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JP2002094123A - Surface-mounted light emitting diode and its manufacturing method - Google Patents

Surface-mounted light emitting diode and its manufacturing method

Info

Publication number
JP2002094123A
JP2002094123A JP2000279076A JP2000279076A JP2002094123A JP 2002094123 A JP2002094123 A JP 2002094123A JP 2000279076 A JP2000279076 A JP 2000279076A JP 2000279076 A JP2000279076 A JP 2000279076A JP 2002094123 A JP2002094123 A JP 2002094123A
Authority
JP
Japan
Prior art keywords
light emitting
light
circuit board
emitting diode
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000279076A
Other languages
Japanese (ja)
Inventor
Akira Koike
晃 小池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Electronics Co Ltd
Original Assignee
Citizen Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Electronics Co Ltd filed Critical Citizen Electronics Co Ltd
Priority to JP2000279076A priority Critical patent/JP2002094123A/en
Publication of JP2002094123A publication Critical patent/JP2002094123A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Landscapes

  • Luminescent Compositions (AREA)
  • Led Device Packages (AREA)
  • Led Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a surface-mounted light emitting diode having a wavelength conversion board for obtaining a uniform emission luminance without causing a color irregularity. SOLUTION: A gallium nitride compound semiconductor has a light emitting layer 27 composed of an n-type semiconductor 23 and a p-type semiconductor 24, an n-type electrode 25, and a p-type electrode 26. All elements are formed on the surface of an element substrate 22 made of sapphire glass. A light emitting element chip 21 is formed with a zinc selenide compound semiconductor- made wavelength conversion board 28 adhered to the backside of the element board 22. The chip 21 is mounted on a circuit board 31 having outer connection electrodes 32, 33 to form a surface mount type light emitting diode.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、白色光を発する発
光ダイオードに係り、特に、白色光に変換する波長変換
基板を発光層が形成された素子基板に一体形成してなる
表面実装型の発光ダイオード及びその製造方法に関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light emitting diode which emits white light, and more particularly to a surface mount type light emitting device in which a wavelength conversion substrate for converting to white light is formed integrally with an element substrate on which a light emitting layer is formed. The present invention relates to a diode and a method for manufacturing the diode.

【0002】[0002]

【従来の技術】従来、白色発光する発光ダイオードとし
ては、例えば窒化ガリウム系化合物半導体からなる青色
発光の発光素子を発光媒体として、この発光媒体に黄色
系の蛍光材を組合せたものが知られている。このような
従来の青色発光を白色系発光に波長変換するタイプの発
光ダイオードを図10に示す。この発光ダイオード1
は、発光素子チップ4がメタルステム2に設けた凹部3
に載置され、ボンディングワイヤ6によってメタルポス
ト5に接続されている。これらの発光素子チップ4及び
ボンディングワイヤ6は、砲弾形の透明樹脂体8によっ
て封止されている。また、前記凹部3内には蛍光材を分
散した蛍光材含有樹脂7が発光素子チップ4の上方を被
うようにして充填されている。このような構成からなる
発光ダイオード1にあっては、発光素子チップ4から発
した青色光が蛍光材含有樹脂7に分散されている蛍光材
に当たって蛍光材を励起し、発光素子チップ4の元来の
発光色とは異なる黄色系の発光に変換され、両者の混色
により白色系の発光を得るものである(特開平7−99
345号参照)。
2. Description of the Related Art Heretofore, as a light emitting diode which emits white light, for example, a light emitting diode in which a blue light emitting element made of a gallium nitride compound semiconductor is used as a light emitting medium and a yellow fluorescent material is combined with this light emitting medium is known. I have. FIG. 10 shows such a conventional light emitting diode that converts the wavelength of blue light emission into white light emission. This light emitting diode 1
Is a concave portion 3 provided in the metal stem 2 by the light emitting element chip 4.
And connected to the metal post 5 by a bonding wire 6. The light emitting element chip 4 and the bonding wires 6 are sealed with a bullet-shaped transparent resin body 8. The recess 3 is filled with a fluorescent material-containing resin 7 in which a fluorescent material is dispersed so as to cover the light emitting element chip 4. In the light emitting diode 1 having such a configuration, the blue light emitted from the light emitting element chip 4 hits the fluorescent material dispersed in the fluorescent material containing resin 7 to excite the fluorescent material, and the light emitting element chip 4 Is converted to yellow-based light emission different from the light-emission color, and white-based light is obtained by mixing the two colors (Japanese Patent Laid-Open No. 7-99).
No. 345).

【0003】[0003]

【発明が解決しようとする課題】しかしながら、上記の
ような発光素子チップ4にあっては、蛍光物質をインサ
ート成形によって樹脂モールド内に分散させているの
で、蛍光物質と樹脂モールドとの比重の違いから、蛍光
物質が一方に偏ってしまい、輝度のバラツキや色調むら
が生じるといった問題があった。
However, in the light emitting element chip 4 as described above, since the fluorescent substance is dispersed in the resin mold by insert molding, the difference in specific gravity between the fluorescent substance and the resin mold is caused. As a result, there is a problem that the fluorescent substance is biased to one side, causing a variation in luminance and an uneven color tone.

