JP2011142725A

JP2011142725A - thetaZ ACTUATOR

Info

Publication number: JP2011142725A
Application number: JP2010001256A
Authority: JP
Inventors: Toru Shikayama; 透鹿山; Shogo Makino; 省吾牧野; Yoichiro Dan; 洋一郎壇; Yoshiaki Kubota; 義昭久保田
Original assignee: Yaskawa Electric Corp
Current assignee: Yaskawa Electric Corp
Priority date: 2010-01-06
Filing date: 2010-01-06
Publication date: 2011-07-21
Anticipated expiration: 2030-01-06
Also published as: JP5454150B2

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flat θZ actuator by reducing a height of a stator. <P>SOLUTION: The θZ actuator includes a θ-axis armature winding making a rotating field in the direction of rotation θ in a stator and a Z-axis armature winding making a traveling magnetic field in the direction (the axial direction of rotation θ) of direct action Z, and also includes a permanent magnet working as a field magnet in a mover. The θ-axis armature winding is composed of plural straw bag-shaped θ-axis coils arranged in the direction θ, and also the Z-axis armature winding is composed of plural cylindrical Z-axis coils arranged in the direction Z. The θZ actuator is structured to meet Lα<LZ, where the length in the direction Z of an air core provided inside the θ-axis coil is Lα and the length in the direction Z of the Z-axis armature winding is LZ. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、半導体、電子部品、液晶ガラス基板などの製造装置や検査装置などの回転θ方向と直動Ｚ方向（回転θの軸方向）の位置決めを行うθＺアクチュエータに関する。 The present invention relates to a θZ actuator that positions a rotation θ direction and a linear motion Z direction (axial direction of the rotation θ) of a manufacturing apparatus or an inspection apparatus such as a semiconductor, an electronic component, or a liquid crystal glass substrate.

