JP2009034862A - Liquid ejecting head unit and liquid ejecting apparatus - Google Patents

Abstract

A liquid ejecting head unit and a liquid ejecting apparatus having improved durability and improved adhesion strength between a liquid ejecting surface and a holding member.
A liquid ejecting head having a liquid ejecting surface A in which a nozzle opening 21 for ejecting liquid is opened, and a holding member which is bonded to the liquid ejecting surface A via an adhesive 401 and holds the liquid ejecting head. 250, and provided with recesses 23, 255 in the adhesion region of the liquid ejection surface A and the adhesion region of the holding member 250, and provided with a connecting member 500 other than the adhesive in the recesses 23, 255, Interfaces between the holding member 250 and the liquid ejection surface A and the adhesive 401 facing the recesses 23 and 255 are provided along the recesses 23 and 255.
[Selection] Figure 5

Description

  The present invention relates to a liquid ejecting head unit and a liquid ejecting apparatus that include a liquid ejecting head that ejects liquid from nozzle openings, and more particularly, to an ink jet recording head unit and an ink jet recording apparatus that eject ink as liquid.

  For example, an ink jet recording head unit (hereinafter also referred to as a head unit) having an ink jet recording head that ejects ink as a liquid includes an ink jet recording head having a liquid ejecting surface in which a nozzle opening for ejecting ink is opened. And a holding member such as a fixing plate that is bonded to a liquid ejecting surface of an ink jet recording head via an adhesive (for example, see Patent Document 1).

  In such a head unit, if a liquid repellent film is provided on the liquid ejecting surface, the adhesive strength between the liquid ejecting surface and the holding member is lowered. A non-liquid repellent region from which the film has been removed is formed.

Japanese Patent Laying-Open No. 2005-096419 (pages 7 to 12, FIGS. 1 to 3)

  However, when the non-liquid-repellent region of the ink jet recording head and the holding member are bonded via an adhesive, the ink adhering to the liquid jetting surface enters from the interface between the liquid jetting surface and the holding member and the adhesive and adheres. There is a problem that the strength is lowered and the holding member is peeled off from the ink jet recording head.

  Such a problem is not limited to an ink jet recording head unit that ejects ink, but also exists in a liquid ejecting head unit that ejects liquid other than ink.

  In view of such circumstances, an object of the present invention is to provide a liquid ejecting head unit and a liquid ejecting apparatus that have improved adhesive strength between a liquid ejecting surface and a holding member and improved durability.

According to an embodiment of the present invention for solving the above problem, a liquid ejecting head having a liquid ejecting surface in which a nozzle opening for ejecting a liquid is opened, and the liquid ejecting surface are bonded to each other through an adhesive to hold the liquid ejecting head. And a recess is provided in one or both of the adhesive region of the liquid ejection surface and the adhesive region of the holding member, and a connecting member other than the adhesive is provided in the recess. The liquid ejecting head unit is characterized in that an interface between the holding member and the liquid ejecting surface facing the concave portion and the adhesive is provided along the concave portion.
In this aspect, since the recess and the connecting member are bonded via the adhesive, the interface (bonding area) between the liquid ejecting surface and the holding member and the adhesive can be widened, and the liquid has an adhesive interface. Even if erosion occurs, the holding member and the liquid ejecting surface can be prevented from peeling in a short time, and durability can be improved.

Here, the concave portion includes a first concave portion provided in the adhesion region of the liquid ejection surface, and a second concave portion provided in a region facing the first concave portion of the adhesion region of the holding member. Preferably, the connecting member separate from the liquid ejecting head and the fixing member is provided between the first recess and the second recess. As another aspect, it is preferable that the recess is provided on the liquid ejection surface, and the connecting member is provided integrally with the holding member and protrudes into the recess.
According to this, the interface between the holding member and the liquid ejecting surface and the adhesive is not formed in the in-plane direction of the liquid ejecting surface, but is formed along the recess, so that the adhesion area can be increased.

  The liquid ejecting surface includes a liquid repellent region in which a liquid repellent film is provided around the nozzle opening and a non-liquid repellent region in which the liquid repellent film is not provided. It is preferable that an adhesion area between the ejection head and the holding member is the non-liquid-repellent area. According to this, the liquid repellent region can prevent the liquid from adhering to the vicinity of the nozzle opening, and the adhesion strength can be improved by adhering to the non-liquid repellent region.