【0004】また、発光素子チップ4と外部電極との接
続がボンディングワイヤ6を介して行っているため、工
程や副資材が多くかかり、製品コストが高騰するといっ
た問題もあった。
In addition, since the connection between the light emitting element chip 4 and the external electrodes is made through the bonding wires 6, there are also problems in that many steps and auxiliary materials are required, and the product cost is increased.

【0005】また、従来のインサート成形では一度に数
十個単位でしか発光ダイオードが製造できず、大量生産
に適さないものであった。
[0005] In the conventional insert molding, light emitting diodes can be manufactured only in units of several tens at a time, which is not suitable for mass production.

【0006】そこで、本発明の目的は、色調むらが起き
ずに均一な発光輝度を得られると共に、製造工程の簡略
化及び大量生産が図られるような波長変換基板を備えた
表面実装型の発光ダイオード及びその製造方法を提供す
るものである。
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a surface-mounted type light emitting device having a wavelength conversion substrate capable of obtaining uniform light emission luminance without color tone unevenness, simplifying a manufacturing process, and mass-producing. A diode and a method for manufacturing the same are provided.

【0007】[0007]

【課題を解決するための手段】上記課題を解決するため
に、本発明者は、発光層が形成された素子基板に波長変
換基板を一体に設けることで発光輝度の均一化を図るよ
うにした。具体的には、請求項1の発明は、素子基板を
サファイアガラスで構成し、その表面に発光層と電極が
形成されてなる窒化ガリウム系化合物半導体において、
前記素子基板の裏面にセレン化亜鉛系化合物半導体で形
成された波長変換基板を接着固定した発光素子チップを
備えてなる表面実装型発光ダイオードによって、上述し
た課題を解決した。
Means for Solving the Problems To solve the above problems, the present inventors have attempted to make the emission luminance uniform by integrally providing a wavelength conversion substrate on an element substrate on which a light emitting layer is formed. . Specifically, the invention according to claim 1 is a gallium nitride-based compound semiconductor in which an element substrate is made of sapphire glass and a light emitting layer and an electrode are formed on the surface thereof.
The above-mentioned problem has been solved by a surface-mounted light-emitting diode including a light-emitting element chip in which a wavelength conversion substrate formed of a zinc selenide-based compound semiconductor is bonded and fixed to the back surface of the element substrate.

【0008】この発明によれば、前記素子基板の裏面に
セレン化亜鉛系化合物半導体で形成された波長変換基板
が直接透明接着剤で接着固定されているため、素子基板
の表面の発光層で発した光が、発光媒体である素子基板
及び波長変換基板を効率よく通過し光量の減衰を抑える
ことができる。このため、波長変換においても光量の低
下及び色調むらを防ぎ、青色光と黄色光が効率よく混色
されて均一な白色系の発光を得ることができる。また、
従来、波長変換材料として粉末状の蛍光体を使用し、モ
ールド樹脂へブレンドして波長変換層を形成していた
が、このブレンド法においては、分散が不均一になりや
すい。このため、輝度のバラツキや色調むらが発生し
て、均一な白色発光が得られなかったが、本案のよう
に、蛍光粒子が均一な結晶体であるセレン化亜鉛系化合
物半導体の基板を直接配することで、発光輝度のバラツ
キが起きにくくなり、安定した色調の白色発光が得られ
る。
According to the present invention, since the wavelength conversion substrate formed of a zinc selenide-based compound semiconductor is directly adhered and fixed to the back surface of the element substrate with the transparent adhesive, the light emission layer on the surface of the element substrate emits light. The emitted light efficiently passes through the element substrate and the wavelength conversion substrate, which are light emitting media, and the attenuation of the light amount can be suppressed. For this reason, even in wavelength conversion, a decrease in light amount and uneven color tone can be prevented, and blue light and yellow light can be efficiently mixed to obtain uniform white light emission. Also,
Conventionally, a powdery phosphor has been used as a wavelength conversion material and blended with a mold resin to form a wavelength conversion layer. However, in this blending method, dispersion tends to be non-uniform. As a result, variations in brightness and uneven color tone were generated, and uniform white light emission was not obtained. However, as in the present invention, a substrate of a zinc selenide-based compound semiconductor in which fluorescent particles were uniform crystals was directly disposed. By doing so, it is difficult for variations in the light emission luminance to occur, and white light emission with a stable color tone can be obtained.

【0009】請求項2の発明は、請求項1記載の表面実
装型発光ダイオードにおいて、前記発光素子チップが上
下逆にして回路基板上に載置され、該発光素子チップの
電極を回路基板にバンプを介して接続すると共に、前記
発光素子チップを回路基板面に樹脂封止したことを特徴
とする。
According to a second aspect of the present invention, in the surface mount type light emitting diode according to the first aspect, the light emitting element chip is mounted on a circuit board upside down, and the electrodes of the light emitting element chip are bumped on the circuit board. And the light emitting element chip is resin-sealed on the circuit board surface.

