the inspection stage at the time of manufacturing the recording head, and there is a possibility that a defect occurs after reaching the user's hand as a product.

  In view of such circumstances, in the recording head 2 according to the present invention, the separation between the exposed portion 55 and the introduction hole opening portion 51 where the ink introduction hole 50 is formed is electrically insulated. A portion 56 is provided. In the present embodiment, as shown in FIG. 4, by surrounding the introduction hole opening portion 51 and the ink introduction hole 50, the surrounding support substrate 45 is annularly removed so that only the elastic film 46 is obtained. A bowl-shaped dividing portion 56 that is slightly larger than the outer peripheral shape of the ink introduction hole 50 is formed. As a result, the ink introduction port 50 and the surrounding introduction hole opening portion 51 are electrically independent from other portions of the support substrate 45 (that is, portions other than the island portion 49 and the introduction hole opening portion 51). In the unlikely event that the island 49 and other portions of the support substrate 45 are short-circuited due to the attachment of the conductive foreign matter F as described above (or the individual external electrode 30 of the piezoelectric vibrator 15 and the support substrate 45 In the case where the ink is short-circuited), it is possible to prevent the electrolysis of the ink, and as a result, it is possible to suppress the ejection failure caused by the electrolysis of the ink. Since the printer 1 includes the recording head 2 having the above-described configuration, it is possible to perform highly reliable ejection control.

  The introduction hole opening 51 is left as a seal allowance that can sufficiently secure a liquid-tight state between the case flow path 25 of the head case 18 and the ink flow path of the flow path unit 17. Thereby, it is possible to prevent ink leakage from occurring in the ink introduction hole 50. Further, by forming the dividing portion 56 with a uniform width along the outer peripheral shape of the ink introduction hole 50, for example, when the elastic film 46 in the dividing portion 56 is stretched or deformed due to a change in temperature or humidity. However, since it is possible to suppress deformation in one direction, it is possible to prevent displacement of the ink introduction hole 50 with respect to the case flow path 25 as much as possible.

  By the way, the present invention is not limited to the above embodiment, and various modifications can be made based on the description of the scope of claims.

  FIG. 5 is a plan view illustrating the configuration of the sealing plate 35 in the second embodiment of the present invention. In this 2nd Embodiment, the shape and formation position of the parting part 56 differ from the said 1st Embodiment. Specifically, a dividing portion 56 is formed in a frame-shaped portion outside the compliance portion 48 in the support substrate 45 so as to cross the frame-shaped portion. That is, dividing portions 56a and 56b are formed in two places on the left and right sides, respectively, with the ink introduction hole 50 and the introduction hole opening portion 51 interposed therebetween. Also with this configuration, the ink introduction port 50 and the introduction hole opening portion 51 around the ink introduction port 50 can be electrically independent from the other portions of the support substrate 45, so that the electrolysis of the ink can be prevented. Is possible. In short, it is possible to electrically insulate the exposed portion 55 where foreign matter may adhere to the introduction hole opening portion 51 where the ink introduction hole 50 is formed, and the case flow path 25 and the ink flow path. As long as the liquid-tight state can be secured, the dividing portion 56 having an arbitrary shape can be formed at an arbitrary position.

  In addition, the present invention is not limited to the printer described above, and can be applied to other liquid ejecting heads and liquid ejecting apparatuses as long as the sealing plate having the above-described configuration is provided. For example, a display manufacturing apparatus that manufactures color filters such as liquid crystal displays, an electrode manufacturing apparatus that forms electrodes such as organic EL (Electro Luminescence) displays and FEDs (surface emitting displays), and chips that manufacture biochips (biochemical elements) The present invention can also be applied to a manufacturing apparatus or the like.

FIG. 2 is a perspective view illustrating a configuration of a printer. FIG. 3 is a cross-sectional view of a main part for explaining the configuration of a recording head. It is a disassembled perspective view explaining the structure of a flow path unit. It is a top view explaining the structure of a sealing plate. It is a top view explaining the structure of the sealing board in 2nd Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Printer, 2 ... Recording head, 15 ... Piezoelectric vibrator, 16 ... Vibrator unit, 17 ... Channel unit, 18 ... Head case, 25 ... Case channel, 33 ... Nozzle plate, 34 ... Channel formation substrate, 35 ... Sealing plate, 37 ... Nozzle opening, 38 ... Common ink chamber, 40 ... Pressure chamber, 44 ... Apron part, 45 ... Support substrate, 46 ... Elastic body film, 47 ... Diaphragm part, 49 ... Island part, 50 ... Ink introduction hole, 51 ... introduction hole opening part, 53 ... storage chamber, 55 ... exposure part, 56 ... dividing part

Claims (3)

Nozzle forming substrate having a nozzle opening, a flow path forming member in which a flow path including a pressure chamber empty portion serving as a pressure chamber leading to the nozzle opening is formed, and a seal bonded to one surface of the flow path forming member A plate , and a head case having a storage chamber for storing pressure generating means for generating pressure in the pressure chamber based on the supplied drive signal ,
The liquid is supplied from the case passage of the head case to the passage through the liquid introduction hole of the sealing plate,
A diaphragm portion corresponding to the pressure chamber of the sealing plate is disposed at the bottom side opening of the storage chamber, and the case flow path and the liquid flow path are liquid-tightly connected via the liquid introduction hole. a liquid body jet head that passed through,
The sealing plate has a conductive support substrate ,
In the support substrate, between the exposed portion including the diaphragm portion exposed in the bottom side opening of the storage chamber in a joined state with the head case, and the introduction hole opening portion in which the liquid introduction hole is opened. A liquid ejecting head comprising a dividing portion that is electrically insulated. The dividing portion is provided in a state of surrounding the introduction hole opening portion and the liquid introduction hole while leaving the introduction hole opening portion as a seal allowance for securing a liquid tight state between the case flow channel and the liquid flow channel. The liquid ejecting head according to claim 1, wherein the liquid ejecting head is a portion from which the support substrate is removed. A liquid ejecting head according to claim 1 or 2,
A liquid ejecting apparatus, comprising: ejecting liquid droplets from the liquid ejecting head to land the liquid droplets on an ejection target.

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