JP2011235216A - Method for decomposing and treating fluorine-based gas by means of zeolite - Google Patents

Abstract

In a conventional rotary kiln method or catalytic cracking method, which is a detoxification method for alternative chlorofluorocarbon gas, a secondary treatment of the decomposed product after the decomposition is separately required.
At high temperature, a fluorine-containing gas is brought into contact with a zeolite having calcium as a cationic species to decompose, and the decomposition product is adsorbed on the zeolite. The fluorine-based gas can be applied fluorocarbon gas _(C n _{F l)} or fluorinated hydrocarbon gas _{(C n} H m _{F l)} is. The zeolite preferably has a pore diameter of 0.5 nm or more, and particularly preferably a faujasite type zeolite.
[Selection] Figure 1

Description

  The present invention relates to a method for bringing a fluorine-based gas into contact with zeolite and performing a decomposition treatment.

  The main cause of global warming is the release of greenhouse gases such as carbon dioxide, methane-based gas, and chlorofluorocarbon into the atmosphere. Freon gas, which is one of these greenhouse gases, is roughly classified into specific chlorofluorocarbon (CFC) composed of carbon, fluorine, and chlorine and alternative chlorofluorocarbon (HFC) that does not contain chlorine. It has been elucidated that chlorine atoms released by decomposition destroy the ozone layer, and production has already been discontinued in developed countries. Therefore, the use of alternative chlorofluorocarbon as a substance that does not contain chlorine and does not destroy the ozone layer. Has increased.

  However, since substitute CFCs themselves have a global warming potential (GWP) that is several thousand to tens of thousands times that of carbon dioxide, in Japan, used CFCs are recovered and converted into harmless substances. It is obliged to process.

  The detoxification methods of alternative chlorofluorocarbon gas that are currently in practical use include the rotary kiln method in which pyrolysis is performed by heating to a high temperature in a firing furnace, or an alkaline earth metal or alkali metal metal compound and the alternative chlorofluorocarbon gas are allowed to react with each other Thus, a method of converting to metal fluoride is known (see Patent Documents 1 and 2).

Japanese Patent Laid-Open No. 10-277363 JP 2005-52724 A

  The conventional rotary kiln method, which is a detoxification method for alternative chlorofluorocarbons, requires secondary treatment because of the generation of corrosive gases such as hydrogen fluoride, and secondary treatment of decomposition products is also required by the treatment method using catalytic cracking reaction. Met.

  In view of the technical background described above, the present invention focuses on the fact that a specific zeolite has a high decomposition characteristic with respect to a fluorine-based gas, and an object thereof is to provide a method for decomposing fluorine-based gas with zeolite.

  That is, this invention has the structure as described in following [1]-[6].

  [1] A method for decomposing a fluorine-containing gas, comprising decomposing the fluorine-containing gas by contacting it with zeolite having calcium as a cationic species at a high temperature and adsorbing the decomposition product to the zeolite.

  [2] The method for decomposing a fluorine-based gas as described in 1 above, wherein the decomposing treatment is performed in the presence of water.

[3] The fluorine-based gas cracking process of the fluorine-containing gas according to item 1 or 2 is a fluorocarbon gas _(C n _{F l)} or fluorinated hydrocarbon gas _{(C n H m F l)} .

  [4] The method for decomposing a fluorine-based gas according to any one of items 1 to 3, wherein the zeolite has a pore diameter of 0.5 nm or more.

  [5] The method for decomposing fluorine-containing gas according to any one of items 1 to 4, wherein the zeolite is a faujasite type.

  [6] A method for decomposing a fluorine-based gas, wherein the zeolite used in the method according to any one of items 1 to 5 is washed, calcined, and reused.

  In the method of the present invention described in [1] above, the fluorine-based gas is decomposed by contacting the zeolite containing calcium with the fluorine-based gas as a cationic species at a high temperature, and the decomposition product is adsorbed on the zeolite. The treatment can be performed without dissipating the decomposition products.

  According to the invention described in [2] above, the main fluorine-based gas can be decomposed.

According to the embodiment described in the above [3], fluorocarbon gas _(C n _{F l)} or fluorinated hydrocarbon gas _{(C n} H m _{F l)} is _{HF, C, CO 2, SiF} 4, H 2 O Of these decomposition products, HF, C, and SiF ₄ are adsorbed on the zeolite.