【0010】この発明によれば、前記発光素子チップが
上下逆にして回路基板上に載置されることで下から回路
基板、電極、発光層、素子基板、波長変換基板の順の積
層構造となる。また、回路基板と電極とがバンプを介し
て接続されているため、発光素子チップを覆う樹脂中に
ワイヤ等の障害物がなくなる。このため、発光層で発し
た光が電極やワイヤ等によって遮光されることなく、素
子基板を通して直接波長変換基板に到達させることがで
きる。具体的には、前記素子基板がサファイアガラスで
あり、このサファイアガラスを通した青色発光が、波長
変換基板を形成するセレン化亜鉛系化合物半導体の蛍光
粒子を励起することによって、発光素子チップの元来の
青色光とは異なる黄色系の発光に変換される。そして、
これら両者の混色によって均一な白色発光を得ることが
できる。
According to the present invention, the light emitting element chip is placed upside down on the circuit board to form a laminated structure of a circuit board, electrodes, a light emitting layer, an element substrate, and a wavelength conversion board from the bottom. Become. Further, since the circuit board and the electrodes are connected via the bumps, there is no obstacle such as a wire in the resin covering the light emitting element chip. For this reason, the light emitted from the light emitting layer can reach the wavelength conversion substrate directly through the element substrate without being blocked by the electrodes, wires, or the like. Specifically, the element substrate is sapphire glass, and blue light emitted through the sapphire glass excites the fluorescent particles of the zinc selenide-based compound semiconductor forming the wavelength conversion substrate, so that the light emitting element chip The light is converted to yellow light that is different from the original blue light. And
Uniform white light emission can be obtained by mixing these two colors.

【0011】請求項3に係る表面実装型ダイオードの製
造方法は、集合回路基板に長溝状のスルーホールと、該
スルーホールに繋がる電極パターンをマトリックス状に
形成する工程と、サファイアガラスで構成された素子基
板の表面に発光層と電極が形成された窒化ガリウム系化
合物半導体を上下逆にして前記電極パターン上に載置
し、該電極と電極パターンとをバンプを介して電気的に
接続する工程と、前記集合回路基板に載置された窒化ガ
リウム系化合物半導体の素子基板の上面にセレン化亜鉛
系化合物半導体で形成された波長変換基板を接着固定し
て発光素子チップ集合体を形成する工程と、前記集合回
路基板上に金型を配し、この金型内に樹脂を充填して発
光素子チップ集合体を封止する工程と、前記樹脂をキュ
アリングした後、単個の発光ダイオードごとに集合回路
基板を分割する工程とを備えたことを特徴とする。
According to a third aspect of the present invention, there is provided a method of manufacturing a surface mount type diode, comprising a step of forming a long groove-shaped through-hole in a collective circuit board, an electrode pattern connected to the through-hole in a matrix, and sapphire glass. A step of placing the gallium nitride-based compound semiconductor on which the light emitting layer and the electrode are formed on the surface of the element substrate upside down on the electrode pattern, and electrically connecting the electrode and the electrode pattern via bumps; Forming a light-emitting element chip assembly by bonding and fixing a wavelength conversion substrate formed of a zinc selenide-based compound semiconductor on an upper surface of an element substrate of a gallium nitride-based compound semiconductor mounted on the collective circuit board; Disposing a mold on the collective circuit board, filling the mold with a resin to seal the light emitting element chip assembly, and after curing the resin, Characterized by comprising a step of dividing the set circuit board for each of the light emitting diode.

【0012】この発明によれば、1枚の集合回路基板か
ら大量の発光ダイオードの生産が可能である。また、バ
ンプによるフリップチップ実装方式であるため、ワイヤ
ボンディング工程が不要となる。このため、製法が簡単
で製造設備や工数の低減化が図られると共に、接続不良
等も起きにくく、製品の歩留りも向上する。
According to the present invention, a large number of light emitting diodes can be produced from one integrated circuit board. Further, since the flip-chip mounting method using bumps is used, a wire bonding step is not required. For this reason, the manufacturing method is simple, manufacturing equipment and man-hours are reduced, connection failures and the like are less likely to occur, and the product yield is improved.

【0013】[0013]

【発明の実施の形態】以下、添付図面に基づいて本発明
に係る表面実装型発光ダイオード及びその製造方法の実
施形態を詳細に説明する。図1は前記表面実装型発光ダ
イオードを構成する発光素子チップの断面図、図2は本
発明の表面実装型発光ダイオードの斜視図、図3は前記
表面実装型発光ダイオードをマザーボードに実装したと
きの断面図、図4乃至図9は前記表面実装型発光ダイオ
ードの製造工程を示す工程図である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a surface-mounted light emitting diode and a method for manufacturing the same according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a cross-sectional view of a light emitting element chip constituting the surface mounted light emitting diode, FIG. 2 is a perspective view of the surface mounted light emitting diode of the present invention, and FIG. 3 shows a case where the surface mounted light emitting diode is mounted on a motherboard. 4 to 9 are cross-sectional views showing the steps of manufacturing the surface-mounted light emitting diode.

