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JP2012079776A - Semiconductor light-emitting device and method of manufacturing the same - Google Patents

Semiconductor light-emitting device and method of manufacturing the same Download PDF

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JP2012079776A
JP2012079776A JP2010221186A JP2010221186A JP2012079776A JP 2012079776 A JP2012079776 A JP 2012079776A JP 2010221186 A JP2010221186 A JP 2010221186A JP 2010221186 A JP2010221186 A JP 2010221186A JP 2012079776 A JP2012079776 A JP 2012079776A
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light emitting
semiconductor light
emitting device
phosphor layer
white
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Atsushi Shiraishi
篤 白石
Yoshimasa Kinoshita
嘉将 木下
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Citizen Holdings Co Ltd
Citizen Electronics Co Ltd
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Citizen Holdings Co Ltd
Citizen Electronics Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide an LED device that prevents uselessness of phosphor, has excellent luminous efficiency, and can be manufactured easily even if the device has phosphor and a structure in which side surfaces of an LED element are buried in a white (reflective) member.SOLUTION: An LED element 21 is flip-chip mounted on a circuit board 22. The LED element 21 has a phosphor layer 15 on the surface opposite to the mounting surface of the circuit board 22, and a white member 11 surrounds the side surfaces of the LED element 21 and the phosphor layer 15. The top surfaces of the phosphor layer 15 and the white member 11 are substantially aligned.

Description

本発明は、回路基板上に半導体発光素子をフリップチップ実装した半導体発光装置及びその製造方法に関する。   The present invention relates to a semiconductor light-emitting device in which a semiconductor light-emitting element is flip-chip mounted on a circuit board and a manufacturing method thereof.

半導体発光素子(以後とくに断らない限りLED素子と呼ぶ)を回路基板に実装した半導体発光装置(以後とくに断らない限りLED装置と呼ぶ)のなかで、LED素子の側面に反射部材を設けたLED装置が知られている(例えば特許文献1)。   2. Description of the Related Art Among semiconductor light emitting devices (hereinafter referred to as LED devices unless otherwise specified) in which a semiconductor light emitting element (hereinafter referred to as an LED device) is mounted on a circuit board, an LED device provided with a reflective member on the side surface of the LED element Is known (for example, Patent Document 1).

特許文献1の図1を図4に示す。図4は、反射剤入りの第1封止樹脂6がLEDチップ4(LED素子)の周囲を埋めるようにしたLED装置の断面図である。LEDチップ4は、セラミック材により作られたリフレクトケース1の中央に配置され、リフレクトケース1は四角錘状の開口2を備えている。LEDチップ4はリードフレーム3aにダイボンディングされ、LEDチップ4の上面電極はリードフレーム3bとボンディングワイヤ5により接続している。第1封止樹脂6とLEDチップ4は、透明樹脂又は透明樹脂に拡散材を混合させた透明樹脂からなる第2の封止材7で覆われている。   FIG. 4 of Patent Document 1 is shown in FIG. FIG. 4 is a cross-sectional view of the LED device in which the first sealing resin 6 containing the reflective agent fills the periphery of the LED chip 4 (LED element). The LED chip 4 is disposed in the center of a reflector case 1 made of a ceramic material, and the reflector case 1 includes a square pyramid-shaped opening 2. The LED chip 4 is die-bonded to the lead frame 3 a, and the upper surface electrode of the LED chip 4 is connected to the lead frame 3 b by a bonding wire 5. The first sealing resin 6 and the LED chip 4 are covered with a second sealing material 7 made of a transparent resin or a transparent resin obtained by mixing a transparent resin with a diffusion material.

このLEDチップ4は、エピタキシャル発光層から青色光が発光し、ZnSe基板から黄色光が発光する。この黄色光と青色光のうち側方に向う光は第1封止樹脂6の反射材で反射しLEDチップ4内へ戻される。下方に向う光はLEDチップ4の底面に形成された反射層(図示せず)で反射される。このようにして最終的に青色光及び黄色光の全てがLEDチップ4の上面から出射する。この結果、二色混合が効果的に行われ高輝度の白色光が得られる。   The LED chip 4 emits blue light from the epitaxial light emitting layer and emits yellow light from the ZnSe substrate. Of the yellow light and blue light, the light directed to the side is reflected by the reflective material of the first sealing resin 6 and returned to the LED chip 4. The downward light is reflected by a reflective layer (not shown) formed on the bottom surface of the LED chip 4. In this way, all of blue light and yellow light are finally emitted from the upper surface of the LED chip 4. As a result, two-color mixing is effectively performed, and high brightness white light is obtained.

