JP2008236818A - thetaZ ACTUATOR - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a θZ actuator for realizing exact rotating operation and rectilinear operation with a single actuator having a simple structure. <P>SOLUTION: The θZ actuator comprises a mover 200 equipped with a permanent magnet 203 as a field magnet or iron teeth, and a stator 100 equipped with a θ-axis armature winding 102 for generating rotary magnetic field in a rotary θ-axis direction and a Z-axis armature winding 103 for generating a progress magnetic field in a rectilinear Z-axis direction, wherein current is applied to the θ-axis armature winding 102 and the Z-axis armature winding 103, and a torque is generated in a θ-axis direction and a thrust force is generated in the Z-axis direction to execute the rotation operation and the rectilinear operation of the mover 200. In the θZ actuator, a hollow core portion of the θ-axis armature winding 102 is used as a crossover processing space 110a of the θ-axis armature winding 102 and the Z-axis armature winding 103. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a θZ actuator that precisely performs two motions, rotation and rectilinear movement.

As a conventional θZ actuator, there is disclosed an actuator in which armature windings of a rotary motor and a linear motor are concentrically overlapped to generate a torque and a thrust directly on an output shaft to perform a rotation operation and a linear motion operation (for example, (Patent Literature 1, Patent Literature 2)
8 is a cross-sectional view taken along the line AA, and FIG. 9 is a cross-sectional view taken along the arrow B.
The stator 100 includes a hollow motor frame 101, a θ-axis armature winding 102, a Z-axis armature winding 103, an L-side rotary ball spline 104, an anti-L-side rotary ball spline 105, an L-side bracket 106, and an anti-L side. It is comprised from the bracket 107 grade | etc.,. Inside the hollow motor frame 101, a θ-axis armature winding 102 is provided on the concentric outer circumference side, and a Z-axis armature winding 103 is provided on the inner circumference side. An L-side bracket 106 is provided on the load side end surface of the motor frame 101, an anti-L side bracket 107 is provided on the non-load side end surface, and an L-side rotary ball spline 104 and an anti-L side rotary ball spline 105 are provided on each. A motor terminal for supplying power (not shown) is provided on the outer periphery of the motor frame 101.
The connecting line of the θ-axis armature winding 102 and the Z-axis armature winding 103 on the inner peripheral side is a connecting line processing space 110C that extends between adjacent θ-axis forming coils and θ-axis forming coils shown in FIG. The motor frame 101 is connected to the motor frame 101 through a crossing processing space 110b secured by processing or the like.

  On the other hand, the mover 200 includes an output shaft 201, a field yoke 202, a permanent magnet 203, and the like. A field yoke 202 and a permanent magnet 203 are concentrically provided on the outer periphery of the output shaft 201 at a position opposite to the θ-axis armature winding 102 and the Z-axis armature winding 103. In 201, it is supported by the L-side rotary ball spline 104 and the non-L-side rotary ball spline 105, and can freely move in the θ-axis direction and the Z-axis direction.

The θZ actuator configured as described above generates torque in the mover 200 due to the action of the magnetic field generated by the permanent magnet 203 by passing a current through the θ-axis armature winding 102, and the current is supplied to the Z-axis armature winding. By flowing through the wire 103, a thrust is generated in the mover 200 by the action of the magnetic field created by the permanent magnet 203. In this way, the mover 200 realizes the operations in both directions of rotation and straight movement.
JP 2004-343903 A JP 2005-20885 A