【0014】図1に示すように、本発明の表面実装型の
発光ダイオードに搭載される発光素子チップ21は、発
光源が窒化ガリウム系化合物半導体からなる略四角形状
の青色発光素子である。この青色発光素子は、100μ
m程度の厚みの透明サファイアガラスで構成された素子
基板22の下面にn型半導体23とp型半導体24とか
らなる発光層27を拡散成長させたダブルヘテロ構造と
なっている。前記n型半導体23及びp型半導体24
は、数μm程度の厚みに成膜されたもので、それぞれの
下面にn型電極25,p型電極26が形成される。n型
電極25は金(Au)で形成されカソード側に,p型電
極26はアルミニウム(Al)で形成されアノード側に
接続される。前記n型電極25,p型電極26は、スパ
ッタリングや真空蒸着によって所望の大きさに形成する
ことができる。
As shown in FIG. 1, a light-emitting element chip 21 mounted on a surface-mount type light-emitting diode of the present invention is a blue light-emitting element having a substantially square shape whose light-emitting source is made of a gallium nitride-based compound semiconductor. This blue light emitting element has a
A light emitting layer 27 composed of an n-type semiconductor 23 and a p-type semiconductor 24 is diffused and grown on the lower surface of an element substrate 22 made of a transparent sapphire glass having a thickness of about m. The n-type semiconductor 23 and the p-type semiconductor 24
Is formed to have a thickness of about several μm, and an n-type electrode 25 and a p-type electrode 26 are formed on the lower surfaces thereof. The n-type electrode 25 is formed of gold (Au) on the cathode side, and the p-type electrode 26 is formed of aluminum (Al) and connected to the anode side. The n-type electrode 25 and the p-type electrode 26 can be formed to desired sizes by sputtering or vacuum deposition.

【0015】前記素子基板22の上面には、固体状の波
長変換基板28が素子基板22と一体に接合されてい
る。この波長変換基板28は、素子基板22の上面全体
に載置される厚さ100〜200μmのセレン化亜鉛系
化合物半導体の基板であり、発光層27で発光した青色
発光が、素子基板22を介して、セレン化亜鉛系化合物
半導体の基板内の蛍光粒子を励起することによって蛍光
色に変換され、元来の青色光と変換された蛍光色との混
色により白色系の発光が得られる。
On the upper surface of the element substrate 22, a solid-state wavelength conversion substrate 28 is integrally joined with the element substrate 22. The wavelength conversion substrate 28 is a 100-200 μm-thick zinc selenide-based compound semiconductor substrate mounted on the entire upper surface of the element substrate 22, and the blue light emitted from the light emitting layer 27 is emitted through the element substrate 22. Then, the fluorescent particles in the substrate of the zinc selenide-based compound semiconductor are excited to be converted to a fluorescent color, and white light is obtained by mixing the original blue light and the converted fluorescent color.

【0016】上述の波長変換基板28は、前記素子基板
22の上面全体を覆うようにして透明接着剤(図示せ
ず)で接合形成される。
The above-described wavelength conversion substrate 28 is formed by bonding with a transparent adhesive (not shown) so as to cover the entire upper surface of the element substrate 22.

【0017】従って、上記のような構成からなる発光素
子チップ21にあっては、n型半導体23とp型半導体
24との境界面から、上方、側方及び下方へ青色光が発
光するが、特に上方側へ発光した青色光は素子基板22
を通り、波長変換基板28の中の微小な蛍光粒子を励起
し、それによって長波長の可視光に波長変換される。前
記波長変換された発光色は黄色系であるが、元々の青色
光との混色で得られる白色系発光の色調は、波長変換基
板28の材質であるセレン化亜鉛系化合物半導体の厚み
によって変化する。例えば、本実施例の100μmでス
ライスしたものは、やや青色がかかった白で、これより
薄いと短波長側にシフトした青の色調となり、逆に厚い
と長波長側にシフトした赤の色調になる。したがって、
用途に応じて、適宜スライスする厚さを調整して使用す
ることになる。
Accordingly, in the light emitting element chip 21 having the above-described configuration, blue light is emitted upward, sideward, and downward from the boundary surface between the n-type semiconductor 23 and the p-type semiconductor 24. In particular, the blue light emitted upward is emitted from the element substrate 22.
, And excites the minute fluorescent particles in the wavelength conversion substrate 28, whereby the wavelength is converted into long-wavelength visible light. The wavelength-converted emission color is yellow, but the color tone of white emission obtained by mixing with the original blue light varies depending on the thickness of the zinc selenide-based compound semiconductor that is the material of the wavelength conversion substrate 28. . For example, the sliced 100 μm of the present embodiment is a white with a slight blue tint, and a thinner than this gives a blue tone shifted to the shorter wavelength side, while a thicker one gives a red tone shifted to the longer wavelength side. Become. Therefore,
The thickness to be sliced is appropriately adjusted and used according to the application.