従来のθＺアクチュエータとして、固定子に電機子コア、θ軸電機子巻線、Ｚ軸電機子巻線を備え、電機子コアに設けたθ方向とＺ方向のスロットにθ軸電機子巻線とＺ軸電機子巻線を配置して構成したものがある。また、θ軸電機子巻線を複数個の楕円環状のθ軸コイルで構成し、Ｚ軸電機子巻線を複数個の円筒状のＺ軸コイルで構成し、Ｚ軸コイルを結線する渡り線をθ軸コイルの空心に配置したものがある。以下、従来技術のθＺアクチュエータについて説明する。
図１１は従来技術におけるθＺアクチュエータの側面から見た断面図、図１２と図１３は図１１におけるＡ−Ａ断面図とＢ−Ｂ断面図である。また、図１４はＺ軸電機子巻線の渡り線の配置を示す巻線展開図、図１５は側面から見た固定子の断面拡大図である。図において、１００が固定子、１０１がＺ軸電機子巻線、１０２がθ軸電機子巻線、１０３が電機子コア、２００が可動子、２０１が界磁ヨーク、２０２ｓが磁極表面をＳ極とする永久磁石、２０２ｎが磁極表面をＮ極とする永久磁石、１１１〜１１６がＺ軸コイル、１２１〜１２３がθ軸コイル、１３１〜１３３が渡り線である。
従来技術のθＺアクチュエータは、外周側に固定子１００、内周側に可動子２００が配置され、可動子２００が固定子１００に対し、θ方向とＺ方向の両方向に移動するものである。ここで、可動子２００は固定子１００に対しθ方向とＺ方向の両方向に支持案内されるとともに、θ方向の角度とＺ方向の位置がエンコーダ等のセンサにより検出される。なお、それら構成要素については、図示を省略している。可動子２００は、界磁ヨーク２０１の外周表面の上側に永久磁石２０２ｓ、下側に永久磁石２０２ｎが配置され構成されている。永久磁石２０２ｓと永久磁石２０２ｎは各個数が２０個であり、Ｚ方向にずれて配置されるとともに、θ方向にもずれて配置されている。このように配置されることで、Ｚ方向に２極、θ方向に４０極の磁極を形成している。
一方、固定子１００は、永久磁石２０２ｓ、２０２ｎと空隙を介して、内周側からＺ軸電機子巻線１０１、θ軸電機子巻線１０２、電機子コア１０３が配置され構成されている。ここで、Ｚ軸電機子巻線１０１、θ軸電機子巻線１０２、電機子コア１０３は、各間に所定の絶縁層を挟み、モールド樹脂（図示なし）によって一体に固定されている。図１４に示すように、Ｚ軸電機子巻線１０１は６種類の円筒状のＺ軸コイル１１１〜１１６をＺ方向に９個並べて三相巻線を構成し、その相順は下からＵ（１１１）、Ｗ（１１２、１１５と巻方向が逆）、Ｖ（１１３）、Ｕ（１１４、１１１と巻方向が逆）、Ｗ（１１５）、Ｖ（１１６、１１３と巻方向が逆）、Ｕ（１１１）、Ｗ（１１２）、Ｖ（１１３）となっている。Ｚ軸コイル１１１〜１１６の間隔は電気角６０度であるため、３個分のＺ方向長さが永久磁石２０２ｓと永久磁石２０２ｎの間隔（電気角１８０度）と一致している。θ軸電機子巻線１０２は、３種類の楕円環状のθ軸コイル１２１〜１２３をθ方向に３０個並べて三相巻線を構成し、その相順は＋θ方向に沿ってＵ（１２１）、Ｗ（１２２）、Ｖ（１２３）、Ｕ（１２１）、Ｗ（１２２）、Ｖ（１２３）、・・・となっている。θ軸コイル１２１〜１２３の間隔は電気角２４０度であるため、３個分のθ方向角度が永久磁石２０２ｓと永久磁石２０２ｎの間隔の４倍（電気角７２０度）と一致している。
また、Ｚ軸コイル１１１〜１１６の同相同士のコイルを結線する渡り線１３１〜１３３は、図１４に示すようにθ軸コイル１２１〜１２３の空心部に配置され、図１５に示すようにＺ軸コイル１１１〜１１６の下方に引き出されるように配置されている。このように渡り線１３１〜１３３が引き出されることで、Ｚ軸電機子巻線１０１のＺ方向長さ（Ｚ軸コイル１１１〜１１６のＺ方向長さの総和）をＬＺ、θ軸コイル１２１〜１２３の空心部のＺ方向長さをＬαとした場合、ＬＺ＜Ｌαの関係になるように寸法が決定されている。
このように構成されたθＺアクチュエータは、θ軸電機子巻線１０２に三相交流電流を通電すると回転磁界が発生し、Ｚ軸電機子巻線１０１に三相交流電流を通電すると進行磁界が発生する。それら磁界と可動子２００の磁極との電磁作用によって、可動子２００はθ方向にトルク、Ｚ方向に推力を発生し、両方向に移動することができる。
また、Ｚ軸コイル１１１〜１１６の渡り線１３１〜１３３をθ軸コイル１１１〜１１６の空心部に配置しているので、Ｚ軸コイル１１１〜１１６とθ軸コイル１１１〜１１６との間に渡り線を通すための隙間を設けることが不要な構造となっている。つまり、余計な隙間を径方向に設ける必要がなく、θＺアクチュエータを小径化することができる。 As a conventional θZ actuator, the stator includes an armature core, a θ-axis armature winding, and a Z-axis armature winding, and a θ-axis armature winding is provided in the θ-direction and Z-direction slots provided in the armature core. There is a configuration in which a Z-axis armature winding is arranged. Further, the θ-axis armature winding is constituted by a plurality of elliptical θ-axis coils, the Z-axis armature winding is constituted by a plurality of cylindrical Z-axis coils, and the connecting wire connecting the Z-axis coils. Are arranged in the air core of the θ-axis coil. Hereinafter, a conventional θZ actuator will be described.
FIG. 11 is a cross-sectional view seen from the side of the θZ actuator in the prior art, and FIGS. 12 and 13 are cross-sectional views taken along the lines AA and BB in FIG. FIG. 14 is a winding development view showing the arrangement of the jumper wires of the Z-axis armature winding, and FIG. 15 is an enlarged sectional view of the stator as viewed from the side. In the figure, 100 is a stator, 101 is a Z-axis armature winding, 102 is a θ-axis armature winding, 103 is an armature core, 200 is a mover, 201 is a field yoke, and 202s is an S pole. The permanent magnet 202n is a permanent magnet having the N pole as the magnetic pole surface, 111 to 116 are Z-axis coils, 121 to 123 are θ-axis coils, and 131 to 133 are crossover wires.
In a conventional θZ actuator, a stator 100 is disposed on the outer peripheral side and a mover 200 is disposed on the inner peripheral side, and the mover 200 moves relative to the stator 100 in both the θ direction and the Z direction. Here, the mover 200 is supported and guided with respect to the stator 100 in both the θ direction and the Z direction, and the angle in the θ direction and the position in the Z direction are detected by a sensor such as an encoder. Note that illustration of these components is omitted. The mover 200 is configured by arranging a permanent magnet 202 s on the upper side of the outer peripheral surface of the field yoke 201 and a permanent magnet 202 n on the lower side. The number of the permanent magnets 202s and the number of permanent magnets 202n is 20, and they are displaced in the Z direction and are also displaced in the θ direction. With this arrangement, two magnetic poles are formed in the Z direction and 40 magnetic poles are formed in the θ direction.
On the other hand, the stator 100 is configured by arranging a Z-axis armature winding 101, a θ-axis armature winding 102, and an armature core 103 from the inner peripheral side through permanent magnets 202s and 202n and a gap. Here, the Z-axis armature winding 101, the θ-axis armature winding 102, and the armature core 103 are integrally fixed with a mold resin (not shown) with a predetermined insulating layer interposed therebetween. As shown in FIG. 14, the Z-axis armature winding 101 includes nine types of cylindrical Z-axis coils 111 to 116 arranged in the Z direction to form a three-phase winding, and the phase sequence is U ( 111), W (the winding direction is opposite to 112, 115), V (113), U (the winding direction is opposite to 114, 111), W (115), V (the winding direction is opposite to 116, 113), U (111), W (112), and V (113). Since the Z-axis coils 111 to 116 have an electrical angle of 60 degrees, the three Z-direction lengths coincide with the distance between the permanent magnet 202s and the permanent magnet 202n (electrical angle 180 degrees). The θ-axis armature winding 102 comprises three types of elliptical annular θ-axis coils 121 to 123 arranged in the θ direction to form a three-phase winding, and the phase sequence is U (121) along the + θ direction. W (122), V (123), U (121), W (122), V (123), and so on. Since the interval between the θ-axis coils 121 to 123 is an electrical angle of 240 degrees, the three θ-direction angles coincide with four times the interval between the permanent magnet 202s and the permanent magnet 202n (electrical angle 720 degrees).
Moreover, the connecting wires 131-133 which connect the coils of the same phase of the Z-axis coils 111-116 are arranged in the air cores of the θ-axis coils 121-123 as shown in FIG. It arrange | positions so that it may pull out below the axial coils 111-116. Thus, the connecting wires 131 to 133 are drawn out, so that the Z-direction length of the Z-axis armature winding 101 (the sum of the Z-direction lengths of the Z-axis coils 111 to 116) is LZ and the θ-axis coils 121 to 123. The dimension is determined so that LZ <Lα.
The thus configured θZ actuator generates a rotating magnetic field when a three-phase alternating current is applied to the θ-axis armature winding 102, and a traveling magnetic field is generated when a three-phase alternating current is applied to the Z-axis armature winding 101. To do. Due to the electromagnetic action of these magnetic fields and the magnetic poles of the mover 200, the mover 200 generates torque in the θ direction and thrust in the Z direction, and can move in both directions.
Moreover, since the crossover wires 131-133 of the Z-axis coils 111-116 are arranged in the air core part of the θ-axis coils 111-116, the crossover wires are provided between the Z-axis coils 111-116 and the θ-axis coils 111-116. It is a structure that does not need to provide a gap for passing through. That is, it is not necessary to provide an extra gap in the radial direction, and the θZ actuator can be reduced in diameter.