特開2002−43625号公報 (図1)JP 2002-43625 A (FIG. 1)

図4のLED装置は、近年の主流となっている青色(又は近紫外)発光ダイオードと蛍光体を組み合わせたものではない。このLED装置に対し、LEDチップ4を青色LED素子に置き換え、第2の封止樹脂7に黄色く発光する蛍光体を混合させれば、LED素子の側面に反射部材を設けた構造で白色発光するLED装置が得られる。しかしながらLED素子の側面に反射部材を設けた構造ではLED素子から出射する光線がLED素子上方に偏在するため、LED素子上方以外の領域の蛍光体は機能せず無駄になってしまうという課題がある。   The LED device of FIG. 4 is not a combination of a blue (or near-ultraviolet) light emitting diode and a phosphor, which have become mainstream in recent years. For this LED device, if the LED chip 4 is replaced with a blue LED element and the second sealing resin 7 is mixed with a phosphor that emits yellow light, the LED element emits white light with a structure in which a reflecting member is provided on the side surface. An LED device is obtained. However, in the structure in which the reflecting member is provided on the side surface of the LED element, the light emitted from the LED element is unevenly distributed above the LED element, so that there is a problem that the phosphors in the region other than the LED element do not function and are wasted. .

そこで本発明は、蛍光体及びLED素子の側面を埋める白色(反射)部材を備えていても、蛍光体の無駄が小さいばかりでなく、発光効率が良好で製造が容易なLED装置及びその製造方法を提供することを目的とする。   Therefore, the present invention provides an LED device that has not only a small waste of the phosphor but also good luminous efficiency and is easy to manufacture even if it includes a white (reflective) member that fills the side surfaces of the phosphor and the LED element, and a method for manufacturing the LED device. The purpose is to provide.

上記課題を解決するため本発明の半導体発光装置は、回路基板上に半導体発光素子を実装した半導体発光装置において、
前記半導体発光素子が前記回路基板上にフリップチップ実装され、実装面とは反対側の面に蛍光体層を備え、
白色部材が該半導体発光素子及び該蛍光体層の側面を取り囲み、
該蛍光体層の上面と該白色部材の上面とが略一致していることを特徴とする。
In order to solve the above problems, a semiconductor light emitting device of the present invention is a semiconductor light emitting device in which a semiconductor light emitting element is mounted on a circuit board.
The semiconductor light emitting device is flip-chip mounted on the circuit board, and includes a phosphor layer on the surface opposite to the mounting surface,
A white member surrounds the sides of the semiconductor light emitting device and the phosphor layer;
The upper surface of the phosphor layer is substantially coincident with the upper surface of the white member.

前記白色部材のバインダが焼結するとガラス質となる無機バインダであっても良い。   An inorganic binder that becomes glassy when the binder of the white member is sintered may be used.

前記白色部材のバインダがシリコーン樹脂であっても良い。   The binder of the white member may be a silicone resin.

前記半導体発光素子と前記回路基板の間隙に前記白色部材が充填されているのが好ましい。   It is preferable that the white member is filled in a gap between the semiconductor light emitting element and the circuit board.

上記課題を解決するため本発明の半導体発光装置の製造方法は、回路基板上に半導体発光素子を実装した半導体発光装置の製造方法において、
前記半導体発光素子が連結して配列するウェハーを準備するウェハー準備工程と、
前記半導体発光素子の実装面とは反対側となる前記ウェハーの面に蛍光体層を形成する蛍光体層形成工程と、
前記ウェハーを切断して前記半導体発光素子を個片化するLED素子個片化工程と、
前記回路基板が連結した集合基板に前記半導体発光素子をフリップチップ実装する実装工程と、
前記集合基板の全面に反射性微粒子を含有する白色部材を塗布する塗布工程と、
該白色部材を研磨する研磨工程と、
前記半導体発光装置を単個に分離する個片化工程と
を備えることを特徴とする。
In order to solve the above problems, a method for manufacturing a semiconductor light emitting device of the present invention is a method for manufacturing a semiconductor light emitting device in which a semiconductor light emitting element is mounted on a circuit board.
A wafer preparation step of preparing a wafer in which the semiconductor light emitting elements are connected and arranged; and
A phosphor layer forming step of forming a phosphor layer on the surface of the wafer opposite to the mounting surface of the semiconductor light emitting element;
LED element singulation step of cutting the wafer into pieces of the semiconductor light emitting elements;
A mounting step of flip-chip mounting the semiconductor light emitting element on a collective substrate connected to the circuit board;
An application step of applying a white member containing reflective fine particles to the entire surface of the aggregate substrate;
A polishing step of polishing the white member;
And a singulation process for separating the semiconductor light emitting device into a single piece.

前記蛍光体層形成工程の後に前記蛍光体層を研磨する蛍光体層研磨工程を備えても良い。   You may provide the fluorescent substance layer grinding | polishing process of grind | polishing the said fluorescent substance layer after the said fluorescent substance layer formation process.

前記個片化工程の前に透明樹脂を塗布する透明樹脂塗布工程を備えても良い。   You may provide the transparent resin application | coating process which apply | coats transparent resin before the said singulation process.

前記白色部材のバインダが焼結するとガラス質となる無機バインダであっても良い。   An inorganic binder that becomes glassy when the binder of the white member is sintered may be used.

前記白色部材のバインダがシリコーン樹脂であっても良い。   The binder of the white member may be a silicone resin.