【0018】図2及び図3は、上記の発光素子チップ2
1を用いて構成した波長変換型の発光ダイオード20及
びマザーボードへの実装形態を示したものである。この
発光ダイオード20は、略長方形状のガラスエポキシか
らなる回路基板31の上面に一対の外部接続用電極3
2,33(カソード,アノード)をパターン形成し、こ
れと一体に成形された下面電極32a,33aをマザー
ボード36上のプリント配線37,38に半田39で固
定することによって表面実装するものである。
FIGS. 2 and 3 show the light emitting element chip 2 described above.
1 illustrates a wavelength conversion type light-emitting diode 20 configured by using No. 1 and a mounting form on a motherboard. The light-emitting diode 20 has a pair of external connection electrodes 3 on an upper surface of a circuit board 31 made of a substantially rectangular glass epoxy.
2, 33 (cathode, anode) are formed in a pattern, and the lower electrodes 32a, 33a formed integrally therewith are fixed to printed wirings 37, 38 on a motherboard 36 by solder 39 to perform surface mounting.

【0019】前記発光素子チップ21は、回路基板31
の上面略中央部に載置され、回路基板側の外部接続用電
極32,33と、発光層27側のn型電極25,p型電
極26とがバンプ40を介して熱圧接され電気的に接続
される。このバンプ40の材質は、金(Au)である。
このようにして回路基板31に接続された発光素子チッ
プ21は、無色透明の樹脂封止体34によって封止さ
れ、機械的ストレスから保護される。この樹脂封止体3
4は、電極32,33の側面及び上面の一部を残した状
態で発光素子チップ21全体を完全に覆い隠すようにし
て形成される。
The light emitting element chip 21 includes a circuit board 31
The external connection electrodes 32 and 33 on the circuit board side and the n-type electrode 25 and the p-type electrode 26 on the light-emitting layer 27 side are heat-pressed through the bumps 40 and electrically connected. Connected. The material of the bump 40 is gold (Au).
The light emitting element chip 21 connected to the circuit board 31 in this manner is sealed by a colorless and transparent resin sealing body 34, and is protected from mechanical stress. This resin sealing body 3
Reference numeral 4 is formed so as to completely cover the entire light emitting element chip 21 while leaving a part of the side surfaces and upper surfaces of the electrodes 32 and 33.

【0020】上記構成の発光ダイオード20にあって
は、発光層27と素子基板22を有する発光素子チップ
21が発する青色発光が、上方の波長変換基板28に含
まれる蛍光粒子を励起し、長波長の可視光である蛍光色
に波長変換される。そして、元来の青色光と混色すると
共に無色透明の樹脂封止体34を通してマザーボード3
6の上面側を照射する白色系発光30が得られることに
なる。
In the light emitting diode 20 having the above-described structure, the blue light emitted from the light emitting element chip 21 having the light emitting layer 27 and the element substrate 22 excites the fluorescent particles contained in the upper wavelength conversion substrate 28 to produce a long wavelength light. Wavelength is converted to a fluorescent color, which is visible light of Then, the motherboard 3 is mixed with the original blue light and passes through the colorless and transparent resin sealing body 34.
Thus, white light emission 30 for irradiating the upper surface side of 6 is obtained.