特開２００５−２０８８５号公報（第３−５頁、図１）Japanese Patent Laying-Open No. 2005-20885 (page 3-5, FIG. 1) 特開２００８−２３６８１８号公報（第３−５頁、図２）JP 2008-236818 A (page 3-5, FIG. 2)

しかしながら、従来のθＺアクチュエータには以下のような問題があった。
Ｚ軸コイルを結線する渡り線をθ軸コイルの空心部に通して下方に引き出すために、θ軸コイルの空心部のＺ方向長さＬαを長くする必要があった。そのため、Ｚ軸電機子巻線のＺ方向長さＬＺとの関係をＬＺ＜Ｌαにしなければならず、ＬＺよりもθ軸電機子巻線のＺ方向長さ（図１５中のＬθであり、Ｚ軸コイルのＺ方向長さと同じ）をかなり長くしなければならなかった。その結果、固定子の高さが大きくなってしまった。偏平なθＺアクチュエータを要求される用途では、固定子の高さをできるだけ小さくしなければならないため、特にこの問題が顕著に現れた。
本発明はこのような問題点に鑑みてなされたものであり、固定子の高さを小さくし、偏平にすることができるθＺアクチュエータを提供することを目的とする。 However, the conventional θZ actuator has the following problems.
In order to pass the connecting wire connecting the Z-axis coil through the air core portion of the θ-axis coil and pulling it downward, it is necessary to increase the Z-direction length Lα of the air-core portion of the θ-axis coil. Therefore, the relationship with the Z-direction length LZ of the Z-axis armature winding must be LZ <Lα, and the Z-direction length of the θ-axis armature winding (Lθ in FIG. The length of the Z-axis coil (which is the same as the length in the Z direction) had to be considerably long. As a result, the height of the stator has increased. In applications that require a flat θZ actuator, this problem is particularly noticeable because the height of the stator must be made as small as possible.
The present invention has been made in view of such problems, and an object of the present invention is to provide a θZ actuator that can reduce the height of the stator and make it flat.

上記問題を解決するため、本発明は、次のように構成したのである。
請求項１に記載の発明は、固定子に回転θ方向の回転磁界を作るθ軸電機子巻線と回転θの軸方向である直動Ｚ方向に進行磁界を作るＺ軸電機子巻線を備えるとともに、可動子に界磁とする永久磁石を備え、前記θ軸電機子巻線がθ方向に複数個並べられたθ軸コイルにより構成されるとともに、前記Ｚ軸電機子巻線がＺ方向に複数個並べられた円筒状のＺ軸コイルにより構成され、前記可動子が前記固定子に対してθ方向とＺ方向の両方向に相対的に移動するθＺアクチュエータにおいて、前記θ軸コイルの内側に設けた空心部のＺ方向長さをＬα、前記Ｚ軸電機子巻線のＺ方向長さをＬＺとした場合、
Ｌα ＜ＬＺ
となるように構成した。
請求項２に記載の発明によると、前記固定子に円筒状の電機子コアを設けるとともに、
前記θ軸電機子巻線のＺ方向長さをＬθ、前記電機子コアのＺ方向長さをＬＣとした場合、ＬθとＬＣが等しい長さとなるように構成した。
請求項３に記載の発明によると、ＬＺとＬθが等しい長さとなるように構成した。
請求項４に記載の発明によると、複数の前記Ｚ軸コイルを結線する渡り線を、前記θ軸コイル間に配置した。
請求項５に記載の発明によると、前記θ軸電機子巻線の内径をＤ、前記θ軸コイルの断面形状の曲率半径をＲとした場合、
Ｒ＜Ｄ／２
になるように前記θ軸コイルを形成するとともに、前記Ｚ軸コイルと前記θ軸コイルの間に、複数の前記Ｚ軸コイルを結線する渡り線を配置した。
請求項６に記載の発明によると、前記θ軸コイルの断面形状を内径側に窪みを有する形状に形成するとともに、前記Ｚ軸コイルと前記θ軸コイルの間の前記窪みに、複数の前記Ｚ軸コイルを結線する渡り線を配置した。
請求項７に記載の発明によると、前記θ軸コイルの断面形状を平板状に形成するとともに、前記Ｚ軸コイルと前記θ軸コイルの間に、複数の前記Ｚ軸コイルを結線する渡り線を配置した。
請求項８に記載の発明によると、前記θ軸電機子巻線に電流を供給するθ軸リード線と、前記Ｚ軸電機子巻線に電流を供給するＺ軸リード線を、一本のケーブルにまとめた。
なお、「等しい長さ」とは、数学的な厳密な意味ではなく、「ほぼ等しい長さ」を含むものである。 In order to solve the above problem, the present invention is configured as follows.
The invention described in claim 1 includes a θ-axis armature winding that creates a rotating magnetic field in the rotation θ direction on the stator and a Z-axis armature winding that generates a traveling magnetic field in the linear Z direction that is the axial direction of the rotation θ. A permanent magnet as a field magnet is provided in the mover, and a plurality of the θ-axis armature windings are arranged in the θ direction, and the Z-axis armature windings are in the Z direction. In a θZ actuator in which a plurality of cylindrical Z-axis coils are arranged in parallel, and the mover moves relative to the stator in both the θ-direction and the Z-direction, When the length in the Z direction of the provided air core is Lα, and the length in the Z direction of the Z-axis armature winding is LZ,
Lα <LZ
It comprised so that it might become.
According to invention of Claim 2, while providing the cylindrical armature core in the said stator,
When the length of the θ-axis armature winding in the Z direction is Lθ and the length of the armature core in the Z direction is LC, Lθ and LC are equal in length.
According to the third aspect of the present invention, LZ and Lθ are configured to have the same length.
According to a fourth aspect of the present invention, the connecting wires connecting the plurality of Z-axis coils are arranged between the θ-axis coils.
According to the invention of claim 5, when the inner diameter of the θ-axis armature winding is D and the radius of curvature of the cross-sectional shape of the θ-axis coil is R,
R <D / 2
The θ-axis coil is formed so that a crossover wire connecting the plurality of Z-axis coils is disposed between the Z-axis coil and the θ-axis coil.
According to a sixth aspect of the present invention, the cross-sectional shape of the θ-axis coil is formed into a shape having a depression on the inner diameter side, and a plurality of the Z-axis coils are formed in the depression between the Z-axis coil and the θ-axis coil. A crossover for connecting the axial coil was arranged.
According to the invention described in claim 7, the cross-sectional shape of the θ-axis coil is formed in a flat plate shape, and the connecting wire connecting the plurality of Z-axis coils between the Z-axis coil and the θ-axis coil. Arranged.
According to the invention described in claim 8, the θ-axis lead wire for supplying current to the θ-axis armature winding and the Z-axis lead wire for supplying current to the Z-axis armature winding are provided as one cable. Summarized in
Note that “equal length” does not have an exact mathematical meaning, but includes “approximately equal length”.