本発明の半導体発光層装置は、上面に蛍光体層を備えた半導体発光素子を回路基板上にフリップチップ実装し、反射性微粒子を含有した白色部材で蛍光体層及び半導体発光素子の側面を埋め、蛍光体層と白色部材の上面同士を略一致させている。ふつうフリップチップ実装用の半導体発光素子は上側(出射側)が透明基板、下側(実装側)が半導体層となる(透明基板のない場合もある)。この透明基板の直上だけに蛍光体層を形成しているので、すべての蛍光体は波長変換に関与し無駄がなくなり少量で済む。またフリップチップ実装であるためボンディングワイヤによる影がなくなり発光効率が向上する。白色部材を簡易な塗布法で配置しても研磨によって白色部材の上面と蛍光体層の上面とを簡単に一致させることができる。以上のように本発明の半導体発光装置は、半導体発光素子の側面を白色部材で埋め、蛍光体層を備えていても、蛍光体の無駄が小さいばかりでなく、発光効率が良好で製造が容易になる。   In the semiconductor light emitting layer device of the present invention, a semiconductor light emitting element having a phosphor layer on the upper surface is flip-chip mounted on a circuit board, and the side surfaces of the phosphor layer and the semiconductor light emitting element are filled with a white member containing reflective fine particles. The upper surfaces of the phosphor layer and the white member are substantially matched. Usually, a semiconductor light emitting element for flip chip mounting has a transparent substrate on the upper side (light emitting side) and a semiconductor layer on the lower side (mounting side) (there may be no transparent substrate). Since the phosphor layer is formed only directly above the transparent substrate, all the phosphors are involved in wavelength conversion, and there is no waste and only a small amount is required. In addition, since it is flip-chip mounted, the shadow caused by the bonding wire is eliminated and the light emission efficiency is improved. Even if the white member is arranged by a simple coating method, the upper surface of the white member and the upper surface of the phosphor layer can be easily matched by polishing. As described above, the semiconductor light emitting device of the present invention is not only small in waste of the phosphor but also good in luminous efficiency and easy to manufacture even if the side surface of the semiconductor light emitting element is filled with the white member and the phosphor layer is provided. become.

本発明の半導体発装置の製造方法は、ウェハー段階で蛍光体層を形成しておき、回路基板が連結した集合基板に半導体発光素子をフリップチップ実装してから、集合基板において反射性微粒子を含有する白色部材の塗布と研磨により半導体発光素子の上面を露出させている。以上のように本発明の半導体発光装置は、半導体発光素子が高密度で配列するウェハー段階で蛍光体層を形成するため製造効率が良く蛍光体の無駄が少ない。さらに蛍光
体層及び半導体発光素子の側面を白色部材で埋める際に集合基板に対し塗布及び研磨を行うため製造が容易であり、前述のようにボンディングワイヤがないので発光効率を損なうこともない。
In the method for manufacturing a semiconductor light emitting device of the present invention, a phosphor layer is formed at a wafer stage, a semiconductor light emitting element is flip-chip mounted on an aggregate substrate connected to a circuit board, and then the reflective fine particles are contained in the aggregate substrate. The upper surface of the semiconductor light emitting element is exposed by applying and polishing a white member. As described above, the semiconductor light-emitting device of the present invention forms a phosphor layer at the wafer stage where the semiconductor light-emitting elements are arranged at a high density, so that the manufacturing efficiency is high and the phosphor is not wasted. Furthermore, since the phosphor layer and the side surface of the semiconductor light emitting device are filled and coated with a white member, the assembly substrate is coated and polished, so that it is easy to manufacture, and since there is no bonding wire as described above, the light emission efficiency is not impaired.

本発明の実施形態におけるLED装置の断面図。Sectional drawing of the LED apparatus in embodiment of this invention. 図1の部分拡大図。The elements on larger scale of FIG. 図1に示したLED装置の製造方法の説明図。Explanatory drawing of the manufacturing method of the LED apparatus shown in FIG. 従来のLED装置の断面図。Sectional drawing of the conventional LED device.

以下、添付図1〜3を参照しながら本発明の好適な実施形態について詳細に説明する。なお図面の説明において、同一または相当要素には同一の符号を付し、重複する説明は省略する。また説明のため部材の縮尺は適宜変更している。   Hereinafter, preferred embodiments of the present invention will be described in detail with reference to FIGS. In the description of the drawings, the same or equivalent elements will be denoted by the same reference numerals, and redundant description will be omitted. For the sake of explanation, the scale of the members is changed as appropriate.