【0021】次に、上記構成からなる表面実装型の発光
ダイオード20の製造工程を図4の一連の工程図及び図
5〜図9の個別の工程図に基づいて説明する。表面実装
型の発光ダイオード20は図4に示すように、集合回路
基板形成(工程1)、フリップチップ実装(工程2)、
波長変換基板形成(工程3)、樹脂成形・キュアリング
(工程4)、切断・分割(工程5)の一連の製造工程を
経て製造される。次に個別の製造工程を説明する。図5
は集合回路基板51の製造工程(工程1)を示したもの
である。1枚の集合回路基板51にアノード及びカソー
ド電極となる電極パターン52,53と、スルーホール
54を形成する。前記集合回路基板51は、ガラスエポ
キシ等の樹脂製の基板で、サイズは約80mm×60m
m四方で厚さ0.3mmである。前記スルーホール54
は長溝状に形成され、前記集合回路基板51の表面に、
一定の間隔をおいて平行に設けられる。電極パターン5
2,53は、前記スルーホール54から分岐するような
形でマトリックス状に配され、一方のアノード側の電極
パターン52に1個のバンプ40aが、他方のカソード
側の電極パターン53に3個のバンプ40b〜40dが
それぞれ形成される。なお、前記バンプ40b〜40d
のうち、40bはカソード側の電極パターン53と電気
的導通が図られ、残りのバンプ40c及び40dも電極
と導通する接合用のダミーバンプである。これらスルー
ホール54及び電極パターン52,53はエッチングあ
るいは蒸着法によって形成される。1枚の集合回路基板
51に設けられる一対の電極パターン52,53の数
は、最大800個程度である。
Next, the manufacturing process of the surface-mounted light-emitting diode 20 having the above configuration will be described with reference to a series of process diagrams of FIG. 4 and individual process diagrams of FIGS. As shown in FIG. 4, the surface-mounted type light emitting diode 20 is formed as an integrated circuit board (step 1), flip-chip mounted (step 2),
It is manufactured through a series of manufacturing steps of wavelength conversion substrate formation (step 3), resin molding / curing (step 4), and cutting / division (step 5). Next, individual manufacturing steps will be described. FIG.
Shows a manufacturing process (process 1) of the collective circuit board 51. Electrode patterns 52 and 53 serving as anode and cathode electrodes and a through hole 54 are formed on one integrated circuit board 51. The collective circuit board 51 is a board made of a resin such as glass epoxy and has a size of about 80 mm × 60 m.
It is 0.3 mm thick with m squares. The through hole 54
Is formed in a long groove shape, and on the surface of the collective circuit board 51,
They are provided in parallel at regular intervals. Electrode pattern 5
2 and 53 are arranged in a matrix so as to be branched from the through hole 54, and one bump 40a is provided on one anode-side electrode pattern 52 and three bumps 40a are provided on the other cathode-side electrode pattern 53. The bumps 40b to 40d are respectively formed. The bumps 40b to 40d
Among them, 40b is a dummy bump for electrical connection with the electrode pattern 53 on the cathode side, and the remaining bumps 40c and 40d are also electrically connected to the electrodes. These through holes 54 and electrode patterns 52 and 53 are formed by etching or vapor deposition. The number of the pair of electrode patterns 52 and 53 provided on one integrated circuit board 51 is about 800 at the maximum.

【0022】図6は前記形成された電極パターン52,
53のバンプ40a〜40d上に窒化ガリウム系化合物
半導体の発光層27が設けられた素子基板22をフリッ
プチップ実装する工程(工程2)を示したものである。
前記バンプ40a〜40dは金(Au)を原料としたも
ので、これを加熱しながら素子基板22の上面側から超
音波で圧接することによって、電極パターン52,53
と、発光層27のp型電極26,n型電極25との導通
が図られる。図6中に示したA矢視図は一対の電極パタ
ーン52,53と発光層27の下面側の接合部を集合回
路基板51の上方からみたものである。発光層27の下
面には前記図6に示したような小四角形状のp型電極パ
ッド41とL字形状のn型電極パッド42があり、それ
ぞれの電極パッド41,42にp型電極26、n型電極
25が形成されている。そして、アノード側の電極パタ
ーン52にはp型電極26がバンプ40aを介して接合
され、カソード側の電極パターン53にはn型電極25
がバンプ40b,40c,40dを介して接合され導通
が図られる。なお、前述したように、バンプ40c,4
0dは接合用のダミーバンプである。
FIG. 6 shows the formed electrode patterns 52,
This shows a step (step 2) of flip-chip mounting the element substrate 22 provided with the gallium nitride-based compound semiconductor light emitting layer 27 on the 53 bumps 40a to 40d.
The bumps 40a to 40d are made of gold (Au) as a raw material. The bumps 40a to 40d are pressed by ultrasonic waves from the upper surface side of the element substrate 22 while being heated, thereby forming the electrode patterns 52, 53.
And the p-type electrode 26 and the n-type electrode 25 of the light emitting layer 27 are electrically connected. 6 is a view of the joint between the pair of electrode patterns 52 and 53 and the lower surface side of the light emitting layer 27 as viewed from above the integrated circuit board 51. On the lower surface of the light emitting layer 27, there are a small square p-type electrode pad 41 and an L-shaped n-type electrode pad 42 as shown in FIG. An n-type electrode 25 is formed. The p-type electrode 26 is bonded to the anode-side electrode pattern 52 via the bump 40a, and the n-type electrode 25 is connected to the cathode-side electrode pattern 53.
Are connected via the bumps 40b, 40c, and 40d to achieve conduction. As described above, the bumps 40c, 4c
0d is a dummy bump for bonding.

【0023】次に、図7に示したように前記フリップチ
ップ実装された窒化ガリウム系化合物半導体の素子基板
22の上面に透明接着剤を塗布した後、予め所定の厚み
にスライスした波長変換基板28を接合して一体化させ
る(工程3)。この工程によって、発光素子チップ21
が完成する。
Next, as shown in FIG. 7, a transparent adhesive is applied to the upper surface of the gallium nitride-based compound semiconductor device substrate 22 mounted on the flip chip, and then the wavelength conversion substrate 28 previously sliced to a predetermined thickness. (Step 3). By this step, the light emitting element chip 21
Is completed.