  Moreover, it is preferable that the said recessed part is continuously provided over the circumference | surroundings of several nozzle opening. According to this, adhesive strength and durability can be improved around the plurality of nozzle openings, and reliability can be improved.

Another aspect of the invention is a liquid ejecting apparatus including the liquid ejecting head unit according to the above aspect.
In this aspect, a liquid ejecting apparatus with improved durability and reliability can be realized.

Hereinafter, the present invention will be described in detail based on embodiments.
(Embodiment 1)
FIG. 1 is an exploded perspective view showing an ink jet recording head unit which is an example of a liquid jet head unit according to Embodiment 1 of the present invention, and FIG. 2 is an assembly perspective view of the ink jet recording head unit.

  As shown in the drawing, a cartridge case 210 constituting an ink jet recording head unit 1 (hereinafter also referred to as a head unit) which is an example of a liquid ejecting head unit of the present invention is mounted with an ink cartridge which is an ink supply means (not shown). The cartridge mounting portion 211 is provided. For example, in this embodiment, the ink cartridge is configured as a separate body filled with black and three color inks, and the ink cartridges of the respective colors are mounted in the cartridge case 210. Although not shown, the bottom surface of the cartridge case 210 is provided with a plurality of ink communication paths having one end opened to each cartridge mounting portion 211 and the other end opened to the head case 230 side described later. In addition, an ink supply needle 213 that is inserted into the ink supply port of the ink cartridge is formed in the ink communication path in the ink communication path of the cartridge mounting portion 211 to remove bubbles and foreign matters in the ink. It is fixed via a filter (not shown).

  A plurality of ink jet recording heads 2 are fixed to the bottom surface side of such a cartridge case 210.

  A plurality of ink jet recording heads 2 are provided for each ink color of an ink cartridge (not shown). In this embodiment, one inkjet recording head unit 1 is provided with four inkjet recording heads 2.

  Here, the ink jet recording head 2 which is an example of the liquid jet head of the present embodiment will be described in detail. 3 is an exploded perspective view of the ink jet recording head, FIG. 4 is a cross-sectional view of a main part of the head unit, and FIG. 5 is a plan view and a cross-sectional view of the main part of the head unit. As shown in FIGS. 3 and 4, the ink jet recording head 2 includes a head main body 220 and a head case 230 provided on the side opposite to the liquid ejecting surface A of the head main body 220.

  In this embodiment, the flow path forming substrate 10 constituting the head main body 220 is made of a silicon single crystal substrate, and an elastic film 50 made of silicon dioxide previously formed by thermal oxidation is formed on one surface thereof. This flow path forming substrate 10 is formed with two rows in which pressure generation chambers 12 partitioned by a plurality of partition walls are arranged in parallel in the width direction by anisotropic etching from the other side. Further, on the outer side in the longitudinal direction of the pressure generating chambers 12 in each row, there is communication with a reservoir unit 31 provided on a reservoir forming substrate 30 described later, and a communication composing a reservoir 100 serving as a common ink chamber for each pressure generating chamber 12. A portion 13 is formed. The communication portion 13 is in communication with one end portion in the longitudinal direction of each pressure generating chamber 12 via the ink supply path 14. That is, in the present embodiment, the pressure generation chamber 12, the communication portion 13, and the ink supply path 14 are provided as the liquid flow paths formed on the flow path forming substrate 10.

  Further, the nozzle plate 20 in which the nozzle openings 21 are formed is fixed to the opening surface side of the flow path forming substrate 10 with an adhesive 400. Specifically, a plurality of nozzle plates 20 are provided so as to correspond to the plurality of head main bodies 220, and the nozzle plates 20 have a slightly larger area than an exposed opening 251 of the fixed plate 250 described in detail later. It is fixed by the adhesive 401 in a region that overlaps with the fixing plate 250. The nozzle opening 21 of the nozzle plate 20 is formed at a position communicating with the pressure generation chamber 12 on the side opposite to the ink supply path 14. In this embodiment, since two rows in which the pressure generation chambers 12 are arranged in parallel are provided on the flow path forming substrate 10, two rows of nozzle rows 21A in which the nozzle openings 21 are arranged in parallel are provided in one head body 220. Yes. In this embodiment, the surface on which the nozzle openings 21 of the nozzle plate 20 are opened is the liquid ejection surface A. Examples of such a nozzle plate 20 include a silicon single crystal substrate and a metal substrate such as stainless steel (SUS).