図1は本実施形態のLED装置10(半導体発光装置)の断面図である。LED装置10は、回路基板22上にLED素子21(半導体発光素子)をフリップチップ実装している。回路基板22において板材20上面に形成された電極17はスルーホール18を介して板材20の下面に形成された電極19と接続している。LED素子21はサファイア基板12の下面に半導体層13が形成され、半導体層13に2個のバンプ14が付着している。半導体層13は発光層を備えたダイオードであり、それぞれのバンプ14はアノードとカソードに相当する。バンプ14は金属共晶接合により電極17と接続している。   FIG. 1 is a cross-sectional view of an LED device 10 (semiconductor light emitting device) of the present embodiment. In the LED device 10, an LED element 21 (semiconductor light emitting element) is flip-chip mounted on a circuit board 22. The electrode 17 formed on the upper surface of the plate material 20 in the circuit board 22 is connected to the electrode 19 formed on the lower surface of the plate material 20 through the through hole 18. In the LED element 21, a semiconductor layer 13 is formed on the lower surface of the sapphire substrate 12, and two bumps 14 are attached to the semiconductor layer 13. The semiconductor layer 13 is a diode provided with a light emitting layer, and each bump 14 corresponds to an anode and a cathode. The bumps 14 are connected to the electrodes 17 by metal eutectic bonding.

サファイア基板12の上面には蛍光体層15が存在し、LED素子21及び蛍光体層15の側面を白色シリコーン樹脂11(白色部材)が取り囲んでいる。蛍光体層15の上面と白色シリコーン樹脂11の上面とは一致しており、それぞれの上面に透明樹脂層16が積層している。またLED素子21と回路基板22の間隙にも白色シリコーン樹脂11が充填されている。   The phosphor layer 15 exists on the upper surface of the sapphire substrate 12, and the white silicone resin 11 (white member) surrounds the LED element 21 and the side surfaces of the phosphor layer 15. The upper surface of the phosphor layer 15 and the upper surface of the white silicone resin 11 coincide with each other, and the transparent resin layer 16 is laminated on each upper surface. The white silicone resin 11 is also filled in the gap between the LED element 21 and the circuit board 22.

LED素子21は青色発光ダイオードである。蛍光体層15はYAG蛍光体を含みLED素子21から出射した青色光で黄色発光する。すなわちLED素子21の発光色(青)と蛍光体の発光色(黄)が混色し白色光が得られる。白色部材11は酸化チタン(反射性微粒子)をシリコーン樹脂(バインダ)に混練し加熱硬化させたものである。透明樹脂16はシリコーン樹脂からなる。   The LED element 21 is a blue light emitting diode. The phosphor layer 15 contains a YAG phosphor and emits yellow light with blue light emitted from the LED element 21. That is, the light emitting color (blue) of the LED element 21 and the light emitting color (yellow) of the phosphor are mixed to obtain white light. The white member 11 is obtained by kneading titanium oxide (reflective fine particles) with a silicone resin (binder) and curing it by heating. The transparent resin 16 is made of a silicone resin.

板材20は、厚さが数百μmで、熱伝導性を考慮して樹脂、セラミック、金属から選ぶ。電極17,19は、例えば20μm程度の銅箔上にニッケル層と金層を積層したものである。板材20が樹脂の場合、スルーホール18は熱伝導性をよくするため内部を金属ペーストで埋めておくと良い。サファイア基板12は厚さが80〜120μm、半導体層13は厚さが7μm程度であり、バンプ14は電解メッキ法で形成すれば厚さが10〜30μm程度になる。LED素子21から下方向に出射した光を効率良く上方に向けるには、LED素子21と回路基板22の間に充填された白色シリコーン樹脂11の厚さが30μm以上あることが好ましい。蛍光体層15は厚さが100μm程度、透明樹脂層16は厚さが数十μmである。   The plate member 20 has a thickness of several hundred μm and is selected from resin, ceramic, and metal in consideration of thermal conductivity. The electrodes 17 and 19 are formed by laminating a nickel layer and a gold layer on a copper foil of about 20 μm, for example. When the plate material 20 is resin, the through hole 18 is preferably filled with a metal paste to improve thermal conductivity. The sapphire substrate 12 has a thickness of 80 to 120 μm, the semiconductor layer 13 has a thickness of about 7 μm, and the bump 14 has a thickness of about 10 to 30 μm if formed by electrolytic plating. In order to efficiently direct the light emitted downward from the LED element 21 upward, the thickness of the white silicone resin 11 filled between the LED element 21 and the circuit board 22 is preferably 30 μm or more. The phosphor layer 15 has a thickness of about 100 μm, and the transparent resin layer 16 has a thickness of several tens of μm.