【0024】続いて図8に示したように、前記発光素子
チップ21が形成された集合回路基板51のスルーホー
ル54に沿った部分のみをマスクする金型55を装着す
る。そして、前記装着された金型55内の発光素子チッ
プ21全体を封止するようにして集合回路基板51全面
に無色透明の樹脂56を充填する。その後、充填した樹
脂56を光照射や熱処理により硬化させるキュアリング
を行う(工程4)。
Subsequently, as shown in FIG. 8, a mold 55 for masking only a portion along the through hole 54 of the collective circuit board 51 on which the light emitting element chips 21 are formed is mounted. Then, a colorless and transparent resin 56 is filled over the entire surface of the collective circuit board 51 so as to seal the entire light emitting element chip 21 in the mounted mold 55. Thereafter, curing is performed to cure the filled resin 56 by light irradiation or heat treatment (step 4).

【0025】最後に図9に示したように、前記キュアリ
ングして硬化した樹脂56から金型55を取り外す。そ
して、スルーホール54と直交するY軸(Y1,Y2,
…Yn)方向に沿って、単個の発光ダイオードごとに集
合回路基板51を切断する(工程5)。このような一連
の工程を経て、前記図2に示したような一つひとつの発
光ダイオード20が完成する。実装する場合は、前記図
3に示したように、マザーボード36に形成されたプリ
ント配線37,38上に載置し、半田39で接続され
る。
Finally, as shown in FIG. 9, the mold 55 is removed from the cured and cured resin 56. Then, the Y axis (Y1, Y2,
.. Yn), the collective circuit board 51 is cut for each single light emitting diode (step 5). Through such a series of steps, each light emitting diode 20 as shown in FIG. 2 is completed. In the case of mounting, as shown in FIG. 3, they are mounted on printed wirings 37 and 38 formed on a motherboard 36 and connected by solder 39.

【0026】上述の実施形態に係る発光ダイオードによ
れば、バンプを用いたフリップチップ実装タイプの表面
実装型発光ダイオードとして光学特性的に最適であり、
量産性にも優れた構造である。これに対して、光学特性
及び量産性は劣るが、発光素子チップ21と回路基板3
1上の一対の電極パターン52,53をボンディングワ
イヤによって接続する場合においても、本発明に係る発
光ダイオードは適用可能である。
According to the light emitting diode according to the above-described embodiment, it is optimal in terms of optical characteristics as a flip-chip mounting type surface mounting light emitting diode using bumps.
The structure is also excellent in mass production. On the other hand, the light-emitting element chip 21 and the circuit board 3
The light emitting diode according to the present invention can be applied to a case where the pair of electrode patterns 52 and 53 on the first electrode are connected by a bonding wire.

【0027】[0027]

【発明の効果】以上説明したように、本発明に係る発光
ダイオードによれば、波長変換基板を形成するセレン化
亜鉛系化合物半導体を素子基板の発光面に直接に接着固
定したので、従来の蛍光材を分散して形成された波長変
換基板に比べて発光輝度のバラツキや色調むらが起きる
ことなく、均一な白色発光を得ることができる。
As described above, according to the light emitting diode of the present invention, the zinc selenide-based compound semiconductor forming the wavelength conversion substrate is directly bonded and fixed to the light emitting surface of the element substrate. Uniform white light emission can be obtained without variations in light emission luminance and uneven color tone as compared with a wavelength conversion substrate formed by dispersing materials.

【0028】また、前記波長変換基板の形成が、スライ
スしたセレン化亜鉛系化合物半導体を透明接着剤で接合
するだけであるので、発光ダイオードの製造工数及びコ
ストの簡略化が図られる。
Further, since the formation of the wavelength conversion substrate is performed only by bonding the sliced zinc selenide-based compound semiconductor with a transparent adhesive, the manufacturing steps and cost of the light emitting diode can be simplified.

【0029】さらに、スライスするセレン化亜鉛系化合
物半導体の厚さを適宜調整することで、様々な明るさ及
び色調を有する発光ダイオードの製造が可能となった。
Further, by appropriately adjusting the thickness of the zinc selenide-based compound semiconductor to be sliced, it becomes possible to manufacture light emitting diodes having various brightness and color tones.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る表面実装型発光ダイオードを構成
する発光素子チップの断面図である。
FIG. 1 is a cross-sectional view of a light emitting element chip constituting a surface mounted light emitting diode according to the present invention.

【図2】上記表面実装型発光ダイオードの斜視図であ
る。
FIG. 2 is a perspective view of the surface mounted light emitting diode.

【図3】上記表面実装型発光ダイオードをマザーボード
に実装したときの断面図である。
FIG. 3 is a cross-sectional view when the surface-mount type light emitting diode is mounted on a motherboard.

【図4】上記表面実装型発光ダイオードの一連の製造工
程を示す工程図である。
FIG. 4 is a process chart showing a series of manufacturing steps of the surface-mounted light emitting diode.

【図5】上記表面実装型発光ダイオードを集合回路基板
で製造する際の電極パターン形成の工程図である。
FIG. 5 is a process chart of forming an electrode pattern when manufacturing the surface-mounted light-emitting diode on a collective circuit board.