  According to the invention described in [4] above, by using a zeolite having a pore size of 0.5 nm or more as a zeolite having calcium as a cation species, particularly high resolution can be obtained for a fluorine-based gas. .

  According to the invention described in [5] above, by using a faujasite type zeolite as a zeolite having calcium as a cation species, particularly high resolution can be obtained for a fluorine-based gas.

  According to the invention described in [6] above, the fluorine-based gas can be decomposed by washing, firing and reusing the zeolite used in any of the methods 1 to 5 above.

It is a schematic diagram which shows the structure of the flow-type decomposition processing apparatus used for implementation of the decomposition processing method of the fluorine-type gas of this invention. It is a graph which shows the relationship between the decomposition | disassembly rate by the zeolite of HFC-134a, and the distribution time of to-be-processed gas. Is a graph showing the relation between flow time of the decomposition rate and the treated gas by the SiO ₂ and _Al 2 _{O 3} of HFC-134a. It is a graph which shows the relationship between the adsorption rate by the zeolite of HFC-134a, and the distribution time of to-be-processed gas.

The present invention has found that in a zeolite in which SiO ₂ and Al ₂ O ₃ having calcium as a cation species form a three-dimensional structure, a fluorine-based gas can be decomposed at a high temperature and a decomposition product can be adsorbed on the zeolite. The present invention has been completed.

  The method of the present invention will be described in detail below.

  The method of the present invention is a method for decomposing a fluorine-based gas, comprising decomposing a fluorine-based gas by contacting it with a zeolite having calcium as a cation species at a high temperature and adsorbing the decomposition product to the zeolite. is there.

  Zeolite is a crystalline hydrous aluminosilicate containing an alkali metal ion or alkaline earth metal as a cation species, and the general formula of the chemical composition is represented by the following formula (A1). It is essential that zeolite has calcium as a cationic species.

(M ^I , M ^II _1/2 ) _m [Al _m Si _{(m + n)} O _{2 (m + n)} ] · xH ₂ O (A1)
However, n ≧ m
M ^I : Li ⁺ , Na ⁺ , K ⁺ etc.
M ^II : Ca ²⁺ , Mg ²⁺ , Ba ²⁺ , Sr ²⁺ etc.

  The resolution for the fluorine-based gas varies depending on the cation species of the zeolite, but the zeolite having calcium as the cation species has a particularly high resolution.

  Calcium as the cation species is preferably 60% or more of the cation in the ion exchange site, and particularly preferably 90% or more. The resolution increases as the calcium content approaches 100%. However, if the calcium content exceeds 95%, no significant improvement in resolution can be obtained.

The skeleton of the zeolite is formed in a form having pores by three-dimensionally combining the structures of Si—O—Al—O—Si, and cations (M ^I , M ^II) for canceling negative charges at the ion exchange site. And has crystal water in the pores of the skeleton. In addition, various types of skeletons such as A type and faujasite type are formed by a three-dimensional combination.

Zeolite has the characteristic that the space constituting the pores is extremely large and the specific surface area is very large, and further, the ion exchange capacity that allows cations (M ^I , M ^II ) of the ion exchange sites to be reversibly exchanged with other cations, The zeolite itself has properties such as catalytic ability to act as a catalyst and adsorption ability to adsorb a substance in the pores.

  Zeolite adsorbs fluorine-based gas by incorporating fluorine-based gas molecules into the pores of the framework, and decomposes the adsorbed molecules. The larger the pore diameter of the fluorine-based gas molecule, the easier it is to be taken into the skeleton and the higher the resolution. From this viewpoint, the pore diameter of the zeolite is preferably 0.5 nm or more, particularly preferably 0.7 nm or more, and more preferably 0.9 nm or more. Accordingly, the type of skeleton is preferably a type having a large pore diameter, and the faujasite type is particularly preferable.

  The zeolite used in the method of the present invention can be used in either a powder form or a molded body. As the shape of the molded body, a cylindrical shape, a spherical shape, an elliptical shape, a ring shape, or the like can be used, and the size is preferably 0.1 to 5 mm as a diameter converted into a spherical volume. In addition, the molded body may contain a binder component such as silica, alumina, clay mineral, etc., but in order to increase the decomposition efficiency of the fluorine-based gas, the binderless molded body in which the binder component is zeoliticized. Is preferably used.

  In the method of the present invention, a fluorine-containing gas is brought into contact with zeolite having calcium as a cationic species at a high temperature.