図2によりLED装置10から出射する光の様子を説明する。図2は図1のAで囲んだ領域の拡大図に、半導体層13から出射した青色の光線L1,L2を書き加えたものである。半導体層13から出射する青色光のうち光線L1は、サファイア基板12、蛍光体層15及び透明樹脂層16を通りLED装置10から出射する。光線L2はサファイア基板12の側面を抜け白色シリコーン樹脂11に侵入し、ここで反射性微粒子により反射し再
びサファイア基板12に戻り、蛍光体層15と透明樹脂層16を通りLED装置10から出射する。下に向った光線(図示せず)は、下方の白色シリコーン樹脂11、バンプ14、又はフリップチップ実装用LED素子21の反射層(図示せず、フリップチップ実装用LED素子は反射層を備えることが多い)で反射し上に向う。以上のようにLED素子21の半導体層13から出射した光線L1,L2等は、吸収などの損失を除きサファイア基板12の上面を通ってLED装置10から出射する。蛍光体層15では青色光の一部が蛍光体により波長変換され、この波長変換された光と青色光の加色混合により白色化する。なお蛍光体層15の発光は等方的であるが下に向った光線は前述の青色光(光線L1,L2等)と同様にして上に向う。
The state of light emitted from the LED device 10 will be described with reference to FIG. FIG. 2 is obtained by adding blue light beams L1 and L2 emitted from the semiconductor layer 13 to the enlarged view of the region surrounded by A in FIG. Of the blue light emitted from the semiconductor layer 13, the light ray L <b> 1 is emitted from the LED device 10 through the sapphire substrate 12, the phosphor layer 15, and the transparent resin layer 16. The light beam L2 passes through the side surface of the sapphire substrate 12 and enters the white silicone resin 11, where it is reflected by the reflective fine particles, returns to the sapphire substrate 12 again, passes through the phosphor layer 15 and the transparent resin layer 16, and is emitted from the LED device 10. . A downward light beam (not shown) is reflected on the lower white silicone resin 11, the bump 14, or the LED chip 21 for flip chip mounting (not shown, the LED chip for flip chip mounting includes a reflecting layer). ) And reflect upwards. As described above, the light beams L1, L2, and the like emitted from the semiconductor layer 13 of the LED element 21 are emitted from the LED device 10 through the upper surface of the sapphire substrate 12 except for losses such as absorption. In the phosphor layer 15, part of the blue light is wavelength-converted by the phosphor, and whitened by additive mixing of the wavelength-converted light and the blue light. The light emission of the phosphor layer 15 is isotropic, but the downward light beam is directed upward in the same manner as the blue light (light beams L1, L2, etc.) described above.

図3により本実施形態のLED装置10の製造方法を説明する。図3はLED装置10の製造方法の説明図である。(a)はLED素子21が連結して配列しサファイア基板12からなるウェハー31を準備するウェハー準備工程である。ウェハー31の下面には半導体層13(図示せず)が形成され、各LED素子領域にはバンプ14が付着している。   A method of manufacturing the LED device 10 of this embodiment will be described with reference to FIG. FIG. 3 is an explanatory diagram of a method for manufacturing the LED device 10. (A) is a wafer preparation process in which the LED elements 21 are connected and arranged to prepare the wafer 31 made of the sapphire substrate 12. A semiconductor layer 13 (not shown) is formed on the lower surface of the wafer 31, and bumps 14 are attached to each LED element region.

(b)はLED素子21の実装面とは反対側の面、すなわちウェハー31の上面に蛍光体層15を形成する蛍光体層形成工程である。蛍光体層15は印刷法で塗布すれば良い。また蛍光体層15は、後述するLED素子21の実装工程で加わる高温(300℃程度)に耐えられるよう無機系のバインダ(例えばオルガノポリシロキサン)を使う。このバインダは触媒により150℃程度で硬化する。   (B) is a phosphor layer forming step for forming the phosphor layer 15 on the surface opposite to the mounting surface of the LED element 21, that is, on the upper surface of the wafer 31. The phosphor layer 15 may be applied by a printing method. The phosphor layer 15 uses an inorganic binder (for example, organopolysiloxane) so as to withstand high temperatures (about 300 ° C.) applied in the mounting process of the LED element 21 described later. This binder is cured at about 150 ° C. by a catalyst.

(c)は前述の蛍光体層形成工程の後に蛍光体層15を研磨する蛍光体層研磨工程である。所望の色度の白色を得るためには、蛍光体層15の厚さを調整する必要がある。なお厚さ調整用の研磨は、ウェハーのバックグラインド等で普及している研削であっても良い。   (C) is a phosphor layer polishing step for polishing the phosphor layer 15 after the aforementioned phosphor layer forming step. In order to obtain white with a desired chromaticity, it is necessary to adjust the thickness of the phosphor layer 15. The polishing for adjusting the thickness may be grinding that is widely used in wafer back grinding and the like.

(d)はウェハー31を切断してLED素子21を個片化するLED素子個片化工程である。ダイシングシート(図示せず)にウェハー31を貼り付け、ダイシング装置でウェハー31を切断し、ダイシングシートを拡張すると各LED素子21が分離しピックアップ可能になる。   (D) is an LED element separation step in which the wafer 31 is cut to separate the LED elements 21. When the wafer 31 is attached to a dicing sheet (not shown), the wafer 31 is cut by a dicing apparatus, and the dicing sheet is expanded, each LED element 21 is separated and can be picked up.