The θZ actuator is mainly used for a chip mounter head, a probe of a mounting board inspection device, and the like. In many cases, a plurality of θZ actuators are used rather than one. Assuming the mounting of electronic components, etc., the mounting density has increased, and it has been demanded that the mounting intervals of mounter heads and inspection probes be narrowed. Further, since the mounting density has been increased, the mounter head and the inspection probe have been required to operate at high speed. In order to solve such a demand, a θZ actuator having a small outer dimension and a high torque is required.
However, the conventional θZ actuator has the following problems.
When connecting a plurality of θ-axis forming coils and a plurality of Z-axis forming coils, when using the connecting line processing space 110C that is between adjacent θ-axis forming coils and θ-axis forming coils shown in FIG. In order to secure the space, it is necessary to reduce the size of the θ-axis forming coil in the width direction, which causes a problem that the volume occupied by the coil decreases and the torque of the θ-axis cannot be increased.
Further, when connecting the plurality of θ-axis forming coils and the plurality of Z-axis forming coils, when the crossover processing space 110b secured by processing or the like is used for the motor frame 101, the motor frame is formed asymmetrically. For this reason, the magnetic path becomes unbalanced, and the magnetic characteristics are deteriorated. When such a magnetic field is formed, problems such as torque unevenness and the generated torque itself are reduced. In addition, when trying to secure a predetermined thickness of the frame, there has been a problem that the outer dimensions are increased.
The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a θZ actuator that realizes a precise rotation operation and a straight-ahead operation with a single actuator with a simple structure.

In order to solve the above problem, the present invention is configured as follows.
According to the first aspect of the present invention, a mover having a permanent magnet or iron core teeth as a magnetic field, a θ-axis armature winding that generates a rotating magnetic field in the rotating θ-axis direction, and a traveling magnetic field in the straight Z-axis direction are provided. And a stator having a Z-axis armature winding that is generated, and a current is passed through the θ-axis armature winding and the Z-axis armature winding to generate torque in the θ-axis direction. In a θZ actuator that generates a thrust in a direction to perform a rotation operation and a straight movement operation of the mover, an air core portion of the θ-axis armature winding is connected to the θ-axis armature winding and the Z-axis armature winding. This is a crossover processing space.
According to a second aspect of the present invention, the θ-axis armature winding is arranged on either the inner peripheral surface or the outer peripheral surface with respect to the Z-axis winding.
According to a third aspect of the present invention, the longitudinal length of the air core portion of the θ-axis armature winding is longer than the longitudinal length of the Z-axis armature winding.
According to a fourth aspect of the present invention, the θ-axis armature winding is disposed on an inner peripheral surface with respect to the Z-axis armature winding, and the air-core portion of the θ-axis armature winding The length in the longitudinal direction is longer than the length in the longitudinal direction of the Z-axis armature winding.
The invention according to claim 5 is characterized in that the θ-axis armature winding is disposed on the outer peripheral surface with respect to the Z-axis armature winding, and the longitudinal direction of the air core portion of the θ-axis armature winding. The length in the direction is longer than the length in the longitudinal direction of the Z-axis armature winding.
According to a sixth aspect of the present invention, the Z-axis armature winding is subjected to a crossover process at the air core portion of the θ-axis armature winding, and the winding start and winding of the θ-axis armature winding are performed. The last two cables are drawn in the same direction.
According to a seventh aspect of the invention, the two cables are drawn from a gap between the Z-axis armature winding and the θ-axis armature winding.