  Further, as shown in FIG. 5, a liquid repellent film 22 is provided on the liquid ejection surface A where the nozzle openings 21 of the nozzle plate 20 are opened. The liquid repellent film 22 is not particularly limited as long as it has water repellency with respect to ink. For example, a metal film containing a fluorine-based polymer or a metal alkoxide molecular film having liquid repellency may be used. it can.

  The liquid repellent film 22 made of a metal film containing a fluorine-based polymer can be formed, for example, by performing eutectoid plating directly on the liquid ejection surface A of the nozzle plate 20.

  In the present embodiment, such a liquid repellent film 22 is formed only at the center of the liquid ejection surface A of the nozzle plate 20. That is, a central portion including a region where the nozzle opening 21 of the liquid ejection surface A of the nozzle plate 20 is opened is a liquid repellent region 25 provided with a liquid repellent film 22. Further, the liquid ejection surface A of the nozzle plate 20 is provided with a non-liquid repellent region 26 where the liquid repellent film 22 is not provided along the outer periphery of the four sides of the liquid ejection surface A. A fixing plate 250 as a holding member, which will be described in detail later, is bonded to the non-liquid-repellent region 26 via an adhesive 401. Therefore, the non-liquid repellent area 26 of the liquid ejection surface A is an adhesive area that is bonded to the fixing plate 250 that is a holding member.

  Here, a first recess 23 is provided in the non-liquid-repellent region 26 (adhesion region) of the liquid ejection surface A of the nozzle plate 20. In the present embodiment, since the non-liquid-repellent region 26 is provided over the periphery surrounding the four sides of the liquid-repellent region 25 provided at the center of the nozzle plate 20, the first recess 23 is formed around the periphery of the nozzle plate 20. It was made to provide continuously over the direction.

  A fixing plate 250 that is a holding member that holds the ink jet recording head 2 is bonded to the non-liquid-repellent region 26 of the liquid ejection surface A of the nozzle plate 20 via an adhesive 401.

  Specifically, as shown in FIGS. 1 and 4, the fixed plate 250 is a flat plate, defines an exposed opening 251 that exposes the nozzle opening 21, an exposed opening 251, and a liquid in the head main body 220. And a joining portion 252 joined to both end portions of the nozzle row 21A on the ejection surface A.

  In the present embodiment, the joining portion 252 extends between the fixing frame portion 253 provided along the outer periphery of the liquid ejection surface A across the plurality of ink jet recording heads 2 and the adjacent ink jet recording head 2. And a fixing beam portion 254 that divides the exposed opening 251, and a joint portion 252 including the fixing frame portion 253 and the fixing beam portion 254 is formed on the liquid ejecting surface A of the plurality of ink jet recording heads 2. They are joined at the same time.

  In addition, a second recess 255 is provided in a region opposite to the first recess 23 in the adhesion region of the fixing plate 250. That is, in the present embodiment, the first concave portion 23 provided on the liquid ejection surface A side of the nozzle plate 20 and the second concave portion 255 provided on the fixed plate 250 that is a holding member are provided as the concave portions. Is.

  The second recess 255 is provided with the same opening area as the first recess 23. A connecting member 500 is provided between the first recess 23 and the second recess 255.

  The connecting member 500 has a width narrower than the width of the first recess 23 and the second recess 255 and a height lower than the height of the space defined by the first recess 23 and the second recess 255. It is adhered to the first recess 23 and the second recess 255 by an adhesive 401 that bonds the ink jet recording head 2 and the fixing plate 250. That is, the first recess 23 and the second recess 255 and the connecting member 500 are bonded via the adhesive 401.

  For this reason, in the region opposite to the first recess 23 and the second recess 255, the interface between the liquid ejection surface A and the fixing plate 250 and the adhesive 401 is provided along the in-plane direction of the liquid ejection surface A. In other words, it is bent along the first recess 23 and the second recess 255.

  As a result, the adhesion area between the liquid ejection surface A and the fixing plate 250 and the adhesive 401 can be expanded, so that ink adheres to the surface of the nozzle plate 20 and the adhered ink erodes the interface of the adhesive 401. However, since the adhesion area is large against erosion, the fixing plate 250 can be prevented from peeling off from the nozzle plate 20 in a short time, and durability can be improved. Further, since the bonding area can be increased by the connecting member 500, the bonding strength can be improved, and the fixing plate 250 can be prevented from being peeled from the nozzle plate 20.