(e)は回路基板22が連結した集合基板23にLED素子21をフリップチップ実装する実装工程である。集合基板23は大判の板材20に多数の回路基板領域を備え、各回路基板領域には電極17、スルーホール18(図示せず)、及び電極19(図示せず)が形成されている。LED素子21は、一個ずつ集合基板23上に配置しても良いし、予め集合基板23の電極ピッチにあわせて粘着シート上にLED素子21を配列させ、この粘着シートを集合基板23に重ね、多数のLED素子21を一括して集合基板23に配置しても良い。LED21の配置が完了したらLED素子21を加圧及び加熱し電極17に接合する。   (E) is a mounting process in which the LED elements 21 are flip-chip mounted on the collective substrate 23 connected to the circuit board 22. The collective substrate 23 is provided with a large number of circuit board regions on a large plate member 20, and an electrode 17, a through hole 18 (not shown), and an electrode 19 (not shown) are formed in each circuit board region. The LED elements 21 may be arranged on the collective substrate 23 one by one, or the LED elements 21 are arranged on the adhesive sheet in advance according to the electrode pitch of the collective substrate 23, and this adhesive sheet is stacked on the collective substrate 23. A large number of LED elements 21 may be collectively arranged on the collective substrate 23. When the arrangement of the LED 21 is completed, the LED element 21 is pressurized and heated to be joined to the electrode 17.

(f)は集合基板23の全面に反射性微粒子を含有する白色シリコーン樹脂11を塗布する塗布工程である。白色シリコーン樹脂11はLED素子21を覆って良いので、スキージを使って集合基板23に白色シリコーン樹脂11を配置しても良い。最後に白色シリコーン樹脂11を150℃程度で加熱硬化させる。   (F) is an application process in which the white silicone resin 11 containing reflective fine particles is applied to the entire surface of the collective substrate 23. Since the white silicone resin 11 may cover the LED element 21, the white silicone resin 11 may be disposed on the collective substrate 23 using a squeegee. Finally, the white silicone resin 11 is heated and cured at about 150 ° C.

(g)は白色シリコーン樹脂11を研磨する研磨工程である。白色シリコーン樹脂11が蛍光体層15の上面に一致するまで研磨する。このとき蛍光体層15の上面を多少(数μm程度)研磨しても大きな色度変化はない。   (G) is a polishing step for polishing the white silicone resin 11. Polishing is performed until the white silicone resin 11 coincides with the upper surface of the phosphor layer 15. At this time, even if the upper surface of the phosphor layer 15 is polished to some extent (about several μm), there is no significant change in chromaticity.

(h)は透明樹脂を塗布し透明樹脂層16を形成する透明樹脂塗布工程である。透明樹
脂層16は蛍光体層15の機械的保護やガスバリヤとして機能する。透明樹脂はシリコーンで良く、塗布後硬化させる。
(H) is a transparent resin coating step in which a transparent resin is applied to form the transparent resin layer 16. The transparent resin layer 16 functions as a mechanical protection and gas barrier for the phosphor layer 15. The transparent resin may be silicone and is cured after application.

(i)は集合基板23からLED装置10を単個に分離する個片化工程である。透明樹脂層16まで形成した集合基板23をダイシング装置により切断しLED装置10を個片化する。   (I) is an individualization process for separating the LED device 10 into single pieces from the collective substrate 23. The collective substrate 23 formed up to the transparent resin layer 16 is cut by a dicing device to divide the LED device 10 into individual pieces.

本実施形態では、蛍光体層形成工程の後に蛍光体層研磨工程を備えていた。白色の色度に対し微調しなくても良い場合は、蛍光体層研磨工程を省略できる。また、蛍光体として珪酸塩系の緑色蛍光体と窒化物系の赤色蛍光体を組み合わせた場合、LED層15の厚さを決めるのにLED素子21のピーク波長の影響にも配慮する必要がある。   In the present embodiment, a phosphor layer polishing step is provided after the phosphor layer forming step. When it is not necessary to finely adjust the white chromaticity, the phosphor layer polishing step can be omitted. In addition, when a silicate green phosphor and a nitride red phosphor are combined as the phosphor, it is necessary to consider the influence of the peak wavelength of the LED element 21 to determine the thickness of the LED layer 15. .

本実施形態では、白色シリコーン樹脂11の塗布工程(f)の後に白色シリコーン樹脂11の研磨工程(g)を備えていた。研磨工程(g)は、高精度のディスペンサで塗布量を制御し、白色シリコーン樹脂11の上面とLED素子21の上面を略一致させれば省くことができる。同様に本実施形態では蛍光体層形成工程(b)後の蛍光体層研磨工程(c)も精度の高いディスペンサを使えば省略できる。しかしながら本実施形態のようにLED素子21が密集したウェハー31の研磨加工、及び多数のLED装置10が配列した集合基板23の研磨加工は、一括処理になっているため製造上大きな負荷とはならない。また透明樹脂層16及び透明樹脂塗布工程(h)も、蛍光体層15の強度が充分で蛍光体の耐環境性(特に水分)が高い場合は省略できる。   In this embodiment, the white silicone resin 11 polishing step (g) is provided after the white silicone resin 11 coating step (f). The polishing step (g) can be omitted if the coating amount is controlled with a high-precision dispenser and the upper surface of the white silicone resin 11 and the upper surface of the LED element 21 are substantially matched. Similarly, in this embodiment, the phosphor layer polishing step (c) after the phosphor layer forming step (b) can be omitted if a highly accurate dispenser is used. However, the polishing process of the wafer 31 in which the LED elements 21 are densely packed and the polishing process of the collective substrate 23 in which a large number of LED devices 10 are arranged as in the present embodiment are performed in a lump, and thus do not impose a large load on manufacturing. . The transparent resin layer 16 and the transparent resin coating step (h) can also be omitted when the phosphor layer 15 has sufficient strength and the environment resistance (especially moisture) of the phosphor is high.