According to the first to seventh aspects of the present invention, it is not necessary to narrow the size of the θ-axis forming coil in the width direction for the purpose of securing a connecting line processing space in the θZ actuator. The torque value of the θ axis can be increased. In other words, it can be downsized with the same torque value. Also, by selecting to place the θ-axis armature winding on either the inner or outer peripheral surface of the Z-axis armature winding, select to increase either the rotational torque or thrust Is possible.
In addition, since it is not necessary to perform complicated processing or the like on the motor frame for the purpose of securing a wiring processing space, it is possible to provide a θZ actuator with a small magnetic property unbalance amount.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1 of the first embodiment of the present invention is a front view, FIG. 2 is a cross-sectional view taken along the line AA, and FIG. Constituent elements of the present invention that are the same as those of the prior art will be described with the same reference numerals. The stator 100 includes a hollow motor frame 101, a θ-axis armature winding 102, a Z-axis armature winding 103, an L-side rotary ball spline 104, an anti-L-side rotary ball spline 105, an L-side bracket 106, and an anti-L side. It is comprised from the bracket 107 grade | etc.,. Inside the hollow motor frame 101, a θ-axis armature winding 102 is provided on the concentric outer circumference side, and a Z-axis armature winding 103 is provided on the inner circumference side. An L-side bracket 106 is provided on the load side end surface of the motor frame 101, an anti-L side bracket 107 is provided on the non-load side end surface, and an L-side rotary ball spline 104 and an anti-L side rotary ball spline 105 are provided on each. A motor terminal for supplying power (not shown) is provided on the outer periphery of the motor frame 101.
FIG. 4 shows a θ-axis armature winding connection diagram, and FIG. 5 shows a Z-axis armature winding connection diagram. The θ-axis armature winding 102 is composed of a plurality of θ-axis forming coils and is connected as shown in FIG. 4 and is connected to a motor terminal for power supply (not shown). The Z-axis armature winding 103 is composed of a plurality of Z-axis forming coils and is connected as shown in FIG. 5 and is connected to a power supply motor terminal (not shown). A plurality of θ-axis forming coils and a plurality of Z-axis forming coils are connected as shown in FIGS. 4 and 5, respectively, and the air core portions of the plurality of θ-axis forming coils shown in FIG. 6 are connected as a connecting line processing space 110a. Has been. For example, the U1 and U2 crossover lines 160 are processed in the crossover processing space 110a, the U1 winding start line 161 and the U2 winding end line 162 are drawn out in one direction, and the θ-axis armature winding 102 and the Z-axis electric machine Terminal processing is performed from the gap between the child windings 103. Further, the length in the Z-axis direction of the θ-axis armature winding 102 disposed on the outer periphery is greater than the length in the Z-axis direction of the Z-axis armature winding 103 disposed on the inner periphery of the θ-axis armature winding 102. It is made sufficiently long to secure the dimensions L1 and L2 shown in FIG. 1, and the terminal processing is performed using the clearance.
The detector 150 includes a detector frame 151, a θ-axis detection head 152, a Z-axis detection head 153, and the like. A θ-axis detection head 152 and a Z-axis detection head 153 are provided side by side on the detector frame 151.

  On the other hand, the mover 200 includes an output shaft 201, a field yoke 202, a permanent magnet 203, a θ-axis scale 251, a Z-axis scale 252 and the like. A field yoke 202 and a permanent magnet 203 are provided concentrically on the outer periphery of the output shaft 201 at a position facing the θ-axis armature winding 102 and the Z-axis armature winding 103, and the θ-axis detection head 152, Z A θ-axis scale 251 and a Z-axis scale 252 are provided side by side on the outer periphery of the output shaft 201 at a position facing the axis detection head 153. The mover 200 is supported on the output shaft 201 by the L-side rotary ball spline 104 and the anti-L-side rotary ball spline 105, and can move freely in the θ-axis direction and the Z-axis direction.

  The θZ actuator configured in this manner generates torque in the mover 200 due to the action of the magnetic field generated by the permanent magnet 203 by flowing a current through the θ-axis armature winding 102, and also transmits the current to the Z-axis armature winding. By flowing through the wire 103, a thrust is generated in the mover 200 by the action of the magnetic field created by the permanent magnet 203. In this manner, the mover 200 realizes both rotational and straight movements.

The second embodiment of the present invention will be described by extracting only the differences from the first embodiment.
As shown in FIG. 7, the length in the Z-axis direction of the θ-axis armature winding arranged on the inner circumference is the length of the Z-axis armature winding arranged in the outer circumference of the θ-axis armature winding. The crossover process is performed by making use of the clearance in the Z-axis direction of both armature windings.