請求項１に記載の発明によると、θ軸コイルの空心部のＺ方向長さＬαとＺ軸電機子巻線のＺ方向長さＬＺの関係がＬα＜ＬＺとなるように構成しているので、θ軸電機子巻線のＺ方向長さＬθを小さくすることができ、固定子の高さを小さくすることができる。よって、偏平なθＺアクチュエータを実現することができる。
請求項２に記載の発明によると、θ軸電機子巻線のＺ方向長さＬθと電機子コアのＺ方向長さＬＣがほぼ等しい長さとなるように構成しているので、電機子コアを含む固定子の高さを小さくすることができる。よって、偏平なθＺアクチュエータを実現することができる。
請求項３に記載の発明によると、ＬＺとＬθがほぼ等しい長さとなるように構成しているので、Ｚ軸電機子巻線とθ軸電機子巻線を合わせたＺ方向長さが最小となり、固定子の高さを最も小さくすることができる。よって、偏平なθＺアクチュエータを実現することができる。
請求項４に記載の発明によると、Ｚ軸コイルを結線する渡り線をθ軸コイル間に配置しているので、θ軸電機子巻線のＺ方向長さＬθを小さくすることができ、固定子の高さを小さくすることができる。よって、偏平なθＺアクチュエータを実現することができる。
請求項５に記載の発明によると、θ軸コイルの断面形状の曲率半径Ｒをθ軸電機子巻線の内径Ｄの関係がＲ＜Ｄ／２となるように構成しているので、θ軸コイルとＺ軸コイルとの間に空間が生まれ、そこにＺ軸コイルを結線する渡り線を配置することができる。よって、θ軸電機子巻線のＺ方向長さＬθを小さくすることができ、固定子の高さを小さくすることができる。よって、偏平なθＺアクチュエータを実現することができる。
請求項６に記載の発明によると、θ軸コイルの断面形状を内径側に窪みを有する形状に形成しているので、その窪みにＺ軸コイルを結線する渡り線を配置することができる。よって、θ軸電機子巻線のＺ方向長さＬθを小さくすることができ、固定子の高さを小さくすることができる。よって、偏平なθＺアクチュエータを実現することができる。
請求項７に記載の発明によると、θ軸コイルを平板状に形成しているので、円筒状のＺ軸コイルとの間に空間が生まれ、そこにＺ軸コイルを結線する渡り線を配置することができる。よって、θ軸電機子巻線のＺ方向長さＬθを小さくすることができ、固定子の高さを小さくすることができる。よって、偏平なθＺアクチュエータを実現することができる。
請求項８に記載の発明によると、θ軸リード線とＺ軸リード線を一本のケーブルにまとめているので省配線化できる。 According to the first aspect of the present invention, since the relationship between the Z-direction length Lα of the air core portion of the θ-axis coil and the Z-direction length LZ of the Z-axis armature winding is configured to satisfy Lα <LZ. The Z-direction length Lθ of the θ-axis armature winding can be reduced, and the height of the stator can be reduced. Therefore, a flat θZ actuator can be realized.
According to the second aspect of the present invention, the Z-direction length Lθ of the θ-axis armature winding and the Z-direction length LC of the armature core are substantially equal to each other. The height of the stator including it can be made small. Therefore, a flat θZ actuator can be realized.
According to the third aspect of the present invention, since the lengths of LZ and Lθ are substantially equal, the length in the Z direction including the Z-axis armature winding and the θ-axis armature winding is minimized. The height of the stator can be minimized. Therefore, a flat θZ actuator can be realized.
According to the invention described in claim 4, since the connecting wire for connecting the Z-axis coil is disposed between the θ-axis coils, the Z-direction length Lθ of the θ-axis armature winding can be reduced and fixed. The height of the child can be reduced. Therefore, a flat θZ actuator can be realized.
According to the fifth aspect of the present invention, the radius of curvature R of the cross-sectional shape of the θ-axis coil is configured so that the relationship of the inner diameter D of the θ-axis armature winding satisfies R <D / 2. A space is created between the coil and the Z-axis coil, and a jumper connecting the Z-axis coil can be arranged there. Therefore, the Z-direction length Lθ of the θ-axis armature winding can be reduced, and the height of the stator can be reduced. Therefore, a flat θZ actuator can be realized.
According to the sixth aspect of the present invention, since the cross-sectional shape of the θ-axis coil is formed in a shape having a recess on the inner diameter side, a jumper wire for connecting the Z-axis coil can be disposed in the recess. Therefore, the Z-direction length Lθ of the θ-axis armature winding can be reduced, and the height of the stator can be reduced. Therefore, a flat θZ actuator can be realized.
According to the invention described in claim 7, since the θ-axis coil is formed in a flat plate shape, a space is created between the cylindrical Z-axis coil, and a connecting wire for connecting the Z-axis coil is disposed there. be able to. Therefore, the Z-direction length Lθ of the θ-axis armature winding can be reduced, and the height of the stator can be reduced. Therefore, a flat θZ actuator can be realized.
According to the invention described in claim 8, since the θ-axis lead wire and the Z-axis lead wire are combined into one cable, the wiring can be saved.