本実施形態では白色部材としてバインダをシリコーン樹脂としていた。白色部材としてはオルガノポリシロキサンのように焼結するとガラス質となる無機バインダと反射性微粒子とを混練し固化した白色セラミックインクでも良い。この白色セラミックインクは触媒により150℃程度で硬化する。また白色セラミックインクはバインダが無機質であるため光劣化が少ないという特徴もある。   In this embodiment, the binder is a silicone resin as the white member. The white member may be a white ceramic ink obtained by kneading and solidifying an inorganic binder that becomes glassy when sintered, such as organopolysiloxane, and reflective fine particles. This white ceramic ink is cured at about 150 ° C. by a catalyst. The white ceramic ink is also characterized by little light degradation because the binder is inorganic.

本実施形態では図3の研磨工程(g)において白色シリコーン樹脂11を研磨する際、蛍光体層15の上面を多少(数μm程度)研磨しても良いものとしていた。しかしながら蛍光体層15の研磨が好ましくない場合、蛍光体層研磨工程(c)のあとに薄い透明樹脂層を形成しておくと良い。この場合、研磨工程(g)において白色シリコーン樹脂11を研磨する際、この透明樹脂層の上面が多少(数μm程度)研磨され、蛍光体層15は研磨されない。この手法は、前述のように蛍光体層15がLED素子21の発光スペクトル(発光ピーク波長等)の影響で発光効率が変化するとき、蛍光体層15の厚みをLED素子21ごとに予め調整しておき、LED素子21を色度補正する場合に有効である。   In the present embodiment, when the white silicone resin 11 is polished in the polishing step (g) of FIG. 3, the upper surface of the phosphor layer 15 may be polished somewhat (about several μm). However, when polishing of the phosphor layer 15 is not preferable, a thin transparent resin layer may be formed after the phosphor layer polishing step (c). In this case, when the white silicone resin 11 is polished in the polishing step (g), the upper surface of the transparent resin layer is slightly polished (about several μm), and the phosphor layer 15 is not polished. As described above, when the luminous efficiency of the phosphor layer 15 changes due to the emission spectrum (emission peak wavelength, etc.) of the LED element 21 as described above, the thickness of the phosphor layer 15 is adjusted in advance for each LED element 21. This is effective when correcting the chromaticity of the LED element 21.

本実施形態ではLED素子21は青色光を発光していたが、LED素子21は近紫外光を発光しても良い。この場合、蛍光体層15には青色蛍光体、緑色蛍光体及び赤色蛍光体を混錬しておく。このとき可視光は演色性が向上するばかりでなく、発光部位がLED素子21の上面だけになるので方位角による色ムラが低減する。   In the present embodiment, the LED element 21 emits blue light, but the LED element 21 may emit near ultraviolet light. In this case, the phosphor layer 15 is kneaded with a blue phosphor, a green phosphor and a red phosphor. At this time, not only the color rendering property of visible light is improved, but also the color emission due to the azimuth angle is reduced because the light emitting portion is only the upper surface of the LED element 21.

本実施形態では白色部材11は単一層であったが、白色部材を2層以上にしても良い。例えば下層を白色シリコーン樹脂とし上層を白色セラミックインクとする。この構造では軟質の白色シリコーン樹脂が応力に対するバッファ層となり、回路基板の熱膨張で硬質の白色セラミックインクが割れるという不具合を回避できる。また白色シリコーン樹脂(硬化前)の粘度を下げておきLED素子下面に入り込み易くしておいても良い(同時に周囲の気圧を上げても良い)。またサファイア基板(透明基板)を極力薄く(例えば10〜20μm)にした場合にも本発明の製造方法は製造を容易にするのに有効である。   In the present embodiment, the white member 11 is a single layer, but the white member may be two or more layers. For example, the lower layer is a white silicone resin and the upper layer is a white ceramic ink. In this structure, the soft white silicone resin serves as a buffer layer against stress, and the problem that the hard white ceramic ink breaks due to the thermal expansion of the circuit board can be avoided. Alternatively, the viscosity of the white silicone resin (before curing) may be lowered to make it easier to enter the lower surface of the LED element (at the same time the ambient pressure may be increased). Even when the sapphire substrate (transparent substrate) is made as thin as possible (for example, 10 to 20 μm), the production method of the present invention is effective for facilitating the production.