With the configuration of the present invention, it is not necessary to reduce the size of the θ-axis forming coil in the width direction for the purpose of securing a connecting line processing space in the θZ actuator. It can be enlarged. In other words, it can be downsized with the same torque value. Further, since it is not necessary to perform complicated processing or the like on the motor frame for the purpose of securing the wiring processing space, it is possible to provide a θZ actuator that is relatively inexpensive and has a small unbalanced magnetic property.
In addition, when the θ-axis armature winding is arranged on either the inner peripheral surface or the outer peripheral surface of the Z-axis armature winding, and the rotation torque is to be increased, the θ-axis armature winding is If you want to reduce the magnetic path length and increase the thrust by placing it on the inner peripheral surface of the shaft armature winding, place the θ-axis armature winding on the outer peripheral surface of the Z-axis armature winding. The magnetic path length between the Z-axis armature winding and the mover is shortened.

  The present invention can provide a θZ actuator that realizes a precise rotational operation and straight-ahead operation with a single actuator. Therefore, the present invention can be applied to applications such as a mounter head of a chip mounter device that requires two-degree-of-freedom movement of θZ and an inspection head of various inspection devices.

AA sectional view of an embodiment of the present invention Front view of the embodiment of the present invention B sectional view of the embodiment of the present invention Θ-axis armature winding connection diagram of the embodiment of the present invention Z-axis armature winding connection diagram of the embodiment of the present invention Schematic diagram of armature winding of an embodiment of the present invention Sectional view of the second embodiment of the present invention AA sectional view of the prior art Cross-sectional view of prior art arrow B

Explanation of symbols

100 Stator 101 Motor frame 102 θ-axis armature winding 103 Z-axis armature winding 104 L-side rotary ball spline 105 Anti-L-side rotary ball spline 106 L-side bracket 107 Anti-L-side brackets 110a, 110b, 110c Space 150 Detector 151 Detector frame 152 θ-axis detection head 153 Z-axis detection head 200 Movable element 201 Output shaft 202 Field yoke 203 Permanent magnet 251 θ-axis scale 252 Z-axis scale

Claims (7)

A mover having a permanent magnet or iron core teeth as a field, a θ-axis armature winding that generates a rotating magnetic field in the rotating θ-axis direction, and a Z-axis armature winding that generates a traveling magnetic field in the straight Z-axis direction And a movable current by passing a current through the θ-axis armature winding and the Z-axis armature winding to generate torque in the θ-axis direction and thrust in the Z-axis direction. In the θZ actuator that performs rotation and straight movement of the child,
An θZ actuator characterized in that the air-core portion of the θ-axis armature winding is used as a crossover processing space for the θ-axis armature winding and the Z-axis armature winding.   The θZ actuator according to claim 1, wherein the θ-axis armature winding is disposed on either the inner peripheral surface or the outer peripheral surface with respect to the Z-axis winding.   2. The θZ actuator according to claim 1, wherein a length in a longitudinal direction of the air core portion of the θ-axis armature winding is longer than a length in a longitudinal direction of the Z-axis armature winding.   The θ-axis armature winding is disposed on the inner peripheral surface with respect to the Z-axis armature winding, and the length in the longitudinal direction of the air core portion of the θ-axis armature winding is the Z-axis armature. The θZ actuator according to claim 1, wherein the θZ actuator is longer than a length in a longitudinal direction of the winding.   The θ-axis armature winding is disposed on the outer peripheral surface with respect to the Z-axis armature winding, and the length in the longitudinal direction of the air core portion of the θ-axis armature winding is the Z-axis armature winding. The θZ actuator according to claim 1, wherein the θZ actuator is longer than a length in a longitudinal direction of the line.   The Z-axis armature winding is subjected to a crossover process at the air core portion of the θ-axis armature winding, and the two cables at the start and end of winding of the θ-axis armature winding are pulled out in the same direction. The θZ actuator according to claim 1, wherein:   5. The θZ actuator according to claim 4, wherein the two cables are led out from a gap between the Z-axis armature winding and the θ-axis armature winding.

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