  Furthermore, in this embodiment, the adhesive strength between the adhesive 401 and the nozzle plate 20 can be improved by setting the adhesive region where the fixing plate 250 of the nozzle plate 20 is bonded to the non-liquid-repellent region 26.

  Such a connecting member 500 is made of a material that is different from the adhesive 401 that bonds the ink jet recording head 2 and the fixing plate 250 and is not eroded by ink, for example, a metal material or a resin material. In this embodiment, stainless steel is used.

  In the present embodiment, the nozzle plate 20 and the flow path forming substrate 10 are bonded via the adhesive 400. For this reason, the adhesion region of the nozzle plate 20 with the flow path forming substrate 10 is also a non-liquid repellent region 27. In the present embodiment, the entire surface of the nozzle plate 20 opposite to the liquid ejection surface A is the non-liquid repellent region 27.

  On the other hand, as shown in FIG. 4, on the side opposite to the opening surface of the flow path forming substrate 10, on the elastic film 50, a lower electrode film made of metal and a piezoelectric made of lead zirconate titanate (PZT) or the like. A piezoelectric element 300 formed by sequentially laminating a body layer and an upper electrode film made of metal is formed. On the flow path forming substrate 10 on which such a piezoelectric element 300 is formed, a reservoir forming substrate 30 having a reservoir portion 31 that constitutes at least a part of the reservoir 100 is joined. In this embodiment, the reservoir portion 31 is formed across the reservoir forming substrate 30 in the thickness direction and across the width direction of the pressure generating chamber 12, and as described above, the communication portion of the flow path forming substrate 10 is formed. The reservoir 100 is connected to the pressure generation chamber 12 and serves as a common ink chamber for the pressure generation chambers 12.

  A piezoelectric element holding portion 32 having a space that does not hinder the movement of the piezoelectric element 300 is provided in a region facing the piezoelectric element 300 of the reservoir forming substrate 30.

  Furthermore, a drive IC 110 for driving each piezoelectric element 300 is provided on the reservoir forming substrate 30. Each terminal of the drive IC 110 is connected to a lead wiring drawn from the individual electrode of each piezoelectric element 300 via a bonding wire or the like (not shown). Each terminal of the drive IC 110 is connected to the outside via an external wiring 111 such as a flexible printed circuit (FPC), and receives various signals such as a print signal from the outside via the external wiring 111. .

  In addition, the compliance substrate 40 is bonded onto the reservoir forming substrate 30. An ink inlet 44 for supplying ink to the reservoir 100 is formed in a region facing the reservoir 100 of the compliance substrate 40 by penetrating in the thickness direction. In addition, the region of the compliance substrate 40 other than the ink introduction port 44 in the region facing the reservoir 100 is a flexible portion 43 formed thin in the thickness direction, and the reservoir 100 is sealed by the flexible portion 43. Has been. Compliance is given to the reservoir 100 by the flexible portion 43.

  A head case 230 is fixed on the surface of each head body 220 opposite to the liquid ejection surface A, that is, on the compliance substrate 40.

  The head case 230 is provided with an ink supply communication passage 231 that communicates with the ink introduction port 44 and also communicates with the ink communication passage of the cartridge case 210 and supplies ink from the cartridge case 210 to the ink introduction port 44. In the head case 230, a groove portion 232 is formed in a region facing the flexible portion 43 of the compliance substrate 40, and the flexible portion 43 is appropriately deformed. The head case 230 is provided with a drive IC holding part 233 penetrating in the thickness direction in a region facing the drive IC 110 provided on the reservoir forming substrate 30, and the external wiring 111 is connected to the drive IC holding part. The drive IC 110 is connected through the H.233.

  The ink jet recording head 2 according to this embodiment takes in ink from the ink cartridge from the ink introduction port 44 via the ink communication path and the ink supply communication path 231, and the inside from the reservoir 100 to the nozzle opening 21. After filling with ink, according to a recording signal from the driving IC 110, a voltage is applied to each piezoelectric element 300 corresponding to each pressure generating chamber 12 to cause the elastic film 50 and the piezoelectric element 300 to bend and deform, thereby generating each pressure. The pressure in the chamber 12 increases and ink droplets are ejected from the nozzle openings 21.