本発明のθＺアクチュエータの斜視図The perspective view of the θZ actuator of the present invention 本発明の第１実施例におけるθＺアクチュエータの側面から見た断面図Sectional view seen from the side of the θZ actuator in the first embodiment of the present invention 本発明の第１実施例における渡り線の配置を示す巻線展開図Winding development view showing the arrangement of the jumper wires in the first embodiment of the present invention 本発明の第１実施例における固定子の側面から見た断面拡大図The cross-sectional enlarged view seen from the side of the stator in 1st Example of this invention 本発明の第２実施例における固定子の側面から見た断面拡大図The cross-sectional enlarged view seen from the side of the stator in 2nd Example of this invention 本発明の第３実施例におけるθ軸コイルの断面形状図Cross-sectional shape diagram of the θ-axis coil in the third embodiment of the present invention 本発明の第３実施例における渡り線の配置を示す展開図Exploded view showing the arrangement of crossovers in the third embodiment of the present invention 本発明の第４実施例におけるθ軸コイルの断面形状図Cross-sectional view of the θ-axis coil in the fourth embodiment of the present invention 本発明の第５実施例におけるθ軸コイルの断面形状図Cross-sectional view of the θ-axis coil in the fifth embodiment of the present invention 本発明の第６実施例におけるケーブルの構成を示す図The figure which shows the structure of the cable in 6th Example of this invention. 従来のθＺアクチュエータの側面から見た断面図Sectional view from the side of a conventional θZ actuator 図１１におけるＡ−Ａ断面図AA sectional view in FIG. 図１１におけるＢ−Ｂ断面図BB sectional view in FIG. 従来の渡り線の配置を示す巻線展開図Winding development view showing the layout of conventional crossovers 従来の固定子の側面から見た断面拡大図Cross-sectional enlarged view seen from the side of a conventional stator