  When a mixed fluid containing a fluorinated gas is brought into contact with zeolite at room temperature, the fluorinated gas can be adsorbed in the pores of the zeolite skeleton. However, in such a treatment, the fluorine-based gas is removed from the mixed fluid, but the adsorbed fluorine-based gas exists in the pores of the zeolite without being decomposed. Next processing is required. On the other hand, when a mixed fluid containing a fluorine-based gas is brought into contact with zeolite at a high temperature, the fluorine-based gas adsorbed on the zeolite is decomposed by the catalytic ability of the zeolite, and the decomposition product is further adsorbed on the zeolite. Thus, the treatment can be performed without dissipating the decomposition products containing fluorine atoms.

In the present invention, under high temperature, the temperature is preferably 623 to 1073K, and particularly preferably 623 to 823K. If it is less than 623K, the decomposition of the fluorine-based gas adsorbed on the zeolite is insufficient. On the other hand, sufficient resolution is obtained for a fluorine-based gas as long as 823 K, better resolution for persistent fluorine-based gas such as CF ₄ can be obtained if the 1073 K. On the other hand, a high temperature exceeding that is not only disadvantageous in terms of energy cost, but also shortens the lifetime of the zeolite. A particularly preferred reaction temperature is 673-823K.

The fluorine-based gas is decomposed in the present invention, for example, can be exemplified a fluorocarbon gas _(C n _{F l)} or fluorinated hydrocarbon gas _{(C n H m F l)} , in particular _CF 4, _{C 2} Examples thereof include F ₆ , CH ₂ F ₂ , C ₂ HF ₅ , C ₂ H ₂ F ₄ , C ₂ H ₃ F ₃ , C ₂ H ₄ F ₂ , and C ₃ H ₄ F ₄ .

  The zeolite used for the decomposition treatment of the fluorine-based gas in the method of the present invention can be reused repeatedly.

  The zeolite adsorbed with the fluorine compound by the method of the present invention can be reused for the decomposition and removal of the fluorine-based gas by calcination to remove carbon.

Carbon in the decomposition product adsorbed on the zeolite can be removed from the zeolite as CO ₂ . The baking temperature may be a temperature at which a reaction of C + O ₂ → CO ₂ occurs, and for example, a range of 973 to 1273K is preferable.

  Fluorine in the decomposition product adsorbed on the zeolite can be recovered by washing the used zeolite with a cleaning solution that dissolves the fluorine compound, and eluting the fluorine compound adsorbed on the zeolite. The cleaning liquid is not particularly limited as long as it can dissolve the fluorine compound, but alkali or acid can be appropriately used. For example, it does not contain fluorine such as ammonium water, sodium hydroxide, hydrochloric acid, sulfuric acid, nitric acid. Mention may be made of alkalis or acids. In the cleaning, a cleaning solution that can be eluted in a short time is preferable, and it is particularly preferable to use an acid as the cleaning solution.

  The chemical reaction between the fluorinated gas and the zeolite in the method of the present invention will be described for each specific fluorinated gas.

When HFC-134a (C ₂ H ₂ F ₄ ), which is a kind of fluorinated hydrocarbon gas (C _n H _m F _l ), is brought into contact with zeolite under high temperature, the following (F1) (F2 ) And (F3) are considered to progress.

C ₂ H ₂ F ₄ + H ₂ O → 4HF + 3 / 2C + 1 / 2CO ₂ (F1)
4HF + SiO ₂ → SiF ₄ + 2H ₂ O (F2)
6HF + Al ₂ O ₃ → 2AlF ₃ + 3H ₂ O (F3)

Here, H ₂ O involved in the decomposition reaction of HFC-134a gas, and H ₂ O and O ₂ involved in the decomposition reaction of other fluorine-based gases described later are treated gases (fluorine-based gas to be decomposed, carrier gas). This is caused by the components contained in a trace amount in the nitrogen gas) and the water remaining in the framework without being dehydrated from the zeolite during the temperature rising process.