  The head main body 220 described above forms a large number of chips on one silicon wafer at the same time, and bonds and integrates the nozzle plate 20 and the compliance substrate 40. Thereafter, the single chip size as shown in FIG. The head main body 220 is obtained by dividing each flow path forming substrate 10.

  Four such ink jet recording heads 2 are fixed to the bottom surface of the cartridge case 210. In the present embodiment, the four ink jet recording heads 2 are arranged at a predetermined interval in the arrangement direction of the nozzle rows 21A. That is, one nozzle type recording head 2 of this embodiment is provided with eight nozzle rows 21A. In this way, the nozzle rows 21A including the nozzle openings 21 arranged side by side using a plurality of ink jet recording heads 2 are arranged in multiple rows, thereby forming a plurality of nozzle rows 21A in one ink jet recording head 2. Compared to the above, the yield can be prevented from decreasing. Further, by using a plurality of ink jet recording heads 2 in order to increase the number of nozzle rows 21A, the number of head main bodies 220 (ink jet recording heads 2) that can be formed from one silicon wafer is increased. It is possible to reduce the use cost of the silicon wafer and reduce the manufacturing cost.

  Further, as described above, the four ink jet recording heads 2 are holding members that are bonded to the non-liquid-repellent regions 26 of the liquid ejection surfaces A of the plurality of ink jet recording heads 2 via the adhesive 401. It is positioned and held by a fixed plate 250.

  Further, as shown in FIGS. 1 and 2, the ink jet recording head unit 1 has a box shape that covers the plurality of ink jet recording heads 2 on the opposite side of the fixing plate 250 from the ink jet recording head 2. A cover head 240 is provided. The cover head 240 has a fixing portion 242 provided with an opening 241 corresponding to the exposed opening 251 of the fixing plate 250, and a side surface side of the ink droplet ejection surface of the head main body 220, and extends around the outer periphery of the fixing plate 250. And a side wall portion 245 provided so as to be bent.

  In this embodiment, the fixing portion 242 is provided corresponding to the frame portion 243 provided corresponding to the fixing frame portion 253 of the fixing plate 250, and the opening portion 241 provided corresponding to the fixing beam portion 254 of the fixing plate 250. It is comprised with the beam part 244 which divides | segments. Further, the fixing part 242 including the frame part 243 and the beam part 244 is joined to the joining part 252 of the fixing plate 250.

  As shown in FIG. 2, the fixing portion 242 of the cover head 240 is provided with a support portion 246 provided with a fixing hole 247 for positioning and fixing the cover head 240 to the cartridge case 210. The support portion 246 is bent and provided so as to protrude from the side wall portion 245 in the same direction as the in-plane direction of the droplet discharge surface. In this embodiment, the cover head 240 is fixed to the cartridge case 210. That is, the cartridge case 210 is provided with a protrusion 215 that protrudes toward the liquid ejecting surface A and is inserted into the fixing hole 247 of the cover head 240. The protrusion 215 is provided in the fixing hole 247 of the cover head 240. The cover head 240 is fixed to the cartridge case 210 by inserting and heating and crimping the tip of the protrusion 215.

  As described above, since the liquid ejecting surface A of the ink jet recording head 2 and the cover head 240 are joined to each other through the fixing plate 250 without any gap, it is possible to prevent the recording medium from entering the gap and cover the head. 240 deformation and paper jam can be prevented. Further, since the side wall portion 245 of the cover head 240 covers the outer peripheral edge portions of the plurality of ink jet recording heads 2, it is possible to reliably prevent the ink from flowing into the side surfaces of the ink jet recording heads 2.

  In the above-described example, the cover head 240 is bonded to the surface of the fixing plate 250 opposite to the head body 220. However, the present invention is not limited to this. For example, the cover head 240 is bonded to the fixing plate 250. Instead, it may be provided at a predetermined interval or may be provided so as to abut.

(Embodiment 2)
6 is a cross-sectional view of main parts of an ink jet recording head unit that is an example of a liquid jet head according to Embodiment 2 of the present invention, and FIG. 7 is a plan view of main parts and a cross-sectional view of main parts of the head unit. .