以下、本発明の実施の形態について図を参照して説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図１は本発明の第１実施例におけるθＺアクチュエータの斜視図である。図２は側面から見た断面図、図３は渡り線の配置を示す巻線展開図、図４は固定子の側面から見た断面拡大図である。これら図において構成要素はすべて従来技術と同じであるため、同一の符号を付している。なお、図１では電機子コア１０３を除いた図となっている。また、図１におけるＡ−Ａ断面、Ｂ−Ｂ断面は図１２、図１３と同じである。
本発明の特徴は、楕円環状のθ軸コイル１２１〜１２３の空心部のＺ方向長さＬαとＺ軸電機子巻線１０１のＺ方向長さＬＺの関係をＬα＜ＬＺとなるように構成し、かつ、Ｚ軸コイル１１１〜１１６を結線する渡り線１３１〜１３３を、θ軸コイル１２１〜１２３間に配置させたことである。
図１に示すように、θＺアクチュエータは外周側に固定子１００、内周側に可動子２００が配置され、可動子２００が固定子１００に対し、θ方向とＺ方向の両方向に移動するものである。可動子２００は、界磁ヨーク２０１の外周表面の上側に永久磁石２０２ｓ、下側に永久磁石２０２ｎが配置され構成されている。永久磁石２０２ｓと永久磁石２０２ｎは各個数２０個であり、Ｚ方向にずれて配置されるとともに、θ方向にもずれて配置されている。このように配置されることで、Ｚ方向に２極、θ方向に４０極の磁極を形成している。
一方、固定子１００は、永久磁石２０２ｓ、２０２ｎと空隙を介して、内周側からＺ軸電機子巻線１０１、θ軸電機子巻線１０２、電機子コア１０３が配置され構成されている。ここで、Ｚ軸電機子巻線１０１、θ軸電機子巻線１０２、電機子コア１０３は、各間に所定の絶縁層を挟み、モールド樹脂（図示なし）によって一体に固定されている。Ｚ軸電機子巻線１０１、θ軸電機子巻線１０２の詳細な構造は従来技術で示したものと同じであるため説明を省略する。以下、本発明の主要な部分となる渡り線１３１〜１３３の配置と固定子１００の断面形状について説明する。
θ軸コイル１２１〜１２３はθ方向の幅が従来技術に比べやや小さく形成されており、θ軸コイル１２１〜１２３の各間に隙間が設けられている。そして、Ｚ軸コイル１１１〜１１６の同相同士のコイルを結線する渡り線１３１〜１３３がその隙間を通るようにして配置されている。このように構成とすることで、Ｚ軸電機子巻線１０１のＺ方向長さ（Ｚ軸コイル１１１〜１１６のＺ方向長さの総和）ＬＺとθ軸コイル１２１〜１２３の空心部のＺ方向長さＬαとの関係をＬα＜ＬＺとすることができる。その結果、θ軸電機子巻線１０２のＺ方向長さ（θ軸コイルのＺ方向長さと同じ）Ｌθが従来のものに比べ小さくなっている。
また、電機子コア１０３のＺ方向長さＬＣとθ軸電機子巻線１０２のＺ方向長さＬθがほぼ等しくなるように構成されている。 FIG. 1 is a perspective view of the θZ actuator in the first embodiment of the present invention. 2 is a cross-sectional view seen from the side, FIG. 3 is an exploded view of the winding showing the arrangement of the jumper wires, and FIG. 4 is an enlarged cross-sectional view seen from the side of the stator. In these drawings, all the constituent elements are the same as those of the prior art, and are therefore given the same reference numerals. In FIG. 1, the armature core 103 is omitted. Moreover, the AA cross section and BB cross section in FIG. 1 are the same as FIG. 12, FIG.
A feature of the present invention is that the relationship between the Z-direction length Lα of the air-core portion of the elliptical θ-axis coils 121 to 123 and the Z-direction length LZ of the Z-axis armature winding 101 is Lα <LZ. In addition, the connecting wires 131 to 133 that connect the Z-axis coils 111 to 116 are arranged between the θ-axis coils 121 to 123.
As shown in FIG. 1, the θZ actuator has a stator 100 on the outer peripheral side and a mover 200 on the inner peripheral side, and the mover 200 moves relative to the stator 100 in both the θ direction and the Z direction. is there. The mover 200 is configured by arranging a permanent magnet 202 s on the upper side of the outer peripheral surface of the field yoke 201 and a permanent magnet 202 n on the lower side. The number of the permanent magnets 202s and the number of permanent magnets 202n is 20, and they are arranged shifted in the Z direction and also shifted in the θ direction. With this arrangement, two magnetic poles are formed in the Z direction and 40 magnetic poles are formed in the θ direction.
On the other hand, the stator 100 is configured by arranging a Z-axis armature winding 101, a θ-axis armature winding 102, and an armature core 103 from the inner peripheral side through permanent magnets 202s and 202n and a gap. Here, the Z-axis armature winding 101, the θ-axis armature winding 102, and the armature core 103 are integrally fixed with a mold resin (not shown) with a predetermined insulating layer interposed therebetween. Since the detailed structure of the Z-axis armature winding 101 and the θ-axis armature winding 102 is the same as that shown in the prior art, description thereof is omitted. Hereinafter, the arrangement of the crossover wires 131 to 133 and the cross-sectional shape of the stator 100 will be described.
The θ-axis coils 121 to 123 are formed so that the width in the θ direction is slightly smaller than that of the prior art, and a gap is provided between each of the θ-axis coils 121 to 123. And the connecting wires 131-133 which connect the coils of the same phase of the Z-axis coils 111-116 are arrange | positioned so that the clearance gap may be passed. With this configuration, the Z-direction length of the Z-axis armature winding 101 (the sum of the Z-direction lengths of the Z-axis coils 111 to 116) LZ and the Z-direction of the air-core portion of the θ-axis coils 121 to 123 The relationship with the length Lα can be Lα <LZ. As a result, the length of the θ-axis armature winding 102 in the Z direction (same as the length of the θ-axis coil in the Z direction) Lθ is smaller than the conventional one.
Further, the Z-direction length LC of the armature core 103 and the Z-direction length Lθ of the θ-axis armature winding 102 are configured to be substantially equal.

以上のような構成のθＺアクチュエータは、従来技術と同様、θ軸電機子巻線１０２に三相交流電流を通電すると回転磁界が発生し、Ｚ軸電機子巻線１０１に三相交流電流を通電すると進行磁界が発生する。それら磁界と可動子２００の磁極との電磁作用によって、可動子２００はθ方向にトルク、Ｚ方向に推力を発生し、両方向に移動することができる。 The θZ actuator configured as described above generates a rotating magnetic field when a three-phase alternating current is applied to the θ-axis armature winding 102, and a three-phase alternating current is applied to the Z-axis armature winding 101, as in the prior art. Then, a traveling magnetic field is generated. Due to the electromagnetic action of these magnetic fields and the magnetic poles of the mover 200, the mover 200 generates torque in the θ direction and thrust in the Z direction, and can move in both directions.

以上のような構成により、θ軸電機子巻線のＺ方向長さＬθを小さくすることができ、電機子コアを含む固定子の高さを小さくすることができる。よって、偏平なθＺアクチュエータを実現することができる。 With the above configuration, the Z-direction length Lθ of the θ-axis armature winding can be reduced, and the height of the stator including the armature core can be reduced. Therefore, a flat θZ actuator can be realized.

図５は第２実施例における固定子の側面から見た断面拡大図である。
第２実施例が第１実施例と異なる点は、Ｚ軸電機子巻線１０１のＺ方向長さＬＺとθ軸電機子巻線１０２のＺ方向長さＬθをほぼ等しい長さとなるように構成した点である。なお、Ｚ軸コイル１１１〜１１６を結線する渡り線１３１〜１３３は、実施例１と同じ配置となっている。 FIG. 5 is an enlarged cross-sectional view seen from the side of the stator in the second embodiment.
The second embodiment differs from the first embodiment in that the Z-direction length LZ of the Z-axis armature winding 101 and the Z-direction length Lθ of the θ-axis armature winding 102 are substantially equal. This is the point. In addition, the crossover wires 131-133 which connect the Z-axis coils 111-116 are the same arrangement | positioning as Example 1. FIG.

このような構成により、Ｚ軸電機子巻線とθ軸電機子巻線を合わせたＺ方向長さが最小となるので、固定子の高さを最も小さくすることができる。よって、偏平なθＺアクチュエータを実現することができる。 With such a configuration, the total length in the Z direction including the Z-axis armature winding and the θ-axis armature winding is minimized, so that the height of the stator can be minimized. Therefore, a flat θZ actuator can be realized.