As shown in the formula (F1), HFC-134a in contact with the zeolite is decomposed into HF (hydrogen fluoride), C (carbon), and CO ₂ (carbon dioxide) by the catalytic action of the zeolite. A portion of HF which is decomposition product, when generating a SiO ₂ (silicon oxide) and (F2) SiF ₄ (silicon tetrafluoride) causing the reaction shown in the formula and _{H 2} O is a skeleton component of the zeolite Conceivable. In addition, since the reactivity of Al ₂ O ₃ (aluminum oxide), which is another framework component of zeolite, and HF is lower than that of SiO ₂ , it is considered that the reaction of the formula (F3) hardly occurs. Therefore, when HFC-134a is brought into contact with zeolite at a high temperature, a reaction of the formula (F1) occurs, and a part of the reaction of the formula (F2) occurs, and decomposition products such as HF, C, CO ₂ , SiF ₄ , H ₂ O is produced. HF, SiF ₄ , and C are adsorbed on the zeolite, and other decomposition products CO ₂ and H ₂ O are discharged without being adsorbed.

When the fluorocarbon gas (C _n F _{2n + 2} ) and other fluorinated hydrocarbon gases (C _n H _m F _l ) are decomposed, as shown in the following formulas (F4) to (F7), HF and C Or further CO ₂ or H ₂ O is formed.

Decomposition of the fluorocarbon gas (C _n F _{2n + 2} ) is as shown in the following formula (F4).

C _n F _{2n + 2} + 2nH ₂ O → (2n + 2) HF + nCO ₂ (F4)

The decomposition of the fluorinated hydrocarbon gas _{(C n H m F l)} , n, m, the reaction of the following three depending on the number of l.

(i) When m <l (l = 2n−m + 2), C _n H _m F _l +1/2 (l−m) H ₂ O
→ lHF + 1/4 (4n−1 + m) C + 1/4 (1−m) CO ₂ (F5)
(ii) When m> l, C _n H _m F _l +1/2 (l−m) O ₂ → lHF + nC + 1/2 (l−m) H ₂ O (F6)
(iii) When m = 1, C _n H _m F _l → lHF + nC (F7)

It is considered that the HF produced by the above formulas (F4) to (F7) mainly produces SiF ₄ and H ₂ O by reaction with SiO ₂ shown in the formula (F2). On the other hand, at a particularly high temperature, the produced HF produces CaF ₂ and H ₂ O by the reaction of calcium in the zeolite and the formula (F8).

2HF + Ca (OH) ⁺ → CaF ₂ + H ₂ O + H ⁺ (F8)

In these cases, as in the decomposition treatment of HFC-134a, the produced HF, SiF ₄ , CaF ₂ and C are adsorbed on the zeolite, and CO ₂ and H ₂ O are discharged without being adsorbed.

  FIG. 1 schematically shows the configuration of a flow-type decomposition treatment apparatus which is an example of an apparatus for carrying out the fluorine-based gas decomposition treatment method of the present invention.

In the flow-type decomposition treatment apparatus (1), (10) is a cylindrical reaction vessel and is disposed in the heater (11). The reaction vessel (10) is filled with a powdery decomposition treatment agent in a gas-flowable state, and the temperature of the filled decomposition treatment agent is monitored by a thermocouple (not shown) and a temperature control device. By controlling the heater (11) in (12), it is heated to the set reaction temperature. The flow rate of the fluorine-based gas is adjusted together with nitrogen gas (N ₂ ) by the mass flow controller (20), and is fed into the introduction pipe (16) as a mixed gas to be processed, while passing through the preheater (13). After being preheated to the set reaction temperature, the reaction vessel (10) is introduced into the reaction vessel (10) through the inlet (14) at the lower end. The gas to be treated comes into contact with the decomposition treatment agent while passing through the reaction vessel (10), the fluorine-based gas is decomposed, and is sent out as a processed gas from the upper outlet (15). The treated gas sent from the reaction vessel (10) to the delivery pipe (17) is collected at any time from a sampling port (18) provided in the middle of the delivery pipe (17) and analyzed by a gas chromatograph or the like. Fluorine gas concentration is monitored. (21) is an inlet for fluorine gas, and (22) is an inlet for nitrogen gas, and the flow rates of these gases are independently controlled. The temperature of the preheater (13) is controlled by the temperature control device (12).

  A method for decomposing fluorine-based gas in the above-described flow-type decomposition apparatus (1) will be described.

  First, the reaction vessel (10) is filled with a decomposition treatment agent, zeolite (or a decomposition treatment agent to be compared), and nitrogen gas is introduced from the introduction pipe (16) to make the system a non-oxidizing atmosphere. Set the inside of the heater (11) to a temperature suitable for the reaction by (12). Next, fluorine gas and nitrogen gas are introduced into the introduction pipe (16) as predetermined gases at a predetermined flow rate, heated to the reaction temperature by the preheater (13), and introduced into the reaction vessel (10). While the gas to be treated passes through the reaction vessel (10), the fluorine-based gas and the decomposition treatment agent come into contact with each other. The system gas is decomposed. The treated mixed gas is appropriately collected from the collection port (18) on the delivery pipe (17), and the treated gas is subjected to qualitative analysis and quantitative analysis by a gas chromatograph or the like.