  As shown in the drawing, in the present embodiment, a first recess 23 is provided in the non-liquid-repellent region 26 (adhesion region) of the nozzle plate 20. The fixing plate 250A includes a bent connecting member 500A that is inserted into the first recess 23 at a predetermined interval at the end on the exposed opening 251 side. That is, in the present embodiment, the fixing plate 250A is not provided with the second recess, and only the first recess 23 is provided on the liquid ejection surface A of the nozzle plate 20.

  The nozzle plate 20 of the ink jet recording head unit 1 and the fixing plate 250 </ b> A are bonded via an adhesive 401. The first recess 23 and the connecting member 500 </ b> A are bonded via an adhesive 401. Therefore, the interface of the adhesive 401 in the region facing the first recess 23 is not formed along the in-plane direction of the liquid ejection surface A, and is provided along the first recess 23. become.

  Even in such a configuration, the adhesion area between the nozzle plate 20 and the fixing plate 250A can be widened to prevent the fixing plate 250A from being peeled off from the nozzle plate 20 by ink in a short time, thereby improving the durability. it can.

(Other embodiments)
As mentioned above, although each embodiment of this invention was described, the basic composition of this invention is not limited to what was mentioned above. For example, in the first and second embodiments described above, the ink jet recording head 2 is exemplified by the configuration including the nozzle plate 20 provided with the nozzle openings 21, but is not particularly limited thereto, for example, the ink jet recording head. As described above, the present invention can also be applied to a configuration in which nozzle openings are formed in a flow path forming substrate, that is, a flow path forming substrate and a nozzle plate that are integrally formed.

  In the first and second embodiments described above, the plurality of ink jet recording heads 2 are bonded to the fixing plate 250 via the adhesive 401, but a plurality of ink jet recording heads are provided without providing the fixing plate 250. 2 may be bonded to the cover head 240. That is, the cover head 240 may be a holding member that holds the liquid ejection surface A of the ink jet recording head 2. Of course, in the present embodiment, the four ink jet recording heads 2 are joined to the holding members such as the fixed plate 250 and the cover head 240, but the number of ink jet recording heads 2 joined to the holding members is particularly large. The inkjet recording head 2 may be joined to the holding member, that is, the inkjet recording head unit 1 may include one inkjet recording head 2.

  In the first and second embodiments described above, the holding member such as the fixing plate 250 and the cover head 240 is illustrated as being bonded to the non-liquid-repellent region 26 of the nozzle plate 20. It may be formed so as to cover the liquid repellent area 25 of the nozzle plate 20. This is to prevent the non-liquid-repellent region 26 of the nozzle plate 20 from being exposed from the exposed opening 251 formed in the holding member due to, for example, an adhesive displacement between the holding member and the nozzle plate 20.

  In the first and second embodiments described above, the configuration in which the first concave portion 23 is provided in the nozzle plate 20 is illustrated. However, the configuration is not particularly limited thereto. For example, the second concave portion 255 is provided in the fixing plate 250. The nozzle plate 20 may be integrally provided with a connecting member that protrudes into the second recess 255. Even in such a configuration, the interface of the adhesive 401 in the region facing the recess (second recess 255) is not provided along the in-plane direction of the liquid ejection surface A, but is provided by being bent. Therefore, the adhesion area can be expanded to improve durability.

  Furthermore, in Embodiment 1 and 2 mentioned above, although the 1st recessed part 23 was provided over the circumference | surroundings of the outer peripheral side of the liquid ejection surface A, it is not limited to this in particular, A recessed part is the circumference | surroundings of the outer peripheral side. It may be provided in a part. In Embodiments 1 and 2 described above, by providing the liquid repellent area 25 and the non-liquid repellent area 26 on the liquid ejection surface A, the adhesive force with the adhesive 401 is improved. The liquid repellent film 22 may not be provided.

  In the first and second embodiments described above, the actuator device having the thin film type piezoelectric element 300 is described as the pressure generating means for causing the pressure change in the pressure generating chamber 12, but the present invention is not particularly limited thereto. For example, a thick film type actuator device formed by a method such as attaching a green sheet, or a longitudinal vibration type actuator device in which piezoelectric materials and electrode forming materials are alternately stacked to expand and contract in the axial direction is used. be able to. Also, as a pressure generating means, a heating element is arranged in the pressure generating chamber, and droplets are discharged from the nozzle opening by bubbles generated by the heat generated by the heating element, or static electricity is generated between the diaphragm and the electrode. Thus, it is possible to use a so-called electrostatic actuator that deforms the diaphragm by electrostatic force and ejects droplets from the nozzle openings.