図６は第３実施例におけるθ軸コイルの断面形状図である。図７は渡り線の配置を示す巻線展開図である。図において、１２１ａはθ軸コイルである。
第３実施例が第１〜２実施例と異なる点は、θ軸コイル１２１ａの断面形状の曲率半径Ｒを、θ軸電機子巻線１０２の内径Ｄの１／２よりも小さくなるように形成した点である。θ軸コイル１２１ａの断面形状をＲ＜Ｄ／２とすることで、θ軸コイル１２１ａとＺ軸コイル１１１〜１１６との間に空間が生まれる。その空間に、Ｚ軸コイル１１１〜１１６を結線する渡り線１３１を配置している。なお、他のθ軸コイルや渡り線も同様にして構成している。 FIG. 6 is a sectional view of the θ-axis coil in the third embodiment. FIG. 7 is a winding development view showing the arrangement of the jumper wires. In the figure, 121a is a θ-axis coil.
The third embodiment differs from the first and second embodiments in that the radius of curvature R of the cross-sectional shape of the θ-axis coil 121a is formed to be smaller than ½ of the inner diameter D of the θ-axis armature winding 102. This is the point. By setting the cross-sectional shape of the θ-axis coil 121a to R <D / 2, a space is created between the θ-axis coil 121a and the Z-axis coils 111 to 116. In the space, the crossover 131 connecting the Z-axis coils 111 to 116 is arranged. Other θ-axis coils and connecting wires are configured in the same manner.

このような構成により、θ軸コイルの空心部のＺ方向長さＬαを大きくする必要が無くなり、θ軸電機子巻線のＺ方向長さＬθとともに固定子の高さを小さくすることができる。よって、偏平なθＺアクチュエータを実現することができる。 With such a configuration, it is not necessary to increase the Z-direction length Lα of the air-core portion of the θ-axis coil, and the stator height can be reduced together with the Z-direction length Lθ of the θ-axis armature winding. Therefore, a flat θZ actuator can be realized.

図８は第４実施例におけるθ軸コイルの断面形状図である。図において、１２１ｂはθ軸コイルである。
第４実施例が第１〜３実施例と異なる点は、θ軸コイル１２１ｂの断面形状を内径側に窪みを有する形状に形成した点である。図８はθ軸コイル１２１ｂを２つの鈍角を有する形状に形成した例である。その結果、θ軸コイル１２１ｂの頂点付近とＺ軸コイル１１１〜１１６との間に空間が生まれる。その空間に、Ｚ軸コイル１１１〜１１６を結線する渡り線１３１を配置している。なお、他のθ軸コイルや渡り線も同様にして構成している。 FIG. 8 is a sectional view of the θ-axis coil in the fourth embodiment. In the figure, 121b is a θ-axis coil.
The fourth embodiment differs from the first to third embodiments in that the cross-sectional shape of the θ-axis coil 121b is formed into a shape having a depression on the inner diameter side. FIG. 8 shows an example in which the θ-axis coil 121b is formed in a shape having two obtuse angles. As a result, a space is created between the vicinity of the apex of the θ-axis coil 121b and the Z-axis coils 111 to 116. In the space, the crossover 131 connecting the Z-axis coils 111 to 116 is arranged. Other θ-axis coils and connecting wires are configured in the same manner.

図９は第５実施例におけるθ軸コイルの断面形状図である。図において、１２１ｃはθ軸コイルである。
第５実施例が第１〜４実施例と異なる点は、θ軸コイル１２１ｃの断面形状を平板状に形成した点である。θ軸コイル１２１ｃを平板状に形成したことで、その左右両側でＺ軸コイル１１１〜１１６との間に空間が生まれる。その空間に、Ｚ軸コイル１１１〜１１６を結線する渡り線１３１を配置している。なお、他のθ軸コイルや渡り線も同様にして構成している。 FIG. 9 is a sectional view of the θ-axis coil in the fifth embodiment. In the figure, 121c is a θ-axis coil.
The fifth embodiment differs from the first to fourth embodiments in that the cross-sectional shape of the θ-axis coil 121c is formed in a flat plate shape. By forming the θ-axis coil 121c in a flat plate shape, a space is created between the Z-axis coils 111 to 116 on both the left and right sides thereof. In the space, the crossover 131 connecting the Z-axis coils 111 to 116 is arranged. Other θ-axis coils and connecting wires are configured in the same manner.

図１０は第６実施例におけるケーブルの構成を示す図である。図において、１５０がＺ軸リード線、１６０がθ軸リード線、１７０がケーブルである。
Ｚ軸電機子巻線１０１は、渡り線１３１〜１３３が引き出された先でＺ軸リード線１５０と接続されている。Ｚ軸リード線１５０は、三相であるためにＵ相、Ｖ相、Ｗ相の３本で構成されている。また、θ軸リード線１６０も、三相であるためにＵ相、Ｖ相、Ｗ相の３本で構成されている。そして、Ｚ軸リード線１５０とθ軸リード線１６０は、ケーブル１７０によって一本にまとめられている。なお、必要に応じてアース線（図示なし）もケーブル１７０内に収納される。 FIG. 10 is a diagram showing the configuration of the cable in the sixth embodiment. In the figure, 150 is a Z-axis lead wire, 160 is a θ-axis lead wire, and 170 is a cable.
The Z-axis armature winding 101 is connected to the Z-axis lead wire 150 at a point where the connecting wires 131 to 133 are drawn out. Since the Z-axis lead wire 150 has three phases, the Z-axis lead wire 150 is composed of three phases, a U phase, a V phase, and a W phase. In addition, since the θ-axis lead wire 160 has three phases, the θ-axis lead wire 160 is composed of three phases of U phase, V phase, and W phase. The Z-axis lead wire 150 and the θ-axis lead wire 160 are grouped together by a cable 170. A ground wire (not shown) is also housed in the cable 170 as necessary.