10…LED装置(半導体発光装置)、
11…白色シリコーン樹脂(白色部材)、
12…サファイア基板、
13…半導体層、
14…バンプ、
15…蛍光体層、
16…透明樹脂層、
17,19…電極、
18…スルーホール、
20…板材、
21…LED素子(半導体発光素子)、
22…回路基板、
23…集合基板、
L1,L2…光線。
10 ... LED device (semiconductor light-emitting device),
11 ... White silicone resin (white member),
12 ... sapphire substrate,
13 ... semiconductor layer,
14 ... Bump,
15 ... phosphor layer,
16 ... Transparent resin layer,
17, 19 ... electrodes,
18 ... Through hole,
20 ... plate material,
21 ... LED element (semiconductor light emitting element),
22 ... circuit board,
23 ... Collective board,
L1, L2 ... rays.

Claims (9)

回路基板上に半導体発光素子を実装した半導体発光装置において、
前記半導体発光素子が前記回路基板上にフリップチップ実装され、実装面とは反対側の面に蛍光体層を備え、
白色部材が該半導体発光素子及び該蛍光体層の側面を取り囲み、
該蛍光体層の上面と該白色部材の上面とが略一致している
ことを特徴とする半導体発光装置。
In a semiconductor light emitting device in which a semiconductor light emitting element is mounted on a circuit board,
The semiconductor light emitting device is flip-chip mounted on the circuit board, and includes a phosphor layer on the surface opposite to the mounting surface,
A white member surrounds the sides of the semiconductor light emitting device and the phosphor layer;
A semiconductor light emitting device, wherein an upper surface of the phosphor layer and an upper surface of the white member are substantially coincident with each other.
前記白色部材のバインダが焼結するとガラス質となる無機バインダであることを特徴とする請求項1に記載の半導体発光装置。   The semiconductor light emitting device according to claim 1, wherein the white material binder is an inorganic binder that becomes glassy when sintered. 前記白色部材のバインダがシリコーン樹脂であることを特徴とする請求項1に記載の半導体発光装置。   The semiconductor light emitting device according to claim 1, wherein the binder of the white member is a silicone resin. 前記半導体発光素子と前記回路基板の間隙に前記白色部材が充填されていることを特徴とする請求項1から3のいずれか一項に記載の半導体発光装置。   4. The semiconductor light emitting device according to claim 1, wherein the white member is filled in a gap between the semiconductor light emitting element and the circuit board. 5. 回路基板上に半導体発光素子を実装した半導体発光装置の製造方法において、
前記半導体発光素子が連結して配列するウェハーを準備するウェハー準備工程と、
前記半導体発光素子の実装面とは反対側となる前記ウェハーの面に蛍光体層を形成する蛍光体層形成工程と、
前記ウェハーを切断して前記半導体発光素子を個片化するLED素子個片化工程と、
前記回路基板が連結した集合基板に前記半導体発光素子をフリップチップ実装する実装工程と、
前記集合基板の全面に反射性微粒子を含有する白色部材を塗布する塗布工程と、
該白色部材を研磨する研磨工程と、
前記半導体発光装置を単個に分離する個片化工程と
を備えることを特徴とする半導体発光装置の製造方法。
In a method for manufacturing a semiconductor light emitting device in which a semiconductor light emitting element is mounted on a circuit board,
A wafer preparation step of preparing a wafer in which the semiconductor light emitting elements are connected and arranged; and
A phosphor layer forming step of forming a phosphor layer on the surface of the wafer opposite to the mounting surface of the semiconductor light emitting element;
LED element singulation step of cutting the wafer into pieces of the semiconductor light emitting elements;
A mounting step of flip-chip mounting the semiconductor light emitting element on a collective substrate connected to the circuit board;
An application step of applying a white member containing reflective fine particles to the entire surface of the aggregate substrate;
A polishing step of polishing the white member;
A method for manufacturing a semiconductor light emitting device, comprising: a step of separating the semiconductor light emitting device into a single piece.
前記蛍光体層形成工程の後に前記蛍光体層を研磨する蛍光体層研磨工程を備えることを特徴とする請求項5に記載の半導体発光装置の製造方法。   6. The method of manufacturing a semiconductor light emitting device according to claim 5, further comprising a phosphor layer polishing step for polishing the phosphor layer after the phosphor layer forming step. 前記個片化工程の前に透明樹脂を塗布する透明樹脂塗布工程を備えることを特徴とする請求項5又は6に記載の半導体発光装置の製造方法。   The method for manufacturing a semiconductor light emitting device according to claim 5, further comprising a transparent resin application step of applying a transparent resin before the individualization step. 前記白色部材のバインダが焼結するとガラス質となる無機バインダであることを特徴とする請求項5から7のいずれか一項に記載の半導体発光装置の製造方法。   The method for manufacturing a semiconductor light emitting device according to claim 5, wherein the white material binder is an inorganic binder that becomes glassy when sintered. 前記白色部材のバインダがシリコーン樹脂であることを特徴とする請求項5から7のいずれか一項に記載の半導体発光装置の製造方法。
The method for manufacturing a semiconductor light emitting device according to claim 5, wherein the binder of the white member is a silicone resin.
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