  Such an ink jet recording head unit 1 is mounted on the ink jet recording apparatus I. FIG. 8 is a schematic view showing an example of the ink jet recording apparatus. As shown in FIG. 8, the head unit 1 is detachably provided with cartridges 2A and 2B constituting ink supply means, and the carriage 3 on which the head unit 1 is mounted is a carriage shaft 5 attached to the apparatus main body 4. Are provided so as to be axially movable. For example, the head unit 1 discharges a black ink composition and a color ink composition, respectively.

  Then, the driving force of the driving motor 6 is transmitted to the carriage 3 via a plurality of gears and a timing belt 7 (not shown), so that the carriage 3 on which the head unit 1 is mounted is moved along the carriage shaft 5. On the other hand, the apparatus body 4 is provided with a platen 8 along the carriage shaft 5, and a recording sheet S, which is a recording medium such as paper fed by a paper feed roller (not shown), is conveyed on the platen 8. It is like that.

  Although an ink jet recording head that ejects ink has been described as an example of the liquid ejecting head, the present invention is intended for a liquid ejecting head unit that widely includes the liquid ejecting head. Examples of the liquid ejecting head include a recording head used for an image recording apparatus such as a printer, a color material ejecting head used for manufacturing a color filter such as a liquid crystal display, an organic EL display, and an electrode formation such as an FED (field emission display). Electrode material ejecting heads used in manufacturing, bioorganic matter ejecting heads used in biochip production, and the like.

FIG. 3 is an exploded perspective view of the head unit according to the first embodiment. FIG. 3 is an assembled perspective view of the head unit according to the first embodiment. FIG. 3 is an exploded perspective view of the recording head according to the first embodiment. FIG. 3 is a cross-sectional view of a main part of the head head according to the first embodiment. FIG. 2 is a plan view and a cross-sectional view of main parts of a head unit according to Embodiment 1. FIG. 6 is a cross-sectional view of a main part of a head unit according to a second embodiment. FIG. 6 is a plan view and a cross-sectional view of main parts of a head unit according to a second embodiment. It is the schematic which shows an example of the recording device which concerns on one Embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS I Liquid ejector, A Liquid ejecting surface, 1 Inkjet recording head unit (liquid ejecting head unit), 2 Inkjet recording head (liquid ejecting head), 10 Flow path formation substrate, 12 Pressure generating chamber, 20 Nozzle plate (nozzle) Forming member), 21 nozzle opening, 22 liquid repellent film, 23 first recess, 100 reservoir, 210 cartridge case, 220 head body, 230 head case, 240 cover head, 250 fixing plate (holding member), 255 second Recess, 300 Piezoelectric element, 400, 401 Adhesive, 500, 500A Connecting member

Claims (6)

A liquid ejecting head having a liquid ejecting surface having a nozzle opening for ejecting liquid, and a holding member that is bonded to the liquid ejecting surface via an adhesive and holds the liquid ejecting head;
A concave portion is provided in one or both of the adhesive region of the liquid ejection surface and the adhesive region of the holding member, and a connecting member other than the adhesive is provided in the concave portion,
The liquid ejecting head unit is characterized in that an interface between the holding member, the liquid ejecting surface, and the adhesive facing the recessed portion is provided along the recessed portion.   The concave portion includes a first concave portion provided in an adhesive region of the liquid ejecting surface and a second concave portion provided in a region facing the first concave portion of the adhesive region of the holding member. 2. The liquid according to claim 1, wherein the connecting member separate from the liquid ejecting head and the fixing member is provided between the first concave portion and the second concave portion. Jet head unit.   The liquid ejection according to claim 1, wherein the recess is provided on the liquid ejection surface, and the connecting member is provided integrally with the holding member and protrudes into the recess. Head unit.   The liquid ejecting surface includes a liquid repellent area in which a liquid repellent film is provided around the nozzle opening and a non-liquid repellent area in which the liquid repellent film is not provided, and the liquid ejecting head. The liquid ejecting head unit according to any one of claims 1 to 3, wherein an adhesion area between the holding member and the holding member is the non-liquid-repellent area.   The liquid ejecting head unit according to claim 1, wherein the concave portion is provided continuously around a plurality of nozzle openings.   A liquid ejecting apparatus comprising the liquid ejecting head unit according to claim 1.

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