【図6】上記集合回路基板上に発光層を有する素子基板
を載置する工程図である。
FIG. 6 is a process chart for mounting an element substrate having a light emitting layer on the collective circuit substrate.

【図7】上記搭載した素子基板上に波長変換基板を接合
する工程図である。
FIG. 7 is a process chart for bonding a wavelength conversion substrate on the mounted element substrate.

【図8】上記集合回路基板上の発光素子チップを樹脂封
止体で封止し、キュアリングする工程図である。
FIG. 8 is a process diagram in which a light emitting element chip on the collective circuit board is sealed with a resin sealing body and cured.

【図9】上記樹脂封止体で封止した集合回路基板をY方
向の切断ラインに沿って分割する工程図である。
FIG. 9 is a process diagram of dividing the collective circuit board sealed with the resin sealing body along a cutting line in the Y direction.

【図10】従来における波長変換型の発光ダイオードの
一例を示す断面図である。
FIG. 10 is a cross-sectional view showing an example of a conventional wavelength conversion type light emitting diode.

【符号の説明】[Explanation of symbols]

21 発光素子チップ 22 素子基板 23 n型半導体 24 p型半導体 25 n型電極 26 p型電極 27 発光層 28 波長変換基板 31 回路基板 32,33 外部接続用電極 Reference Signs List 21 light-emitting element chip 22 element substrate 23 n-type semiconductor 24 p-type semiconductor 25 n-type electrode 26 p-type electrode 27 light-emitting layer 28 wavelength conversion substrate 31 circuit board 32, 33 external connection electrode

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 素子基板をサファイアガラスで構成し、
その表面に発光層と電極が形成されてなる窒化ガリウム
系化合物半導体において、 前記素子基板の裏面にセレン化亜鉛系化合物半導体で形
成された波長変換基板を接着固定した発光素子チップを
備えてなることを特徴とする表面実装型発光ダイオー
ド。
1. An element substrate comprising sapphire glass,
A gallium nitride-based compound semiconductor having a light-emitting layer and an electrode formed on the surface thereof, comprising a light-emitting device chip in which a wavelength conversion substrate formed of a zinc selenide-based compound semiconductor is bonded and fixed to the back surface of the device substrate. A surface-mount type light emitting diode characterized by the following.
【請求項2】 前記発光素子チップが上下逆にして回路
基板上に載置され、該発光素子チップの電極を回路基板
にバンプを介して接続すると共に、前記発光素子チップ
を回路基板面に樹脂封止したことを特徴とする請求項1
記載の表面実装型発光ダイオード。
2. The light emitting element chip is mounted on a circuit board with the light emitting element chip turned upside down, electrodes of the light emitting element chip are connected to the circuit board via bumps, and the light emitting element chip is mounted on a circuit board surface with a resin. 2. A sealed structure according to claim 1.
A surface-mounted light emitting diode as described.
【請求項3】 集合回路基板に長溝状のスルーホール
と、該スルーホールに繋がる電極パターンをマトリック
ス状に形成する工程と、 サファイアガラスで構成された素子基板の表面に発光層
と電極が形成された窒化ガリウム系化合物半導体を上下
逆にして前記電極パターン上に載置し、該電極と電極パ
ターンとをバンプを介して電気的に接続する工程と、 前記集合回路基板に載置された窒化ガリウム系化合物半
導体の素子基板の上面にセレン化亜鉛系化合物半導体で
形成された波長変換基板を接着固定して発光素子チップ
集合体を形成する工程と、 前記集合回路基板上に金型を配し、この金型内に樹脂を
充填して発光素子チップ集合体を封止する工程と、 前記樹脂をキュアリングした後、単個の発光ダイオード
ごとに集合回路基板を分割する工程とを備えたことを特
徴とする表面実装型発光ダイオードの製造方法。
3. A process of forming a long groove-shaped through-hole in a collective circuit board and an electrode pattern connected to the through-hole in a matrix, wherein a light-emitting layer and an electrode are formed on a surface of an element substrate made of sapphire glass. Placing the gallium nitride-based compound semiconductor upside down on the electrode pattern and electrically connecting the electrode and the electrode pattern via bumps; and gallium nitride placed on the collective circuit board. Forming a light-emitting element chip assembly by bonding and fixing a wavelength conversion substrate formed of a zinc selenide-based compound semiconductor on the upper surface of an element substrate of a system compound semiconductor; and disposing a mold on the assembly circuit substrate, Filling the mold with a resin to seal the light emitting element chip assembly; and, after curing the resin, dividing the collective circuit board into single light emitting diodes. Method for producing a surface-mount-type light-emitting diode, characterized in that a step.
JP2000279076A 2000-09-14 2000-09-14 Surface-mounted light emitting diode and its manufacturing method Pending JP2002094123A (en)

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Publication Number Publication Date
JP2002094123A true JP2002094123A (en) 2002-03-29

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Country Status (1)

Country Link
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