  If the analysis result of the treated gas confirms that the unreacted fluorine-based gas has been decomposed to a reference value or less, the treated gas is released into the atmosphere. Moreover, when the fluorine-type gas exceeding a reference value exists according to the analysis result, unreacted fluorine-type gas is collect | recovered and it decomposes | disassembles again.

  Note that the fluorine-based gas decomposition treatment method of the present invention is not limited to a flow type in which a fluorine-based gas is circulated in a reaction vessel to continuously perform a catalytic reaction. It can also be carried out by a batch-type decomposition treatment in which a reactant and a fluorine-based gas are brought into contact in a sealed reaction vessel.

(Example)
A decomposition experiment of HFC-134a was performed using the above-described flow-type decomposition apparatus.

As the zeolite, five types (manufactured by Tosoh Corporation) having different skeleton types, cationic species, SiO ₂ / Al ₂ O ₃ ratio, and pore diameters were used. The characteristics are shown in Table 1. Each zeolite used was activated by dehydration at 550 ° C.

Further, SiO ₂ and Al ₂ O ₃ which are skeleton components of zeolite were used as a control decomposition agent for control.

  1, the reaction vessel (10) is a cylindrical body having an inner diameter of 50 mm × height of 181 mm and a capacity of 355.4 ml. HFC-134a was introduced into the introduction pipe (16) as a gas to be treated together with nitrogen gas at a predetermined flow rate, and continuously brought into contact with the decomposition treatment agent filled in the reaction vessel (10) and heated to a predetermined temperature. The treated gas, which has been decomposed while passing through the reaction vessel (10), is collected from the collection port (18) on the delivery pipe (17) at regular intervals and analyzed by gas chromatography, and the HFC before and after the reaction is collected. The concentration of HFC-134a was calculated from the peak area of −134a using the one-inspection curve method, and the decomposition rate was calculated by the following formula.

Decomposition rate (%) = [1- (C _F / C _I )] × 100
C _F : concentration of HFC-134a in the treated gas C _I : concentration of HFC-134a in the gas to be treated

The treatment conditions are the same for each decomposition treatment agent. Each reaction vessel (10) is filled with 20 g of the decomposition treatment agent, the flow rate of HFC-134a is 10 cm ³ / min, and the N ₂ gas flow rate is 50 cm ³ / min. The decomposition treatment was performed at a reaction temperature of 823 K for 120 minutes or until the decrease in the decomposition rate became significant.

Of the decomposition products in the decomposition reaction due to the contact between HFC-134a and each zeolite, HF, C, and SiF ₄ remain in the reaction vessel (10) while adsorbed on the zeolite, and H ₂ O is nitrogen as a treated gas. It is discharged with gas. FIG. 2 shows the relationship between the decomposition rate of HFC-134a with five types of zeolite and the flow time of the gas to be treated.

  Table 2 shows the decomposition reaction and decomposition products of HFC-134a.

  As shown in FIG. 2, in zeolites 1 to 3 having Ca as a cation species, the zeolite 4 having a main cation species of Li and the cation species have a higher resolution and higher resolution than the zeolite 5 having only Na. there were.

  Comparing the three types of Ca cation type zeolites 1 to 3 with each other, zeolites 2 and 3 having a skeleton of faujasite type and a large pore diameter have a particularly higher resolution than zeolite 1 having a skeleton type and a small pore diameter. it was high.

Further, although the zeolite 2 and zeolite 3 in _{which SiO} 2 / _Al 2 _{O 3} ratios are different, had a comparable resolution.

  All the zeolites after the decomposition treatment were blackish, and it was possible to confirm the formation of C as a decomposition product. In particular, the Ca cation type zeolites 1 to 3 are darker black than the Li cation type zeolite 4 and the Na cation type zeolite 5, suggesting that the amount of C produced is large, and is shown in FIG. 2. It was consistent with the resolution results.