このような構成により、Ｚ軸リード線とθ軸リード線のリード線を１本のケーブルにまとめているので、θＺアクチュエータを省配線化できる。 With such a configuration, since the lead wires of the Z-axis lead wire and the θ-axis lead wire are combined into one cable, the θZ actuator can be reduced in wiring.

なお、実施例１〜６では、可動子を内径側、固定子を外径側に配置する構成としたが、可動子を外径側、固定子を内径側に配置する構成としても、本発明の効果が得られることは言うまでもない。また、可動子に界磁とする永久磁石、固定子に電機子とする巻線を配置する構成としたが、可動子に電機子とする巻線、固定子に界磁とする永久磁石を配置する構成としても良い。また、Ｚ軸電機子巻線、θ軸電機子巻線ともに三相として説明したが、単相や二相としても良い。また、固定子に電機子コアを設ける構造としたが、電機子コアを設けないコアレス形としても良い。また、Ｚ軸電機子巻線を内径側、θ軸電機子巻線を外径側に配置する構成としたが、Ｚ軸電機子巻線を外径側、θ軸電機子巻線を内径側に配置する構成としても良い。また、可動子の永久磁石をＺ方向とθ方向にずらして配置（千鳥状に配置）したが、永久磁石の配置はこれだけによらず、可動子にトルクと推力の両方向の力が発生するように配置されていれば、本発明の効果が得られることは言うまでもない。 In the first to sixth embodiments, the movable element is arranged on the inner diameter side and the stator is arranged on the outer diameter side. However, the present invention can be applied to a structure in which the movable element is arranged on the outer diameter side and the stator is arranged on the inner diameter side. It goes without saying that the effect of can be obtained. In addition, the permanent magnet used as a field for the mover and the winding used as the armature for the stator were arranged. However, the winding used as the armature for the mover and the permanent magnet used as the field for the stator were arranged. It is good also as composition to do. Moreover, although both the Z-axis armature winding and the θ-axis armature winding have been described as three-phase, they may be single-phase or two-phase. In addition, although the armature core is provided on the stator, a coreless type without an armature core may be used. The Z-axis armature winding is arranged on the inner diameter side and the θ-axis armature winding is arranged on the outer diameter side. However, the Z-axis armature winding is arranged on the outer diameter side, and the θ-axis armature winding is arranged on the inner diameter side. It is good also as a structure arrange | positioned. In addition, the permanent magnets of the mover are shifted in the Z direction and the θ direction (arranged in a staggered manner), but the arrangement of the permanent magnets is not limited to this, and forces in both directions of torque and thrust are generated in the mover. Needless to say, the effects of the present invention can be obtained as long as they are arranged.

本発明のθＺアクチュエータは従来のものに比べ偏平にできるので、例えば、光学ステージや各種ロボットの駆動にも使用することができる。 Since the θZ actuator of the present invention can be made flatter than the conventional one, it can be used, for example, for driving an optical stage and various robots.

１００固定子
１０１Ｚ軸電機子巻線
１０２ θ軸電機子巻線
１０３電機子コア
１１１〜１１６Ｚ軸コイル
１２１〜１２３、１２１ａ、１２１ｂ、１２１ｃ θ軸コイル
１３１〜１３３渡り線
１５０Ｚ軸リード線
１６０ θ軸リード線
１７０ケーブル
２００可動子
２０１界磁ヨーク
２０２ｓ、２０２ｎ永久磁石 100 Stator 101 Z-axis armature winding 102 θ-axis armature winding 103 Armature cores 111 to 116 Z-axis coils 121 to 123, 121a, 121b, 121c θ-axis coils 131 to 133 Crossover wire 150 Z-axis lead wire 160 θ-axis lead wire 170 cable 200 mover 201 field yoke 202s, 202n permanent magnet

Claims

The stator includes a θ-axis armature winding that creates a rotating magnetic field in the rotation θ direction and a Z-axis armature winding that generates a traveling magnetic field in the linear Z direction that is the axial direction of the rotation θ, A permanent magnet
The θ-axis armature winding is composed of a plurality of θ-axis coils arranged in the θ direction, and the Z-axis armature winding is composed of a cylindrical Z-axis coil arranged in the Z direction. ,
In the θZ actuator in which the mover moves relative to the stator in both the θ direction and the Z direction,
When the length in the Z direction of the air core provided inside the θ-axis coil is Lα, and the length in the Z direction of the Z-axis armature winding is LZ,
Lα <LZ
A θZ actuator characterized by that.

While providing a cylindrical armature core to the stator,
The length of the θ-axis armature winding is Lθ, and when the length of the armature core in the Z direction is LC, Lθ and LC are equal in length. The described θZ actuator.

The θZ actuator according to claim 1, wherein LZ and Lθ are configured to have equal lengths.

The θZ actuator according to claim 1, wherein a crossover connecting the plurality of Z-axis coils is disposed between the θ-axis coils.

When the inner diameter of the θ-axis armature winding is D and the radius of curvature of the cross-sectional shape of the θ-axis coil is R,
R <D / 2
And forming the θ-axis coil to be
2. The θZ actuator according to claim 1, further comprising a connecting wire connecting the plurality of Z-axis coils between the Z-axis coil and the θ-axis coil.

While forming the cross-sectional shape of the θ-axis coil into a shape having a depression on the inner diameter side,
2. The θZ actuator according to claim 1, wherein a jumper connecting a plurality of the Z-axis coils is disposed in the recess between the Z-axis coil and the θ-axis coil.

While the cross-sectional shape of the θ-axis coil is formed in a flat plate shape,
2. The θZ actuator according to claim 1, further comprising a connecting wire connecting the plurality of Z-axis coils between the Z-axis coil and the θ-axis coil.

The θ-axis lead wire for supplying current to the θ-axis armature winding and the Z-axis lead wire for supplying current to the Z-axis armature winding are combined into one cable. The θZ actuator according to 1.