  Further, each of the zeolites before and after the decomposition treatment was quantitatively analyzed for eight elements of Si, Al, F, Ca, K, Na, and Mg using a fluorescent X-ray analyzer. The decomposition-processed zeolite to be analyzed contains fluorine which is a decomposition product of HFC-134a. Table 3 shows the fluorine element content in terms of atom%, where the total of 8 elements is 100%.

  From Table 3, it was confirmed that F that was not contained in the zeolite before the decomposition treatment was contained in the zeolite after the decomposition treatment, and that the zeolite had captured F.

Among the five types of zeolites listed in Table 1, the adsorption rate at 298 K was examined for the Ca cation type zeolites 1 to 3 using the flow decomposition apparatus. Each of the reaction vessels (10) is filled with 20 g of zeolite, the flow rate of HFC-134a is set to 10 cm ³ / min, the flow rate of N ₂ gas is set to 50 cm ³ / min, and the adsorption temperature (zeolite temperature) is set to 298K. The gas to be treated was circulated for 120 minutes for adsorption treatment. As with the decomposition rate, the adsorption rate is calculated by analyzing the processed gas collected from the sampling port (18) on the delivery pipe (17) at regular intervals using a gas chromatograph, and from the peak area of HFC-134a before and after adsorption. The HFC-134a concentration was calculated using the one-inspection curve method.

Adsorption rate (%) = [1- (C _F / C _I )] × 100
C _F : concentration of HFC-134a in the treated gas C _I : concentration of HFC-134a in the gas to be treated

  FIG. 4 shows the change in adsorption rate. As shown in FIG. 4, zeolites 2 and 3 maintained a high adsorption rate, but zeolite 1 having no calcium as a cation species had a low adsorption rate from the initial stage.

(Comparative example)
When SiO ₂ is used as the decomposition treatment agent, a reaction based on the following formula (F9) proceeds, and solid C in the decomposition products remains in the reaction vessel (10), and gaseous SiF ₄ , H ₂ O and CO ₂ were discharged together with nitrogen gas as a treated gas.

2C ₂ H ₂ F ₄ + 2SiO ₂ → 2SiF ₄ + 3C + 2H ₂ O + CO ₂ (F9)

When Al ₂ O ₃ is used as the decomposition treatment agent, the reaction proceeds based on the following formula (F10), solid AlF ₃ and C remain in the reaction vessel (10), and gaseous H ₂ O It was discharged with nitrogen gas as a treated gas.

3C ₂ H ₂ F ₄ + 4Al ₂ O ₃ → 4AlF ₃ + 6C + 2H ₂ O (F10)

FIG. 3 shows the relationship between the decomposition rate of HFC-134a with SiO ₂ and Al ₂ O ₃ and the flow time of the gas to be treated.

Comparing the time lapse of the decomposition rate with five types of zeolite (FIG. 2) and the time lapse of the decomposition rate with SiO ₂ and Al ₂ O ₃ which are the framework components of the zeolite (FIG. 3), SiO ₂ and Al ₂ O ₃ Each has a very low resolution with respect to HFC-134a, but the zeolite in which they form a three-dimensional structure shows a high resolution with respect to HFC-134a, confirming the usefulness of the zeolite.

  The present invention can be used for the decomposition treatment of fluorine-based gas such as HFC-134a which is a global warming gas.

1 ... Distribution-type disassembly treatment device
10 ... Reaction vessel
11 ... Heater
12 ... Temperature control device
13… Preheater
16 ... Introduction pipe
17 ... Delivery pipe
21 ... HFC-134a inlet
22… Nitrogen gas inlet

Claims (6)

  A method for decomposing a fluorine-containing gas, comprising decomposing a fluorine-containing gas by contacting it with a zeolite having calcium as a cationic species at a high temperature and adsorbing the decomposition product to the zeolite.   The fluorine gas decomposition method according to claim 1, wherein the decomposition treatment is performed in the presence of water. Cracking process of the fluorine gas is fluorine gas as claimed in claim 1 or 2 is a fluorocarbon gas (C n _{F l)} or fluorinated hydrocarbon gas _{(C n H m F l)} .   The method for decomposing a fluorine-based gas according to any one of claims 1 to 3, wherein the zeolite has a pore diameter of 0.5 nm or more.   The method for decomposing a fluorine-based gas according to any one of claims 1 to 4, wherein the zeolite is of a faujasite type.   A method for decomposing a fluorine-based gas, wherein the zeolite used in the method according to any one of claims 1 to 5 is washed, calcined and reused.

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